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At least 19 records

Development of a spectroscopic Mueller matrix imaging ellipsometer for nanostructure metrology

In this paper, we describe the development of a spectroscopic Mueller matrix imaging ellipsometer (MMIE), which combines the great power of Mueller matrix ellipsometry with the high spatial resolution of optical microscopy. A dual rotating-compensator configuration is adopted to collect the full 4 × 4 imaging Mueller matrix in a single measurement. The light wavelengths are scanned in the range of 400–700 nm by a monochromator. The instrument has measurement accuracy and precision better than 0.01 for all the Mueller matrix elements in both the whole image and the whole spectral range. The instrument was then applied for the measurement of nanostructures combined with an inverse diffraction problem solving technique. The experiment performed on a photoresist grating sample has demonstrated the great potential of MMIE for accurate grating reconstruction from spectral data collected by a single pixel of the camera and for efficient quantification of geometrical profile of the grating structure over a large area with pixel resolution. It is expected that MMIE will be a powerful tool for nanostructure metrology in future high-volume nanomanufacturing.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Statistical properties of the Mueller matrix of distributed targets

Attention is given to the statistical properties of the Mueller matrix of distributed targets, with emphasis on the copolarized phase angle phi sub c. The latter is shown to exhibit a pdf that is characterized completely by two parameters alpha and zeta, both of which are related to the elements of the Mueller matrix of the target. The parameter alpha governs the width of the pdf, and zeta governs the mean value of phi sub c. It is shown that the magnitudes S sub vv, S sub hh, and S sub hv, and the parameters alpha and zeta completely specify the Mueller matrix, and therefore contain all the statistical information available from the polarimetric backscatter response of the target. These results are verified with experimental observations that show that alpha and zeta are related to the physical and dielectric properties of soil and vegetation targets.

Ulaby, F. T.↗

Mueller-matrix mapping of biological tissues in differential diagnosis of optical anisotropy mechanisms of protein networks

We report a model of Mueller-matrix description of optical anisotropy of protein networks in biological tissues with allowance for the linear birefringence and dichroism. The model is used to construct the reconstruction algorithms of coordinate distributions of phase shifts and the linear dichroism coefficient. In the statistical analysis of such distributions, we have found the objective criteria of differentiation between benign and malignant tissues of the female reproductive system. From the standpoint of evidence-based medicine, we have determined the operating characteristics (sensitivity, specificity and accuracy) of the Mueller-matrix reconstruction method of optical anisotropy parameters and demonstrated its effectiveness in the differentiation of benign and malignant tumours. (laser applications and other topics in quantum electronics)

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Derivation of phase statistics from the Mueller matrix

Experimental observations show a strong dependence of phase differences of scattering matrix elements on the physical parameters of random media. Here, the statistical behavior of the phase differences is studied for distributed targets. The pdfs of the phase differences are derived from the Mueller matrix of the target. In deriving the density functions, it is assumed that the real and imaginary parts of the copolarized and cross-polarized terms of the scattering matrix are jointly Gaussian and their covariance matrices are found in terms of the Mueller matrix elements. The functional forms of the copolarized and cross-polarized density functions are similar and are obtained independently. It is shown that the density function of the phase difference is completely determined in terms of only two parameters.

Sarabandi, K.↗

Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures

Mueller matrix ellipsometry (MME) is applied to detect foot-like asymmetry encountered in nanoimprint lithography (NIL) processes. We present both theoretical and experimental results which show that MME has good sensitivity to both the magnitude and direction of asymmetric profiles. The physics behind the use of MME for asymmetry detection is the breaking of electromagnetic reciprocity theorem for the zeroth-order diffraction of asymmetric gratings. We demonstrate that accurate characterization of asymmetric nanoimprinted gratings can be achieved by performing MME measurements in a conical mounting with the plane of incidence parallel to grating lines and meanwhile incorporating depolarization effects into the optical model. The comparison of MME-extracted asymmetric profile with the measurement by cross-sectional scanning electron microscopy also reveals the strong potential of this technique for in-line monitoring NIL processes, where symmetric structures are desired.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Fluorescent Mueller matrix analysis of a highly scattering turbid media

We report the fluorescent Mueller matrix analysis of a highly scattering, inhomogeneous, and low quantum yield polymeric nanoparticle system. Both the ground and the excited state anisotropy of this turbid system were measured. The excited state anisotropy was found to be higher than ground state anisotropy by inverse polar decomposition analysis. The depolarization coefficients of these polythiophene nanoparticles were experimentally determined by recording Mueller matrices from this complex random medium. This approach provides an alternative method of determining optical characteristics of low quantum efficiency turbid system like fluorescently leveled tissue phantom.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Measurement and calibration of differential Mueller matrix of distributed targets

A rigorous method for calibrating polarimetric backscatter measurements of distributed targets is presented. By characterizing the radar distortions over the entire mainlobe of the antenna, the differential Mueller matrix is derived from the measured scattering matrices with a high degree of accuracy. It is shown that the radar distortions can be determined by measuring the polarimetric response of a metallic sphere over the main lobe of the antenna. Comparison of results obtained with the new algorithm with the results derived from the old calibration method show that the discrepancy between the two methods is less than 1 dB for the backscattering coefficients. The discrepancy is more drastic for the phase-difference statistics, indicating that removal of the radar distortions from the cross products of the scattering matrix elements cannot be accomplished with the traditional calibration methods.

Sarabandi, Kamal↗

Mueller-matrix mapping of optically anisotropic fluorophores of biological tissues in the diagnosis of cancer

We report the results of studying the polarisation manifestations of laser autofluorescence of optically anisotropic structures in biological tissues. A Mueller-matrix model is proposed to describe their complex anisotropy (linear and circular birefringence, linear and circular dichroism). The relationship is established between the mechanisms of optical anisotropy and polarisation manifestations of laser autofluorescence of histological sections of rectal tissue biopsy in different spectral regions. The ranges of changes in the statistical moments of the 1st-to-4th orders, which describe the distribution of the azimuth-invariant elements of Mueller matrices of rectal tissue autofluorescence, are found. Effectiveness of laser autofluorescence polarimetry is determined and the histological sections of biopsy of benign (polyp) and malignant (adenocarcinoma) tumours of the rectal wall are differentiated for the first time. (laser biophotonics)

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Metasurface‐Based Mueller Matrix Microscope

In conventional optical microscopes, image contrast of objects mainly results from the differences in light intensity and/or color. Muller matrix optical microscopes (MMMs), on the other hand, can provide significantly enhanced image contrast and rich information about objects by analyzing their interactions with polarized light. However, state-of-the-art MMMs are fundamentally limited by bulky and slow polarization state generators and analyzers. Here, the study demonstrates a metasurface-based MMM, i.e., Meta-MMM, which is equipped with a chip-integrated, single-shot metasurface polarization state analyzer (Meta-PSA). The Meta-MMM is featured with high-speed measurement (≈2s per Muller matrix (MM) image), superior operation stability, dual-color operation, and high measurement accuracy (measurement error 1–2%) for MM imaging. The Meta-MMM is applied to nanostructure characterization, surface morphology analysis, and discovering birefringent structures in honeybee wings. As a result, the Meta-MMMs hold the promise to revolutionize various applications from biological imaging, medical diagnosis, and material characterization to industry inspection and space exploration.

36 MATERIALS SCIENCE↗

Estimating Terra MODIS Polarization Effect Using Ocean Data

Terra MODIS has been known since pre-launch to have polarization sensitivity, particularly in shortest-wavelength bands 8 and 9. On-orbit reflectance trending of pseudo-invariant sites show a variation in reflectance as a function of band and scan mirror angle of incidence consistent with time-dependent polarization effects from the rotating double-sided scan mirror. The MODIS Characterization Support Team [MCST] estimates the Mueller matrix trending from this variation as observed from a single desert site, but this effect is not included in Collection 6 [C6] calibration. Here we extend the MCSTs current polarization sensitivity monitoring to two ocean sites distributed over latitude to helpestimate the uncertainties in the derived Mueller matrix. The Mueller matrix elements derived for polarization-sensitive Band 8 for a given site are found to be fairly insensitive to surface brdf modeling. The site-to-site variation is a measure of the uncertainty in the Mueller estimation.Results for band 8 show that the polarization correction reduces mirror-side striping by up to 50% and reduces the instrument polarization effect on reflectance time series of an ocean target.

Wald, Andrew E.↗

Polarization effects on hard target calibration of lidar systems

The theory of hard target calibration of lidar backscatter data, including laboratory measurements of the pertinent target reflectance parameters, is extended to include the effects of polarization of the transmitted and received laser radiation. The bidirectional reflectance-distribution function model of reflectance is expanded to a 4 x 4 matrix allowing Mueller matrix and Stokes vector calculus to be employed. Target reflectance parameters for calibration of lidar backscatter data are derived for various lidar system polarization configurations from integrating sphere and monostatic reflectometer measurements. It is found that correct modeling of polarization effects is mandatory for accurate calibration of hard target reflectance parameters and, therefore, for accurate calibration of lidar backscatter data.

Kavaya, Michael J.↗

Numerical Solution of Light Scattered from and Transmitted through a Rough Dielectric Surface with Applications to Periodic Roughness and Isolated Structures

Light scattering and transmission by rough surfaces are of considerable interest in a variety of applications including remote sensing and characterization of surfaces. In this work, the finite-difference time domain technique is applied to calculate the scattered and transmitted electromagnetic fields of an infinite periodic rough surface. The elements of Mueller matrix for scattered light are calculated by an integral of the near fields over a significant number of periods of the surface. The normalized Mueller matrix elements of the scattered light and the spatial distribution of the transmitted flux for a monolayer of micron-sized dielectric spheres on a silicon substrate are presented. The numerical results show that the nonzero Mueller matrix elements of the system of the monolayer of dielectric spheres on a silicon substrate have specific maxima at some scattering angles. These maxima may be used in characterization of the feature of the system. For light transmitted through the monolayer of spheres, our results show that the transmitted energy focuses around the ray passing through centers of the spheres. At other locations, the transmitted flux is very small. The technique also may be used to calculate the perturbance of the electromagnetic field due to the presence of an isolated structure on the substrate.

Sun, Wenbo↗

Diffraction image formation in optical systems with polarization aberrations. I - Formulation and example

This paper is the first in a series that will examine image formation in optical systems with polarization aberrations. The present paper derives the point-spread function (PSF) and the optical transfer function for optical systems with polarization aberration and explores how image formation depends on the coherence and polarization state of the source. It is shown that the scalar PSF of Fourier optics can be generalized in the presence of polarization aberration to a 4 x 4 point-spread matrix (PSM) in Mueller matrix notation. A similar 4 x 4 optical transfer matrix (OTM) is shown to be an appropriate generalization of the optical transfer function. The PSM and the OTM are associated with the optical system and are independent of the incident polarization state but dependent on the coherence of the illumination. Since an optical system with polarization aberrations will have a different PSF and optical transfer function for different incident polarization states, the PSM and the OTM act as filters with regard to the incident polarization state. Example calculations are performed for a circularly retarding lens.

Mcguire, James P., Jr.↗

Application of the target decomposition theorem to a polarimetric random media model

With advances in polarimetric radar measurements of land surfaces, the need for understanding the underlying scattering mechanisms and dominant target features has become the focus of many studies. In particular, the maximum use of the polarimetric information to identify and/or separate parameters related to the surface features such as vegetation thickness, structure, water content, and soil surface characteristics will enhance the possibility of using polarimetric radars for monitoring the earth's surface from space. In this paper, Cloude's decomposition theorem is applied to a polarimetric random media model to simulate the radar measurements of vegetated canopies. The vegetated canopies are modeled as a three layer discrete random medium with leaves and branches in the first layer, tree trunks in the second layer, and a half space of homogeneous ground with rough interface as the bottom layer. The distorted born approximation (DBA) has been used to compute full Mueller matrix of the canopy, using canonical dielectric objects such as thin discs and cylinders as leaves, branches, and trunks, respectively. The Mueller matrix and the derived covariance matrix contain information on the second order statistics of radar signals at various polarizations from the canopy. To decompose the covariance matrix to its constituent targets, the eigenvalues and eigenvectors of the covariance matrix are computed in terms of the physical parameters of the canopy. In addition, each eigenvector explicitly shows the scattering mechanisms such as odd and even reflections in the canopy. Cloude's decomposition theorem is applied using the Pauli spin matrices as a basis and an expression for the degree of disorder or the entropy for the vegetated surface is found. Then, the physical parameters estimated from in situ measurements are used in the random media to obtain realistic covariance matrices. As a result, the sensitivity of the eigenvalue spectrums and the coefficients resulting from the target decomposition theorem to the physical parameters of the canopy are examined and the possible use of Cloude's theorem to estimate vegetation and soil parameters is discussed.

Saatchi, Sasan S.↗

Exact relativistic expressions for polarization of incoherent Thomson scattering

We present a derivation of the degree of polarization for incoherent Thomson scattering (TS) using Mueller matrix formalism. An exact analytic solution is obtained for spectrum-integrated matrix elements. The solution is valid for the full range of incident polarizations, scattering angles, and electron thermal motion from non-relativistic to ultra-relativistic. It is based on a newly developed theoretical model, a finite transit time (FTT) correction to previous theoretical work on TS polarization. The Mueller matrix elements are substantially different from previous calculations without the FTT correction, even to the lowest linear order in T e =m e c 2 <<1. Mathematically, the derivation is a unique example of fully analytical integration of the 3D scattering operator over a relativistic Maxwellian distribution function; experimentally, the results have application to the use of the polarization properties of Thomson scattered light as a method of electron temperature measurement. The results can also be used as a reliable tool for benchmarking and verification of numerical codes for frequency resolved properties of TS polarization.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Remote sensing of Earth Terrain

The Mueller matrix and polarization covariance matrix for polarimetric radar systems were studied. The clutter is modelled by a layer of random permittivity, described by a three dimensional correlation function, with variance, and horizontal and vertical correlation lengths. This model is applied, using the wave theory with Born approximations carried to the second order, to find the backscattering elements of the polarimetric matrices. It is found that 8 out of 16 elements of the Mueller matrix are identically zero, corresponding to a covariance matrix with four zero elements. Theoretical predictions are matched with experimental data for vegetation fields. A general mixing formula is derived for discrete scatterers immersed in a host medium. The inclusion particles are assumed to be ellipsoidal. The electric field inside the scatterers is determined by quasistatic analysis, assuming the diameter of the inclusion particles to be much smaller than the wavelength. The results are applicable to general multiphase mixtures.

Kong, J. A.↗

Theoretical models for polarimetric radar clutter

The Mueller matrix and polarization covariance matrix are described for polarimetric radar systems. The clutter is modeled by a layer of random permittivity, described by a three-dimensional correlation function, with variance, and horizontal and vertical correlation lengths. This model is applied, using the wave theory with Born approximations carried to the second order, to find the backscattering elements of the polarimetric matrices. It is found that 8 out of 16 elements of the Mueller matrix are identically zero, corresponding to a covariance matrix with four zero elements. Theoretical predictions are matched with experimental data for vegetation fields.

Borgeaud, M.↗