DOE OSTI2023
The new CVD/ALD furnace that we are commissioning at Fermilab will allow us to deposit thin films of superconducting materials on RF cavities on different shapes, 1 cell and 9 cells 1.3GHz and 1 cell and 5 cells 650MHz. This furnace is capable to perform two different types of deposition: chemical vapor deposition and atomic layer deposition. Different materials are under investigation to push accelerating superconducting RF cavities to support higher accelerating fields and to operate with lower power loss. The first tests are focusing on the alternative A15 superconductors as: Nb3Ge, Nd3Ga, Nb3Sn, V3Si. The furnace has two different sources of precursors: 1) chlorine furnace, where we can produce the precursors in-situ, so we can build our own precursors and test how the deposited material is affecting the cavity performance, 2) 6 different bubblers, 3 low temperature bubblers and 3 high temperature bubblers. The deposition chamber is a versatile chamber with two independ ent vacuum volumes, to ensure a higher cleanliness of the deposited material. The furnace is designed to have two different configurations: High temperature, up to 1400 C, and low temperature, up to 400 C.