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At least 1,459 records · Page 81
All sourcesNASA NTRSDOE OSTI
DOE OSTI2021

Chemical and structural characterization of EUV photoresists as a function of depth by standing-wave x-ray photoelectron spectroscopy

The success in the miniaturization of the electronic device constituents depends mostly on the photolithographic techniques. Recently, to achieve patterning at the sub-10-nm node, extreme ultraviolet (EUV) lithography has been introduced into high volume production. Continued scaling of EUV via increased numerical aperture to achieve nodes at 3-nm and below requires the development of fundamentally new patterning materials and new characterization methods. Current EUV-resist film thicknesses are in the 20- to 40-nm range, and further thickness reduction is required for the next generation. Therefore, interfaces become exceedingly important, and the properties of the resist film would be dominated by top and bottom interfacial effects. X-ray photoelectron spectroscopy (XPS) combined with standing-wave excitation (SW-XPS), a fairly new method in the EUV lithography field, previously had been largely applied in multilayers and superlattices for characterizing the composition and electronic structure of buried layers and interfaces as a function of depth. We applied the SW-XPS method to organic/inorganic photoresists to provide depth-selective information on their structural and chemical conditions of as a function of temperature, EUV exposure, different underlayers, and other fundamental parameters. As a first attempt, we perform an SW-XPS feasibility study on self-assembled monolayer (SAM) films after exposure to an electron beam. By SW-XPS, we determined that the interface between the Al 2 O 3 underlayer and the SAMs is smooth, with a mean roughness of about 0.2 nm. Moreover, we determined that the SAM chains are, on average, tilted by 1/430 deg off the sample normal. The SW-XPS results also suggest that the SAM is not a perfectly aligned and uniform monolayer, with some areas having thickness higher than a single monolayer. We demonstrated that SW-XPS can provide useful information on ultrathin materials with high potential for being used as a characterization method of organic/inorganic photoresists.

36 MATERIALS SCIENCE↗
NASA NTRS1990

Thermospheric gravity waves - Observations and interpretation using the transfer function model (TFM)

This paper presents some numerical experiments performed with the TFM to study the various wave components excited in the auroral regions that propagate through the thermosphere and lower atmosphere, and to demonstrate the properties of realistic source geometries. The model is applied to the interpretation of satellite measurements, and gravity waves seen in the thermosphere of Venus are discussed. Gravity waves are prominent in the terrestrial thermosphere polar region and can be excited by perturbations in Joule heating and Lorentz force due to magnetospheric processes. Observations from the Dynamics Explorer-2 satellite are used to illustrate the complexity of the phenomenon and to review the TFM that is utilized.

Mayr, H. G.↗
NASA NTRS1972

Unsteady viscous effects in the flow over an oscillating surface

A theoretical model for the interaction of a turbulent boundary layer with an oscillating wavy surface over which a fluid is flowing is developed, with an application to wind-driven water waves and to panel flutter in low supersonic flow. A systematic methodology is developed to obtain the surface pressure distribution by considering separately the effects on the perturbed flow of a mean shear velocity profile, viscous stresses, the turbulent Reynolds stresses, compressibility, and three-dimensionality. The inviscid theory is applied to the wind-water wave problem by specializing to traveling-wave disturbances, and the pressure magnitude and phase shift as a function of the wave phase speed are computed for a logarithmic mean velocity profile and compared with inviscid theory and experiment. The results agree with experimental evidence for the stabilization of the panel motion due to the influence of the unsteady boundary layer.

Lerner, J. I.↗
NASA NTRS1993

Adjoint methods for aerodynamic wing design

A model inverse design problem is used to investigate the effect of flow discontinuities on the optimization process. The optimization involves finding the cross-sectional area distribution of a duct that produces velocities that closely match a targeted velocity distribution. Quasi-one-dimensional flow theory is used, and the target is chosen to have a shock wave in its distribution. The objective function which quantifies the difference between the targeted and calculated velocity distributions may become non-smooth due to the interaction between the shock and the discretization of the flowfield. This paper offers two techniques to resolve the resulting problems for the optimization algorithms. The first, shock-fitting, involves careful integration of the objective function through the shock wave. The second, coordinate straining with shock penalty, uses a coordinate transformation to align the calculated shock with the target and then adds a penalty proportional to the square of the distance between the shocks. The techniques are tested using several popular sensitivity and optimization methods, including finite-differences, and direct and adjoint discrete sensitivity methods. Two optimization strategies, Gauss-Newton and sequential quadratic programming (SQP), are used to drive the objective function to a minimum.

Grossman, Bernard↗
NASA NTRS1983

Plasma wave experiment for the ISEE-3 mission

Sensitive, high resolution plasma probes for analysis of the distribution functions and plasma wave instruments for measurements of electromagnetic and electrostatic wave modes are commonly flown together to provide information on plasma instabilities and wave particle interactions. Analysis of the data for the ISEE 3 mission is provided.

Scarf, F. L.↗
DOE OSTI2025

Applied Research and Development to Support Open Water Testing at PacWave – Task 5: Development of additively manufactured, functionally graded, corrosion resistant clads for wave energy applications

In this task, we focused on developing corrosion-resistant claddings for wave energy applications. Wave energy systems are exposed to saline conditions, which are corrosive to many metallic structural materials (e.g., carbon steel). Corrosion-resistant (stainless) steels are typically alloyed with >18% chromium (Cr) and >8% nickel (Ni), which dramatically raises material costs and can hinder the development of wave energy systems; thus, coatings are a necessary corrosion protection method for most. Non-metallic coatings (paint, epoxy) have shorter service lives, limited resistance to mechanical stress and wear, plus additional costs of inspection and eventual replacement. Therefore, overlay stainless steel (SS) claddings have a cost-effective use case for protecting components from corrosion, particularly for those that may be subject to mechanical stress / wear and with long service lives.

16 TIDAL AND WAVE POWER↗
NASA NTRS1986

Variational divergence in wave scattering theory with Kirchhoffean trial functions

In a recent study of variational improvement of the Kirchhoff approximation for electromagnetic scattering by rough surfaces, a key ingredient in the variational principle was found to diverge for important configurations (e.g., backscatter) if the polarization had any vertical component. The cause and a cure of this divergence are discussed here. The divergence is demonstrated to occur for arbitrary perfectly conducting scatterers and its universal characterstics are determined, by means of a general divergence criterion that is derived. A variational cure for the divergence is prescribed, and it is tested successfully on a standard scattering model.

Bird, J. F.↗
NASA NTRS1993

Squeezing in phase-conjugated resonance fluorescence

Emission of resonance fluorescence by an atom near the surface of a four-wave mixing phase conjugator is considered. The dipole radiation field, regarded as a Heisenberg-operator field, is decomposed into plane waves with the aid of Weyl's representation of the Green's function for the wave equation. Each plane-wave component which is incident on the surface of the nonlinear medium, is reflected as its phase-conjugate image. Summation of all reflected plane waves then yields the phase conjugate replica of the incident dipole radiation. This field adds to the radiation which is emitted by the atom into the direction away from the medium. The condition under which squeezing occurs in the emitted resonance fluorescence is investigated.

Arnoldus, Henk F.↗
DOE OSTI2023

JuliaOceanWaves

SAND2023-05107O JuliaOceanWaves is a collection of packages and functions for modeling wave energy converters. The open-source software is designed to be used by the wave energy community to model new concepts, perform design optimization, and more. Capabilities include: • A representation of ocean wave spectra and input/output (e.g. read from National Oceanic and Atmospheric Administration buoys) and post-processing functionalities; • A solver for the linear potential flow radiation and diffraction equations for wave forcing on floating structures. • Solving the floating body linear dynamics in the frequency domain. Future additions to the software will include solving non-linear floating body dynamics in the time-domain through time-marching Ordinary Differential Equation solvers and the pseudo-spectral optimization method. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525.

Michelen Strofer, Carlos↗
DOE OSTI2021

Profiling the Quito basin (Ecuador) using seismic ambient noise

SUMMARY Quito, the capital of Ecuador, with more than 2.5 M inhabitants, is exposed to a high seismic hazard due to its proximity to the Pacific subduction zone and active crustal faults, both capable of generating significant earthquakes. Furthermore, the city is located in an intermontane piggy-back basin prone to seismic wave amplification. To understand the basin’s seismic response and characterize its geological structure, 20 broad and medium frequency band seismic stations were deployed in Quito’s urban area between May 2016 and July 2018 that continuously recorded ambient seismic noise. We first compute horizontal-to-vertical spectral ratios to determine the resonant frequency distribution in the entire basin. Secondly, we cross-correlate seismic stations operating simultaneously to retrieve interstations surface-wave Green’s functions in the frequency range of 0.1–2 Hz. We find that Love waves travelling in the basin’s longitudinal direction (NNE–SSW) show much clearer correlograms than those from Rayleigh waves. We then compute Love wave phase-velocity dispersion curves and invert them in conjunction with the HVSR curves to obtain shear-wave velocity profiles throughout the city. The inversions highlight a clear difference in the basin’s structure between its northern and southern parts. In the centre and northern areas, the estimated basin depth and mean shear-wave velocity are about 200 m and 1800 ms−1, respectively, showing resonance frequency values between 0.6 and 0.7 Hz. On the contrary, the basement’s depth and shear-wave velocity in the southern part are about 900 m and 2500 ms−1, having a low resonance frequency value of around 0.3 Hz. This difference in structure between the centre-north and the south of the basin explains the spatial distribution of low-frequency seismic amplifications observed during the Mw 7.8 Pedernales earthquake in April 2016 in Quito.

Pacheco, D. (ORCID:0000000282355096)↗
NASA NTRS1985

Landsat Thematic Mapper image-derived MTF

The Landsat Image Data Quality Analysis (LIDQA) Program conducted by NASA has the objective to quantify the performance of the Thematic Mapper (TM) on the Landsat-4 and Landsat-5 spacecraft. The interest in the spatial resolution performance of the TM is partly related to the decrease of the instantaneous field of view (IFOV) from 80 m for the MSS to 30 m for the TM. Studies related to the preflight line spread function (LSF), square wave response (SWR), and theoretical component modeling of the TM system modulation transfer function (MTF) have been conducted. However, the need remains to estimate the MTF of the complete system. The present paper is concerned with investigations related to this task. Attention is given to three approaches for measuring the MTF of the TM system from imagery.

Schowengerdt, R. A.↗
NASA NTRS1989

Probability function of breaking-limited surface elevation

The effect of wave breaking on the probability function of surface elevation is examined. The surface elevation limited by wave breaking zeta sub b(t) is first related to the original wave elevation zeta(t) and its second derivative. An approximate, second-order, nonlinear, non-Gaussian model for zeta(t) of arbitrary but moderate bandwidth is presented, and an expression for the probability density function zeta sub b(t) is derived. The results show clearly that the effect of wave breaking on the probability density function of surface elevation is to introduce a secondary hump on the positive side of the probability density function, a phenomenon also observed in wind wave tank experiments.

Tung, C. C.↗
NASA NTRS2001

Complex Correlation Calculation of e-H Total Cross Sections

Calculation of e-H total and elastic partial wave cross sections is being carried out using the complex correlation variational T-matrix method. In this preliminary study, elastic partial wave phase shifts are calculated with the correlation functions which are confined to be real. In that case the method reduces to the conventional optical potential approach with projection operators. The number of terms in the Hylleraas-type wave function for the S phase shifts is 95 while for the S it is 56, except for k=0.8 where it is 84. Our results, which are rigorous lower bounds, are given. They are seen to be in general agreement with those of Schwartz, but they are of 0 greater accuracy and outside of his error limits for k=0.3 and 0.4 for S. The main aim of this approach' is the application to higher energy scattering. By virtue of the complex correlation functions, the T matrix is not unitary so that elastic and total scattering cross sections are independent of each other. Our results will be compared specifically with those of Bray and Stelbovics.

Bhatia, A. K.↗
NASA NTRS2001

Complex Correlation Calculation of e(-) - H Total Cross Sections

Calculation of e(-) - H total and elastic partial wave cross sections is being carried out using the complex correlation variational T-matrix method. In this preliminary study, elastic partial wave phase shifts are calculated with the correlation functions which are confined to be real. In that case the method reduces to the conventional optical potential approach with 2 projection operators. The number of terms in the Hylleraas-type wave function for the S-1 phase shifts is 95 while for the S-3 it is 56, except for k = 0.8 where it is 84. Our results, which are rigorous lower bounds, are seen to be in general agreement with those of Schwartz, but they are of greater accuracy and outside of his error limits for k = 0.3 and 0.4 for S-1. The main aim of this approach is the application to higher energy scattering. By virtue of the complex correlation functions, the T-matrix is not unitary so that elastic and total scattering cross sections are independent of each other. Our results will be compared specifically with those of Bray and Stelbovics.

Bhatia, A. K.↗
NASA NTRS1986

Electric and magnetic observations of the structure of standing waves in the magnetosphere

Electric and magnetic field instruments on the DE 1 spacecraft provided observations of toroidal standing wave oscillations of magnetic shells in 1981 and 1982. The amplitude and nodal structure of these waves, as a function of increasing magnetic latitude, was studied and compared with model calculations of these waves. Eight pulsation events were selected for study. The pulsations in these events ranged in period from 20 to 300 s. They were observed at L values between 2.8 and 9.7 and at magnetic latitudes from the equator to 48 deg. The duration of these pulsation events was 20 to 30 min, and they usually consisted of a 5- to 10-min growth in amplitude, a 5- to 10-min interval of fluctuating amplitude, and a 5- to 20-min interval of decreasing amplitude. The relative E and B amplitudes and the phase relations between the E and B waves could be qualitatively explained by the nodal structure of the waves predicted by model calculations. Detailed quantitative comparisons of E and B amplitudes were in agreement with more recent model calculations. In a few cases, electron densities were also available as derived from plasma frequency observations; in these cases the standing wave periods calculated were reasonably close to, but somewhat less than, the observed periods.

Cahill, L. J., Jr.↗
NASA NTRS1984

The non-Gaussian joint probability density function of slope and elevation for a nonlinear gravity wave field

On the basis of the mapping method developed by Huang et al. (1983), an analytic expression for the non-Gaussian joint probability density function of slope and elevation for nonlinear gravity waves is derived. Various conditional and marginal density functions are also obtained through the joint density function. The analytic results are compared with a series of carefully controlled laboratory observations, and good agreement is noted. Furthermore, the laboratory wind wave field observations indicate that the capillary or capillary-gravity waves may not be the dominant components in determining the total roughness of the wave field. Thus, the analytic results, though derived specifically for the gravity waves, may have more general applications.

Huang, N. E.↗