Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “Contamination Control Engineering”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 145 records · Page 8

Comparison of Laboratory Analytical Methods for Uranium Analysis Superior Steel FUSRAP Site - 16606

The Superior Steel Site processed uranium metal in support of the Atomic Energy Commission's fuel-element development program in the 1950's, and was subsequently classified as a Formerly Utilized Sites Remedial Action Program (FUSRAP) Site. Previous investigations at the site identified uranium contamination both inside and outside the buildings associated with historic uranium metalworking activities. The U.S. Army Corps of Engineers (USACE) is currently engaged in the Remedial Investigation (RI) phase in accordance with the Comprehensive Environmental Response, Compensation, and Liability Act (CERCLA) of 1980, as amended. As part of the RI, gamma spectroscopy analysis of environmental samples was performed on-site using a laboratory-grade, high-purity germanium (HPGe) spectrometer. The gamma spectroscopy analysis included isotopes of uranium and their progeny. As a quality assurance measure, a subset of samples already analyzed on-site were sent to a certified, commercial, off-site laboratory for analysis using a suite of analytical methods including gamma spectroscopy, alpha spectroscopy, and mass spectroscopy. As an element of the quality assurance program implemented for the RI, an assessment of the correlations between the various analytical methods employed by both the on-site and off-site laboratory was performed. This assessment revealed inconsistencies between on-site and off-site gamma spectroscopy analytical results, which raised concerns about the appropriateness and suitability of the analytical data. To resolve the data quality concerns and better understand the source(s) of analytical results variability, the Superior Steel RI team (USACE together with its contractor, Amec Foster Wheeler) developed a quality control test whose design objective was to control or practically eliminate sampling and sample preparation variability in order to focus more clearly on analytical variability. This paper discusses the results of this supplemental quality control test, showing the differences in the various analytical methods (both on-site and off-site). It demonstrates in a practical and real world setting how sample preparation and analytical variability, if not controlled and understood can impact data quality and data defensibility. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Contamination control and plume assessment of low-energy thrusters

A method for evaluating the effects of gases originating from plumes or other direct sources impinging on sensitive surfaces located within their field of view is presented. The method is applied to an Xe ion plasma generator with a thrust of a few mN located near a cryogenic surface. The method is based on experimentally derived plume descriptions of emitted low-pressure vented gases and test results of plume distributions from a similar ion engine. It is concluded that the plume of the Xe neutrals represented by a cosine squared function of the angle is a possible contamination source for certain surfaces of the spacecraft.

Scialdone, John J.↗

Evaluation of fuel-borne sodium effects on a DOC-DPF-SCR heavy-duty engine emission control system: Simulation of full-useful life

Here we report that for renewable fuels to displace petroleum, they must be compatible with emissions control devices. Pure biodiesel contains up to 5 ppm Na + K and 5 ppm Ca + Mg metals, which have the potential to degrade diesel emissions control systems. This study aims to address these concerns, identify deactivation mechanisms, and determine if a lower limit is needed. Accelerated aging of a production exhaust system was conducted on an engine test stand over 1001 h using 20% biodiesel blended into ultra-low sulfur diesel (B20) doped with 14 ppm Na. This Na level is equivalent to exposure to Na at the uppermost expected B100 value in a B20 blend for the system full-useful life. During the study, NOx emissions exceeded the engine certification limit of 0.33 g/bhp-hr before the 435,000-mile requirement. Replacing aged diesel oxidation catalyst (DOC), diesel particulate filter (DPF), and selective catalytic reduction (SCR) devices with new degreened parts showed that each device contributed equally to the NOx increase. Following this systems-based evaluation, a detailed investigation of the individual components was completed. Na was determined to have minimal impact on DOC activity. For this system, it is estimated that B20-Na resulted in 50% more ash into the DPF. However, the Na did not diffuse into the cordierite DPF nor degrade its mechanical properties. The SCR degradation was found to be caused by a small amount of precious group metals (PGM) contamination that increased NH3 oxidation, and lowered NOx reduction. Therefore, we determined that the primary effect of Na in this study is through increased ash in the DPF rather than deactivation of the catalytic activity.

42 ENGINEERING↗

Precipitation in pores: A geochemical frontier

This article's purpose is to review some of the recent research in which geochemists have examined precipitation of solid phases in porous media, particularly in pores a few nanometers in diameter (nanopores). While this is a “review,” it is actually more forward-looking in that the list of things about this phenomenon that we do not know or cannot control at this time is likely longer than what we do know and can control. For example, there are three directly contradictory theories on how to predict how precipitation proceeds in a medium of varying pore size, as will be discussed below. The confusion on this subject likely stems from the complexity of the phenomenon itself: One can easily clog a porous medium by inducing a rapid, homogeneous precipitation directly from solution, or have limited precipitation occur that does not affect permeability or even porosity substantially. It is more difficult to engineer mineral precipitation in order to obtain a specific outcome, such as filling all available pore space over a targeted area for the purposes of contaminant sequestration. However, breakthrough discoveries could occur in the next five to ten years that enhance our ability to predict robustly and finely control precipitation in porous media by understanding how porosity and permeability evolve in response to system perturbations. These discoveries will likely stem (at least in part) from advances in our ability to 1) perform and interpret X-ray/neutron scattering experiments that reveal the extent of precipitation and its locales within porous media (Anovitz and Cole 2015, this volume), and 2) utilize increasingly powerful simulations to test concepts and models about the evolution of porosity and permeability as precipitation occurs (Steefel et al. 2015, this volume). A further important technique to isolate specific phenomena and understand reactivity is also microfluidics cell experiments that allow specific control of flow paths and fluid velocities (Yoon et al. 2012). An improved ability to synthesize idealized porous media will allow for tailored control of pore distributions, mineralogy and will allow more reproducible results. This in turn may allow us to isolate specific processes without the competing and obfuscatory effects that hinder generalization of observations when working with solely natural samples. It is likely that no one single experiment, or simulation technique will provide the key discoveries: to make substantive progress will require a collaborative effort to understand the interplay between fluid transport and geochemistry. Finally, where rock fracturing and elevated pressures are of concern, an understanding and capability to model geomechanical properties are necessary (Scherer 1999).

58 GEOSCIENCES↗

Fully Robotic Hot Cell Crane for Target Hall Operations at Isotope Research Facility - 18329

There are many types of equipment used in high radiation environments, but the super-sized and high precision lifting requirements for an isotope research facility in the USA called for one of the largest fully robotic cranes in the US. The 20 Ton Remote Handling Bridge Crane provided by PaR Systems met many challenging requirements for accuracy, repeatability and unique lifting motions in the radiation-shielded target hall of this facility. This robotic system was designed to address four main issues. The first is that the crane needed to be operated remotely due to high radioactivity during the time when it is needed most. Second is that high precision is needed due to the complex fit of multiple heavy shielding blocks. Third problem is that automated routines and exclusion areas were needed due to the remote operation of the system around high capital cost equipment. Lastly is the survivability of the equipment due to the high radiation environment. The facility robotic crane is an overhead top running multiple girder hot cell bridge crane (hereafter referred to as the system). The system is intended to be used in either manually operated or automated operation under computer control. Under automated control, the system provides highly accurate motion control in three linear axes as well as hook rotation. Using motion control programming, this highly accurate system ensures safe, remote movement of in-cell components. The system was designed to be remotely operated by a technician from the remote handling control room in the facility. This is facilitated by computer control using the System Graphical User Interface with feedback from a facility supplied video system. It can also be operated using a wireless hand held controller. The system will be used to place sensitive components with high precision in locations that will be difficult to observe directly. In order to accomplish this, it is critical that the system be capable of moving its payload with minimal swing, and with high accuracy, repeatability and reliability. The system will be operating in an environment where it will be exposed to both high energy neutrons and gamma radiation. Under beam-off conditions, the target hall will be hands-on accessible to accommodate crane maintenance. The system was installed and tested in early 2017 in advance of the live operations of the facility. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Space station momentum management

Gravity gradient stabilization is planned for the space station. Torques arise from air-drag since the center of pressure is not the same as the center of mass of the satellite. The magnitude of these torques varies depending upon the orientation of the solar panels. Adjustments are made through the use of CMG's (Control Moment Gyros). In time, if the CMG's saturate, torque must be bled off using thrusters; however, that is undesirable because it expends propellant and contaminates the local environment. The task of the engineer is to design the CMG's to handle the aerodynamic torques and design the configuration of the spacecraft to prevent, if possible, CMG saturation. For this application the long-term atmospheric density trends are of less importance than the rate of change of density within an orbit. In principle, CMG's could be designed for the worst case of maximum solar activity, but the penalty for overdesign is excess mass and cost. In summary, present models are inadequate for this application with the greatest need being a reliable prediction of maximum rates-of-change of density within an orbit.

Buckalew, V.↗

Controller modeling and evaluation for PCV electro-mechanical actuator

Hydraulic actuators are currently used to operate the propellant control valves (PCV) for the space shuttle main engine (SSME) and other rocket engines. These actuators are characterized by large power to weight ratios, large force capabilities, and rapid accelerations, which favor their use in control valve applications. However, hydraulic systems are also characterized by susceptibility to contamination, which leads to frequent maintenance requirements. The Control Mechanisms Branch (EP34) of the Component Development Division of the Propulsion Laboratory at the Marshall Space Flight Center (MSFC) has been investigating the application of electromechanical actuators as replacements for the hydraulic units in PCV's over the last few years. This report deals with some testing and analysis of a PCV electromechanical actuator (EMA) designed and fabricated by HR Textron, Inc. This prototype actuator has undergone extensive testing by EP34 personnel since early 1993. At this time, the performance of the HR Textron PCV EMA does not meet requirements for position tracking.

Parker, Joey K.↗

NASA Engineering and Safety Center Technical Bulletin No. 22-08; Contaminant Reduction in High Purity Hydrazine

Hydrazine and its derivatives are used ubiquitously in liquid propulsion systems. In smaller thruster systems, contaminant build up has historically caused flow decay and consequently performance losses. Many of these contaminants are not controlled by the current revision of MIL-PRF-26536 [1], the High Purity Hydrazine (HPH) procurement specification, yet have been observed to be present in HPH at variable concentration and, often exceed potentially problematic levels for small thrusters. This technical bulletin outlines recent work aimed at identifying appropriate separation processes to remove specific target elemental and carbonaceous contamination in HPH.

Technical Bulletin No. 22-08↗

Metabolic engineering to improve production of 3-hydroxypropionic acid from corn-stover hydrolysate in Aspergillus species

Fuels and chemicals derived from non-fossil sources are needed to lessen human impacts on the environment while providing a healthy and growing economy. 3-hydroxypropionic acid (3-HP) is an important chemical building block that can be used for many products. Biosynthesis of 3-HP is possible; however, low production is typically observed in those natural systems. Biosynthetic pathways have been designed to produce 3-HP from a variety of feedstocks in different microorganisms. In this study, the 3-HP β-alanine pathway consisting of aspartate decarboxylase, β-alanine-pyruvate aminotransferase, and 3-hydroxypropionate dehydrogenase from selected microorganisms were codon optimized for Aspergillus species and placed under the control of constitutive promoters. The pathway was introduced into Aspergillus pseudoterreus and subsequently into Aspergillus niger, and 3-HP production was assessed in both hosts. A. niger produced higher initial 3-HP yields and fewer co-product contaminants and was selected as a suitable host for further engineering. Proteomic and metabolomic analysis of both Aspergillus species during 3-HP production identified genetic targets for improvement of flux toward 3-HP including pyruvate carboxylase, aspartate aminotransferase, malonate semialdehyde dehydrogenase, succinate semialdehyde dehydrogenase, oxaloacetate hydrolase, and a 3-HP transporter. Overexpression of pyruvate carboxylase improved yield in shake-flasks from 0.09 to 0.12 C-mol 3-HP C-mol -1 glucose in the base strain expressing 12 copies of the β-alanine pathway. Deletion or overexpression of individual target genes in the pyruvate carboxylase overexpression strain improved yield to 0.22 C-mol 3-HP C-mol -1 glucose after deletion of the major malonate semialdehyde dehydrogenase. Further incorporation of additional β-alanine pathway genes and optimization of culture conditions (sugars, temperature, nitrogen, phosphate, trace elements) for 3-HP production from deacetylated and mechanically refined corn stover hydrolysate improved yield to 0.48 C-mol 3-HP C-mol -1 sugars and resulted in a final titer of 36.0 g/L 3-HP. The results of this study establish A. niger as a host for 3-HP production from a lignocellulosic feedstock in acidic conditions and demonstrates that 3-HP titer and yield can be improved by a broad metabolic engineering strategy involving identification and modification of genes participated in the synthesis of 3-HP and its precursors, degradation of intermediates, and transport of 3-HP across the plasma membrane.

09 BIOMASS FUELS↗

Analytical method for nitroaromatic explosives in radiologically contaminated soil for ISO/IEC 17025 accreditation

Here, unique hazards are presented in the analysis of radiologically contaminated samples. Strenuous safety and security precautions must be in place to protect the analyst, laboratory, and instrumentation used to perform analyses. A validated method has been optimized for the analysis of select nitroaromatic explosives and degradative products using gas chromatography/mass spectrometry via sonication extraction of radiologically contaminated soils, for samples requiring ISO/IEC 17025 laboratory conformance. Target analytes included 2-nitrotoluene, 4-nitrotoluene, 2,6-dinitrotoluene, and 2,4,6-trinitrotoluene, as well as the degradative product 4-amino-2,6-dinitrotoluene. Analytes were extracted from soil in methylene chloride by sonication. Administrative and engineering controls, as well as instrument automation and quality control measures, were utilized to minimize potential human exposure to radiation at all times and at all stages of analysis, from receiving through disposition. Though thermal instability increased uncertainties of these selected compounds, a mean lower quantitative limit of 2.37 µg/mL and mean accuracy of 2.3% relative error and 3.1% relative standard deviation were achieved. Quadratic regression was found to be optimal for calibration of all analytes, with compounds of lower hydrophobicity displaying greater parabolic curve. Blind proficiency testing (PT) of spiked soil samples demonstrated a mean relative error of 9.8%. Matrix spiked analyses of PT samples demonstrated that 99% recovery of target analytes was achieved. To the knowledge of the authors, this represents the first safe, accurate, and reproducible quantitative method for nitroaromatic explosives in soil for specific use on radiologically contaminated samples within the constraints of a nuclear analytical lab.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Controlled Ecological Life Support Systems (CELSS) conceptual design option study

Results are given of a study to explore options for the development of a Controlled Ecological Life Support System (CELSS) for a future Space Station. In addition, study results will benefit the design of other facilities such as the Life Sciences Research Facility, a ground-based CELSS demonstrator, and will be useful in planning longer range missions such as a lunar base or manned Mars mission. The objectives were to develop weight and cost estimates for one CELSS module selected from a set of preliminary plant growth unit (PGU) design options. Eleven Space Station CELSS module conceptual PGU designs were reviewed, components and subsystems identified and a sensitivity analysis performed. Areas where insufficient data is available were identified and divided into the categories of biological research, engineering research, and technology development. Topics which receive significant attention are lighting systems for the PGU, the use of automation within the CELSS system, and electric power requirements. Other areas examined include plant harvesting and processing, crop mix analysis, air circulation and atmosphere contaminant flow subsystems, thermal control considerations, utility routing including accessibility and maintenance, and nutrient subsystem design.

Oleson, Melvin↗

The community satellite. III

A number of technology experiments conducted with the satellite are discussed, giving attention to a very high resolution radiometer experiment, a radio frequency interference experiment, a millimeter wave propagation experiment, a COMSAT propagation experiment, a cesium bombardment ion engine experiment, an advanced thermal control flight experiment, a spacecraft attitude experiment, a radio beacon experiment, and environmental measurements experiments. Special investigations considered are related to the use of a spacecraft vibration accelerometer, a quartz crystal microbalance contamination monitor, and a television camera.

Source record↗

Hydrocarbon-fuel/combustion-chamber-liner materials compatibility

Results of material compatibility experiments using hydrocarbon fuels in contact with copper-based combustion chamber liner materials are presented. Mil-Spec RP-1, n- dodecane, propane, and methane fuels were tested in contact with OFHC, NASA-Z, and ZrCu coppers. Two distinct test methods were employed. Static tests, in which copper coupons were exposed to fuel for long durations at constant temperature and pressure, provided compatibility data in a precisely controlled environment. Dynamic tests, using the Aerojet Carbothermal Test Facility, provided fuel and copper compatibility data under realistic booster engine service conditions. Tests were conducted using very pure grades of each fuel and fuels to which a contaminant, e.g., ethylene or methyl mercaptan, was added to define the role played by fuel impurities. Conclusions are reached as to degradation mechanisms and effects, methods for the elimination of these mechanisms, selection of copper alloy combustion chamber liners, and hydrocarbon fuel purchase specifications.

Gage, Mark L.↗

FUSRAP Maywood Site Remediation of Redstone Park, Lodi, NJ - 17534

The Formerly Utilized Sites Remedial Action Program (FUSRAP) is the U.S. government program started in 1974 to identify, investigate and clean up or control sites that became contaminated as a result of the nation's early atomic programs. FUSRAP was administered by the U.S. Department of Energy (DOE) until 1997, when it was transferred to the U.S. Army Corps of Engineers (USACE) by congressional action. Redstone Park is a 1.5-acre municipal park located in a residential neighborhood in Lodi, Bergen County, New Jersey, USA. The park is a designated vicinity property of the FUSRAP Maywood Superfund Site. This paper will summarize the FUSRAP history of the property spanning over 20 years and then focus on the construction and community relations challenges of recent FUSRAP actions at the site. All of Redstone Park except for a portion bordering a residential property was remediated under FUSRAP in 1996. This remaining portion was remediated in 1998. The 1996 remediation included some hand-digging of surface contamination around the roots of several large mature trees in the park. As part of this action, the DOE proposed alternate cleanup standards whereby subsurface contaminated soil would remain in place around the root balls of the trees and in deeper areas (greater than 1.2 meters [m]) under a large storm drain pipe (or culvert) that runs through the park. This proposal was made to preserve the natural value of the trees and to protect the drainage pipe from damage. After careful review which included an assessment of potential health hazards, the U.S. Environmental Protection Agency (EPA) approved this proposal. The Borough of Lodi also supported the proposal as a way to preserve the trees for the enjoyment of park users. In 2009, EPA conducted a mandatory Five-Year Review of the FUSRAP Maywood Site. The review identified data gaps which prevented a full assessment of remedy effectiveness at Redstone Park. The USACE reviewed all the historic soil data from the park [1] and developed a characterization plan to address those gaps. Field surveys and sampling confirmed that the material around the tree roots and under the pipe did not comply with the current FUSRAP Maywood Site unrestricted use soil cleanup criteria (an average of 5 pico Curies per gram of radium-226 and thorium-232 combined above background) as established in the site's Soils and Buildings Record of Decision [2]. As noted earlier, USACE also considered the widespread uprooting of trees in the region during Hurricane Sandy in 2012 in its re-evaluation of the earlier decision to leave the trees in the park in place. That re-evaluation concluded it was in the best interest of all stakeholders to remove the residual contamination in Redstone Park. USACE subsequently excavated the soil under and around the drainage pipe as Phase 1 of a two-phased approach to address this residual contamination. 1,116 cubic yards of soil were removed for safe offsite disposal during this action in June-July 2016. Phase 2 (removal of contaminated soil around the tree roots) began in September 2016 with expected completion by December 2016. The work was staged in two phases so as not to impact the park during the summer school vacation months when park use is heaviest. (authors)

54 ENVIRONMENTAL SCIENCES↗

Electrolytically Assisted Surface Decontamination (EASD{sup TM}) for POCO Operations - 20282

NNL in collaboration with C-Tech Innovation Ltd and Sellafield Ltd has been exploring innovative technologies to enable a significant reduction of radiological hazards within facilities during the Post Operational Clean Out (POCO) phase of a nuclear plant's life cycle. Reducing the hazard by effectively decontaminating plants in-situ during POCO delivers huge cost reductions for future decommissioning operations. These cost reduction benefits are realized by reducing the number and complexity of remote operations as well as lowering the long-term waste disposal costs. Whilst chemical decontamination can achieve the desired level of decontamination, applying aggressive chemical reagents is hazardous, potentially difficult to control and requires there to be complimentary effluent treatment and waste routes. This work has aimed to develop flexible and controllable decontamination processes which could be operated without the additional complexity and issues associated with chemical decontamination. The processes needed to be relatively fast and effective to minimize the time operators would spend in an active area. In addition, there was a driver to produce decontamination methodologies which generated a secondary waste compatible with current routes and which takes advantage of current waste capacity. The strategy therefore was to come up with a solution that works with, rather than against, the science and engineering behind process plants at Sellafield. Electrolytically Assisted Surface Decontamination (EASD{sup TM}) is an innovative electrochemical decontamination process (developed by NNL and C-Tech Innovation Ltd) that can remove activity from contaminated metal in very short time periods. Application of the patented electric waveform to the surface when treating contaminated metal with nitric acid has been shown to significantly enhance the decontamination performance. When compared to proposed baseline washout procedures at Sellafield, the only change to the process is the applied electrical waveform which is temporary and controllable. The current causes dissolution of the metal surface being decontaminated which leads to activity transferring from the plant item into the nitric acid effluent stream. This innovation has the potential to transform the POCO process and allow a nitric acid based washout approach to deliver POCO quickly and cost effectively within the existing infrastructure. Several devices have now been designed that incorporate this EASD{sup TM} technology and enable the decontamination process to be applied to a range items commonly identified as being contaminated during nuclear decommissioning programmes such as pipework, tanks and hotspots of walls/floors. Inactive and active laboratory-scale testing has been completed using both simulated and 'real-life' contaminated (low level waste) metallic items retrieved from different nuclear sites. Active trials demonstrated that contaminated items could be treated to free release levels within minutes. Engineering scale tests are currently being performed, with guidance from Sellafield's system engineers and plant managers, to provide the necessary re-assurance the designed devices could be successfully deployed in an on-plant scenario. The final stage of this development work is to carry out an active demonstration of the decontamination technology on Thorp at Sellafield. This paper aims to highlight progress made to date with the EASD{sup TM} technology and, more specifically, the development of an in-situ decontamination device for deployment within radioactive pipework. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Land Use Manager Application Ensures Protectiveness Following Remediation on the Oak Ridge Reservation - 13355

Long-term stewardship is the set of activities necessary to return contaminated land to safe and beneficial use. The activities include physical and legal controls to prevent inappropriate exposure to contamination left in place at a site. It is the longest phase of the Department of Energy's Environmental Management Program and ensures the protection of human health and the environment for varied end uses. At the Department of Energy's Oak Ridge Reservation an automated program has been developed and implemented that tracks the multitude of long-term stewardship activities. The Oak Ridge Reservation is a large site that currently has over 50 actions requiring long-term stewardship activities. The Oak Ridge Reservation consists primarily of three plant sites, and long-term stewardship will enable these sites to be leased to private entities (East Tennessee Technology Park), modernized for an evolving national security mission (Y-12 National Security Complex), and revitalized to continue multi-disciplinary research (Oak Ridge National Laboratory). The varied site end uses of the individual plant sites coupled with the multitude of controls required by leaving waste in place presents challenges. A single remedial action may include surveillance and maintenance activities, media monitoring, property record notices as well as physical controls such as fences and signs. Thus, the array of long-term stewardship activities is complex and intermingled (over 200 inspections each year at various frequencies are required currently) and requires an effective tracking program, termed the Land Use Manager. The Land Use Manager is a web-based data management application for use by personnel responsible for implementing, maintaining, and verifying engineering and land use controls on the Oak Ridge Reservation. The program is a data entry and tracking tool, as well as a notification tool. The status and performance of engineering and land use controls are checked annually for evaluation in the required Remediation Effectiveness Report, and the automated Land Use Manager collects, maintains, tracks, notifies, monitors, and manages the information necessary to perform this evaluation. Land Use Manager tracks site information including type of contamination, regulatory requirements, locates land use controls; provides information on inspections, certification, and reporting; and provides reports. Most data access features, e.g., view, print, query, and download, are available to all users; however, data input, updating, and editing are restricted to the personnel directly responsible for monitoring and inspection. The Land Use Manager application was developed for the Department of Energy Oak Ridge Office by URS - CH2M Oak Ridge LLC, Restoration Services Incorporated, and MIJARA Corporation to meet the specific needs of long-term stewardship tracking on the Oak Ridge Reservation. The successful implementation of long-term stewardship enables the future government and private activities being planned on the Oak Ridge Reservation to proceed. (authors)

54 ENVIRONMENTAL SCIENCES↗

Implementation of atomic layer etching of silicon: Scaling parameters, feasibility, and profile control

Atomic or layer by layer etching of silicon exploits temporally segregated self-limiting adsorption and material removal steps to mitigate the problems associated with continuous or quasicontinuous (pulsed) plasma processes: selectivity loss, damage, and profile control. Successful implementation of atomic layer etching requires careful choice of the plasma parameters for adsorption and desorption steps. This paper illustrates how process parameters can be arrived at through basic scaling exercises, modeling and simulation, and fundamental experimental tests of their predictions. Using chlorine and argon plasma in a radial line slot antenna plasma source as a platform, the authors illustrate how cycle time, ion energy, and radical to ion ratio can be manipulated to manage the deviation from ideality when cycle times are shortened or purges are incomplete. Cell based Monte Carlo feature scale modeling is used to illustrate profile outcomes. Experimental results of atomic layer etching processes are illustrated on silicon line and space structures such that iso-dense bias and aspect ratio dependent free profiles are produced. Experimental results also illustrate the profile control margin as processes move from atomic layer to multilayer by layer etching. The consequence of not controlling contamination (e.g., oxygen) is shown to result in deposition and roughness generation.

42 ENGINEERING↗