Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “Sensor fabrication”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 163 records · Page 9
All sourcesNASA NTRSDOE OSTI
NASA NTRS2017

Design of Multifunctional Materials: Chalcogenides and Chalcopyrites

There is a strong need for developing multifunctional materials to reduce the cost of applied material without compromising the performance of the detectors, devices and sensors. The materials design, processing, growth and fabrication of bulk and nanocrystals and fabrication into devices and sensors involve huge cost and resources including a multidisciplinary team of experts. Because of this reason, prediction of multifunctionality of materials before design and development should be evaluated. Chalcogenides and chalcopyrites are a very exciting class of materials for developing multifunctionality. Materials such as Gallium selenide GaSe and zinc selenide ZnSe have been proven to be excellent examples. GaSe is a layered material and very difficult to grow in large crystal. However, it's ternary and quaternary analogs such as thallium gallium selenide TlGaSe2, thallium gallium selenide sulfide TlGaSe2-xSs, thallium arsenic selenide Tl3AsSe3, silver gallium selenide AgGaGe3Se8, AgGaGe5Se12 and several others have shown great promise for multifunctionality. Several of these materials have shown good efficiency for frequency conversion (nonlinear optical NLO), electro-optic modulation, and acousto-optic tunable filters and imagers suitable for the visible, near-infrared wavelength, mid wave infrared (MWIR), long wave infrared (LWIR) and even up to Tera hertz wavelength (THW) regions. In addition, this class of materials have demonstrated low absorption coefficients and power handling capability in the systems. Also, these crystals do not require post growth annealing, show very large transparency range and fabricability.

Singh, N. B.↗
NASA NTRS2016

Multifunctional 2D- Materials: Selenides and Halides

Material is the key component and controls the performance of the detectors, devices and sensors. The materials design, processing, growth and fabrication of bulk and nanocrystals and fabrication into devices and sensors involve multidisciplinary team of experts. This places a large burden on the cost of the novel materials development. Due to this reason there is a big thrust for the prediction of multifunctionality of materials before design and development. Up to some extent design can achieve certain properties. In multinary materials processing is also a big factor. In this presentation, examples of two classes of industrially important materials will be described.

Singh, N. B.↗
NASA NTRS1992

Very high temperature silicon on silicon pressure transducers

A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). The design principles used to fabricate the pressure sensor are outlined and results are presented of its high temperature performance.

Kurtz, Anthony D.↗
NASA NTRS2009

Sensor Requirements and Roadmaps

The chapter starts with a brief overview of the state-of-the-art of the sensing technologies. Principles of detection and the stage of integration in conjunction with the need are discussed. Based on the projected sensor requirements to accomplish propulsion systems with distributed active control, the existent gaps and selected types of sensor technologies are addressed, which are foreseen to deliver the required sensitivity, the resolution, the range, and the bandwidth in classes of sensors and which will allow operation under harsh environment conditions. By changing the packaging and/or design of the current sensors, operation environments of 750°C may be possible, which would meet requirements for sensors located towards the engine intake, compressor and in some cases low-pressure turbine. However, the majority of sensors for locations close to the engine combustion chamber or afterburner (with operation temperatures up to 1700°C) do not exist. There is also a need for smart sensors, which would enable future distributed control architecture. In addition a number of sensors, which are of interest for more intelligent gas turbine engines, are being explored or do not yet exist, for example turbine emission species sensors, burning patter factor sensors, fuel property sensors, and exhaust gas composition sensors. Meanwhile, rapid emerging technologies were made available during the three years duration of the Task Group. These include tip clearance measurement technologies such as eddy current, and microwave methods. To meet future sensor requirements, new fabrication and material technologies (MEMS, other), advanced sensing principles (spectroscopy, other), and their potential applications to new sensor types need to be explored. The status of current R&D for new sensors and future expectations are summarized in a comprehensive table. Sensors and associated electronics that have to operate in high temperature are foreseen to be largely available by 2015 (SiC) and 2020 (SiCN). Both of these technologies come with the potential of embedding such high temperature sensors within the structure. The information presented in the chapter represents the state-of-the-art of the sensing technology of the years 2005-2007 to the best knowledge of the authors. The authors are also fully aware of the fact that there may be many ongoing research programs as well as individual research that are not publicly supported and public information is not available. Therefore, the report might miss that section of knowledge. Also, progress in research and development is made every day such that often, the recent information may be fast outdated. The reader should bear in mind these facts.

Ion Stiharu↗
NASA NTRS1996

Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing

Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented.

DeBrabander, Gregory N.↗
NASA NTRS1992

The effects of weighting function errors on spatial filters for structural control

Distributed-effect sensors, which respond to spatially distributed inputs over a significant gauge length, encompass piezoelectric laminate films, modal-domain optical fiber sensors, and holographic sensors; they can be fabricated with spatially varying sensitivity to a distributed measurand for spatial filtering. Such spatial filters are configurable to extract various structural parameters from distributed measurements that cannot be directly measured by sensors. A modeling is presently conducted for distributed-effect sensors' integration into state-space structural models, noting the effects of fabrication errors on sensor operation.

Lindner, Douglas K.↗
NASA NTRS1985

Nonintrusive shaft speed sensor

Reusable rocket engines such as the Space Shuttle Main Engines (SSME), the Orbital Transfer Vehicles (OTV), etc., have throttling capabilities that require real-time, closed-loop control systems of engine propellant flows, combustion temperatures and pressures, and turbopump rotary speeds. In the case of the SSME, there are four turbopumps that require real-time measurement and control of their rotary speeds. Variable-reluctance magnetic speed sensors were designed, fabricated, and tested for all four turbopumps, resulting in the successful implementation and operation of three of these speed sensors during each of the 12 Shuttle flights.

Barkhoudarian, S.↗
NASA NTRS1986

The National Transonic Facility

The National Transonic Facility, NTF, is a high Reynolds Number facility where the increase in Reynolds Number is obtained by operating at high pressures and low temperatures. Liquid nitrogen is allowed to vaporize, making gaseous nitrogen the test medium with temperatures extending down to approximately 100 degrees Kelvin. These factors have created unique, new challenges to those developing sensors and instrumentation. Pressure vessels, thermal enclosures or elaborate temperature compensations schemes, are needed for environmental protection and special materials are needed for sensors and model fabrication. The need for a new measurement, model deformation, was also created. An extensive program to develop the unique sensors and instrumentation was initiated. The data acquisition system and systems to measure aerodynamic forces and pressures, model attitude, and model deformation, are discussed.

Holmes, H. K.↗
NASA NTRS1991

Laterally stacked Schottky diodes for infrared sensor applications

Laterally stacked Schottky diodes for infrared sensor applications are fabricated utilizing porous silicon having pores. A Schottky metal contract is formed in the pores, such as by electroplating. The sensors may be integrated with silicon circuits on the same chip with a high quantum efficiency, which is ideal for IR focal plane array applications due to uniformity and reproducibility.

Lin, True-Lon↗
NASA NTRS1994

The development of a solid-state hydrogen sensor for rocket engine leakage detection

Hydrogen propellant leakage poses significant operational problems in the rocket propulsion industry as well as for space exploratory applications. Vigorous efforts have been devoted to minimizing hydrogen leakage in assembly, test, and launch operations related to hydrogen propellant. The objective has been to reduce the operational cost of assembling and maintaining hydrogen delivery systems. Specifically, efforts have been made to develop a hydrogen leak detection system for point-contact measurement. Under the auspices of Lewis Research Center, the Electronics Design Center at Case Western Reserve University, Cleveland, Ohio, has undertaken the development of a point-contact hydrogen gas sensor with potential applications to the hydrogen propellant industry. We envision a sensor array consisting of numbers of discrete hydrogen sensors that can be located in potential leak sites. Silicon-based microfabrication and micromachining techniques are used in the fabrication of these sensor prototypes. Evaluations of the sensor are carried out in-house at Case Western Reserve University as well as at Lewis Research Center and GenCorp Aerojet, Sacramento, California. The hydrogen gas sensor is not only applicable in a hydrogen propulsion system, but also usable in many other civilian and industrial settings. This includes vehicles or facility use, or in the production of hydrogen gas. Dual space and commercial uses of these point-contacted hydrogen sensors are feasible and will directly meet the needs and objectives of NASA as well as various industrial segments.

Liu, Chung-Chiun↗
NASA NTRS1985

Development of heat flux sensors for turbine airfoils

The objectives of this program are to develop heat flux sensors suitable for installation in hot section airfoils of advanced aircraft turbine engines and to experimentally verify the operation of these heat flux sensors in a cylinder in a cross flow experiment. Embedded thermocouple and Gardon gauge sensors were developed and fabricated into both blades and vanes. These were then calibrated using a quartz lamp bank heat source and finally subjected to thermal cycle and thermal soak testing. These sensors were also fabricated into cylindrical test pieces and tested in a burner exhaust to verify heat flux measurements produced by these sensors. The results of the cylinder in cross flow tests are given.

Atkinson, William H.↗
NASA NTRS1991

Control systems using modal domain optical fiber sensors for smart structure applications

Recently, a new class of sensors has emerged for structural control which respond to environmental changes over a significant gauge length; these sensors are called distributed-effect sensors. These sensors can be fabricated with spatially varying sensitivity to the distributed measurand, and can be configured to measure a variety of structural parameters which can not be measured directly using point sensors. Examples of distributed-effect sensors include piezoelectric film, holographic sensors, and modal domain optical fiber sensors. Optical fiber sensors are particularly attractive for smart structure applications because they are flexible, have low mass, and can easily be embedded directly into materials. In this paper we describe the implementation of weighted modal domain optical fiber sensors. The mathematical model of the modal domain optical fiber sensor model is described and used to derive an expression for the sensor sensitivity. The effects of parameter variations on the sensor sensitivity are demonstrated to illustrate methods of spatially varying the sensor sensitivity.

Lindner, Douglas K.↗
NASA NTRS1994

Small Inertial Measurement Units- Sources of Error and Limitations on Accuracy

Inertial measurement units (IMUs) with very low mass and power can be manufactured using micromachined accelerometers and gyroscopes. Six degree of freedom packages which require a few watts of power and have less than a kg of mass are available commercially, greatly expanding the potential applications of IMUs in guidance and navigation. Recent advances in small sensor design and fabrication have pushed the performance limits of these small devices. However, the limitations on the precision of small IMUs are not entirely due to the performance of the individual sensors.

Hoenk, Michael E.↗
NASA NTRS1995

Single crystal silicon filaments fabricated in SOI: A potential IR source for a microfabricated photometric CO2 sensor

The objective of this project was to design, fabricate, and test single crystal silicon filaments as potential black body IR sources for a spectrophotometric CO2 sensing microsystem. The design and fabrication of the silicon-on-insulator (SOI) filaments are summarized and figures showing the composite layout of the filament die (which contains four filaments of different lengths -- 500 microns, 1 mm, 1.5 mm and 2 mm -- and equal widths of 15 microns) are presented. The composite includes four mask layers: (1) silicon - defines the filament dimensions and contact pads; (2) release pit - defines the oxide removed from under the filament and hence, the length of the released filament; (3) Pyrex pit - defines the pit etched in the Pyrex cap (not used); and (4) metal - defines a metal pattern on the contact pads or used as a contact hole etch. I/V characteristics testing of the fabricated SOI filaments is described along with the nitride-coating procedures carried out to prevent oxidation and resistance instability.

Tu, Juliana↗
NASA NTRS2004

Multisensor Arrays for Greater Reliability and Accuracy

Arrays of multiple, nominally identical sensors with sensor-output-processing electronic hardware and software are being developed in order to obtain accuracy, reliability, and lifetime greater than those of single sensors. The conceptual basis of this development lies in the statistical behavior of multiple sensors and a multisensor-array (MSA) algorithm that exploits that behavior. In addition, advances in microelectromechanical systems (MEMS) and integrated circuits are exploited. A typical sensor unit according to this concept includes multiple MEMS sensors and sensor-readout circuitry fabricated together on a single chip and packaged compactly with a microprocessor that performs several functions, including execution of the MSA algorithm. In the MSA algorithm, the readings from all the sensors in an array at a given instant of time are compared and the reliability of each sensor is quantified. This comparison of readings and quantification of reliabilities involves the calculation of the ratio between every sensor reading and every other sensor reading, plus calculation of the sum of all such ratios. Then one output reading for the given instant of time is computed as a weighted average of the readings of all the sensors. In this computation, the weight for each sensor is the aforementioned value used to quantify its reliability. In an optional variant of the MSA algorithm that can be implemented easily, a running sum of the reliability value for each sensor at previous time steps as well as at the present time step is used as the weight of the sensor in calculating the weighted average at the present time step. In this variant, the weight of a sensor that continually fails gradually decreases, so that eventually, its influence over the output reading becomes minimal: In effect, the sensor system "learns" which sensors to trust and which not to trust. The MSA algorithm incorporates a criterion for deciding whether there remain enough sensor readings that approximate each other sufficiently closely to constitute a majority for the purpose of quantifying reliability. This criterion is, simply, that if there do not exist at least three sensors having weights greater than a prescribed minimum acceptable value, then the array as a whole is deemed to have failed.

Immer, Christopher↗
NASA NTRS2009

Wide-Range Temperature Sensors with High-Level Pulse Train Output

Two types of temperature sensors have been developed for wide-range temperature applications. The two sensors measure temperature in the range of -190 to +200 C and utilize a thin-film platinum RTD (resistance temperature detector) as the temperature-sensing element. Other parts used in the fabrication of these sensors include NPO (negative-positive- zero) type ceramic capacitors for timing, thermally-stable film or wirewound resistors, and high-temperature circuit boards and solder. The first type of temperature sensor is a relaxation oscillator circuit using an SOI (silicon-on-insulator) operational amplifier as a comparator. The output is a pulse train with a period that is roughly proportional to the temperature being measured. The voltage level of the pulse train is high-level, for example 10 V. The high-level output makes the sensor less sensitive to noise or electromagnetic interference. The output can be read by a frequency or period meter and then converted into a temperature reading. The second type of temperature sensor is made up of various types of multivibrator circuits using an SOI type 555 timer and the passive components mentioned above. Three configurations have been developed that were based on the technique of charging and discharging a capacitor through a resistive element to create a train of pulses governed by the capacitor-resistor time constant. Both types of sensors, which operated successfully over the wide temperature range, have potential use in extreme temperature environments including jet engines and space exploration missions.

Hammoud, Ahmad↗
NASA NTRS1982

Development of advanced high-temperature heat flux sensors

Various configurations of high temperature, heat flux sensors were studied to determine their suitability for use in experimental combustor liners of advanced aircraft gas turbine engines. It was determined that embedded thermocouple sensors, laminated sensors, and Gardon gauge sensors, were the most viable candidates. Sensors of all three types were fabricated, calibrated, and endurance tested. All three types of sensors met the fabricability survivability, and accuracy requirements established for their application.

Atkinson, W. H.↗
NASA NTRS1992

Development of a fiber optic high temperature strain sensor

From 1 Apr. 1991 to 31 Aug. 1992, the Georgia Tech Research Institute conducted a research program to develop a high temperature fiber optic strain sensor as part of a measurement program for the space shuttle booster rocket motor. The major objectives of this program were divided into four tasks. Under Task 1, the literature on high-temperature fiber optic strain sensors was reviewed. Task 2 addressed the design and fabrication of the strain sensor. Tests and calibration were conducted under Task 3, and Task 4 was to generate recommendations for a follow-on study of a distributed strain sensor. Task 4 was submitted to NASA as a separate proposal.

Rausch, E. O.↗