Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “CF4”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 19 records
All sourcesNASA NTRSDOE OSTI
NASA NTRS1986

Dry etching of beta-SiC in CF4 and CF4 + O2 mixtures

Dry etching of cubic (100) beta-SiC single-crystal thin films produced via chemical-vapor deposition (CVD) has been performed in CF4 and CF4 + O2 mixtures, in both the reactive-ion-etching (RIE) and plasma-etching modes. The latter process yielded measurable etch rates, but produced a dark surface layer which appears, from the results of secondary-ion mass spectrometry, to be residual SiC. The RIE samples had no residual layer, but Auger electron spectroscopy did reveal a C-rich surface. The optimal RIE conditions were obtained with 10 sccm of pure CF4 at 40 mtorr and a power density of 0.548 W/sq cm, giving an etch rate of 23.3 nm/min. Neither the increase of temperature between 293 and 573 K, nor the incremental addition of O2 to CF4 to 50 percent, produced any strong effect on the etch rates of SiC during RIE. Pictorial evidence of fine line structures produced by RIE of beta-SiC films are also presented.

Palmour, J. W.↗
NASA NTRS1996

Increase of Stratospheric Carbon Tetrafluoride (CF4) Based on ATMOS Observations from Space

Stratospheric volume mixing ratio profiles of carbon tetrafluoride, CF4, obtained with the Atmospheric Trace Molecule Spectroscopy (ATMOS) instrument during the ATLAS (Atmospheric Laboratory for Applications and Science) -3 mission of 1994 are reported. Overall the profiles are nearly constant over the altitude range 20 to 50 km, indicative of the very long lifetime of CF4 in the atmosphere. In comparison to the stratospheric values of CF4 inferred from the ATMOS/Spacelab 3 mission of 1985, the 1994 concentrations are consistent with an exponential increase of (1.6 +/- 0.6)% yr(exp -1). This increase is discussed with regard to previous results and likely sources of CF4 at the ground. Further, it is shown that simultaneous measurements of N2O and CF4 provide a means of constraining the lower limit of the atmospheric lifetime of CF4 at least 2,300 years, two sigma.

Zander, R.↗
NASA NTRS1978

Description and preliminary calibration results for the Langley hypersonic CF4 tunnel

A detailed description of the hypersonic CF4 tunnel is presented along with discussion of the basic components, instrumentation, and operating procedure. Operational experience with the CF4 reclaimer and lead-bath heater is discussed. Comparison of measured and predicted shock detachment distance on a sphere and pressure distributions measured on a sharp leading-edge flat plate revealed the absence of significant flow nonuniformity and lent creditability to predicted free stream flow conditions. The economic operation of this facility centers about the CF4 reclaimer, which was designed to operate at an efficiency of 90 to 95 percent. A number of modifications were made to the reclaimer system to improve its performance, and presently, the system reclaims approximately 75 percent of the test gas. Even with current budgetary constraints, this efficiency permits the CF4 tunnel to be operated as a viable research wind tunnel.

Midden, R. E.↗
NASA NTRS1988

Measured and predicted shock shapes for AFE configuration at Mach 6 in air and in CF4

Shock shapes and stand-off distances were obtained for the Aeroassist Flight Experiment configuration from Mach 6 tests in air and in CF4. Results were plotted for an angle-of attack range from -10 to 10 degrees and comparisons were made at selected angles with inviscid-flow predictions. Tests were performed in the Langley Research Center (LaRC) 20 inch Mach 6 Tunnel (air) at unit free-stream Reynolds numbers (N sub Re, infinity) of 2 million/ft and 0.6 million/ft and in the LaRC Hypersonic CF4 Tunnel at N sub Re, infinity = 0.5 million/ft and 0.3 million/ft. Within the range of these tests, N sub Re, infinity did not affect the shock shape or stand off distance, and the predictions were in good agreement with the measurements. The shock stand-off distance in CF4 was approximately half of that in air. This effect resulted from the differences in density ratio across the normal shock, which was approximately 12 in CF4 and 5 in air. In both test gases, the shock lay progressively closer to the body as angle of attack decreased.

Wells, William L.↗
NASA NTRS1977

Measurement of the Specific Refractivities of CF4 and C2F6

In order to relate the measured fringe shift of an interferometer to density, the relation between density rho and refractive index n must be known. For gases where the refractive index is close to unity, this relation between density and refractive index is very closely approximated by (n - 1) = K rho where K is the specific refractivity, or the Gladstone-Dale constant. The specific refractivity, which is weakly dependent on wavelength and temperature, is readily available for a number of common test gases such as N2 and air. For more unique test gases such as CF4 and C2F6 for which refractive index data at optical wavelengths is not readily available, the constants can be estimated from the atomic refractivities of carbon and fluorine. In order to verify this estimation, a two-beam interferometer was used to experimentally determine the specific refractivities of CF4 and C2F6. This data was required for holographic interferometric measurements made at the Langley Hypersonic CF4 Tunnel. A Twyman-Green interferometer with a He-Ne laser light source of vacuum wavelength lambda equal to 633 nm was used to measure the constants. One beam of the two-beam interferometer passed through an optical cell of known inside length l which could be evacuated and slowly filled with the test gas to a density of 7.2 kg/cu m for CF4 or 5.7 kg/cu m for C2F6. If the refractive index (and hence density) is constant along the optical path through the cell, the fringe shift M and density change Delta rho are related M = 2Kl Delta rho/lambda for the double pass interferometer. Thus K can be determined by measuring the fringe shift as the density is changed. The output of a photodiode used to detect the fringe shift was recorded on a strip chart recorder. The rate of pressure increase of the test gas in the cell was controlled such that the fringes shifted at a rate of 0.5 to 1 fringe per sec. The pressure in the test cell was measured with a high accuracy quartz crystal pressure transducer and recorded approximately every 20 fringe peaks. The temperature of the cell was measured with a thermocouple and recorded at the start, midpoint, and end of each test.

Burner, A. W.↗
NASA NTRS1979

Identification of the V3 vibration-rotation band of CF4 in balloon-borne infrared solar spectra

Infrared solar spectra in the 850 to 1350/cm region, at 0.02/cm resolution, were obtained during a balloon flight made on 27 October 1978 from Alamogordo, New Mexico. Analysis of the 1275-1290/cm region indicates that the atmospheric absorption lines of CH4, N2O, H2O, HNO3 and CO2 near 1283/cm are super-imposed on a broader absorption feature which we interpret as due to the V3 band of CF4. Fine structure of CF4 is also identified. Preliminary estimates from the sunset spectra show approximately 75 pptv CF4 near 25 km.

Goldman, A.↗
NASA NTRS1981

Relations for the thermodynamic and transport properties in the testing environment of the Langley hypersonic CF4 tunnel

Thermodynamic and transport properties of gaseous CF4 that can be used in flow field computer codes and theoretical analyses for comparison of results with experimental data from the Langley Hypersonic CF4 Tunnel are presented. The thermodynamic relations which are based on thermally perfect but calorifically imperfect gas are adequate for the testing environment of the CF4 tunnel and are simpler to use than the imperfect gas relations required to define the complete expansion from the tunnel reservoir. Relations for the transport properties are based on the kinetic theory of gases in which published experimental data are used in the derivation of the relations. Extensive experimental data were located for viscosity and the derived relation should provide values for viscosity with errors of less than 1 percent. The experimental data for thermal conductivity were limited with significant disagreement between the various sources. The derived relation will probably provide values for the thermal conductivity with errors of no more than 5 percent which is within the accuracy of the experimental data.

Sutton, K.↗
NASA NTRS1987

Computational analysis and preliminary redesign of the nozzle contour of the Langley hypersonic CF4 tunnel

A computational analysis, modification, and preliminary redesign study was performed on the nozzle contour of the Langley Hypersonic CF4 Tunnel. This study showed that the existing nozzle was contoured incorrectly for the design operating condition, and this error was shown to produce the measured disturbances in the exit flow field. A modified contour was designed for the current nozzle downstream of the maximum turning point that would provide a uniform exit flow. New nozzle contours were also designed for an exit Mach number and Reynolds number combination which matches that attainable in the Langley 20-Inch Mach 6 Tunnel. Two nozzle contours were designed: one having the same exit radius but a larger mass flow rate than that of the existing CF4 Tunnel, and the other having the same mass flow rate but a smaller exit radius than that of the existing CF4 Tunnel.

Thompson, R. A.↗
NASA NTRS1993

Hypersonic lateral and directional stability characteristics of aeroassist flight experiment configuration in air and CF4

Hypersonic lateral and directional stability characteristics measured on a 60 deg half-angle elliptical cone, which was raked at an angle of 73 deg from the cone centerline and with an ellipsoid nose (ellipticity equal to 2.0 in the symmetry plane), are presented for angles of attack from -10 to 10 deg. The high normal-shock density ratio of a real gas was simulated by tests at a Mach number of 6 in air and CF4 (density ratio equal to 5.25 and 12.0, respectively). Tests were conducted in air at Mach 6 and 10 and in CF4 at Mach 6 to examine the effects of Mach number, Reynolds number, and normal-shock density ratio. Changes in Mach number from 6 to 10 in air or in Reynolds number by a factor of 4 at Mach 6 had a negligible effect on lateral and directional stability characteristics. Variations in normal-shock density ratio had a measurable effect on lateral and directional aerodynamic coefficients, but no significant effect on lateral and directional stability characteristics. Tests in air and CF4 indicated that the configuration was laterally and directionally stable through the test range of angle of attack.

Micol, John R.↗
DOE OSTI2022

AmeriFlux FLUXNET-1F US-CF4 CAF-LTAR Boyd South

This is the AmeriFlux Management Project (AMP) created FLUXNET-1F version of the carbon flux data for the site US-CF4 CAF-LTAR Boyd South. This is the FLUXNET version of the carbon flux data for the site US-CF4 CAF-LTAR Boyd South produced by applying the standard ONEFlux (1F) software.

Huggins, Dave↗
NASA NTRS1980

Gladstone-Dale constant for CF4

The Gladstone-Dale constant, which relates the refractive index to density, was measured for CF4 by counting fringes of a two-beam interferometer, one beam of which passes through a cell containing the test gas. The experimental approach and sources of systematic and imprecision errors are discussed. The constant for CF4 was measured at several wavelengths in the visible region of the spectrum. A value of 0.122 cu cm/g with an uncertainty of plus or minus 0.001 cu cm/g was determined for use in the visible region. A procedure for noting the departure of the gas density from the ideal-gas law is discussed.

Burner, A. W., Jr.↗
NASA NTRS1980

Measurement of the specific refractivities of CF4 and C2F6

In order to relate the measured fringe shift of an interferometer to the density of a medium, the relation between density and refractive index, which is expressed by the specific refractivity, must be known. In the present paper, the specific refractivities of the wind tunnel test gases CF4 and C2F6 are determined in order to verify estimations based on the atomic refractivities of carbon and fluorine. A Twyman-Green two-beam interferometer with a 633-nm He-Ne laser light source was used to measure the specific refractivity as a function of fringe shift as the density of the gas was changed. Values of 0.122 and 0.131 cu cm/g were obtained for CF4 and C2F6 respectively at a temperature of 300 K, which are within 1% of the values computed from the atomic refractivities.

Burner, A. W.↗
NASA NTRS1982

Measured pressure distributions, aerodynamic coefficients and shock shapes on blunt bodies at incidence in hypersonic air and CF4

Pressure distributions, aerodynamic coefficients, and shock shapes were measured on blunt bodies of revolution in Mach 6 CF4 and in Mach 6 and Mach 10 air. The angle of attack was varied from 0 deg to 20 deg in 4 deg increments. Configurations tested were a hyperboloid with an asymptotic angle of 45 deg, a sonic-corner paraboloid, a paraboloid with an angle of 27.6 deg at the base, a Viking aeroshell generated in a generalized orthogonal coordinate system, and a family of cones having a 45 deg half-angle with spherical, flattened, concave, and cusp nose shapes. Real-gas effects were simulated for the hperboloid and paraboloid models at Mach 6 by testing at a normal-shock density ratio of 5.3 in air and 12 CF4. Predictions from simple theories and numerical flow field programs are compared with measurement. It is anticipated that the data presented in this report will be useful for verification of analytical methods for predicting hypersonic flow fields about blunt bodies at incidence.

Miller, C. G., III↗
NASA NTRS1988

Electron-CF4 elastic scattering in the static-exchange approximation

Differential, integral, and momentum-transfer cross sections for the elastic scattering of electrons by CF4 from 5 to 35 eV are reported. The calculations were carried out at the fixed-nuclei, static-exchange level usign the Schwinger variational principle. Analyses of the partial channel amplitudes show four broad shape resonances; two in T2, one in A1, and one in E symmetries. The positions of these resonances agree with experimental data from total-cross-section measurements, dissociative attachment studies, and low-energy electron excitation spectra, the only exception being the 8.9-eV structure in the total-cross-section data. No experimental measurements on differential cross sections are available, but comparing with the corresponding static-exchange calculations for the e-CH4 system, the e-CF4 cross sections generally are less backward peaked.

Huo, Winifred M.↗
NASA NTRS1992

Finite-Difference Solution for Laminar or Turbulent Boundary Layer Flow over Axisymmetric Bodies with Ideal Gas, CF4, or Equilibrium Air Chemistry

A computer code was developed that uses an implicit finite-difference technique to solve nonsimilar, axisymmetric boundary layer equations for both laminar and turbulent flow. The code can treat ideal gases, air in chemical equilibrium, and carbon tetrafluoride (CF4), which is a useful gas for hypersonic blunt-body simulations. This is the only known boundary layer code that can treat CF4. Comparisons with experimental data have demonstrated that accurate solutions are obtained. The method should prove useful as an analysis tool for comparing calculations with wind tunnel experiments and for making calculations about flight vehicles where equilibrium air chemistry assumptions are valid.

Hamilton, H. Harris, II↗
NASA NTRS2001

Fourier Transform Infrared Spectroscopy of CF4 on the GEC Reference Cell

Fourier Transform Infrared Spectroscopy (FTIR) has been used to characterize inductively coupled CF4 plasmas in a GEC Reference Cell in-situ In examining these FTIR spectra, several assumptions and approximations of FTIR analysis are addressed. This includes the density dependence of cross-sections, non-linear effects in the addition of overlapping bands and the effect of spatial variations in density and temperature, This analysis demonstrates that temperatures extracted from MR spectra may provide a poor estimate of the true neutral plasma temperature. The FTIR spectra are dominated by unreacted CF, accounting for 40-60% of the gas products. The amount of CF4 consumption is found to have a marked dependence on power, and is nearly independent of pressure in the range of 10-50 mtorr. Small amounts of C2F6 are observed at low power. Also observed are etching products from the quartz window SiF4 COF2 and CO which occur in approximately equal ratios and together account for less than 10% of the gas. The concentrations of these species are nearly independent of pressure. CFx radicals are below the detection limit of this apparatus (approx. 1012/cc).

Rao, M. V. V. S.↗
NASA NTRS2001

Detection of Chamber Conditioning by CF4 in the GEC Cell

During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalks can cause to drift and will necessitate time for conditioning and cleaning of the reactor. Various measurements in CF4 and Ar plasmas are made in an attempt to identify a metric able to indicate the chamber condition. Mass spectrometry and a Langmuir probe shows that the buildup of fluorocarbon films on the reactor surface causes a decrease in plasma floating potential, plasma potential, and ion energy in argon plasmas. This change in floating potential is also observed in CF4 plasma operation, and occurs primarily during the first hour and a half of plasma operation. A slight rise in electron density is also observed in the argon plasmas. Because the change is seen in an argon plasma, it is indicative of altered physical, not chemical, plasma-surface interactions. Specifically, the insulating films deposited on metal surfaces alter the electromagnetic fields seen by the plasma, affecting various parameters including the floating potential and electron density. An impedance probe placed on the inductive coil shows a slight reduction in plasma impedance due to this rising electron density. The optical emission of several species, including CF, C2, atomic Si and atomic C, is also monitored for changes in density resulting from the buildup of film on the chamber wall. Changes in the optical emission spectrum are comparable to the noise levels in their measurement.

Cruden, Brett A.↗
NASA NTRS1999

ICP Reactor Modeling: CF4 Discharge

Inductively coupled plasma (ICP) reactors are widely used now for etching and deposition applications due to their simpler design compared to other high density sources. Plasma reactor modeling has been playing an important role since it can, in principle, reduce the number of trial and error iterations in the design process and provide valuable understanding of mechanisms. Fluorocarbon precursors have been the choice for oxide etching. We have data available on CF4 from our laboratory. These are current voltage characteristics, La.ngmuir probe data, UV-absorption, and mass spectrometry measurements in a GEC-ICP reactor. We have developed a comprehensive model for ICP reactors which couples plasma generation and transport and neutral species dynamics with the gas flow equations. The model has been verified by comparison with experimental results for a nitrogen discharge in an ICP reactor. In the present work, the model has been applied to CF4 discharge and compared to available experimental data.

Bose, Deepak↗