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The scanning electron microscope (SEM) is considered as a tool for both failure analysis as well as device characterization. A survey is made of various operational SEM modes and their applicability to image processing methods on semiconductor devices.
Holographic interferograms can contain large amounts of information about flow and temperature fields. Their information content can be very high because they can be viewed from many different directions. This multidirectionality, and fringe localization add to the information contained in the fringe pattern if diffuse illumination is used. Additional information, and increased accuracy can be obtained through the use of dual reference wave holography to add reference fringes or to effect discrete phase shift or hetrodyne interferometry. Automated analysis of fringes is possible if interferograms are of simple structure and good quality. However, in practice a large number of practical problems can arise, so that a difficult image processing task results.
A system for digitally evaluating interferograms, based on an image processing system connected to a host computer, was implemented. The system supports one- and two-dimensional interferogram evaluations. Interferograms are digitized, enhanced, and then segmented. The fringe coordinates are extracted, and the fringes are represented as polygonal data structures. Fringe numbering and fringe interpolation modules are implemented. The system supports editing and interactive features, as well as graphic visualization. An application of the system to the evaluation of double exposure interferograms from the transonic flow field around a helicopter blade and the reconstruction of the three dimensional flow field is given.
A numerical model for predicting the synthetic aperture radar (SAR) image of a moving ocean surface is described, and results are presented for two SIR-B data sets collected off the coast of Chile. Wave height spectra measured by the NASA radar ocean wave spectrometer (ROWS) were used as inputs to this model, and results are compared with actual SIR-B image spectra from orbits 91 and 106. Additional parametric variations are presented to illustrate the effects of nonlinearities in the imaging process.
An explicit framework can provide a better understanding of remote sensing models and their interrelationships. This framework distinguishes between the scene, which is real and exists on the ground, and the image, which is a collection of spatially arranged masurements drawn from the scene. The scene model generalizes and parameterizes the essential qualities of the scene. Scene models may be discrete, in which the scene model consists of discrete elements with boundaries, or continuous, in which matter and energy flows are taken to be continuous and there are no clear or sharp boundaries in the scene. In the discrete case, there are two possibilities for models: H- and L-resolution. In the H-resolution case, the resolution cells of the image are smaller than the elements, and thus the elements may be individually resolved. In the L-resolution case, the resolution cells are larger than the elements and cannot be resolved. Most canopy models are L-resolution, deterministic, and noninvertible in nature; image processing models, however, tend to be H-resolution, empirical, and invertible. This taxonomy helps add insight to the development of remote sensing theory and point the way to new, productive areas of research.
The conference presents papers on segmentation techniques, three-dimensional recognition and representation, processing image sequences, and navigation and mobility. Particular attention is given to determining the pose of an object, adaptive least squares correlation with geometrical constraints, and the reliable formation of feature vectors for two-dimensional shape representation. Other topics include the real-time tracking of a target moving on a natural textured background, computer vision for the guidance of roving robots, and integrating sensory data for object recognition tasks.
Emission-band and continuum data were obtained of Comet Halley with a CCD camera system at the Perth Observatory during the post-perihelion phase. The image processing techniques which were applied and which revealed jets in the CN band are described. The jets had a spiral shape due to nucleus rotation at a rate which was not precisely determined. Estimates are made of the FWHM and half-width half-maximum spatial extent of the jets. Possible parent molecules of the CN jets are discussed.
The use of a spectral analysis technique to evaluate the reconstruction/interpolation performance of linear, shift-invariant interpolants is examined. The technique was utilized to measure the performance of cubic hermite, quintic hermite, exponential, cubic, spline, Nu, PCC, Keys cubic, and BAWA cubic interpolants. The performance criterion is based upon the mean square error of the difference between the sampled and reconstructed functions. The reconstruction properties, interpolation functions, and reconstruction filters for the interpolants are studied and compared. It is noted that the spectral analysis technique is applicable to reconstruction algorithms used in signal and image processes, and interpolants used in numerical analysis, computer-aided design, and computer graphics.
Forty-three cold, dense molecular clouds are digitized from the Palomar Observatory Sky Survey glass plates and presented with epoch 1950.0 equatorial coordinates. Regardless of the cloud's extent, the digitized area is limited to a 23 arcmin square on the sky with pixel size of about 1.3 arcsec. The optical maps presented herein are useful for comparing complementary molecular cloud maps from radio or infrared instruments and can be obtained in FITS format for use on astronomical image-processing systems.
The capability of a new fluorescence method is evaluated using data from an aircraft fluorescence experiment conducted on the Elbe River on August 10-14, 1981. The technique measures chlorophyll concentrations by monitoring sunlight-induced fluorescence at 685 nm. Upwelling radiance spectra and vertical profiles of upwelling radiances are presented and analyzed. The image-processing algorithm used to retrieve fluorescence signals from raw data is described.
Axial ratios and major-axis orientations determined from image processing of Palomar and SRC Sky Survey material are tabulated for a sample of 100 Galactic globular clusters. From a subsample of 99 clusters, the mean axial ratio is found to be 0.93 + or - 0.01. Given that only 32 percent are flatter than b/a less than 0.9, and 5 percent flatter than 0.8, the clusters are found to be quite spherical. As predicted by King (1961 and 1966), tidal interactions by the Galaxy on the cluster are not the means by which the observed ellipticities are produced. Rather, Galactic absorption effects may have a moderate but not dominant effect on the clusters' observed ellipticities, as suggested by van den Bergh (1984). The alternate mechanisms of cluster rotation or anisotropic internal velocity distributions, or both, are considered to be more likely. The observed distribution of axial ratios is statistically indistinguishable from that of a similar-size sample of rotationally flattened clusters, which have axial-ratio values lying in the range of 0.75 less than b/a less than 0.83, and the major axes of which are oriented randomly in space.
Ice concentrations over the Weddell Sea were studied using SIR-B data obtained during the October 1984 mission, with special attention given to the effect of ocean waves on the radar return at the ice edge. Sea ice concentrations were derived from the SIR-B data using two image processing methods: the classification scheme at JPL and the manual classification method at Scott Polar Research Institute (SPRI), England. The SIR ice concentrations were compared with coincident concentrations from the Nimbus-7 SMMR. For concentrations greater than 40 percent, which was the smallest concentration observed jointly by SIR-B and the SMMR, the mean difference between the two data sets for 12 points was 2 percent. A comparison between the JPL and the SPRI SIR-B algorithms showed that the algorithms agree to within 1 percent in the interior ice pack, but the JPL algorithm gives slightly greater concentrations at the ice edge (due to the fact that the algorithm is affected by the wind waves in these areas).
The use of smoke-like tracers to study the laminar separation bubble and several wake flows is discussed. The unobtrusive nature of this technique is an advantage for the study of laminar steady or laminar periodic flows. The recent development of scanning laser-light sheet, combined with high-speed video and image processing techniques, allow for the study of three-dimensional turbulent separated and wake flows.
Planar visualization images are recorded of transverse jet mixing in a supersonic combustor flowfield, without chemical reaction, using laser-induced fluorescence from iodine molecules. Digital image processing and three-dimensional display enable complete representations of fuel penetration boundary and shock surfaces corresponding to several injection geometries and pressures.
Methods of applying principal component (PC) analysis to high resolution remote sensing imagery were examined. Using Airborne Imaging Spectrometer (AIS) data, PC analysis was found to be useful for removing the effects of albedo and noise and for isolating the significant information on argillic alteration, zeolite, and carbonate minerals. An effective technique for using PC analysis using an input the first 16 AIS bands, 7 intermediate bands, and the last 16 AIS bands from the 32 flat field corrected bands between 2048 and 2337 nm. Most of the significant mineralogical information resided in the second PC. PC color composites and density sliced images provided a good mineralogical separation when applied to a AIS data set. Although computer intensive, the advantage of PC analysis is that it employs algorithms which already exist on most image processing systems.
Many computational problems in image processing, signal processing, and scientific computing are naturally structured for either pipelined or parallel computation. When mapping such problems onto a parallel architecture it is often necessary to aggregate an obvious problem decomposition. Even in this context the general mapping problem is known to be computationally intractable, but recent advances have been made in identifying classes of problems and architectures for which optimal solutions can be found in polynomial time. Among these, the mapping of pipelined or parallel computations onto linear array, shared memory, and host-satellite systems figures prominently. This paper extends that work first by showing how to improve existing serial mapping algorithms. These improvements have significantly lower time and space complexities: in one case a published O(nm sup 3) time algorithm for mapping m modules onto n processors is reduced to an O(nm log m) time complexity, and its space requirements reduced from O(nm sup 2) to O(m). Run time complexity is further reduced with parallel mapping algorithms based on these improvements, which run on the architecture for which they create the mappings.
This publication comprises the papers presented at the 1988 Goddard Conference on Space Applications of Artificial Intelligence held at the NASA/Goddard Space Flight Center, Greenbelt, Maryland on May 24, 1988. The purpose of this annual conference is to provide a forum in which current research and development directed at space applications of artificial intelligence can be presented and discussed. The papers in these proceedings fall into the following areas: mission operations support, planning and scheduling; fault isolation/diagnosis; image processing and machine vision; data management; modeling and simulation; and development tools/methodologies.
An automated Terrain Database Preparation System (TDPS) for the construction and editing of terrain databases used in computerized wargaming simulation exercises has been developed. The TDPS system operates under the TAE executive, and it integrates VICAR/IBIS image processing and Geographic Information System software with CAD/CAM data capture and editing capabilities. The terrain database includes such features as roads, rivers, vegetation, and terrain roughness.