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At least 163 records · Page 9

Method of plasma etching GA-based compound semiconductors

A method of plasma etching Ga-based compound semiconductors includes providing a process chamber and a source electrode adjacent thereto. The chamber contains a Ga-based compound semiconductor sample in contact with a platen which is electrically connected to a first power supply, and the source electrode is electrically connected to a second power supply. SiCl.sub.4 and Ar gases are flowed into the chamber. RF power is supplied to the platen at a first power level, and RF power is supplied to the source electrode. A plasma is generated. Then, RF power is supplied to the platen at a second power level lower than the first power level and no greater than about 30 W. Regions of a surface of the sample adjacent to one or more masked portions of the surface are etched at a rate of no more than about 25 nm/min to create a substantially smooth etched surface.

47 OTHER INSTRUMENTATION↗

Role of ambient dielectric in propagation of Ar atmospheric pressure nonequilibrium plasma jets

A single-electrode atmospheric pressure nonequilibrium plasma jet surrounded with different ambient dielectrics is investigated driven by AC power supply. Another three ambient dielectrics, distilled water, ethanol, and carbon tetrachloride, are adopted to compare with air. By examining electrical and optical characteristics, it was found that the molecular polarity of ambient dielectrics had its significant effect on the propagation of atmospheric pressure nonequilibrium plasma jets. When the polarization of molecules was enhanced, the discharge current and the bullet velocity were also increased. For nonpolar dielectric of carbon tetrachloride, this was mainly resulted from the electron polarization in the built-in electric field. For polar dielectrics of ethanol and distilled water, in addition to the electron polarization, orientation polarization was the main cause for the further increase in discharge current and bullet velocity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Fine structure of modal focusing effect in a three dimensional plasma-sheath-lens formed by disk electrodes

Modal and discrete focusing effects associated with three-dimensional plasma-sheath-lenses show promising potential for applications in ion beam extraction, mass spectrometry, plasma diagnostics and for basic studies of plasma sheath. The ion focusing properties can be adjusted by controlling the geometrical structure of the plasma-sheath-lens and plasma parameters. The positive and negative ion kinetics within the plasma-sheath-lens are investigated both experimentally and theoretically and a modal focusing ring is identified on the surface of disk electrodes. The focusing ring is very sensitive to the sheath thickness and can be used to monitor very small changes in plasma parameters. Three dimensional simulations are found to be in very good agreement with experiments.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Study of the Design and Characteristics of a Modified Pulsed Plasma Thruster with Graphite and Tungsten Trigger Electrodes

The paper presents experimental results for a modified pulsed plasma thruster (PPT) with solid propellant, using a coaxial anode–cathode design. Graphite from pencil leads served as propellant, and a tungsten trigger electrode was tested to reduce carbonization effects. Experiments were performed in a vacuum chamber at 0.001 Pa, employing diagnostics such as discharge current/voltage recording, power measurement, ballistic pendulum, time-of-flight (TOF) method, and a Faraday cup. Current and voltage waveforms matched an oscillatory RLC circuit with variable plasma channel resistance. Key discharge parameters were measured, including current pulse duration/amplitude and plasma channel formation/decay dynamics. Impulse bit values, obtained with a ballistic pendulum, reached up to 8.5 μN·s. Increasing trigger capacitor capacitance reduced thrust due to unstable “pre-plasma” formation and partial pre-discharge energy loss. Using TOF and Faraday cup diagnostics, plasma front velocity, ion current amplitude, current density, and ion concentration were determined. Tungsten electrodes produced lower charged particle concentrations than graphite but offered better adhesion resistance, minimal carbonization, and stable long-term performance. The findings support optimizing trigger electrode materials and PPT operating modes to extend lifetime and stabilize thrust output.

Faraday cup↗

Enhancements of electric field and afterglow of non-equilibrium plasma by Pb(ZrxTi1−x)O3 ferroelectric electrode

Abstract Manipulating surface charge, electric field, and plasma afterglow in a non-equilibrium plasma is critical to control plasma-surface interaction for plasma catalysis and manufacturing. Here, we show enhancements of surface charge, electric field during breakdown, and afterglow by ferroelectric barrier discharge. The results show that the ferroelectrics manifest spontaneous electric polarization to increase the surface charge by two orders of magnitude compared to discharge with an alumina barrier. Time-resolved in-situ electric field measurements reveal that the fast polarization of ferroelectrics enhances the electric field during the breakdown in streamer discharge and doubles the electric field compared to the dielectric barrier discharge. Moreover, due to the existence of surface charge, the ferroelectric electrode extends the afterglow time and makes discharge sustained longer when alternating the external electric field polarity. The present results show that ferroelectric barrier discharge offers a promising technique to tune plasma properties for efficient plasma catalysis and electrified manufacturing.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

X-band microwave generation caused by plasma-sheath instability

It is well known that oscillations at the electron plasma frequency may appear due to instability of the plasma sheath near a positively biased electrode immersed in plasma. This instability is caused by transit-time effects when electrons, collected by this electrode, pass through the sheath. Such oscillations appear as low-power short spikes due to additional ionization of a neutral gas in the electrode vicinity. Herein we present first results obtained when the additional ionization was eliminated. We succeeded in prolonging the oscillations during the whole time a positive bias was applied to the electrode. These oscillations could be obtained at much higher frequency than previously reported (tens of GHz compared to few hundreds of MHz) and power of tens of mW. These results in combination with presented theoretical estimations may be useful, e.g., for plasma diagnostics.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

In situ plasma removal of surface contaminants from ion trap electrodes

In this thesis, the construction and implementation of an in situ plasma discharge designed to remove surface contaminants from electrodes in an ion trapping experimental system is presented with results. In recent years, many advances have been made in using ion traps for quantum information processing. All of the criteria defined by DiVincenzo for using ion traps for implementing a quantum computer have been individually demonstrated, and in particular surface traps provide a scalable platform for ions. In order to be used for quantum algorithms, trapped ions need to be cooled to their motional (quantum mechanical) ground state. One of the hurdles in integrating surface ion traps for a quantum computer is minimizing electric field noise, which causes the ion to heat out of its motional ground state and which increases with smaller ion-to-electrode distances realized with surface traps. Surface contamination of trap electrodes is speculated to be the primary source of electric field noise. The main goal achieved by this work was to implement an in situ surface cleaning solution for surface electrode ion traps, which would not modify the ion trap electrode surface metal. Care was taken in applying the RF power in order to localize a plasma near the trap electrodes. A method for characterizing the energy of the plasma ions arriving at the ion trap surface is presented and results for plasma ion energies are shown. Finally, a method for quantifying the effectiveness of plasma cleaning of trap electrodes, using the surface analysis technique of X-ray photoelectron spectroscopy for measuring the amount and kind of surface contaminants, is described. A significant advantage of the trap electrode surface cleaning method presented here is the minimal changes necessary for implementation on a working ion trap experimental system.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Active species delivered by dielectric barrier discharge filaments to bacteria biofilms on the surface of apple

The atmospheric pressure non-equilibrium plasma has shown a significant potential as a novel food decontamination technology. In this paper, we report a computational study of the intersection of negative streamer produced by air dielectric barrier discharge with bacteria biofilm on an apple surface. The structure, conductivities, and permittivities of bacteria biofilm have been considered in the Poisson's equations and transportation equations of charge and neutral species to realize self-consistent transportation of plasma between electrode and charging surfaces of apple. We find that the ionization near the biofilm facilitates the propagation of negative streamer when the streamer head is 1 mm from the biofilm. The structure of the biofilm results in the non-uniform distribution of ROS and RNS captured by flux and time fluence of these reactive species. The mean free path of charged species in μm scale permitted the plasma penetrate into the cavity of the biofilm, therefore, although the density of ROS and RNS decrease by 6–7 order of magnitude, the diffusion results in the uniform distribution of ROS and RNS inside the cavity during the pulse off period.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Electrostatic equilibria of non-neutral plasmas confined in a Penning trap with axially varying magnetic field

A procedure for computing the electrostatic equilibria of non-neutral plasmas in a Penning trap with a nonuniform magnetic field by solving Poisson's equation using an iterative method is described. Plasma equilibria in a model Penning trap with high and low field regions are computed. The plasma is assumed to follow the Boltzmann density distribution along magnetic field lines. Correspondence with previous investigations examining similar configurations analytically and using particle-in-cell simulations is found. The relationship between the plasma density in low and high field regions is examined for various plasma temperatures, densities, magnetic mirror ratios, and plasma and electrode radii. An analytical description of the radial density profile in the high field region is developed and compared with the computed equilibria. A concept is described for cooling a positron plasma with laser-cooled ions trapped axially within a high magnetic field region, while antiprotons are trapped axially separated from the laser-cooled ions within a low field region, and the positron plasma extends to both regions.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

A cesium TELEC experiment at Lewis Research Center

The thermoelectronic laser energy converter (TELEC), was studied as a method of converting a 10.6 mm CO2 laser beam into electric power. The calculated characteristics of a TELEC seem to be well matched to the requirements of a spacecraft laser energy conversion system. The TELEC is a high power density plasma device which absorbs an intense laser beam by inverse bremsstrahlung with the plasma electrons. In the TELEC process, electromagnetic radiation is absorbed directly in the plasma electrons producing a high electron temperature. The energetic electrons diffuse out of the plasma striking two electrodes which are in contact with the plasma at the boundaries. These two electrodes have different areas: the larger one is designated as the collector, the smaller one is designated as the emitter. The smaller electrode functions as an electron emitter to provide continuity of the current. Waste heat is rejected from the collector electrode. An experiment was carried out with a high power laser using a cesium vapor TELEC cell with 30 cm active length. Laser supported plasma was produced in the TELEC device during a number of laser runs over a period of several days. Electric power from the TELEC was observed with currents in the range of several amperes and output potentials of less than 1 volt. The magnitudes of these electric outputs were smaller than anticipated but consistent with the power levels of the laser during this experiment.

Britt, E. J.↗

Status of thermoelectronic laser energy conversion, TELEC

A concept known as a thermo-electronic laser energy converter (TELEC), was studied as a method of converting a 10.6 micron CO2 laser beam into electric power. The calculated characteristics of a TELEC seem to be well matched to the requirements of a spacecraft laser energy conversion system. The TELEC is a high power density plasma device which absorbs an intense laser beam by inverse bremsstrahlung with the plasma electrons. In the TELEC process, electromagnetic radiation is absorbed directly in the plasma electrons producing a high electron temperature. The energetic electrons diffuse out of the plasma striking two electrodes which are in contact with the plasma at the boundaries. These two electrodes have different areas: the larger one is designated as the collector, the smaller one is designated as the emitter. The smaller electrode functions as an electron emitter provide continuity of the current. Waste heat is rejected from the collector electrode. An experiment was carried out with a high power laser using a cesium vapor TELEC cell with 30 cm active length. Laser supported plasma were produced in the TELEC device during a number of laser runs over a period of several days. Electric power from the TELEC was observed with currents in the range of several amperes and output potentials of less than 1 volt.

Britt, E. J.↗

Computational study of plasma sustainability in radio frequency micro-discharges

We apply an implicit particle-in-cell Monte-Carlo (PIC-MC) method to study a radio-frequency argon microdischarge at steady state in the glow discharge limit, in which the microdischarge is sustained by secondary electron emission from the electrodes. The plasma density, electron energy distribution function (EEDF), and electron temperature are calculated in a wide range of operating conditions, including driving voltage, microdischarge gap, and pressure. Also, the effect of gap size scaling (in the range of 50-1000 μm) on the plasma sustaining voltage and peak electron density at atmospheric pressure is examined, which has not been explored before. In our simulations, three different EEDFs, i.e., a so-called three temperature hybrid mode, a two temperature α mode, and a two temperature γ mode distribution, are identified at different gaps and voltages. The maximum sustaining voltage to avoid a transition from the glow mode to an arc is predicted, as well as the minimum sustaining voltage for a steady glow discharge. Our calculations elucidate that secondary electrons play an essential role in sustaining the discharge, and as a result the relationship between breakdown voltage and gap spacing is far away from the Paschen law at atmospheric pressure.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Chemically reactive species in liquids generated by atmospheric-pressure plasmas and their roles in plasma medicine

Plasmas whose gas temperatures are close to room temperature may be generated in ambient air or a gas at atmospheric pressure with the use of low-frequency high voltage or low-power radio-frequency (RF) or microwave power applied to electrodes. Such plasmas can serve as a powerful source of free radicals and/or chemically reactive species that arise from atoms and molecules of the ambient gas. Recently use of such plasmas for medical purposes has attracted much attention as they can be implemented in possible medical devices that can cause blood coagulation, heal wounds, facilitate angiogenesis, sterilize surgical devices as well as living tissues without harming healthy cells, and selectively inactivate cancer cells. Especially of interest among reactive species generated by atmospheric-pressure plasmas (APP) are reactive oxygen species (ROS) and reactive nitrogen species (RNS) that are generated in liquid phase. Since most living tissues and cells are immersed in liquids (such as blood or culture media), reactive species generated by APPs in the gas phase are transported to the liquid phase and possibly converted to different types of reactive species therein before causing some influence on the tissues or cells. In this study, the rate equations are solved to evaluate concentrations of various reactive species in pure water that are originated by plasma reactions in atmosphere and possible effects of such species (including ROS/RNS) on living tissues and cells are discussed.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗