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Results for “PLASMA GENERATOR”

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At least 19 records

Electrode assemblies, plasma generating apparatuses, and methods for generating plasma

Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.

42 ENGINEERING↗

Plasma generation by household microwave oven for surface modification and other emerging applications

A simple and inexpensive method to generate plasma using a kitchen microwave oven is described in this paper. The microwave-generated plasma is characterized by spectroscopic analysis and compared with the absorption spectra of a gas discharge tube. A Paschen-like curve is observed as the microwave plasma initiation time is plotted as a function of the pressure of the plasma chamber. We have also demonstrated that this microwave-generated air plasma can be used in a multitude of applications such as: (a) surface modification of a substrate to change its wettability; (b) surface modification to change electrical/optical properties of a substrate; and (c) enhancement of adhesive forces for improved bonding of polymeric microfluidic molds, such as bonding polydimethylsiloxane (PDMS) chips to glass covers. These simple techniques of plasma generation and subsequent surface treatment and modification applications may bring new opportunities leading to new innovations not only in advanced labs, but also in undergraduate and even high school research labs.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Effect of Ti-Al cathode composition on plasma generation and plasma transport in direct current vacuum arc

DC arc plasma from Ti, Al, and Ti{sub 1-x}Al{sub x} (x = 0.16, 0.25, 0.50, and 0.70) compound cathodes was characterized with respect to plasma chemistry and charge-state-resolved ion energy. Scanning electron microscopy, X-ray diffraction, and Energy-dispersive X-ray spectroscopy of the deposited films and the cathode surfaces were used for exploring the correlation between cathode-, plasma-, and film composition. Experimental work was performed at a base pressure of 10{sup −6} Torr, to exclude plasma-gas interaction. The plasma ion composition showed a reduction of Al of approximately 5 at. % compared to the cathode composition, while deposited films were in accordance with the cathode stoichiometry. This may be explained by presence of neutrals in the plasma/vapour phase. The average ion charge states (Ti = 2.2, Al = 1.65) were consistent with reference data for elemental cathodes, and approximately independent on the cathode composition. On the contrary, the width of the ion energy distributions (IEDs) were drastically reduced when comparing the elemental Ti and Al cathodes with Ti{sub 0.5}Al{sub 0.5}, going from ∼150 and ∼175 eV to ∼100 and ∼75 eV for Ti and Al ions, respectively. This may be explained by a reduction in electron temperature, commonly associated with the high energy tail of the IED. The average Ti and Al ion energies ranged between ∼50 and ∼61 eV, and ∼30 and ∼50 eV, respectively, for different cathode compositions. The attained energy trends were explained by the velocity rule for compound cathodes, which states that the most likely velocities of ions of different mass are equal. Hence, compared to elemental cathodes, the faster Al ions will be decelerated, and the slower Ti ions will be accelerated when originating from compound cathodes. The intensity of the macroparticle generation and thickness of the deposited films were also found to be dependent on the cathode composition. The presented results may be of importance for choice of cathodes for thin film depositions involving compound cathodes.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Particle-in-cell modeling of electron beam generated plasma

Plasmas generated using energetic electron beams are well known for their low electron temperature (T e ) and plasma potential, which makes them attractive for atomic-precision plasma processing applications such as atomic layer etch and deposition. A 2-dimensional particle-in-cell model for an electron beam-generated plasma in argon confined by a constant applied magnetic field is described here in this article. Plasma production primarily occurs in the path of the beam electrons in the center of the chamber. The resulting plasma spreads out in the chamber through non-ambipolar diffusion with a short-circuiting effect allowing unequal electron and ion fluxes to different regions of the bounding conductive chamber walls. The cross-field transport of the electrons (and thus the steady-state characteristics of the plasma) are strongly impacted by the magnetic field. T e is anisotropic in the electron beam region, but low and isotropic away from the plasma production zone. The plasma density increases and the plasma becomes more confined near the region of production when the magnetic field strengthens. The magnetic field reduces both electron physical and energy transport perpendicular to the magnetic field. T e is uniform along the magnetic field lines and slowly decreases perpendicular to it. Electrons are less energetic in the sheath regions where the sheath electric field repels and confines the low-energy electrons from the bulk plasma. Even though electron and ion densities are similar in the bulk plasma due to quasi-neutrality, electron and ion fluxes on the grounded chamber walls are unequal at most locations. Electron confinement by the magnetic field weakens with increasing pressure, and the plasma spread out farther from the electron beam region.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Thomson parabola spectrometry for gold laser-generated plasmas

The plasma generated from thin gold films irradiated in high vacuum at high intensity ({approx}10{sup 15} W/cm{sup 2}) laser shot is characterized in terms of ion generation through time-of-flight techniques and Thomson parabola spectrometry. Gold ions and protons, accelerated in forward direction by the electric field developed in non-equilibrium plasma, have been investigated. Measurements, performed at PALS laboratory, give information about the gold charge states distributions, the ion energy distributions and the proton acceleration driven as a function of film thickness, laser parameters, and angular emission. The ion diagnostics of produced plasma in forward direction permits to understand some mechanisms developed during its expansion kinetics. The role of the focal position of a laser beam with respect to the target surface, plasma properties, and the possibility to accelerate protons up to energies above 3 MeV has been presented and discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analyses of the plasma generated by laser irradiation on sputtered target for determination of the thickness used for plasma generation

In Brookhaven National Laboratory, laser ion source has been developed to provide heavy ion beams by using plasma generation with 1064 nm Nd:YAG laser irradiation onto solid targets. The laser energy is transferred to the target material and creates a crater on the surface. However, only the partial material can be turned into plasma state and the other portion is considered to be just vaporized. Since heat propagation in the target material requires more than typical laser irradiation period, which is typically several ns, only the certain depth of the layers may contribute to form the plasma. As a result, the depth is more than 500 nm because the base material Al ions were detected. On the other hand, the result of comparing each carbon thickness case suggests that the surface carbon layer is not contributed to generate plasma.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Hydrogen ionic plasma generated using Al plasma grid

Negative hydrogen ions are produced in the apertures of a plasma grid made of aluminum under the irradiation of positive ions, generating an ionic plasma consisting of positive and negative ions. The saturation current ratio obtained using a Langmuir probe reflects the existence ratio of electrons and is found to increase in connection with the diffusion of the ionic plasma. The local increment of the current ratio suggests the collapse of negative ions and the replacement of detached electrons.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analysis of non-equilibrium phenomena in inductively coupled plasma generators

This article addresses the modeling of non-equilibrium phenomena in inductively coupled plasma discharges. In the proposed computational model, the electromagnetic induction equation is solved together with the set of Navier-Stokes equations in order to compute the electromagnetic and flow fields, accounting for their mutual interaction. Semi-classical statistical thermodynamics is used to determine the plasma thermodynamic properties, while transport properties are obtained from kinetic principles, with the method of Chapman and Enskog. Particle ambipolar diffusive fluxes are found by solving the Stefan-Maxwell equations with a simple iterative method. Two physico-mathematical formulations are used to model the chemical reaction processes: (1) A Local Thermodynamics Equilibrium (LTE) formulation and (2) a thermo-chemical non-equilibrium (TCNEQ) formulation. In the TCNEQ model, thermal non-equilibrium between the translational energy mode of the gas and the vibrational energy mode of individual molecules is accounted for. The electronic states of the chemical species are assumed in equilibrium with the vibrational temperature, whereas the rotational energy mode is assumed to be equilibrated with translation. Three different physical models are used to account for the coupling of chemistry and energy transfer processes. Numerical simulations obtained with the LTE and TCNEQ formulations are used to characterize the extent of non-equilibrium of the flow inside the Plasmatron facility at the von Karman Institute. Each model was tested using different kinetic mechanisms to assess the sensitivity of the results to variations in the reaction parameters. A comparison of temperatures and composition profiles at the outlet of the torch demonstrates that the flow is in non-equilibrium for operating conditions characterized by pressures below 30 000 Pa, frequency 0.37 MHz, input power 80 kW, and mass flow 8 g/s.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Theoretical and numerical predictions of hypervelocity impact-generated plasma

The hypervelocity impact generated plasmas (HVIGP) in thermodynamic non-equilibrium state were theoretically analyzed, and a physical model was presented to explore the relationship between plasma ionization degree and internal energy of the system by a group of equations including a chemical reaction equilibrium equation, a chemical reaction rate equation, and an energy conservation equation. A series of AUTODYN 3D (a widely used software in dynamic numerical simulations and developed by Century Dynamic Inc.) numerical simulations of the impacts of hypervelocity Al projectile on its targets at different incident angles were performed. The internal energy and the material density obtained from the numerical simulations were then used to calculate the ionization degree and the electron temperature. Based on a self-developed 2D smooth particle hydrodynamic (SPH) code and the theoretical model, the plasmas generated by 6 hypervelocity impacts were directly simulated and their total charges were calculated. The numerical results are in good agreements with the experimental results as well as the empirical formulas, demonstrating that the theoretical model is justified by the AUTODYN 3D and self-developed 2D SPH simulations and applicable to predict HVIGPs. The study is of significance for astrophysical and cosmonautic researches and safety.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Study of self-diffraction from laser generated plasma gratings in the nanosecond regime

We investigate the formation and diffraction efficiency of plasma gratings generated by the interference of two laser beams crossing at a small angle on the surface of a planar aluminum target. Such gratings were observed during National Ignition Facility experiments with the ratio of energy in the first-order to zeroth order of ≈60%. Recently, additional experiments were performed on the Optical Sciences Laser. These experiments with only two interfering beams showed high normalized energy (ratio of energy in diffracted order to zeroth order) of approximately 10% and 3% at the first and second diffracted order locations, respectively, for intensities less than 1012 W/cm2. The existence of the higher-orders is the characteristic of diffraction from gratings in the Raman-Nath as opposed to the Bragg regime. In addition, we show conical diffraction from the generated plasma grating. Using numerical simulations, we explore the large difference in diffraction efficiency observed in these two experiments and highlight the role of plasma temperature and density scale length. The simulations suggest a modulation depth of the plasma grating refractive index ranging from 1.77×10-4 to 3.5×10-2. These results are relevant to Inertial Confinement Fusion experiments or plasma photonics applications of gratings in high-field laser-physics and high-energy density science, specifically in the nanosecond regime.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Development of an x-ray Talbot-Lau moiré deflectometer for fast density profile measurements of dense plasmas generated by beam-target interactions

We report that for the first time an x-ray Talbot-Lau moiré deflectometer is being developed that will use a flash tube source and fast detector for dynamic density gradient measurements. In Talbot-Lau moiré deflectometry, an x-ray grating makes an image of itself on a second grating (the Talbot effect) to produce a moiré pattern on a detector. The test object is placed between these gratings, with variations in index of refraction changing the pattern. A third grating in front of an incoherent x-ray source produces an array of coherent sources. With a 150 kV x-ray flash tube as the source, the gratings are placed in a glancing angle setup for performance at ~60 keV. The detector is a gated CCD with a fast scintillator for x-ray conversion. This diagnostic, designed for the Dual-Axis Radiographic Hydrodynamic Test facility (DARHT) at Los Alamos National Laboratory, measures the density profile of dense plasma plumes ejected from beam-target interactions. DARHT has two high-current, pulsed, inductive linear electron accelerators with bremsstrahlung targets at the end of each beam line to create 2-D radiographic images of hydrodynamic tests. One multi-pulse accelerator has up to four beam pulses striking the same target within 2 μs. Computer simulations that model target evolution and ejected material between pulses are used to design these targets for optimal radiographic performance; the x-ray deflectometer will directly measure density gradients in the ejected plumes and provide the first experimental constraints to these models. During the first year, currently underway, the diagnostic systems are being designed. In year two, the flash tube and fast detector will be deployed at DARHT for radiographic imaging while the deflectometer is built and tested on the bench with a continuous source. In year three, the fast deflectometer will be installed on DARHT and density measurements will be performed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Electrode assemblies, plasma apparatuses and systems including electrode assemblies, and methods for generating plasma

Electrode assemblies for plasma reactors include a structure or device for constraining an arc endpoint to a selected area or region on an electrode. In some embodiments, the structure or device may comprise one or more insulating members covering a portion of an electrode. In additional embodiments, the structure or device may provide a magnetic field configured to control a location of an arc endpoint on the electrode. Plasma generating modules, apparatus, and systems include such electrode assemblies. Methods for generating a plasma include covering at least a portion of a surface of an electrode with an electrically insulating member to constrain a location of an arc endpoint on the electrode. Additional methods for generating a plasma include generating a magnetic field to constrain a location of an arc endpoint on an electrode.

47 OTHER INSTRUMENTATION↗

Effect of electron energy distribution functions on plasma generated vacuum ultraviolet in a diffusion plasma excited by a microwave surface wave

Plasma generated vacuum ultraviolet (VUV) in diffusion plasma excited by a microwave surface wave has been studied by using dielectric-based VUV sensors. Evolution of plasma VUV in the diffusion plasma as a function of the distance from the power coupling surface is investigated. Experimental results have indicated that the energy and spatial distributions of plasma VUV are mainly controlled by the energy distribution functions of the plasma electrons, i.e., electron energy distribution functions (EEDFs). The study implies that by designing EEDF of plasma, one could be able to tailor plasma VUV in different applications such as in dielectric etching or photo resist smoothing.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Measurement and reduction of Ar metastable densities by nitrogen admixing in electron beam-generated plasmas

Abstract Electron beam (e-beam) generated plasmas are useful for material processing applications such as deposition and etching because the plasmas deliver a large fluence of very low energy of ions to surfaces. Metastable species produced in the beam-region can also transport significant energy to the plasma periphery and surfaces. In this work, we have investigated the spatially resolved density of metastable Ar 1s 5 species produced in an Ar and Ar/N 2 e-beam generated plasma at pressures of 60–67 mTorr using laser-induced fluorescence (LIF). The experiments provide the first direct measure of absolute density and reduction of Ar 1s 5 in an e-beam generated plasma when argon is diluted with nitrogen. These results are consistent with previous predictions of numerical modeling and measurements using optical emission spectroscopy. The present spatially resolved LIF measurements directly quantify the reduction of Ar 1s 5 in the e-beam generated plasma by nitrogen admixing. This reduction was observed in the region of the electron beam and in the plasma periphery, where substrates are usually placed. For example, up to a threefold reduction of the density of Ar 1s 5 was measured when the argon background was diluted with 15.5% nitrogen at pressure of 60 mTorr. Ar 1s 5 reduction is attributed to excitation exchange with nitrogen molecules as well as the cooling of plasma electrons via inelastic collisions with nitrogen molecules.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗