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At least 1,495 records · Page 83

Role of the (Ta/Nb)O{sub x}/Al{sub 2}O{sub 3} interface on the flatband voltage shift for Al{sub 2}O{sub 3}/(Ta/Nb)O{sub x}/Al{sub 2}O{sub 3} multilayer charge trap capacitors

The authors studied the characteristics of Si/Al{sub 2}O{sub 3}/(Ta/Nb)O{sub x}/Al{sub 2}O{sub 3}/SiO{sub 2}/Pt charge trap capacitors fabricated by atomic layer deposition and postmetallization annealing at 400 °C. Al{sub 2}O{sub 3} and (Ta/Nb)O{sub x} films are amorphous and have negligible fixed charges. In program mode, a flatband voltage (V{sub fb}) drastically shifts toward the positive direction at a short program time of 10{sup −4} s. A large V{sub fb} shift of approximately 4 V arises after programming at 1 mC/cm{sup 2} because there is a large difference in the conduction band offset between the (Ta/Nb)O{sub x}-charge trapping layer (TNO-CTL) and the Al{sub 2}O{sub 3}-blocking layer (AlO-BL) (1.8 eV). In the retention mode, most of the trapped electrons in the TNO-CTL transfers across the Al{sub 2}O{sub 3}-tunneling layer (AlO-TL) rather than the AlO-BL. The thickness of the AlO-TL affects the V{sub fb} shift degradation behavior in the retention mode. The injected electrons are dominantly located at the TNO-CTL/ALO-BL interface, determined from the thickness dependence of the TNO-CTL on the V{sub fb} shift.

42 ENGINEERING↗

Multilayer on-chip stacked Fresnel zone plates: Hard x-ray fabrication and soft x-ray simulations

Fresnel zone plates are widely used as x-ray nanofocusing optics. To achieve high spatial resolution combined with good focusing efficiency, high aspect ratio nanolithography is required, and one way to achieve that is through multiple e-beam lithography writing steps to achieve on-chip stacking. A two-step writing process producing 50 nm finest zone width at a zone thickness of 1.14 µm for possible hard x-ray applications is shown here. The authors also consider in simulations the case of soft x-ray focusing where the zone thickness might exceed the depth of focus. In this case, the authors compare on-chip stacking with, and without, adjustment of zone positions and show that the offset zones lead to improved focusing efficiency. The simulations were carried out using a multislice propagation method employing Hankel transforms.

Li, Kenan↗

Long-Term Monitoring the Damage Performance of Multilayer Dielectric Grating Samples Residing Inside the Compressor Chamber of the OMEGA EP Laser

Understanding of the laser-induced damage threshold and impact of air–vacuum cycling of the optical components in short-pulse laser systems is of fundamental importance. We report the results of a damage-testing campaign that monitored representative pulse compression grating samples that were positioned inside the OMEGA EP grating compressor vacuum chamber during normal operation and routinely damage tested on every quarterly vent for a period of about 10 years. Here, the evolution of their damage resistance under 10-ps and 100-ps pulse lengths are associated with a significant degradation of the laser-induced damage thresholds, which is comparatively larger at 100 ps, is described.

42 ENGINEERING↗

Superconductivity in an ultrathin multilayer nickelate

We report the appearance of superconductivity in single-unit-cell Nd 6 Ni 5 O 12 , exhibiting a transition temperature similar to that of thicker films. In situ synchrotron x-ray scattering performed during growth of the parent phase, Nd 6 Ni 5 O 16 , shows that the necessary layer-by-layer deposition sequence does not follow the sequence of the formula unit but an alternate order due to the relative stability of the perovskite unit cell. We exploit this insight to grow ultrathin Nd 6 Ni 5 O 16 heterostructures and conduct in situ studies of topotactic reduction, finding that formation of the square-planar phase occurs rapidly and is highly sensitive to reduction temperature, with small deviations from the optimum condition leading to inhomogeneity and the loss of superconductivity. The fluorite layer within the unit cell facilitates reduction by initially stabilizing the square-planar phase in the upper half of the unit cell. Our findings provide insight into growth of the Ruddlesden-Popper nickelates, highlighting the need for in situ studies of the metastable phases key to superconductivity.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗