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MEMS Spaceborne Testbed

Micro-electro-mechanical-systems (MEMS) technology can significantly reduce the cost to design, launch and operate space systems. MEMS technology offers low cost, small light weight and reliable devices which can significantly reduce the size, weight and cost of spacecraft while increasing their reliability through durability and redundancy. A standard spaceborne interface/cabinet that is readily available for experiments for inexpensive testing of MEMS devices in space is discussed. The MEMS testbed will provide fixtures for holding MEMS devices, ambient environment monitoring, an assortment of available operating voltages, RF and low frequency signal inputs, sources of various gases and pressure monitors, a command and control interface computer, and a data interface which will record or transmit the data and performance parameters of these small systems.

Holderman, Mark

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Patterson, James D.

Active Control Analysis for Aeroelastic Instabilities in Turbomachines

Turbomachines onboard aircraft operate in a highly complex and harsh environment. The unsteady flowfield inherent to turbomachines leads to several problems associated with safety, stability, performance and noise. In-flight surge or flutter incidents could be catastrophic and impact the safety and reliability of the aircraft. High-Cycle-Fatigue (HCF), on the other hand, can significantly impact safety, readiness and maintenance costs. To avoid or minimize these problems generally a more conservative design method must be initiated which results in thicker blades and a loss of performance. Actively controlled turbomachines have the potential to reduce or even eliminate the instabilities by impacting the unsteady aerodynamic characteristics. By modifying the unsteady aerodynamics, active control may significantly improve the safety and performance especially at off-design conditions, reduce noise, and increase the range of operation of the turbomachine. Active control can also help improve reliability for mission critical applications such as the Mars Flyer. In recent years, HCF has become one of the major issues concerning the cost of operation for current turbomachines. HCF alone accounts for roughly 30% of maintenance cost for the United States Air-Force. Other instabilities (flutter, surge, rotating-stall, etc.) are generally identified during the design and testing phase. Usually a redesign overcomes these problems, often reducing performance and range of operation, and resulting in an increase in the development cost and time. Despite a redesign, the engines do not have the capabilities or means to cope with in-flight unforeseen vibration, stall, flutter or surge related instabilities. This could require the entire fleet worldwide to be stood down for expensive modifications. These problems can be largely overcome by incorporating active control within the turbomachine and its design. Active control can help in maintaining the integrity of the system in unforeseen events and provide for more aggressive designs to reduce the weight and improve efficiency of the turbomachine. Another area where active control can be useful is in controlling and suppressing rotating stall and surge in compressors, thereby increasing its operating range. Although some of these benefits will be offset by the added cost and weight penalty of the control system, the potential benefits in safety, reliability, performance, and noise characteristics are significant enough to warrant research in the area of active control of turbomachines. There is renewed interest within industry to understand unsteady aerodynamic behavior. This improved understanding not only leads to better design of turbomachines, which avoid instabilities but also which helps in understanding the controllability of the instabilities. The proliferation of micro-electro-mechanical-system (MEMS) devices has made available new tools to designers for employing feedback controls at reasonable costs. MEMS have also made the control devices small and unobtrusive enough to be implemented within the turbomachine without significant obstruction to the flow path. This has made active-control very attractive especially for systems requiring extreme confidence.

Keith, Theo G., Jr.

Analytical/Operational Requirements for the In Situ Chemical Analysis of Cometary and Planetary Environments Using GC-IMS

Exobiology flight experiments require highly sensitive instrumentation for the in situ analysis of the volatile chemical species that occur in the atmospheres and surfaces of various bodies within the solar system. The complex mixtures encountered place a heavy burden on the analytical instrumentation to detect and identify all species present. The minimal resources available onboard for such missions mandate that the instruments provide maximum analytical capabilities with minimal requirements of volume, weight and consumables. The miniCIDEX instrument was developed for the chemical analysis of a cemetery environment. It combined a Gas Chromatograph (GC) with a helium based Ion Mobility Spectrometer (IMS) to fulfill the analytical requirements of a cemetery exobiology mission: universal response; ppb sensitivity; low mass, volume and consumable MiniCIDEX is now a candidate for the chemical analysis instrument of a Titan Aero-rover Mission. The complexity of the analyses will be similar to the comet application with a heavier emphasis on organic molecules. Because the Titan Aero-Rover will be a balloon powered rover, much more attention is placed on the total mass of the instrument package. The GC will likely be a Micro-Electro-Mechanical-System (MEMS) design, smaller than the initial miniCIDEX GC by a factor of ten (with a similar reduction in consumable use). Similar miniaturization of the helium-based IMS will be necessary while maintaining the analytical capabilities. The two mission applications, the analytical requirements, and the evolution of the IMS design to accommodate these requirements will be presented.

Kojiro, Daniel R.

Ceramic Integration Technologies for Advanced Energy Systems: Critical Needs, Technical Challenges, and Opportunities

Advanced ceramic integration technologies dramatically impact the energy landscape due to wide scale application of ceramics in all aspects of alternative energy production, storage, distribution, conservation, and efficiency. Examples include fuel cells, thermoelectrics, photovoltaics, gas turbine propulsion systems, distribution and transmission systems based on superconductors, nuclear power generation and waste disposal. Ceramic integration technologies play a key role in fabrication and manufacturing of large and complex shaped parts with multifunctional properties. However, the development of robust and reliable integrated systems with optimum performance requires the understanding of many thermochemical and thermomechanical factors, particularly for high temperature applications. In this presentation, various needs, challenges, and opportunities in design, fabrication, and testing of integrated similar (ceramic ceramic) and dissimilar (ceramic metal) material www.nasa.gov 45 ceramic-ceramic-systems have been discussed. Experimental results for bonding and integration of SiC based Micro-Electro-Mechanical-Systems (MEMS) LDI fuel injector and advanced ceramics and composites for gas turbine applications are presented.

Singh, Mrityunjay

Electrostatic Microshutter Arrays

Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open at 90 degrees permitting income light going through, while the rest of shutters keep closed. The programmable microshutter open and close make the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized the magnetic actuation while NGMSA the electrostatic actuation.

Micro-electro-mechanical-system (MEMS)