Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “Infrared techniques”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 1,351 records · Page 75
All sourcesNASA NTRSDOE OSTI
NASA NTRS1990

The analysis of polar clouds from AVHRR satellite data using pattern recognition techniques

The cloud cover in a set of summertime and wintertime AVHRR data from the Arctic and Antarctic regions was analyzed using a pattern recognition algorithm. The data were collected by the NOAA-7 satellite on 6 to 13 Jan. and 1 to 7 Jul. 1984 between 60 deg and 90 deg north and south latitude in 5 spectral channels, at the Global Area Coverage (GAC) resolution of approximately 4 km. This data embodied a Polar Cloud Pilot Data Set which was analyzed by a number of research groups as part of a polar cloud algorithm intercomparison study. This study was intended to determine whether the additional information contained in the AVHRR channels (beyond the standard visible and infrared bands on geostationary satellites) could be effectively utilized in cloud algorithms to resolve some of the cloud detection problems caused by low visible and thermal contrasts in the polar regions. The analysis described makes use of a pattern recognition algorithm which estimates the surface and cloud classification, cloud fraction, and surface and cloudy visible (channel 1) albedo and infrared (channel 4) brightness temperatures on a 2.5 x 2.5 deg latitude-longitude grid. In each grid box several spectral and textural features were computed from the calibrated pixel values in the multispectral imagery, then used to classify the region into one of eighteen surface and/or cloud types using the maximum likelihood decision rule. A slightly different version of the algorithm was used for each season and hemisphere because of differences in categories and because of the lack of visible imagery during winter. The classification of the scene is used to specify the optimal AVHRR channel for separating clear and cloudy pixels using a hybrid histogram-spatial coherence method. This method estimates values for cloud fraction, clear and cloudy albedos and brightness temperatures in each grid box. The choice of a class-dependent AVHRR channel allows for better separation of clear and cloudy pixels than does a global choice of a visible and/or infrared threshold. The classification also prevents erroneous estimates of large fractional cloudiness in areas of cloudfree snow and sea ice. The hybrid histogram-spatial coherence technique and the advantages of first classifying a scene in the polar regions are detailed. The complete Polar Cloud Pilot Data Set was analyzed and the results are presented and discussed.

Smith, William L.↗
NASA NTRS2004

Differential Phase Interferometry with the Keck Telescopes

We summarize the Differential Phase (DP) technique as well as the planned implementation at the Keck Interferometer. Multicolor phase measurements are potentially a powerful astrophysical probe - and can allow ground-based direct detection of extrasolar planets. Better than 0.1 mrad phase measurements in the infrared can allow the Keck Interferometer to detect radiation from the so-called hot-Jupiter or 'Roaster' class of planets. At JPL, we are presently developing and testing instrumentation that will enable these extremely sensitive measurements. First on-sky observations are expected to start in mid-2004. In this article we describe DP and other related techniques, provide an outline of the instrument and present results from preliminary laboratory experiments.

differential phase↗
DOE OSTI2021

Development of an Ultrahigh-bandwidth Phase Contrast Imaging System for detection of electron scale turbulence and Gigahertz Radio-Frequency Waves

The study of waves and turbulence is vital to the development of future reactor-grade plasma devices developed in the quest for fusion energy. These fluctuations are responsible for moving heat and particles across the magnetic field, and a predictive understanding of them is needed to achieve the density and temperature required to sustain a plasma fusion reaction. While many techniques have been developed for measuring waves and fluctuations, every measurement method has limitations. There are relatively few techniques for measuring very high frequency fluctuations, such as radio frequency waves injected to heat the plasma, unstable waves driven by suprathermal particles, or short wavelength electrostatic waves driven by electron temperature or density gradients. The present project builds upon the proven phase contrast imaging (PCI) technique to extend the response of the diagnostic by orders of magnitude in frequency and almost a factor of ten in spatial resolution. PCI provides a measurement of electron density based on small angle scattering of a CO-2 laser beam by using optical techniques to render a phase shift as an intensity change on a detector. Due to the telecommunications revolution, technological development by manufacturers has focused on components in the near -infrared, so that high- quality lasers and detectors at 1.55 µm are readily available. Shifting PCI design to a new, shorter wavelength has numerous advantages and challenges. Similar detector performance is available with room-temperature arrays with GHz bandwidth, while the detector arrays for 10.6 µm required liquid nitrogen cooling and were therefore limited to a bandwidth of about 1 MHz. Shifting to a shorter wavelength reduces the angle at which the laser beam scatters off of plasma waves, allowing more such scattered components to pass through the aperture of the vacuum vessel port and be collected by the PCI, which increases the spatial resolution. Concomitant with these benefits, various questions of performance arise. At shorter laser wave- length, the sensitivity to mirror and lens quality is increased, the contribution of the laser to the overall system noise is increased, and the sensitivity to vibrations is increased. The custom optical components at the heart of the PCI technique were required to be properly scaled for the shorter wavelength, so fabrication technologies needed to be explored. This project was designed to show that a low noise, high response PCI system at 1.55 µm could be constructed and operated, and then to quantify potential issues to allow extrapolation to a full-size production system providing physics measurements on a large plasma device. The first stage, producing the custom optical component called a Phase Plate, was successfully achieved using two methods. First, an easily reproduced masking and coating technique was able to produce good phase plates with the required parameters. Second, a nanofabrication technique was found to produce extremely high quality phase plates at a competitive price. The PCI constructed with the new phase plates and 1.55 µm laser was found to provide excellent wavelength measurements with the theoretically expected response. The sensitivity to optical surface quality was found to be in line with previous measurements at 10.6 µm. The observed signal-to-noise ratio was similar to the theoretically expected value. The effect of vibrations on PCI was studied with the first measurement of the effect of beam motion on PCI response and comparison to theory, allowing for a quantitative prediction of the effect of vibrations on a production PCI system and the requirements for improved beam stabilization. PCI is an extremely cost-effective method to provide a low noise, absolutely calibrated measurement of plasma fluctuations across a wide spatial scale. This project has shown that a 1.55 µm PCI using modern techniques and components is less expensive than the 10.6 µm PCI of a few years ago, with the largest savings in phase plate fabrication and the infrared detector array.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS1988

Infrared Measurements of Atmospheric Gases Above Mauna Loa, Hawaii, in February 1987

Infrared solar absorption spectra recorded at 0.02/ cm resolution from the National Oceanic and Atmospheric Administration (NOAA) Geophysical Monitoring for Climate Change (GMCC) program station at Mauna Loa, Hawaii (latitude 19.5 deg N, longitude 155.6 deg W, elevation 3.40 km), in February 1997 have been analyzed to determine simultaneous total vertical column amounts for 13 atmospheric gases. Average tropospheric concentrations of CO2, N2O, CH4, and CHCIF2 and the daytime diurnal variations or the total columns of NO and NO2 have also been inferred. The retrieved total columns (in molecules /sq cm) of the nondiurnally varying gases are 1.6 +/- 0.2 x 10(exp 15) for HCl, 5.9 +/- 1.2 x 10(exp 15) for HNO3, 2.0 +/- 0.2 x 10(exp 21) for H2O16, 4.4 +/- 0.7 x 10(exp 18) for H2O18, 2.7 +/- 0.1 x 10(exp 17) for HDO, 2.3 +/- 0.2 x 10(exp 19) for CH4, 5.0 +/- 0.5 x 10(exp 21) for CO2, 6.7 +/- 0.8 x 10(exp 18) for O3, 4.3 +/- 0.4 x 10(exp 18) for N2O, 1.0 +/- 0.2 x 10(exp 16) for C2H6, and 9.7 +/- 2.5 x 10(exp 14) for CHClF2. We compare the total column measurements of HCl and HNO3 with previously reported ground-based, aircraft, and satellite measurements. The results for HCl are or particular interest because of the expected temporal increase in the concentration of this gas in the stratosphere. However, systematic differences among stratospheric HCl total column measurements from 1978 to 1980 and the absence of observations of free tropospheric HCl above Mauna Loa make it impossible to obtain a reliable estimate of the trend in the total burden of HCl. The measured HNO3 total column is consistent with aircraft measurements from approx. 12 km altitude. The O3 total column deduced from the IR spectra agrees with correlative Mauna Loa Umkehr measurements within the estimated error limits. The column-averaged D/H ratio of water vapor is (68 +/- 9) x- 10(exp -6), which is 0.44 +/- 0.06 times the reference value of 155.76 x 10(exp -6) for standard mean ocean water (SMOW). This large depletion in the D content of water vapor is similar to published measurements of the upper troposphere and lower stratosphere. Average tropospheric concentrations deduced for CO2, N2O, and CH4 are in good agreement with correlative NOAA GMCC surface data, indicating consistency between the measurement techniques for determining tropospheric volume mixing ratios. Results of the present study indicate that Mauna Loa is a favorable site for infrared monitoring of atmospheric gases. The site is particularly favorable for monitoring the tropospheric volume mixing ratios of long-lived gases, since the high altitude of the tropopause reduces corrections required to account for the decrease in volume mixing ratio in the stratosphere.

Rinsland, C. P.↗
DOE OSTI2021

Separating Physically Distinct Mechanisms in Complex Infrared Plasmonic Nanostructures via Machine Learning Enhanced Electron Energy Loss Spectroscopy

Electron energy loss spectroscopy (EELS) enables direct exploration of plasmonic phenomena at the nanometer level. To isolate individual plasmon modes, linear unmixing methods can be used to separate different physical mechanisms, but in larger and more complex systems the interpretability of the components becomes uncertain. Here, infrared plasmonic resonances in self-assembled heterogeneous monolayer films of doped-semiconductor nanoparticles are examined beyond linear unmixing techniques, and both supervised and unsupervised machine-learning-based analyses of hyperspectral EELS datasets are demonstrated. Additionally, in the supervised approach, a human operator labels a small number of pixels in the hyperspectral dataset corresponding to features of interest which are then propagated across the entire dataset. In the unsupervised approach, non-linear autoencoders are used to create a highly-reduced latent-space representation of the dataset, within which insight into the relevant physics can be gleaned from straightforward distance metrics that do not depend on operator input and bias. The advantage of these approaches is that the labeling separates physical mechanisms without altering the data, enabling robust analyses of the influence of heterogeneities in mesoscale complex systems.

36 MATERIALS SCIENCE↗
DOE OSTI2025

A structured framework for predicting sustainable aviation fuel properties using liquid-phase FTIR and machine learning

Sustainable aviation fuels have the potential to improve efficiency, reduce emissions, and enhance energy security. To help identify viable sustainable aviation fuels and accelerate research, machine learning models have been developed to predict relevant physicochemical properties. However, many models have limited applicability, leverage data from complex analytical techniques with confined spectral ranges, or use feature decomposition methods that offer limited interpretability. Using liquid-phase Fourier Transform Infrared (FTIR) spectra, this study presents a structured method for creating accurate and interpretable property prediction models for neat molecules, aviation fuels, and blends. Liquid FTIR spectra can be collected quickly and consistently, offering high reliability, sensitivity, and component specificity using less than 2 ml of sample. The method first decomposes FTIR spectra into fundamental building blocks using non-negative matrix factorization (NMF) to enable scientific analysis of FTIR spectra attributes and fuel properties. The NMF features are then used to create five ensemble models for predicting final boiling point, flash point, freezing point, density at 15°C, and kinematic viscosity at -20°C. All models were trained using experimental property data from neat molecules, aviation fuels, and blends. The models accurately predict key properties across a broad range of neat molecules and representative fuels and blends, while enabling interpretation of relationships between compositional elements, such as functional groups or chemical classes, and their resulting properties. This demonstrates strong potential to support sustainable aviation fuel research and development. The models and data are available on an interactive web tool.

Fourier transform infrared spectroscopy↗
DOE OSTI2021

Development and Implementation of Digital Image Correlation for Out-of-Cell Burst Testing

This report details the progress made towards utilizing in-situ methods to observe and quantify unirradiated Zircaloy-4 (Zr4) fuel cladding deformation during out-of-cell design basis accident conditions, specifically during loss-of-coolant accident (LOCA) burst testing in the Severe Accident Test Station at Oak Ridge National Laboratory. Digital image correlation (DIC) was implemented to calculate cladding strain during burst and infrared (IR) thermography was used to attempt a correlation of strain with temperature and to investigate thermal gradients. For both techniques, early experimentation revealed experimental modifications were necessary for implementation. For DIC, this manifested as shortened cladding lengths which could be centered in front of the viewing chamber bored through the IR furnace side, and for IR thermography this meant conducting burst tests in air without a reaction tube and the incorporation of a SiC shell to eliminate direct IR reflections from the tungsten lamps. In the following, the technical issues and subsequent origin of these modifications are discussed, laying the framework for a proof-of-concept DIC/IR characterization of a burst test in the final section.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2020

An Algorithm to Retrieve Total Precipitable Water Vapor in the Atmosphere from FengYun 3D Medium Resolution Spectral Imager 2 (FY-3D MERSI-2) Data

The atmosphere has substantial effects on optical remote sensing imagery of the Earth’s surface from space. These effects come through the functioning of atmospheric particles on the radiometric transfer from the Earth’s surface through the atmosphere to the sensor in space. Precipitable water vapor (PWV), CO 2 , ozone, and aerosol in the atmosphere are very important among the particles through their functioning. This study presented an algorithm to retrieve total PWV from the Chinese second-generation polar-orbiting meteorological satellite FengYun 3D Medium Resolution Spectral Imager 2 (FY-3D MERSI-2) data, which have three near-infrared (NIR) water vapor absorbing channels, i.e., channel 16, 17, and 18. The algorithm was improved from the radiance ratio technique initially developed for Moderate-Resolution Imaging Spectroradiometer (MODIS) data. MODTRAN 5 was used to simulate the process of radiant transfer from the ground surfaces to the sensor at various atmospheric conditions for estimation of the coefficients of ratio technique, which was achieved through statistical regression analysis between the simulated radiance and transmittance values for FY-3D MERSI-2 NIR channels. The algorithm was then constructed as a linear combination of the three-water vapor absorbing channels of FY-3D MERSI-2. Measurements from two ground-based reference datasets were used to validate the algorithm: the sun photometer measurements of Aerosol Robotic Network (AERONET) and the microwave radiometer measurements of Energy’s Atmospheric Radiation Measurement Program (ARMP). The validation results showed that the algorithm performs very well when compared with the ground-based reference datasets. The estimated PWV values come with root mean square error (RMSE) of 0.28 g/cm 2 for the ARMP and 0.26 g/cm 2 for the AERONET datasets, with bias of 0.072 g/cm 2 and 0.096 g/cm 2 for the two reference datasets, respectively. The accuracy of the proposed algorithm revealed a better consistency with ground-based reference datasets. Thus, the proposed algorithm could be used as an alternative to retrieve PWV from FY-3D MERSI-2 data for various remote sensing applications such as agricultural monitoring, climate change, hydrologic cycle, and so on at various regional and global scales.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2022

CMB/kSZ and Compton-y Maps from 2500 deg 2 of SPT-SZ and Planck Survey Data

Abstract We present component-separated maps of the primary cosmic microwave background/kinematic Sunyaev–Zel’dovich (SZ) amplitude and the thermal SZ Compton- y parameter, created using data from the South Pole Telescope (SPT) and the Planck satellite. These maps, which cover the ∼2500 deg 2 of the southern sky imaged by the SPT-SZ survey, represent a significant improvement over previous such products available in this region by virtue of their higher angular resolution ( 1 .′ 25 for our highest-resolution Compton- y maps) and lower noise at small angular scales. In this work we detail the construction of these maps using linear combination techniques, including our method for limiting the correlation of our lowest-noise Compton- y map products with the cosmic infrared background. We perform a range of validation tests on these data products to test our sky modeling and combination algorithms, and we find good performance in all of these tests. Recognizing the potential utility of these data products for a wide range of astrophysical and cosmological analyses, including studies of the gas properties of galaxies, groups, and clusters, we make these products publicly available at http://pole.uchicago.edu/public/data/sptsz_ymap and on the NASA/LAMBDA website.

79 ASTRONOMY AND ASTROPHYSICS↗
NASA NTRS1973

Investigation of laser dynamics, modulation and control by means of intra-cavity time varying perturbation

Work continued on a number of projects aimed at the generation of tunable visible, infrared, and ultraviolet light; and on the control of this light by means of novel mode-locking and modulation techniques. Progress is summarized for the following projects: (1) the transient modelocking of the Nd:YAG laser and application of short optical pulses; (2) studies of the sodium-xenon excimer laser; (3) development of techniques for vacuum ultraviolet holography; and (4) studies of multiple photon pumped xenon and argon excimer lasers.

Harris, S. E.↗
NASA NTRS1976

A study of the utilization of EREP data from the Wabash River basin

The author has identified the following significant results. The study of the multispectral data sets indicate that better land use delineation using machine processing techniques can be obtained with data from multispectral scanners than digitized S190A photographic sensor data. Results of the multiemulsion photographic data set were a little better than the multiband photographic data set. Comparison results of the interim and filtered S191 data indicate that the data were improved some for machine processing techniques. Results of the S191 X-5 detector array studied over a wintertime scene indicate that a good quality far infrared channel can be useful. The S191 spectroradiometer study results indicate that the data from the S191 was usable, and it was possible to estimate the path radiance.

Silva, L. F.↗
NASA NTRS1979

The geometry of stellar occultation measurements on long-duration atmospheric monitoring missions

Geometrical considerations are presented for analyzing use of the stellar occultation technique on long duration earth atmosphere monitoring missions. The simulated mission data are presented for three representative orbits. Bright near infrared stars are used as examples of how extensive global longitude-latitude coverage is obtained by performing occultation measurements on several stars during the course of a one year mission. A comparison is made with similar missions using the sun as a light source.

Brooks, D. R.↗
NASA NTRS1982

The Landsat-D responsiveness to user community needs

Initial examinations of the Landsat-4 Multispectral Scanner and Thematic Mapper (IM) imagery indicate that these systems and the ground-based data processing systems are performing well. A combination of the spatial resolution of the multispectral scanner with the four band (0.5-0.6, 0.6-0.7, 0.7-0.8, and 0.8-1.1 microns) multispectral capability provides a useful observation technique for identifying crop type, phenological state of development, and a real condition assessment. Landsat multispectral scanner imagery has become more important in the search for new deposits of oil and mineral resources, and geological applications indicate that image analysis complements geological mapping techniques. Advantages of the TM include more precise measurements of the increased reflectance of vegetation in the green and near infrared. In addition, TM has improvement vegetation species differentiation, due to measurements made in new spectral bands. Preliminary TM data analysis reveals that systems have performed to optimum expectations.

Salomonson, V. V.↗
NASA NTRS1984

The 1984 ASEE-NASA summer faculty fellowship program (aeronautics and research)

The 1984 NASA-ASEE Faculty Fellowship Program (SFFP) is reported. The report includes: (1) a list of participants; (2) abstracts of research projects; (3) seminar schedule; (4) evaluation questionnaire; and (5) agenda of visitation by faculty programs committee. Topics discussed include: effects of multiple scattering on laser beam propagation; information management; computer techniques; guidelines for writing user documentation; 30 graphics software; high energy electron and antiproton cosmic rays; high resolution Fourier transform infrared spectrum; average monthly annual zonal and global albedos; laser backscattering from ocean surface; image processing systems; geomorphological mapping; low redshift quasars; application of artificial intelligence to command management systems.

Dah-Nien, F.↗
NASA NTRS1985

Analysis of Nonvolatile Residue (NVR) from Spacecraft Systems

Organic contamination on critical spacecraft surfaces can cause electronic problems, serious attenuation of various optical signals, thermal control changes, and adhesion problems. Such contaminants can be detected early by the controlled use of witness mirrors, witness plates, wipe sampling, or direct solvent extraction. Each method requires careful control of variables of technique and materials to attain the ultimate sensitivities inherent to that procedure. Subsequent chemical analysis of the contaminant sample by infrared and mass spectrometry identifies the components, gives semiquantitative estimates of contaminant thickness, indicates possible sources of the nonvolatile residue (NVR), and provides guidance for effective cleanup procedures.

Colony, J. A.↗
NASA NTRS1992

The thermal structure, dust loading, and meridional transport in the Martian atmosphere during late southern summer

We have derived a comprehensive picture of the thermal structure and dust loading of the Martian atmosphere in a relatively clear period during late southern summer. Using a new technique for the simultaneous retrieval of atmospheric temperatures and airborne dust abundances, we examined a subset of the Mariner 9 infrared interferometer spectrometer (IRIS) thermal emission spectra spanning L sub s = 343 degrees to 348 degrees. Global maps of temperature and dust optical depth as functions of latitude (plus or minus 90 degrees), altitude (approx. 0-60 km), and Mars local time of day were constructed from the profiles from individual spectra. One of the principal conclusions from this work is that both dayside and nightside atmospheric temperatures at altitudes above about 40 km are warmer over the winter (north) polar regions than over the equator or the summer (south) polar regions. These anomalous temperatures are consistent with ground-based observations of polar warming at higher altitudes (50-85 km), and they indicate that the atmosphere is not in radiative equilibrium. Zonal-mean zonal winds are derived from the observed meridional gradients of the zonally averaged temperatures assuming geostrophy and zero surface zonal wind. The intense eastward jets (with velocities exceeding 120 m/s) correspond to regions of strong horizontal temperature gradients. Similar calculations have been reported previously, but they were not global in coverage. Both the zonal-mean meridional circulation and large-scale waves contribute to the north-south atmospheric transport.

Santee, M.↗
NASA NTRS1994

The effect of Low Earth Orbit exposure on some experimental fluorine and silicon-containing polymers

Several experimental fluorine and silicon-containing polymers in film form were exposed to low Earth orbit (LEO) on a Space Shuttle flight experiment (STS-46, Evaluation of Oxygen Interaction with Materials, EOIM-3). The environmental parameters of primary concern were atomic oxygen (AO) and ultraviolet (UV) radiation. The materials were exposed to 2.3 plus or minus 0.1 x 10(exp 20) oxygen atoms/sq cm and 30.6 UV sun hours during the flight. In some cases, the samples were exposed at ambient, 120 C and 200 C. The effects of exposure on these materials were assessed utilizing a variety of characterization techniques including optical, scanning electron (SEM) and scanning tunneling (STM) microscopy, UV-visible (UV-VIS) transmission, diffuse reflectance infrared (DR-FTIR), x-ray photoelectron (XPS) spectroscopy, and in a few cases, gel permeation chromatography (GPC). In addition, weight losses of the films, presumably due to AO erosion, were measured. The fluorine-containing polymers exhibited significant AO erosion and exposed films were diffuse or 'frosted' in appearance and consequently displayed dramatic reductions in optical transmission. The silicon-containing films exhibited minimum AO erosion and the optical transmission of exposed films was essentially unchanged. The silicon near the exposed surface in the films was converted to silicate/silicon oxide upon AO exposure which subsequently provided protection for the underlying material. The silicon-containing epoxies are potentially useful as AO resistant coatings and matrix resins as they are readily processed into carbon fiber reinforced composites and cured via electron radiation.

Connell, John W.↗
NASA NTRS1999

Diagnostic for Plasma Enhanced Chemical Vapor Deposition and Etch Systems

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies ion the processing of semiconductor materials arising from understanding etch chemistries are being developed through a research collaboration between Stanford University and NASA-Ames Research Center, Although a great deal of laboratory-scale research has been performed on many of materials processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. In addition, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. The research described involves the study of plasmas used in semiconductor processes. An inductively coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics and chemistries. This ICP source generates plasmas with higher electron densities (approximately 10(exp 12)/cu cm) and lower operating pressures (approximately 7 mTorr) than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The motivation for this study is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas-phase and surface reaction rates. species concentration, temperature, ion energy distribution, and electron number density. A wide variety of diagnostic techniques are under development through this consortium grant to measure these parameters. including molecular beam mass spectrometry (MBMS). Fourier transform infrared (FTIR) spectroscopy, broadband ultraviolet (UV) absorption spectroscopy, a compensated Langmuir probe. Additional diagnostics. Such as microwave interferometry and microwave absorption for measurements of plasma density and radical concentrations are also planned.

Cappelli, Mark A.↗