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In-Situ Reaction Monitoring for Lunar Applications Utilizing a Single Quadrupole Residual Gas Analyzer

With a revived focus to create a permanent presence on the moon and in preparation for future Mars exploration, it is imperative that all resources are utilized to their fullest potential.[1] In-Situ Resource Utilization (ISRU) will be critical for future mission success as it would enable independent operation of missions while minimally relying on the complex supply chain created between the Earth, moon and Mars. One of the most critical resources that have been identified for ISRU is the creation of liquid oxygen(LO2) for not only breathable air, but also for rocket propellant. On the moon and potentially Mars, one of the most O2 rich resources is in the presence of regolith.[2],[3] Although there are numerous minerals within regolith and various processes to extract O2,this is not the scope of this paper. Since the O2 extraction method can vary, a critical standardized analytical method is needed to verify O2(or oxygenated precursor compounds) for extraction efficiency and purity. Our group utilizes a modified consumer off-the-shelf (COTS), Residual Gas Analyzer (RGA) Single Quadrupole Mass Spectrometer (QMS). Due to the current field mission requirements, the gas analysis module will need to rely only on mass-to-charge ratios (m/z) and peak intensities to differentiate and quantitate targeted gas-phase reactants or products, i.e. carbon monoxide(CO), carbon dioxide (CO2), methane (CH4) and hydrogen (H2). However, due to solar wind implanted volatiles and various other compounds present in lunar regolith, such as nitrogen (N2), helium (He), and deuterium (D2), deconvolution and quantification of isobaric compounds becomes quite difficult. Specifically, the presence of N2 makes quantification of CO, an oxygenated precursor, difficult due to both compounds having a peak at m/z 28.

Mass Spectrometry↗

In-Situ Reaction Monitoring for Lunar Applications Utilizing a Single Quadrupole Residual Gas Analyzer

With a revived focus to create a permeant presence on the moon and in preparation for future Mars exploration, it is imperative that all re-sources are utilized to their fullest potential. In-Situ Resource Utilization (ISRU) will be critical for future mission success as it would enable independent operation of missions while minimally relying on the complex supply chain created between the Earth, moon and Mars. One of the most critical resources that have been identified for ISRU is the creation of liquid oxygen (O2) for not only breathable air, but also for rocket fuel. On the moon and potentially Mars, one of the most O2 rich resources is in the presence of regolith. Although there are numerous minerals within regolith and various processes to extract O2, this is not the scope of this paper. Since the O2 extraction method can vary, a critical standardized analytical method is needed to verify O2 (or oxygenated precursor compounds) for extraction efficiency and purity. Our group utilizes a modified consumer off-the-shelf (COTS), Residual Gas Analyzer (RGA) Single Quadrupole Mass Spectrometer (QMS). Due to the current field mission requirements, the gas analysis module will need to rely only on mass-to-charge ratios (m/z) and peak intensities to differentiate and quantitate targeted gas-phase reactants or products, i.e. carbon monoxide (CO), carbon dioxide (CO2), methane (CH4) and hydrogen (H2). However, due to solar wind implanted volatiles and various other compounds present in lunar regolith, such as nitrogen (N2), helium (He), and deuterium (D2), deconvolution and quantification of isobaric compounds becomes quite difficult. Specifically, the presence of N2 makes quantification of CO, an oxygenated precursor, difficult due to both compounds having a peak at m/z 28. Approaches to differentiate isobaric components: Initially, the solution to overcome isobaric overlap was to use isotopic ratios, particularly be-tween carbon-13 and nitrogen-15. Although limited literature discuss isotopic composition and attempt to quantify the ratios, variation is particularly high and limited to a few lunar regolith samples. The following were identified as potential approaches to quantify isobaric species, N2 and CO, using our RGA. Threshold Ionization. CO and N2 both have peaks at m/z 28, but only N2 is capable of producing a peak at m/z 7. While a N2 peak at m/z 7 is generally rare, instrument parameters can be optimized in order to maximize the peak intensity. Typically a standard ionization energy of 70 eV is used to monitor a batch process and would produce reliable results for a majority of the reactants or products that we are interested in quantifying. However, to analyze the rare molecular fragment of N2 (N2+ at m/z 7), a different ionization energy may be beneficial. Threshold Ionization Mass Spectrometry (TIMS) will be explored to optimize the N2+ peak at m/z 7 by varying parameters such as ionization energy and pressure. Therefore, a quantitative value at m/z 7 will be used to determine the product gas concentration of N2, which will be subtracted from the total concentration determined at m/z 28 enabling us to approximate the amount of CO. Secondary Detector (infrared gas detector, IR). Another approach to quantitate and differentiate be-tween isobaric components is to leverage alternative modes of detection. Unlike mass spectrometry, which generally uses a separation step prior to analysis (i.e. gas chromatography), IR produces energy that is specifically absorbed depending on the bond and configuration of the molecule. This technique could be leveraged since it is generally only active on non-symmetric molecules, i.e. CO. Utilizing concentrations of CO determined from another detector could help correct concentrations of CO obtained from the QMS. However, the inclusion of another detector adds additional mission requirements, such as power, software changes and avionics updates that add additional cost and schedule requirements.

mass spectrometry↗

Roles of Mn and Co in the Air Synthesizability of Layered Oxide Cathodes for Lithium-Based Batteries

High-nickel layered oxides (LiNi 1-x-y Mn x Co y O 2 ) are the prevailing cathode materials for high-energy-density lithium-based batteries, but they are plagued with deleterious surface air instabilities stemming from residual lithium formation. These issues severely hinder mass production as cathode calcination is limited to a flowing oxygen atmosphere, which entails high manufacturing costs as opposed to simpler and more economical air calcination. Here, while higher Ni contents are known to worsen air instabilities, the influence of Mn and Co contents on impacting these phenomena are less elucidated. We herein present the synthesis in ambient air and flowing oxygen atmospheres of three cathode variants with the same Ni contents, but varying Mn and Co contents: LiNi 0.7 Mn 0.3 O 2 , LiNi 0.7 Mn 0.15 Co 0.15 O 2 , and LiNi 0.7 Co 0.3 O 2 . It is found that the critical parameter influencing the air stability of the cathodes is the average Ni oxidation state, which is greatly dependent on the Mn and Co contents. Substitution of Mn for Ni drives down the Ni oxidation state as Mn exists as Mn4 + and reduces surface residual lithium formation, which vastly improves the overall air stability and, therefore, the synthesizability in air, but with a penalty of lowered capacity. In contrast, substitution of Co for Ni maintains Ni 3+ as Co exists as Co 3+ , offering increased initial capacity, but worsens the air stability and cyclability as the driving force for residual lithium formation and surface reactivity is increased.

25 ENERGY STORAGE↗

Monatomic Oxygen Makes Materials Biocompatible

Treatment with monatomic oxygen activates surfaces of biomedical and biotechnical materials without adversely affecting properties of bulk and without introducing toxic or otherwise dangerous solvent residues. Treatment used to create carpetlike texture increasing surface area and encouraging cells to adhere and grow. On silicone tubing for vascular implants, carpet surface improves acceptance by body. On polymer beads and vessels, surface increases effectiveness of growing, storing, and separating cell cultures. Monatomic oxygen relatively abundant in upper atmosphere of Earth, thus treatments carried out on Space Shuttle missions. Alternatively, one of several high-energy neutral-beam devices used in terrestrial laboratories.

Spaulding, Glenn↗

Rubredoxin 1 promotes the proper folding of D1 and is not required for heme b 559 assembly in Chlamydomonas photosystem II

Photosystem II (PSII), the water:plastoquinone oxidoreductase of oxygenic photosynthesis, contains a heme b 559 iron whose axial ligands are provided by histidine residues from the α (PsbE) and β (PsbF) subunits. PSII assembly depends on accessory proteins that facilitate the step-wise association of its protein and pigment components into a functional complex, a process that is challenging to study due to the low accumulation of assembly intermediates. Here, we examined the putative role of the iron[1Fe-0S]-containing protein rubredoxin 1 (RBD1) as an assembly factor for cytochrome b 559 , using the RBD1-lacking 2pac mutant from Chlamydomonas reinhardtii, in which the accumulation of PSII was rescued by the inactivation of the thylakoid membrane FtsH protease. To this end, we constructed the double mutant 2pac ftsh1-1, which harbored PSII dimers that sustained its photoautotrophic growth. We purified PSII from the 2pac ftsh1-1 background and found that α and β cytochrome b 559 subunits are still present and coordinate heme b 559 as in the WT. Interestingly, immunoblot analysis of dark- and low light–grown 2pac ftsh1-1 showed the accumulation of a 23-kDa fragment of the D1 protein, a marker typically associated with structural changes resulting from photodamage of PSII. Its cleavage occurs in the vicinity of a nonheme iron which binds to PSII on its electron acceptor side. Altogether, our findings demonstrate that RBD1 is not required for heme b 559 assembly and point to a role for RBD1 in promoting the proper folding of D1, possibly via delivery or reduction of the nonheme iron during PSII assembly.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Combined Carbon, Nitrogen, and Oxygen XANES Spectroscopy on Hydrated and Anhydrous Interplanetary Dust Particles

Interplanetary dust particles (IDPs) collected from the Earth s stratosphere generally contain percent-level concentrations of organic matter. This organic matter in IDPs is important for several reasons: 1) some IDPs contain interstellar organic matter, identified by high D/H or N-15, providing the opportunity to characterize this interstellar material, 2) comparison of the organic matter in anhydrous IDPs to that in hydrated IDPs can help establish the effects of parent body aqueous alteration, and, 3) IDPs are believed to have delivered to the surface of the early Earth pre-biotic organic matter important for the origin of life. X-Ray Absorption Near-Edge Structure (XANES) spectroscopy provides information on the functional groups present in a sample, and XANES can be performed on the nano-scale, comparable to the size of some of the sub-units of the IDPs. The energies of the XANES transitions are diagnostic of the type of bonding of the C, N, and O, allowing identification of the functional groups present in the sample. As part of our ongoing effort to characterize the organic matter in the IDPs, we have performed carbon- and oxygen- and the first nitrogen-XANES spectroscopy on two IDPs and acid-insoluble residue from the CM2 meteorite Murchison.

Feser, M.↗

Aromatic Polyimide Foam

A mechanically undensified aromatic polyimide foam is made from an aromatic polyimide precursor solid residuum and has the following combination of properties: a density according to ASTM D-3574A of about 0.5 pounds/cu.ft to about 20 pounds/cu.ft; a compression strength according to ASTM D-3574C of about 1.5 psi to about 1500 psi; and a limiting oxygen index according to ASTM D-2863 of about 35% oxygen to about 75% oxygen at atmospheric pressure. The aromatic polyimide foam has no appreciable solid inorganic contaminants which are residues of inorganic blowing agents. The aromatic polyimide which constitutes the aromatic polyimide foam has a glass transition temperature (Tg) by differential scanning calorimetry of about 235 C to about 400 C; and a thermal stability of 0 to about 1% weight loss at 204 C as determined by thermogravinietric analysis (TGA). The aromatic polyimide foam has utility as foam insulation and as structural foam, for example, for aeronautical, aerospace and maritime applications.

Weiser, Erik S.↗

Atomic Oxygen Cleaning Shown to Remove Organic Contaminants at Atmospheric Pressure

The NASA Lewis Research Center has developed and filed for a patent on a method to produce atomic oxygen at atmospheric pressure by using a direct current arc in a gas flow mixture of oxygen and helium. A prototype device has been tested for its ability to remove various soot residues from surfaces exposed to fire, and various varnishes such as acrylic and egg white.

Rutledge, Sharon K.↗

Wabash Hydrogen Negative Emissions Technology Demonstration

The objectives of the Wabash Hydrogen Negative Emissions Technology Demonstration Project (Wabash Project) are to develop and design all aspects of the scope, cost, characteristics and investment case of a world class flexible gasification, net negative carbon, hydrogen co-products power plant. The outcome of this undertaking is a complete set of deliverables that has been produced by a preeminent team of engineers, constructors, operators, and developers, building upon previous technology, utilizing cutting edge technology, and thoroughly defining all aspects of this fully integrated 21st Century Powerplant. The Wabash Project encapsulates several cross-cutting initiatives within the US Department of Energy, such as 100% hydrogen powered combustion turbine, geological carbon sequestration, coal with biomass gasification and hydrogen energy storage. The flexible gasifier at the Wabash Valley Resources plant is a slurry-fed, entrained flow, high-temperature, oxygen-blown gasifier that has been proven commercially to operate successfully on various coals and petroleum coke (petcoke). The ability to be fuel flexible and feed various biomass (woody biomass and agriculture residue) and petroleum waste (plastics) was evaluated during BP 1 (BP1). This involved the preparation and testing of feedstocks into slurries to determine what fuels can be fed to the gasifier. By utilizing a flexible oxygen-blown gasifier, the ability to address operational issues common to lower temperature biomass gasification, such as the handling of tars, can be mitigated. The overall goal is to achieve a design capable of carbon-negative emissions while leveraging the substantial investments made and operating experience already gained at the Wabash site.

01 COAL, LIGNITE, AND PEAT↗

Elimination of NO Pollutant in Semi-enclosed Spaces over Sodium-promoted Cobalt Oxyhydroxide (CoOOH) by Oxidation and Adsorption Mechanism

Low concentrations of NOx accumulated in air in semi-enclosed spaces is a severe health hazard, but its efficient removal at low cost is a grand challenge. A simple method in preparing CoOOH for low-concentration NO removal at room temperature is described here. The samples are synthesized by oxidizing Co(OH)2 to CoOOH with different oxidants (Na2S2O8, O2 and H2O2). Among them, CoOOH prepared by Na2S2O8 (Co-NS) shows remarkable performance for NO abatement, while the samples synthesized by and H2O2 (Co-HO) and O2 (Co-OG) have no apparent NO removal capacity. It is found that the Co-NS material contains a higher concentration of residual Na, which contributes to the decreased crystallinity and increased concentrations of surface active species (Co2+, active oxygen) for NO storage. Following NO storage, the material can be readily regenerated by water washing. The authors from East China University of Science and Technology acknowledge support from National Basic Research Program of China (2013CB933200), National Natural Science Foundation of China (21577035, 21577034), Commission of Science and Technology of Shanghai Municipality (15DZ1205305) and 111 Project (B08021). Aiyong Wang acknowledges the China Scholarship Council for the Joint-Training Scholarship Program with the Pacific Northwest National Laboratory (PNNL). PNNL is operated by Battelle for the US DOE under contract DE-AC05-76RL01830. FG is supported by the U.S. DOE/Office of Energy Efficiency and Renewable Energy, Vehicle Technologies Office.

NOx abatement, NOx adsorber, ambient temperature, ↗

Experimental investigation of elemental and isotopic evaporation processes by laser heating in an aerodynamic levitation furnace

In this report we carried out evaporation experiments on a B-type calcium–aluminium-rich inclusion (CAI) melt in a gas-mixing aerodynamic levitation laser furnace, at 1873 K and an oxygen partial pressure of 10 -9.1 atm, for durations ranging from 60 to 600 s. Evaporation of SiO 2 and MgO follow the same trend as those observed in vacuum furnace experiments at the same temperature and starting composition, showing that their evaporation relative to one another from the melt is independent of pressure, oxygen fugacity, and hydrodynamical regime specific to the furnace. Isotopic ratios of Mg and Si in evaporation residues are used to derive fractionation factors of α 26/24 Mg vap-liq = 0.9906± 0.0004 and α 30/28 Si vap-lip = 0.9943±0.0003, which are both significantly closer to unity than those found for evaporation in a vacuum, which translates to less isotope fractionation. The residues are also less isotopically fractionated than expected for cases in which transport of the gas species away from the melt is diffusion-controlled at 1-atm. By analysing the flow regimes in our furnace, we find that advection by the levitating gas is the primary mode of mass transport away from the melt surface, as opposed to diffusion-limited transport in a vacuum or 1-atm tube furnace. A modified Hertz–Knudsen–Langmuir formulation accounts for this process, and shows that isotopic fractionation of both Si and Mg reflect a saturation factor (ratio of the pressure of the evaporating species to vapour saturation pressure) equal to 0.75. This is in perfect accord with recent measurements of Cu isotopic fractionation using a similar furnace. The fact that three elements (Mg, Si, Cu) with varying equilibrium vapour pressures, activity coefficients in the liquid, and diffusion coefficients in the gas have the same scaling behaviour to saturation pressure is a strong indication that the mechanism controlling evaporation is driven by the hydrodynamical regime imposed in the furnace. Therefore, this class of experiments can be used to constrain processes in which advection dominates over diffusion, such as (but not limited to) planetary ejecta, tektites, giant impacts, nebular condensation in a turbulent flow, or nuclear fallout material. Finally, the possibility to reach high temperatures (in excess of 3500 K) in this furnace allows it to be used to evaluate the activity coefficients of melt components in extreme conditions relevant to molten planetary interiors (i.e., magma oceans), with a specific focus on refractory elements.

58 GEOSCIENCES↗

Z306 molecular contamination ad hoc committee results

LDEF external surfaces which did not receive significant amounts of atomic oxygen were observed to be coated with a brown contamination, apparently the result of a condensed organic residue darkened due to UV radiation exposure. During the initial Materials Special Investigation Group (MSIG) Meeting after LDEF deintegration, held in Seattle - July 1990, this organic contamination was the subject of much discussion. The amount of contamination was thought to be significant and its source was immediately believed to be the Z306 black thermal control coating used to coat the entire inner surface of LDEF. Due to the size of the structure, it was not feasible to bake-out the coating. However, initial data on the contamination film was confusing in that significant amounts of silicon was observed by several different researchers. Silicon (from silicone) was not expected to be a potential outgassing product of the Z306 polyurethane coating. To investigate the connection between external contamination and the interior paint, a MSIG ad hoc committee was formed.

Golden, Johnny L.↗

Flexible Gasification of Coal and Biomass to Generate Carbon Free Electric Power and Hydrogen

This paper describes the development of a coal and biomass-fed plant concept to co-produce electric power and hydrogen with net-negative CO2 emissions under the aegis of the 21st Century Power Plant initiative of the U.S. Department of Energy (DOE), whose goal is to advance innovative power plant concepts that are capable of flexible, net-zero carbon emission operations while producing cost-effective “blue” hydrogen to support economy-wide decarbonization goals. The proposed standalone plant will be in Nebraska, USA. The specified design feedstock is a hybrid blend of Powder River Basin (PRB) subbituminous coal from Wyoming and local Nebraska biomass (corn stover), 50 wt.% each (dry basis). Other potential feedstocks, including woody biomass (eastern red cedar) and waste plastic (auto shredder residue) were evaluated or reviewed as alternates. The proposed process block comprises a high-pressure, oxygen-blown fluidized bed gasifier (GTI Energy U-GAS® process) coupled with water gas shift, the Selexol process for acid gas (H2S and CO2) removal, and pressure-swing adsorption (PSA) to yield 8,500 kg/h of high-purity hydrogen. The off gas from the PSA unit is used in the power block (gas turbine combined cycle) to generate electric power to support the gasification process, hydrogen production, and 50 MWe net electric power to the grid. All major plant equipment including the gasifier, gas cleanup system, and power generation are commercially available and proven in other applications and considered at TRL 8-9. However, gasification of corn stover biomass is considered at TRL 6. Overall thermal efficiency of the plant is 50% (net HHV) with net atmospheric CO2 removal at a rate of 250-300,000 tpa. Design activities necessary to provide input to a FEED study (Phase II of the project), including the development of the Environmental Information Volume (EIV) for the host site, and an investment case, based on a pro-forma pre-FEED level cost estimate, have been completed and are described in detail in this paper.

Gülen, S. Can↗

Solar concentrator degradation in Low Earth Orbit (LEO)

The use of parabolically or spherically-shaped mirrors is being considered in order to increase the solar energy intensity on solar cells. Their use will significantly decrease the size and number of the cells needed for a particular application, hence the total array cost. Questions arise, however, regarding the long-term (five to ten years) efficiency of these devices. Performance degradation of the mirror surfaces might result from known hostile elements in the low earth orbit (LEO) environment (150-350 nautical miles). The degradation issue is addressed in light of present knowledge of this environment. The following characteristics of the LEO environment are identified for study: (1) the vacuum of space; (2) sputtering by the residual atoms and particles in space; (3) solar electromagnetic radiation; (4) contamination of the mirror surface; (5) atomic oxygen interactions with the surface; (6) bombardment of the surface by meteoroids; and (7) irradiation of the surface by ionizing particles (protons). Using the best available information for the magnitudes of the necessary quantities, a mathematical analysis was carried out, where possible, to determine the degradation in reflectance or other loss caused by each characteristic. Otherwise, reasonable estimates are made of corresponding losses, based on already published data.

Thomas, R. G.↗

Green Solvents for Precision Cleaning

Aerospace machinery used in liquid oxygen (LOX) fuel systems must be precision cleaned to achieve a very low level of non-volatile residue (< 1 mg0.1 m2), especially flammable residue. Traditionally chlorofluorocarbons (CFCs) have been used in the precision cleaning of LOX systems, specifically CFC 113 (C2Cl3F3). CFCs have been known to cause the depletion of ozone and in 1987, were banned by the Montreal Protocol due to health, safety and environmental concerns. This has now led to the development of new processes in the precision cleaning of aerospace components. An ideal solvent-replacement is non-flammable, environmentally benign, non-corrosive, inexpensive, effective and evaporates completely, leaving no residue. Highlighted is a green precision cleaning process, which is contaminant removal using supercritical carbon dioxide as the environmentally benign solvent. In this process, the contaminant is dissolved in carbon dioxide, and the parts are recovered at the end of the cleaning process completely dry and ready for use. Typical contaminants of aerospace components include hydrocarbon greases, hydraulic fluids, silicone fluids and greases, fluorocarbon fluids and greases and fingerprint oil. Metallic aerospace components range from small nuts and bolts to much larger parts, such as butterfly valves 18 in diameter. A fluorinated grease, Krytox, is investigated as a model contaminant in these preliminary studies, and aluminum coupons are employed as a model aerospace component. Preliminary studies are presented in which the experimental parameters are optimized for removal of Krytox from aluminum coupons in a stirred-batch process. The experimental conditions investigated are temperature, pressure, exposure time and impeller speed. Temperatures of 308 - 423 K, pressures in the range of 8.3 - 41.4 MPa, exposure times between 5 - 60 min and impeller speeds of 0 - 1000 rpm were investigated. Preliminary results showed up to 86 cleaning efficiency with the moderate processing conditions of 323 K, 13.8 MPa, 30 min and 750 rpm.

solvents↗

Sea Surface Air Pressure Retrieval with MBARS

Global meteorological observations are essential in initialization and assimilation of numerical weather prediction (NWP) models. Many key weather variables such as temperature, humidity, and wind can be relatively well observed by in-situ and remote techniques from surface, suborbital and orbital platforms. However, sea surface air pressure cannot be well-sampled. Over open oceans, the pressure can only be observed by very limited buoys, ships, and oceanic platforms. There is no operational remote sensing method available for the crucial dynamic variable of the Earth’s climate and weather systems. Advanced techniques for global sea level pressure (SLP) observations are urgently needed for improving NWP models, particularly for improvement of severe weather forecasts. Recent studies on the space and airborne Microwave BArometric Radar and Sounder (MBARS) systems provide a great potential to fill the SLP observational gap. The systems studied have three channels with center frequencies at 65.5, 67.76 and 70 GHz. These channels are designed to operate at atmospheric oxygen (O2) absorption bands for column O2 mass measurements. When sea surface returns of spectrally closely-spaced paired channels are measured, surface reflection and atmospheric attenuation other than O2 are very similar, but the difference in O2 absorption is substantial. Thus, the differential absorption loss of this frequency pair leads to measures of atmospheric O2 amount. For the residual absorption loss caused by other agents, a third frequency having the same spectral space to the weak absorption frequency of the first pair can be used, which forms the second pair and produces the same residual as the first pair. Removal of the residual of this second pair from the first pair can further mitigate environmental impacts. Thus, this 3-channel approach will provide precise O2 amount retrievals. Since oxygen is well mixed in the atmosphere, the column air mass or SLP can be obtained. Currently, MBARS is rapidly maturing its advanced technology. An upcoming airborne field flight campaign is planned in late 2024. The 3-channel approach will be use in SLP retrievals. This MBARS team will discuss the physics-based SLP retrieval technique and report latest progresses in this upcoming AGU annual meeting.

O2 differential absorption↗

Effects of substrate bias and tilt on magnetron sputtered boron carbide films

Maintaining high density and good mechanical properties at oblique angles for magnetron sputtered amorphous boron carbide films remains a challenge. In this study, we investigate the effect of the substrate bias on density, residual stress, mechanical properties, and morphology of boron carbide films deposited via direct current magnetron sputtering with a full-face erosion magnetron source in a mixed Ar-Ne plasma. Results show that films deposited at oblique substrate tilt angles on substrates biased at -50 V possess significantly lower oxygen content, superior mechanical properties, and higher density compared to their electrically grounded counterparts. In conclusion, these enhancements observed at oblique angles, while promising, come at the cost of larger residual compressive stress and higher Ne incorporation in films.

Materials science↗