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Multiple-cell ion pumps with increased vacuum pumping speed are used for producing ultrahigh vacuums in vacuum tubes and mass spectrometers. The pump has eight cathode-anode magnetron cells arranged in a cylinder which increase the surface area of the cathode.
Vacuum pump fluids spectral absorption coefficient measurement, using variable UV cell
Two pump vacuum system, using theoretical model for factors affecting chamber pressure
Pneumatically actuated miniature peristaltic vacuum pumps have been proposed for incorporation into advanced miniature versions of scientific instruments that depend on vacuum for proper operation. These pumps are expected to be capable of reaching vacuum-side pressures in the torr to millitorr range (from .133 down to .0.13 Pa). Vacuum pumps that operate in this range are often denoted roughing pumps. In comparison with previously available roughing pumps, these pumps are expected to be an order of magnitude less massive and less power-hungry. In addition, they would be extremely robust, and would operate with little or no maintenance and without need for oil or other lubricants. Portable mass spectrometers are typical examples of instruments that could incorporate the proposed pumps. In addition, the proposed pumps could be used as roughing pumps in general laboratory applications in which low pumping rates could be tolerated. The proposed pumps could be designed and fabricated in conventionally machined and micromachined versions. A typical micromachined version (see figure) would include a rigid glass, metal, or plastic substrate and two layers of silicone rubber. The bottom silicone layer would contain shallow pump channels covered by silicone arches that could be pushed down pneumatically to block the channels. The bottom silicone layer would be covered with a thin layer of material with very low gas permeability, and would be bonded to the substrate everywhere except in the channel areas. The top silicone layer would be attached to the bottom silicone layer and would contain pneumatic- actuation channels that would lie crosswise to the pump channels. This version is said to be micromachined because the two silicone layers containing the channels would be fabricated by casting silicone rubber on micromachined silicon molds. The pneumatic-actuation channels would be alternately connected to a compressed gas and (depending on pump design) either to atmospheric pressure or to a partial vacuum source. The design would be such that the higher pneumatic pressure would be sufficient to push the silicone arches down onto the substrates, blocking the channels. Thus, by connecting pneumatic- actuation channels to the two pneumatic sources in spatial and temporal alternation, waves of opening and closing, equivalent to peristalsis, could be made to move along the pump channels. A pump according to this concept could be manufactured inexpensively. Pneumatic sources (compressors and partial vacuum sources) similar those needed for actuation are commercially available; they typically have masses of .100 g and power demands of the order of several W. In a design-optimization effort, it should be possible to reduce masses and power demands below even these low levels and to integrate pneumatic sources along with the proposed pumps into miniature units with overall dimensions of no more than a few centimeters per side.
A review of the fundamental characteristics of the many types of vacuum pumps and vacuum pumping systems is given. The optimum pumping range, relative cost, performance limitations, maintenance problems, system operating costs and similar subjects are discussed. Experiences from the thin film deposition, chemical processing, material handling, food processing and other industries, as well as space simulation are used to support conclusions and recommendations.
This paper discusses the initial fabrication of a single-stage MEMS Knudsen Compressor vacuum pump, provides performance criteria such as pumping speed, size, energy use and ultimate pressure and details vacuum pump applications in several MDL related in-situ instruments.
Several lander, probe and rover missions currently under study at the Jet Propulsion Laboratory (JPL) and especially in the Microdevices Laboratory (MDL) Center for Space Microelectronics Technology, focus on utilizing microelectromechanical systems (MEMS) based instruments for science data gathering. These small instruments and NASA's commitment to "faster, better, cheaper" type missions has brought about the need for novel approaches to satisfying mission requirements. Existing in-situ instrument systems clearly lack novel and integrated methods for satisfying their vacuum needs. One attractive candidate for a MEMS vacuum pump is the Knudsen Compressor, which operates based on thermal transpiration. Thermal transpiration describes gas flows induced by temperature differences maintained across orifices, porous membranes or capillary tubes under rarefied conditions. This device has two overwhelmingly attractive features as a MEMS vacuum pump - no moving parts and no fluids. An initial estimate of a Knudsen Compressor's pumping power requirements for a surface atmospheric sampling task on Mars is less than 80 mW, significantly below than alternative pumps. Due to the relatively low energy use for this task and the applicability of the Knudsen Compressor to other applications, the development of a Knudsen Compressor utilizing MEMS fabrication techniques has been initiated. This paper discusses the initial fabrication of a single-stage MEMS Knudsen Compressor vacuum pump, provides performance criteria such as pumping speed, size, energy use and ultimate pressure and details vacuum pump applications in several MDL related in-situ instruments.
This document provides information on the testing and evaluation of thirteen dry rough vacuum pumps of various designs and from various manufacturers. Several types of rough vacuum pumps were evaluated, including scroll, roots, and diaphragm pumps. Tests included long term testing, speed curve generation, voltage variance, vibrations emissions and susceptibility, electromagnetic interference emissions and susceptibility, static leak rate, exhaust restriction, response/recovery time tests, and a contamination analysis for scroll pumps. Parameters were found for operation with helium, which often is not provided from the manufacturer
A mass spectrometer (MS) with unique magnetic pole pieces which provide a homogenous magnetic field across the gap of the MS magnetic sector as well as the magnetic field across an ion-type vacuum pump is disclosed. The pole pieces form the top and bottom sides of a housing. The housing is positioned so that portions of the pole pieces form part of the magnetic sector with the space between them defining the gap region of the magnetic sector, through which an ion beam passes. The pole pieces extend beyond the magnetic sector with the space between them being large enough to accommodate the electrical parts of an ion-type vacuum pump. The pole pieces which provide the magnetic field for the pump, together with the housing form the vacuum pump enclosure or housing.
Boundary layer friction data under ion pumped vacuum was taken for sixteen material couples. The test series was an extension of a previous study of the effects of modified ion pumped environments. Sliding distances imposed in the present effort greatly exceeded any studied in the previous contiguous, flight or ground tests. Wear out of specific couples, in particular, thin film lubricants was noted. The behavior of the test hardware including wear out of the mechanisms was noted. As a result, the impact of test interruption was observed for several test couples. Recovery of the friction upon re-establishing sliding in vacuum was generally rapid. The results of the extended sliding study reinforce the previous conclusion that sliding distance (mechanical history) is the primary factor in establishing the force limiting boundary layer friction. General friction value under the extended sliding confirm those observed in previous orbital and the related ground test studies.
Ozone effect on stability of Dc-704 fluid in diffusion pump vacuum system
The need to identify spikes in the concentration of hazardous gases during countdowns to space shuttle launches has led Kennedy Space Center to acquire considerable expertise in the design, construction, and operation of special-purpose gas analyzers of mass-spectrometer type. If such devices could be miniaturized so as to fit in a small airborne package or backpack them their potential applications would include integrated vehicle health monitoring in later-generation space shuttles and in hazardous material detection in airports, to name two examples. The bulkiest components of such devices are vacuum pumps, particularly those that function in the low vacuum range. Now some pumps that operate in the high vacuum range (e.g. molecular-drag and turbomolecular pumps) are already small and rugged. The present work aims to determine whether, on physical grounds, one may or may not adopt the molecular-drag principle to the low-vacuum range (in which case viscous-drag principle is the appropriate term). The deliverable of the present effort is the derivation and justification of some key formulas and calculation methods for the preliminary design of a single-spool, spiral-channel viscous-drag pump.
Heater placed between an oil diffusion pump and a vacuum chamber prevents backstreaming of oil molecules into the work area of the chamber. It breaks the oil molecules into basic constituents that can be pumped away.
The ultimate utility of hydrogen masers as highly accurate clocks aboard navigation satellites depends on the feasibility of making the maser lightweight, compact, and capable of a 5 to 7 year unattended operation. A vacuum pumping system for the maser that is believed to meet these criteria was designed and fabricated. The pumping system was fabricated almost completely from 6Al-4V titanium alloy and incorporates two or four sintered zirconium carbon getter pumps with integral activation heaters. The manner in which the getter pumps were mounted to insure that they will stand both the activation and the shock of launch is illustrated. Data on the total hydrogen capacity and pumping of this system is also presented.
Moist soil introduced in vacuum chamber to determine pumping load and time required
The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).
A filter system for mechanical pumps is designed with a baffle assembly that rotates in a circulating oil bath which traps destructive particles. This prevents severe damage to the pump and is serviceable for long periods before it requires cleaning.
System provides high pumping capacity even for noble gases. First stage, removes water and CO2 from input gas. Second stage, removes noble gases except helium and some lighter gases not trapped by first stage. Third stage, traps all remaining gases. All three stages mounted inside liquid-nitrogen Dewar that cools first stage. Pump small enough for general laboratory use.