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The Nature of Insoluble Organic Matter in Sutter’s Mill and Murchison Carbonaceous Chondrites: Testing the Effect of X-ray Computed Tomography (XCT) and Exploring Parent Body Organic Molecular Evolution

This study analyzed samples of the Murchison and Sutter’s Mill carbonaceous chondrite meteorites in support of the future analysis of samples returned from the asteroid (10155) Bennu by the OSIRIS-REx (Origins, Spectral Interpretation, Resource Identification, and Security–Regolith Explorer) mission. Focusing specifically on the insoluble organic matter (IOM), this study establishes that a total of 1.3 g of bulk sample from a single chondritic meteorite is sufficient to obtain a wide range of cosmochemical information, including light element analysis (H, C, and N), isotopic analysis (D/H, 13 C/ 12 C, and 15 N/ 14 N), and X-ray fluorescence spectroscopy for major elemental abundances. IOM isolated from the bulk meteorite samples was analyzed by light element and isotopic analysis as described above, 1 H and 13 C solid-state nuclear magnetic resonance spectroscopy, Raman spectroscopy, and complete noble gas analyses (abundances and isotopes). The samples studied included a pair from Murchison (CM2), one of which had been irradiated with high-energy X-rays in the course of computed tomographic imaging. No differences between the irradiated and non-irradiated Murchison samples were observed in the many different chemical and spectroscopic analyses, indicating that any X-ray–derived sample damage is below levels of detection. Elemental, isotopic, and molecular spectroscopic data derived from IOM isolated from the Sutter’s Mill sample reveals evidence that this meteorite falls into the class of heated CM chondrites.

planetary science↗

NASA Capture, Containment, and Return System: Bringing Mars Samples to Earth

The Capture, Containment, and Return System (CCRS) project is NASA’s last step in bringing back Mars samples. CCRS will close a decades-long multi-mission and multi-agency effort to bring Mars surface samples back to Earth for scientific studies. CCRS will launch in 2027 on the European Earth Return Orbiter (ERO) spacecraft, which will provide communications relay for the Mars Sample Return ground missions, Perseverance rover and the Sample Retrieval Lander (SRL) (to be launched in 2028). The main mission for CCRS begins when the first-ever orbital planetary capture operation occurs with CCRS catching and securing the Orbiting Sample (OS)in low Mars orbit. From this point, the system will perform additional "firsts": it will autonomously contain the OS with heat-shrink-fit, sterilize the outside surface, and assemble the Earth entry capsule, named Earth Entry System (EES), in orbit around Mars using a gantry mechanism. At approximately 2.8 Lunar distances from Earth, or 3-days from entry into Earth’s atmosphere, CCRS will open its micrometeoroid shield and release the EES on a ballistic trajectory to Earth. The EES is designed to be a fully passive system that will enter the atmosphere and land without parachute at the Utah Test and Training Range (UTTR).

Mars mission, Sample return, Mission design↗

Apollo Next Generation Sample Analysis (ANGSA): an Apollo Participating Scientist Program to Prepare the Lunar Sample Community for Artemis

As a first step in preparing for the return of samples from the Moon by the Artemis Program, NASA initiated the Apollo Next Generation Sample Analysis Program (ANGSA). ANGSA was designed to function as a low-cost sample return mission and involved the curation and analysis of samples previously returned by the Apollo 17 mission that remained unopened or stored under unique conditions for 50 years. These samples include the lower portion of a double drive tube previously sealed on the lunar surface, the upper portion of that drive tube that had remained unopened, and a variety of Apollo 17 samples that had remained stored at -27 °C for approximately 50 years. ANGSA constitutes the first preliminary examination phase of a lunar “sample return mission” in over 50 years. It also mimics that same phase of an Artemis surface exploration mission, its design included placing samples within the context of local and regional geology through new orbital observations collected since Apollo and additional new “boots-on-the-ground” observations, data synthesis, and interpretations provided by Apollo 17 astronaut Harrison Schmitt. ANGSA used new curation techniques to prepare, document, and allocate these new lunar samples, developed new tools to open and extract gases from their containers, and applied new analytical instrumentation previously unavailable during the Apollo Program to reveal new information about these samples. Most of the 90 scientists, engineers, and curators involved in this mission were not alive during the Apollo Program, and it had been 30 years since the last Apollo core sample was processed in the Apollo curation facility at NASA JSC. There are many firsts associated with ANGSA that have direct relevance to Artemis. ANGSA is the first to open a core sample previously sealed on the surface of the Moon, the first to extract and analyze lunar gases collected in situ, the first to examine a core that penetrated a lunar landslide deposit, and the first to process pristine Apollo samples in a glovebox at -20 °C. All the ANGSA activities have helped to prepare the Artemis generation for what is to come. The timing of this program, the composition of the team, and the preservation of unopened Apollo samples facilitated this generational handoff from Apollo to Artemis that sets up Artemis and the lunar sample science community for additional successes.

79 ASTRONOMY AND ASTROPHYSICS↗

Technology Development for a Potential Hybrid Mars Ascent Vehicle

With Mars Sample Return mission concepts being considered for launch as early as 2026, technology development to enable this potential campaign is currently underway. One of the critical items in the campaign would be a Mars Ascent Vehicle, which would be responsible for getting the samples from the surface of Mars to orbit around Mars. This would be the first rocket launch from another planet. Therefore, several challenges arise due to the Martian atmosphere and remote location. A technology development program to determine the feasibility of a hybrid rocket for a Mars Ascent Vehicle is entering its fourth year. Highlights and successes of this program will be discussed.

Oglesby, Britt↗

Chronology of Steno Crater Basalt

The Apollo Next Generation Sample Analysis (ANGSA) program was designed to investigate specially curated samples returned by the Apollo 15 and 17 missions [1]. As part of this effort, we are examining a suite of Apollo 17 basalts collected from the rim of Steno Crater, to investigate the magmatic and post-magmatic volatile histories of these samples. Here we report initial 207Pb-206Pb chronology of accessory phases for two steno crater basalts, which will ultimately be paired with (40)Ar*/(39)Ar chronology and (38)Ar exposure ages to constrain crystallization and surface histories. The chronology of these samples will help determine if the samples derive from the one lava sequence or represent multiple lava flows, and will allow us to place petrologic and volatile data into the wider context of the magmatic suite [1,2]. Note: Extended abstract on document.

S. J. Pomeroy↗

Analysis of Cometary Dust Impact Residues in the Aluminum Foil Craters of Stardust

In January 2006, the sample return capsule from NASA s Stardust spacecraft successfully returned to Earth after its seven year mission to comet Wild-2. While the principal capture medium for comet dust was low-density graded silica aerogel, the 1100 series aluminum foil (approximately 100 m thick) which wrapped around the T6064 aluminum frame of the sample tray assembly (STA) contains micro-craters that constitute an additional repository for Wild-2 dust. Previous studies of similar craters on spacecraft surfaces, e.g. the Long Duration Exposure Facility (LDEF), have shown that impactor material can be preserved for elemental and mineralogical characterization, although the quantity of impact residue in Stardust craters far exceeds previous missions. The degree of shock-induced alteration experienced by the Wild-2 particles impacting on foil will generally be greater than for those captured in the low-density aerogel. However, even some of the residues found in LDEF craters showed not only survival of crystalline silicates but even their solar flare tracks, which are extremely fragile structures and anneal at around 600 C. Laboratory hypervelocity experiments, using analogues of Wild-2 particles accelerated into flight-grade foils under conditions close to those of the actual encounter, showed retention of abundant projectile residues at the Stardust encounter velocity of 6.1 km/s. During the preliminary examination (PE) of the returned foils, using optical and electron microscopy studies, a diverse range in size and morphologies of micro-craters was identified. In this abstract we consider the state of residue preservation in a diverse range of craters with respect to their elemental composition and inferred mineralogy of the original projectiles.

Graham, G. A.↗

Coevolution of phyllosilicate, carbon, sulfide, and apatite in Ryugu's parent body

Abstract We analyzed an asteroid Ryugu sample returned to Earth by JAXA's Hayabusa2 mission using nanoIR, SEM, and TEM microscopy. We identified multiple distinct carbon reservoirs within the phyllosilicate matrix and demonstrate infrared spectral affinities for some of the carbon to insoluble organic matter (IOM). TEM studies of Ryugu samples have allowed us to better understand the interrelationship between the crystallographic orientations of phyllosilicates and the secondary minerals such as carbonate, sulfide, and apatite. Transport of elements provides a unifying theme for understanding these interrelationships.

Geochemistry & Geophysics↗

Where Is the Upper Altitude Boundary of Earth's Biosphere? An Upcoming Stratosphere Exploration Mission

Earths atmosphere provides a relatively thin barrier to the severe conditions of space. Terrestrial microorganisms from our planets surface gets swept up into the atmosphere at rates which are influenced by meteorology, season, and variety of other regionally-dependent conditions. Residence time of microbes in the atmosphere, dispersal patterns, and metabolic activity in clouds are topics of special interest in tropospheric aerobiology. But what about even higher altitudes? A century of ocean exploration has allowed the scientific community to characterize marine life at every depth. Such knowledge was enabled by routine access, specifically, submersible vehicles with sample return systems. The outer reaches of Earth's atmosphere probably contain trace signatures of microbial life swept up from the surface, but high-altitude exploration (from 18-50 km above sea level) has been severely constrained by a shortage of reliable affordable sample acquisition systems. Thus, attempts to establish the upper altitude limits of Earths biosphere boundary remain unresolved. Previous conclusions based on observations of microbial growth and DNA signatures from samples collected in the upper atmosphere have resulted in extraordinary claims for the tenacity of life in the stratosphere. This altitude range can be regarded as a natural laboratory for examining the edge of habitability, a topic of central important to the field of astrobiology; in fact, stratosphere conditions (high UV light and low extremes of temperature, pressure, and relative humidity) closely resemble stressors associated with the surface of Mars. Moreover, low biomass detection instruments developed exploring Earths upper atmosphere can contribute to future strategies for life detection with spacecraft exploring other worlds. While pioneering, many past stratospheric microbiology studies have been qualitative in nature and lacking rigorous contamination control measurements to verify system sterility. We have designed, constructed, and recently flown a novel system for collecting upper atmosphere bioaerosols using the NASA C20A aircraft. We will report preliminary mission results from the lower stratosphere (characterizing abundance, diversity and survivability or airborne microorganisms), describe our methods for reducing false positives, and outline the open scientific engineering challenges in an ongoing effort to better establish Earths high-altitude biosphere boundary.

Smith, David J.↗

Wautersia: The Contingency Water Container Bacterial Contamination Investigation

The Orbiter delivers water to the International Space Station (ISS) in Contingency Water Containers (CWCs) on each flight to the ISS. These CWCs are routinely sampled during each mission to verify the quality of the delivered water. Of the 5 samples returned on STS118/ 13A.1 in August 2007, two exhibited microbial growth exceeding potable water acceptability limits and historical data by orders of magnitude . The microbe was identified as Wautersia species and an investigation was launched to find the source of the contamination. Since then, samples collected on subsequent flights indicated additional CWCs had the same bacteria, as well as several on-orbit systems. An investigation was launched to try to find and address the source of the bacterial contamination. This paper will discuss how Wautersia was found, what Wautersia is, the investigation, and resolution.

Shkedi, Brienne↗

Subsurface Sampling and Sensing Using Burrowing Moles

Finding evidence for life on Mars will likely require accessing the subsurface since the Martian surface is both hostile to life and to preservation of biosignatures due to the cold dry conditions, the strong W environment, and the presence of strong oxidants. Systems are needed to probe beneath the sun and oxidant baked surface of Mars and return samples to the surface for analysis or to bring the instrument sensing underground. Recognizing this need, the European Space Agency incorporated a small subsurface penetrometer or Mole onto the Beagle 2 Mars lander. Had the 2003 landing been successful, the Mole would have collected samples from 1-1.5 m depth and delivered them to an organic analysis instrument on the surface. The de- vice called the Planetary Underground Tool (PLUTO), also measured soil mechanical and thermophysical properties. Constrained by the small mass and volume allowance of the Beagle lander, the PLUTO mole was a slender cylinder only 2 cm diameter and 28 cm long equipped with a small sampling device designed to collect samples and bring them to the surface for analysis by other instrument. The mass of the entire system including deployment mechanism and tether was 1/2 kg. sensor package underground to make in situ measurements. The Mars Underground Mole (MUM) is a larger Mole based on the PLUTO design but incorporating light collection optics that interface to a fiber optic cable in the tether that transmits light to a combined stimulated emission Raman Spectrometer and Short Wave Infrared (SWIR) reflectance Spectrometer with sensitivity from 0.7 to 2.5 micrometers. This instrument is called the Dual Spectral Sensor and uses a Digital Array Scanning Interferometer as the sensor technology, a type of fourier transform interferometer that uses fixed element prisms and thus is highly rugged compared to a Michaelson interferometer. Due to the size limitations of an on-Mole instrument compartment, and the availability of a tether, the sensor head, light sources, and control electronics for the instrument are on the surface. The DSS sensor is capable of sensing a wide range of minerals relevant to Mars Astrobiology objectives including hydrated minerals, clays, carbonates, sulfates, and ice. Additionally, Raman spectroscopy is effective for detecting organics. The MUM is designed to achieve a maximum depth of penetration of 5 m in Mars regolith and can be repeatedly deployed and retrieved. The ability to perform repeated sampling, combined with the low mass and power requirements, means that Moles could be incorporated into a rover mission as well as used on a stationary platform. The Mole mechanism is a pointed slender cylinder that advances into soil by way of an internal sliding hammer mechanism. Part of the energy released by the spring-loaded hammer with each shock is transferred to the Mole casing and from there to the soil, resulting in penetration by displacing and compressing the surrounding soil. A backwards-directed impulse as a re- action to each forward shock is transferred via a suppressor mass against a second weaker spring allowing forward motion without requiring reactive forces provided by the lander. The Mole tip can be opened to collect soil samples. The Mole casing is tethered to a supporting mechanism that supplies power. Components supporting the Mole on the surface include a launch tube, tether reel and winch for pulling in tether, in addition to the tether itself.

Stoker, C. R.↗

Overview of Phobos/Deimos Regolith Ion Sample Mission (PRISM) Concept

Far more definitive information on composition is required to resolve the question of origin for the Martian moons Phobos and Deimos. Current infrared spectra of the objects are inconclusive due to the lack of strong diagnostic features.Definitive compositional measurements of Phobos could be obtained using in-situ X-ray, gamma-ray, or neutronspectroscopy or collecting and returning samples to Earth for analysis. We have proposed, in lieu of those methods, toderive Phobos and Deimos compositional data from secondary ion mass spectrometry (SIMS) measurements by calibratingthe instrument to elemental abundance measurements made for known samples in the laboratory. We describe thePhobos/Deimos Regolith Ion Sample Mission (PRISM) concept here. PRISM utilizes a high-resolution TOF plasma composition analyzer to make SIMS measurements by observing the sputtered species from various locations of the moons' surfaces. In general, the SIMS technique and ion mass spectrometers complement and expand quadrupole mass spectrometer measurements by collecting ions that have been energized to higher energies, 50-100 eV, and making measurements at very low densities and pressures. Furthermore, because the TOF technique accepts all masses all the time,it obtains continuous measurements and does not require stepping through masses. The instrument would draw less than10 W and weigh less than 5 kg. The spacecraft, nominally a radiation-hardened 12U CubeSat, would use a low-thrust SolarElectric Propulsion system to send it on a two-year journey to Mars, where it would co-orbit with Deimos and then Phobos

Clark, Pamela↗

Aerothermodynamic environments for Mars entry, Mars return, and lunar return aerobraking missions

The aeroheating environments to vehicles undergoing Mars aerocapture, earth aerocapture from Mars, and earth aerocapture from the moon are presented. An engineering approach for the analysis of various types of vehicles and trajectories was taken, rather than performing a benchmark computation for a specific point at a selected time point in a trajectory. The radiation into Mars using the Mars Rover Sample Return (MRSR) 2-ft nose radius bionic remains a small contributor of heating for 6 to 10 km/sec; however, at 12 km/sec it becomes comparable with the convection. For earth aerocapture, returning from Mars, peak radiation for the MRSR SRC is only 25 percent of the peak convection for the 12-km/sec trajectory. However, when large vehicles are considered with this trajectory, peak radiation can become 2 to 4 times higher than the peak convection. For both Mars entry and return, a partially ablative Thermal Protection System (TPS) would be required, but for Lunar Transfer Vehicle return an all-reusable TPS can be used.

Rochelle, W. C.↗

Vehicle and Mission Design Options for the Human Exploration of Mars/Phobos Using "Bimodal" NTR and LANTR Propulsion

The nuclear thermal rocket (NTR) is one of the leading propulsion options for future human missions to Mars because of its high specific impulse (lsp~850-1000 s) capability and its attractive engine thrust-to-weight ratio (~3-10). To stay within the available mass and payload volume limits of a “Magnum” heavy lift vehicle, a high performance propulsion system is required for trans-Mars injection (TMI). An expendable TMI stage, powered by three 15 thousand pounds force (klbf) NTR engines is currently under consideration by NASA for its Design Reference Mission (DRM). However, because of the miniscule burnup of enriched uranium-235 during the Earth departure phase (~10 grams out of 33 kilograms in each NTR core), disposal of the TMI stage and its engines after a single use is a costly and inefficient use of this high performance stage. By reconfiguring the engines for both propulsive thrust and modest power generation (referred to as “bimodal” operation), a robust, multiple burn, “power-rich” stage with propulsive Mars capture and reuse capability is possible. A family of modular “bimodal” NTR (BNTR) vehicles are described which utilize a common “core” stage powered by three 15 klbf BNTRs that produce 50 kWe of total electrical power for crew life support, an active refrigeration / reliquification system for long term, zero-boiloff liquid hydrogen (LH 2 ) storage, and high data rate communications. An innovative, spine-like “saddle truss” design connects the core stage and payload element and is open underneath to allow supplemental “in-line” propellant tanks and contingency crew consumables to be easily jettisoned to improve vehicle performance. A “modified” DRM using BNTR transfer vehicles requires fewer transportation system elements, reduces IMLEO and mission risk, and simplifies space operations. By taking the next logical step—use of the BNTR for propulsive capture of all payload elements into Mars orbit—the power available in Mars orbit grows to 150 kWe compared to 30 kWe for the DRM. Propulsive capture also eliminates the complex, higher risk aerobraking and capture maneuver which is replaced by a simpler reentry using a standardized, lower mass “aerodescent” shell. The attractiveness of the “all BNTR” option is further increased by the substitution of the lightweight, inflatable “TransHab” module in place of the heavier, hard-shell hab module. Use of TransHab introduces the potential for propulsive recovery and reuse of the BNTR / Earth return vehicle (ERV). It also allows the crew to travel to and from Mars on the same BNTR transfer vehicle thereby cutting the duration of the ERV mission in half—from ~4.7 to 2.5 years. Finally, for difficult Mars options, such as Phobos rendezvous and sample return missions, volume (not mass) constraints limit the performance of the “all LH 2 ” BNTR stage. The use of “LOX-augmented” NTR (LANTR) engines, operating at a modest oxygen-to-hydrogen mixture ratio (MR) of 0.5, helps to increase “bulk” propellant density and total thrust during the TMI burn. On all subsequent burns, the bimodal LANTR engines operate on LH 2 only (MR=0) to maximize vehicle performance while staying within the mass limits of two Magnum launches.

Nuclear thermal rocket↗

Overview of Phobos/Deimos Regolith Ion Sample Mission (PRISM) Concept

Far more definitive information on composition is required to resolve the question of origin for the Martian moons Phobos and Deimos. Current infrared spectra of the objects are inconclusive due to the lack of strong diagnostic features. Definitive compositional measurements of Phobos could be obtained using in-situ X-ray, gamma-ray, or neutron spectroscopy or collecting and returning samples to Earth for analysis. We have proposed, in lieu of those methods, to derive Phobos and Deimos compositional data from secondary ion mass spectrometry (SIMS) measurements by calibrating the instrument to elemental abundance measurements made for known samples in the laboratory. We describe the Phobos/Deimos Regolith Ion Sample Mission (PRISM) concept here. PRISM utilizes a high-resolution TOF plasma composition analyzer to make SIMS measurements by observing the sputtered species from various locations of the moons' surfaces. In general, the SIMS technique and ion mass spectrometers complement and expand quadrupole mass spectrometer measurements by collecting ions that have been energized to higher energies, 50-100 eV, and making measurements at very low densities and pressures. Furthermore, because the TOF technique accepts all masses all the time, it obtains continuous measurements and does not require stepping through masses. The instrument would draw less than 10 W and weigh less than 5 kg. The spacecraft, nominally a radiation-hardened 12U CubeSat, would use a low-thrust Solar Electric Propulsion system to send it on a two-year journey to Mars, where it would co-orbit with Deimos and then Phobos at distances as low as 27 km.

Dibraccio, Gina↗

Explosion Welding for Hermetic Containerization

A container designed for storing samples of hazardous material features a double wall, part of which is sacrificed during an explosion-welding process in which the container is sealed and transferred to a clean environment. The major advantage of this container sealing process is that once the samples have been sealed inside, the outer wall of what remains of the container is a clean surface that has not come into contact with the environment from which the samples were taken. Thus, there is no need to devise a decontamination process capable of mitigating all hazards that might be posed by unanticipated radioactive, chemical, and/or biological contamination of the outside of the container. The container sealing method was originally intended to be used to return samples from Mars to Earth, but it could also be used to store samples of hazardous materials, without the need to decontaminate its outer surface. The process stages are shown. In its initial double-wall form, the volume between the walls is isolated from the environment; in other words, the outer wall (which is later sacrificed) initially serves to protect the inner container from contamination. The sample is placed inside the container through an opening at one end, then the container is placed into a transfer dock/lid. The surfaces that will be welded together under the explosive have been coated with a soft metallic sacrificial layer. During the explosion, the sacrificial layer is ejected, and the container walls are welded together, creating a strong metallic seal. The inner container is released during the same event and enters the clean environment.

Dolgin, Benjamin↗

Simulations of OSIRIS-REx Atmospheric Entry for Comparisons with Data from the Imaging Campaign

Results from pre-flight flow and radiation simulations for the OSIRIS-REx Sample Return Capsule along a candidate entry trajectory are presented. These results are from pre-flight simulations in support of the observation campaign. Details of the methodology for computing temporal variation of spectral irradiance on an instrument onboard an aerial observation platform are presented along with a sampling of results. An attempt is made to use the methodology presented to assess the level of elemental sodium in the shock layer. The final paper will be based on the actual flight trajectory and will include comparisons of predictions with calibrated spectrometric data.

Spectrometric Imaging↗

Precision Subsampling System for Mars Surface Missions

The ability to analyze heterogeneous rock samples at fine spatial scales would represent a powerful addition to our planetary in situ analytical toolbox. This is particularly true for Mars, where the signatures of past environments and, potentially, habitability are preserved in chemical and morphological variations across sedimentary layers and among mineral pr.ases in a given rock specimen. On Earth, microbial life often associates with surfaces at the interface of chemical nutrients, and ultimately retains sub-millimeter to millimeter-scale layer confinement in fossilization. On Mars, and possibly other bodies, trace chemical markers (elemental, organic/molecular, isotopic, chiral, etc.) and fine-scale morphological markers (e.g., micro-fossils) may he too subtle, degraded, or ambiguous to be detected, using miniaturized instrumentation, without some concentration or isolation. This is because (i) instrument sensitivity may not be high enough to detect trace markers in bulk averages; and (ii) instrument s~lectiviry may not be sufficient to distinguish such markers from interfering/counteracting signals from the bulk. Moreover from a fundamental chemostratigraphic perspective there would be a great benefit to assessing specific chemical and stable isotopic gradients, over millimeter-to-centimeter scales and beyond, with higher precision than currently possible in situ. We have developed a precision subsampling system (PSS) that addresses this need while remaining relatively flexible to a variety of instruments that may take advantage of the capability on future missions. The PSS is relevant to a number of possible lander/rover missions, especially Mars Sample Return. Our specific PSS prototype is undergoing testing under Mars ambient conditions, on a variety of natural analog rocks and rock drill cores, using a set of complementary flight-compatible measurement techniques. The system is available for testing with other contact instruments that may benefit from precision sampling.

Mahaffy, P. R.↗

Genesis Ultrapure Water Megasonic Wafer Spin Cleaner

A device removes, with high precision, the majority of surface particle contamination greater than 1-micron-diameter in size from ultrapure semiconductor wafer materials containing implanted solar wind samples returned by NASA's Genesis mission. This cleaning device uses a 1.5-liter/minute flowing stream of heated ultrapure water (UPW) with 1- MHz oscillating megasonic pulse energy focused at 3 to 5 mm away from the wafer surface spinning at 1,000 to 10,000 RPM, depending on sample size. The surface particle contamination is removed by three processes: flowing UPW, megasonic cavitations, and centripetal force from the spinning wafer. The device can also dry the wafer fragment after UPW/megasonic cleaning by continuing to spin the wafer in the cleaning chamber, which is purged with flowing ultrapure nitrogen gas at 65 psi (.448 kPa). The cleaner also uses three types of vacuum chucks that can accommodate all Genesis-flown array fragments in any dimensional shape between 3 and 100 mm in diameter. A sample vacuum chuck, and the manufactured UPW/megasonic nozzle holder, replace the human deficiencies by maintaining a consistent distance between the nozzle and wafer surface as well as allowing for longer cleaning time. The 3- to 5-mm critical distance is important for the ability to remove particles by megasonic cavitations. The increased UPW sonication time and exposure to heated UPW improve the removal of 1- to 5-micron-sized particles.

Allton, Judith H.↗