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SiF4 is Silicon tetrafluoride structured and crystallizes in the cubic I-43m space group. The structure is zero-dimensional and consists of two silane, tetrafluoro- molecules. Si4+ is bonded in a tetrahedral geometry to four equivalent F1- atoms. All Si–F bond lengths are 1.58 Å. F1- is bonded in a single-bond geometry to one Si4+ atom.
The vapor pressure (VP) of silicon tetrafluoride (SiF4) was evaluated using three different cryogenic cold baths and multiple pressure transducers (PTs). Through this experiment, the known range of VP has been extended to a low temperature of 122 K. A functional relationship for the VP has been developed for the range between 122 and 159.6 K. This relationship was also used to estimate a VP value at 88 K, which was below observable levels with a 0.1 torr gauge.