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At least 1,315 records · Page 73

Efforts to Improve Efficiency of Extraction Well Operation at the Fernald Preserve, Harrison, Ohio - 16177

The Fernald Preserve, a former uranium processing facility that produced high-purity uranium metal products during the Cold War, is located in southwest Ohio. The facility became a US Department of Energy Office of Legacy Management (LM) site in November 2006, following completion of the Comprehensive Environmental Response, Compensation, and Liability Act environmental remediation and site restoration (with the exception of groundwater). When the site was turned over to LM, approximately 76.5 ha of the Great Miami Aquifer remained contaminated with uranium above the final remediation level of 30 μg/L. Here, uranium contamination is being removed from groundwater in the Great Miami Aquifer through a pump-and-treat operation, which is predicted to continue until 2033. Twenty extraction wells pump about 30 million liters per day. Operation of the system is impacted by iron in the groundwater that promotes iron fouling of the well pumps, motors, and screens. The design of the well field evolved over 21 years and reflected a conservative system that could respond to a wide range of pumping conditions. For instance, some of the extraction wells were sized with pumps and motors that would allow the well to pump up to 1890 L/min (500 gpm) if warranted. The added flexibility, though, came at the cost of operational efficiency. We describe the efforts that have been taken by LM since the Fernald site was transferred to LM to mitigate the operational impacts from the iron fouling aquifer conditions and improve the efficiency of the well-field operation. Variable-frequency drives were installed at six wells to replace flow control valves. Several wells with oversized pumps and motors were changed from 24-hour per day operation to 8-hour per day operation to allow the pumps to operate closer to their design flow rates. Pumps and motors were 'right-sized' at many wells to improve pumping efficiency. The process used to rehabilitate (or clean) well screens was improved, and a process was developed to clean pumps without having to pull them from the well. To reduce pressure drops, improvements were also made to the configuration of the discharge piping. A new control system was installed for each well to allow local control and local tracking of energy used. The amount of energy used daily compared to number of gallons pumped provides a method to assess pump performance and determine when action is necessary to restore well pump efficiency. Additionally, the metrics being employed to help quantify well-field efficiency improvements are described, and the benefits achieved by proactively managing the pump-and-treat operation are presented. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Use of Adaptive Injection Strategies to Increase the Full Load Limit of RCCI Operation

Dual-fuel combustion using port-injection of low reactivity fuel combined with direct injection (DI) of a higher reactivity fuel, otherwise known as reactivity controlled compression ignition (RCCI), has been shown as a method to achieve low-temperature combustion with moderate peak pressure rise rates, low engine-out soot and NO x emissions, and high indicated thermal efficiency. A key requirement for extending to high-load operation is moderating the reactivity of the premixed charge prior to the diesel injection. One way to accomplish this is to use a very low reactivity fuel such as natural gas. In this work, experimental testing was conducted on a 13 l multicylinder heavy-duty diesel engine modified to operate using RCCI combustion with port injection of natural gas and DI of diesel fuel. Engine testing was conducted at an engine speed of 1200 rpm over a wide variety of loads and injection conditions. The impact on dual-fuel engine performance and emissions with respect to varying the fuel injection parameters is quantified within this study. The injection strategies used in the work were found to affect the combustion process in similar ways to both conventional diesel combustion (CDC) and RCCI combustion for phasing control and emissions performance. As the load is increased, the port fuel injection (PFI) quantity was reduced to keep peak cylinder pressure (PCP) and maximum pressure rise rate (MPRR) under the imposed limits. Overall, the peak load using the new injection strategy was shown to reach 22 bar brake mean effective pressure (BMEP) with a peak brake thermal efficiency (BTE) of 47.6%.

Hanson, Reed↗

Efficient modeling of optically-complex, non-coplanar exterior shading: Validation of matrix algebraic methods

It has long been established that shading windows with overhangs, fins, and other types of non-coplanar systems (NCS) is one of the most effective ways of controlling solar heat gains in buildings because they intercept solar radiation prior to entry into the building. Designers however often specify non-opaque materials (e.g., louvers, fritted glass, expanded metal mesh) for these systems in order to admit daylight, reduce lighting energy use, and improve indoor environmental quality. Most simulation tools rely on geometric calculations and radiosity methods to model the solar heat gain impacts of NCS and cannot model optically-complex materials or geometries. For daylighting analysis, optically-complex NCS can be modeled using matrix algebraic methods, although time-efficient parametric analysis has not yet been implemented. Determining the best design and/or material for static or operable NCS that minimize cooling, heating, and lighting energy use and peak demand requires an iterative process. This study describes and validates a matrix algebraic method that enables parametric energy analysis of NCS. Such capabilities would be useful not only for design but also for development of prescriptive energy-efficiency standards, rating and labeling systems for commercial products, development of design guidelines, and development of more optimal NCS technologies. A facade or “F” matrix, which maps the transfer of flux from the NCS to the surface of the window, is introduced and its use is explained. A field study was conducted in a full-scale outdoor testbed to measure the daylight performance of an operable drop-arm awning. Simulated data were compared to measured data in order to validate the models. Results demonstrated model accuracy: simulated workplane illuminance was within 11–13%, surface luminance was within 16–18%, and the daylight glare probability was within 6–9% of measured results. Methods used to achieve accurate results are discussed. Results of the validation of daylighting performance are applicable to solar heat gain performance. Since exterior shading can also significantly reduce peak demand, these models enable stakeholders to more accurately assess HVAC and lighting impacts in support of grid management and resiliency goals.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

SU-E-T-552: Monte Carlo Calculation of Correction Factors for a Free-Air Ionization Chamber in Support of a National Air-Kerma Standard for Electronic Brachytherapy

Purpose: To use Monte Carlo radiation transport methods to calculate correction factors for a free-air ionization chamber in support of a national air-kerma standard for low-energy, miniature x-ray sources used for electronic brachytherapy (eBx). Methods: The NIST is establishing a calibration service for well-type ionization chambers used to characterize the strength of eBx sources prior to clinical use. The calibration approach involves establishing the well-chamber’s response to an eBx source whose air-kerma rate at a 50 cm distance is determined through a primary measurement performed using the Lamperti free-air ionization chamber. However, the free-air chamber measurements of charge or current can only be related to the reference air-kerma standard after applying several corrections, some of which are best determined via Monte Carlo simulation. To this end, a detailed geometric model of the Lamperti chamber was developed in the EGSnrc code based on the engineering drawings of the instrument. The egs-fac user code in EGSnrc was then used to calculate energy-dependent correction factors which account for missing or undesired ionization arising from effects such as: (1) attenuation and scatter of the x-rays in air; (2) primary electrons escaping the charge collection region; (3) lack of charged particle equilibrium; (4) atomic fluorescence and bremsstrahlung radiation. Results: Energy-dependent correction factors were calculated assuming a monoenergetic point source with the photon energy ranging from 2 keV to 60 keV in 2 keV increments. Sufficient photon histories were simulated so that the Monte Carlo statistical uncertainty of the correction factors was less than 0.01%. The correction factors for a specific eBx source will be determined by integrating these tabulated results over its measured x-ray spectrum. Conclusion: The correction factors calculated in this work are important for establishing a national standard for eBx which will help ensure that dose is accurately and consistently delivered to patients.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Method for Generating Expert Derived Confidence Scores

We executed a pilot demonstration of a methodology for developing a new confidence metric to help operators calibrate their trust in ML event classifiers. This confidence metric was derived from domain expert judgment and was accompanied with a qualitative description describing the reason for each confidence rating. After learning the boundaries of an ML’s performance by studying a subset of events an SME rated his confidence in the ML’s ability to classify similar events and provided an explanation for his ratings. To demonstrate this methodology, we developed our expert driven confidence scores for the ML event classifier within the ESAMS. Next, we assessed the accuracy of the human expert confidence scores relative to the ML’s uncertainty quantification scores. This report includes a description of our methodology, summary of our findings and future directions.

97 MATHEMATICS AND COMPUTING↗

A generic scenario analysis of end-of-life plastic management: Chemical additives

Plastic growing demand and the increment in global plastics production have raised the number of spent plastics, out of which over 90% are either landfilled or incinerated. Both methods for handling spent plastics are susceptible to releasing toxic substances, damaging air, water, soil, organisms, and public health. Improvements to the existing infrastructure for plastics management are needed to limit chemical additive release and exposure resulting from the end-of-life (EoL) stage. This article analyzes the current plastic waste management infrastructure and identifies chemical additive releases through a material flow analysis. Additionally, we performed a facility-level generic scenario analysis of the current U.S. EoL stage of plastic additives to track and estimate their potential migration, releases, and occupational exposure. Potential scenarios were analyzed through sensitivity analysis to examine the merit of increasing recycling rates, using chemical recycling, and implementing additive extraction post-recycling. Our analyses identified that the current state of plastic EoL management possesses high mass flow intensity toward incineration and landfilling. Although maximizing the plastic recycling rate is a reasonably straightforward goal for enhancing material circularity, the conventional mechanical recycling method requires improvement because major chemical additive release and contamination routes act as obstacles to achieving high-quality plastics for future reuse and should be mitigated through chemical recycling and additive extraction. In conclusion, the potential hazards and risks identified in this research create an opportunity to design a safer closed-loop plastic recycling infrastructure to handle additives strategically and support sustainable materials management efforts to transform the US plastic economy from linear to circular.

54 ENVIRONMENTAL SCIENCES↗

Local Recurrence in Women With Stage I Breast Cancer: Declining Rates Over Time in a Large, Population-Based Cohort

Purpose: To evaluate whether local recurrence (LR) risk has changed over time among women with stage I breast cancer treated with breast-conserving therapy. Methods and Materials: Subjects were 5974 women aged ≥50 years diagnosis with pT1N0 breast cancer from 1989 to 2006, treated with breast-conserving surgery and radiation therapy. Clinicopathologic characteristics, treatment, and LR outcomes were compared among 4 cohorts stratified by year of diagnosis: 1989 to 1993 (n=1077), 1994 to 1998 (n=1633), 1999 to 2002 (n=1622), and 2003 to 2006 (n=1642). Multivariable analysis was performed, with year of diagnosis as a continuous variable. Results: Median follow-up time was 8.6 years. Among patients diagnosed in 1989 to 1993, 1994 to 1998, 1999 to 2002, and 2003 to 2006, the proportions of grade 1 tumors increased (16% vs 29% vs 40% vs 39%, respectively, P<.001). Surgical margin clearance rates increased from 82% to 93% to 95% and 88%, respectively (P<.001). Over time, the proportions of unknown estrogen receptor (ER) status decreased (29% vs 10% vs 1.2% vs 0.5%, respectively, P<.001), whereas ER-positive tumors increased (56% vs 77% vs 86% vs 86%, respectively, P<.001). Hormone therapy use increased (23% vs 23% vs 62% vs 73%, respectively, P<.001), and chemotherapy use increased (2% vs 5% vs 10% vs 13%, respectively, P<.001). The 5-year cumulative incidence rates of LR over the 4 time periods were 2.8% vs 1.7% vs 0.9% vs 0.8%, respectively (Gray's test, P<.001). On competing risk multivariable analysis, year of diagnosis was significantly associated with decreased LR (hazard ratio, 0.92 per year, P=.0003). Relative to grade 1 histology, grades 2, 3, and unknown were associated with increased LR. Hormone therapy use was associated with reduced LR. Conclusion: Significant changes in the multimodality management of stage I breast cancer have occurred over the past 2 decades. More favorable-risk tumors were diagnosed, and margin clearance and systemic therapy use increased. These changes contributed to the observed declining LR rates among patients treated with breast-conserving therapy.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Preoperative Chemoradiation Therapy With Capecitabine/Oxaliplatin and Cetuximab in Rectal Cancer: Long-Term Results of a Prospective Phase 1/2 Study

Purpose: We have previously shown that the addition of cetuximab to chemoradiation therapy failed to improve complete response rates (pCR) in rectal cancer. Here we report the long-term results of the cetuximab added to preoperative radiation therapy with capecitabine and oxaliplatin (CET-CAPOX-RT) phase 1/2 study that evaluated preoperative chemoradiation with cetuximab, capecitabine, and oxaliplatin in patients with rectal cancer. Methods and Materials: The median follow-up was 63 months (range, 5-73 months). Sixty patients were enrolled; 3 patients were excluded due to protocol violation, and 4 died before surgery. Total mesorectal excision was performed in 53 patients, in 85% (n=45) with curative intention (M0-status). Secondary end points including overall survival (OS) disease-free survival (DFS) and cancer-specific survival (CSS) were calculated. The prognostic value of KRAS mutation status was also assessed. Results: Histopathological examination confirmed ypUICC stages 0 (n=4; pCR), I (n=17), II (n=10), III (n=14), and IV (n=8). For patients who underwent surgery (n=53), OS at 1, 3, and 5 years was 88.7%, 83%, and 75.5%, respectively, whereas CSS rates were 94.1%, 88.1%, and 78.1%, respectively. In the 45 patients who were treated with curative intent (M0), the OS rates at 1, 3, and 5 years were 91.1%, 88.9%, and 86.7%, respectively; whereas CSS rates were 97.6%, 95.2%, and 90.3%, respectively; and DFS rates were 90.7%, 88.3%, and 88.3%, respectively. We did not find any locoregional failure in patients with M0-status (n=45). Chronic toxicity was rare. KRAS mutations, as detected in 33.3%, showed no correlation with the clinicopathological parameters nor significance for either OS (P=.112), CSS (P=.264), or DFS (P=.565). Conclusions: Taken together, chemoradiation therapy combined with cetuximab is safe, feasible, and offers excellent survival rates. KRAS mutation status was not a predictive factor. Importantly, lack of improvement in pCR rate did not translate to poor survival in our clinical trial.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Endovascular Treatment of Diabetic Foot in a Selected Population of Patients with Below-the-Knee Disease: Is the Angiosome Model Effective?

Purpose. To evaluate the efficacy of percutaneous transluminal angioplasty (PTA) in a selected population of diabetic patients with below-the-knee (BTK) disease and to analyze the reliability of the angiosome model. Methods. We made a retrospective analysis of the results of PTA performed in 201 diabetic patients with BTK-only disease treated at our institute from January 2005 to December 2011. We evaluated the postoperative technical success, and at 1, 6, and 12 months' follow-up, we assessed the rates and values of partial and complete ulcer healing, restenosis, major and minor amputation, limb salvage, and percutaneous oximetry (TcPO{sub 2}) (Student's t test). We used the angiosome model to compare different clinicolaboratory outcomes in patients treated by direct revascularization (DR) from patients treated with indirect revascularization (IR) technique by Student's t test and the {chi}{sup 2} test. Results. At a mean {+-} standard deviation follow-up of 17.5 {+-} 12 months, we observed a mortality rate of 3.5 %, a major amputation rate of 9.4 %, and a limb salvage rate of 87 % with a statistically significant increase of TcPO{sub 2} values at follow-up compared to baseline (p < 0.05). In 34 patients, treatment was performed with the IR technique and in 167 by DR; in both groups, there was a statistically significant increase of TcPO{sub 2} values at follow-up compared to baseline (p < 0.05), without statistically significant differences in therapeutic efficacy. Conclusion. PTA of the BTK-only disease is a safe and effective option. The DR technique is the first treatment option; we believe, however, that IR is similarly effective, with good results over time.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Prognostic Significance of the Number of Positive Lymph Nodes in Women With T1-2N1 Breast Cancer Treated With Mastectomy: Should Patients With 1, 2, and 3 Positive Lymph Nodes Be Grouped Together?

Purpose: To determine whether patients with 1, 2, or 3 positive lymph nodes (LNs) have similar survival outcomes. Methods and Materials: We analyzed the Surveillance, Epidemiology, and End Results registry of breast cancer patients diagnosed between 1990 and 2003. We identified 10,415 women with T1-2N1M0 breast cancer who were treated with mastectomy with no adjuvant radiation, with at least 10 LNs examined and 6 months of follow-up. The Kaplan-Meier method and log–rank test were used for survival analysis. Multivariate analysis was performed using the Cox proportional hazard model. Results: Median follow-up was 92 months. Ten-year overall survival (OS) and cause-specific survival (CSS) were progressively worse with increasing number of positive LNs. Survival rates were 70%, 64%, and 60% (OS), and 82%, 76%, and 72% (CSS) for 1, 2, and 3 positive LNs, respectively. Pairwise log–rank test P values were <.001 (1 vs 2 positive LNs), <.001 (1 vs 3 positive LNs), and .002 (2 vs 3 positive LNs). Multivariate analysis showed that number of positive LNs was a significant predictor of OS and CSS. Hazard ratios increased with the number of positive LNs. In addition, age, primary tumor size, grade, estrogen receptor and progesterone receptor status, race, and year of diagnosis were significant prognostic factors. Conclusions: Our study suggests that patients with 1, 2, and 3 positive LNs have distinct survival outcomes, with increasing number of positive LNs associated with worse OS and CSS. The conventional grouping of 1-3 positive LNs needs to be reconsidered.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

A Phase 1/2 and Biomarker Study of Preoperative Short Course Chemoradiation With Proton Beam Therapy and Capecitabine Followed By Early Surgery for Resectable Pancreatic Ductal Adenocarcinoma

Purpose: To evaluate the safety, efficacy and biomarkers of short-course proton beam radiation and capecitabine, followed by pancreaticoduodenectomy in a phase 1/2 study in pancreatic ductal adenocarcinoma (PDAC) patients. Methods and Materials: Patients with radiographically resectable, biopsy-proven PDAC were treated with neoadjuvant short-course (2-week) proton-based radiation with capecitabine, followed by surgery and adjuvant gemcitabine. The primary objective was to demonstrate a rate of toxicity grade ≥3 of <20%. Exploratory biomarker studies were performed using surgical specimen tissues and peripheral blood. Results: The phase 2 dose was established at 5 daily doses of 5 GyE. Fifty patients were enrolled, of whom 35 patients were treated in the phase 2 portion. There were no grade 4 or 5 toxicities, and only 2 of 35 patients (4.1%) experienced a grade 3 toxicity event (chest wall pain grade 1, colitis grade 1). Of 48 patients eligible for analysis, 37 underwent pancreaticoduodenectomy. Thirty of 37 (81%) had positive nodes. Locoregional failure occurred in 6 of 37 resected patients (16.2%), and distant recurrence occurred in 35 of 48 patients (72.9%). With median follow-up of 38 months, the median progression-free survival for the entire group was 10 months, and overall survival was 17 months. Biomarker studies showed significant associations between worse survival outcomes and the KRAS point mutation change from glycine to aspartic acid at position 12, stromal CXCR7 expression, and circulating biomarkers CEA, CA19-9, and HGF (all, P<.05). Conclusions: This study met the primary endpoint by showing a rate of 4.1% grade 3 toxicity for neoadjuvant short-course proton-based chemoradiation. Treatment was associated with favorable local control. In exploratory analyses, KRAS{sup G12D} status and high CXCR7 expression and circulating CEA, CA19-9, and HGF levels were associated with poor survival.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Ubiquitous short-range order in multi-principal element alloys

Recent research in multi-principal element alloys (MPEAs) has increasingly focused on the role of short-range order (SRO) on material performance. However, the mechanisms of SRO formation and its precise control remain elusive, limiting the progress of SRO engineering. Here, leveraging advanced additive manufacturing techniques that produce samples with a wide range of cooling rates (up to 10 7 K s –1 ) and an enhanced semi-quantitative electron microscopy method, we characterize SRO in three CoCrNi-based face-centered-cubic (FCC) MPEAs. Surprisingly, irrespective of the processing and thermal treatment history, all samples exhibit similar levels of SRO. Atomistic simulations reveal that during solidification, prevalent local chemical order arises in the liquid-solid interface (solidification front) even under the extreme cooling rate of 10 11 K s –1 . This phenomenon stems from the swift atomic diffusion in the supercooled liquid, which matches or even surpasses the rate of solidification. Therefore, SRO is an inherent characteristic of most FCC MPEAs, insensitive to variations in cooling rates and even annealing treatments typically available in experiments.

36 MATERIALS SCIENCE↗

Kinetically-constrained ring-polymer molecular dynamics for non-adiabatic chemistries involving solvent and donor–acceptor dynamical effects

We investigate the performance of the recently developed kinetically-constrained ring polymer molecular dynamics (KC-RPMD) method for the description of model condensed-phase electron transfer (ET) reactions in which solvent and donor–acceptor dynamics play an important role. Comparison of KC-RPMD with results from Golden-Rule rate theories and numerically exact quantum dynamics calculations demonstrates that KC-RPMD accurately captures the combination of electronic- and nuclear-dynamical effects throughout the Marcus (intermediate solvent friction) and Zusman (large solvent friction) regimes of ET. It is also demonstrated that KC-RPMD accurately describes systems in which the magnitude of the diabatic coupling depends on the position of a dynamical donor–acceptor mode. In addition to these successes, however, we present an unsurprising failure of KC-RPMD to capture the enhancement of the ET rate in the low solvent friction regime associated with nuclear coherence effects. In this analysis, we re-visit several aspects of the original KC-RPMD formulation, including the form of the kinetic constraint and the choice of the mass of the auxiliary electronic variable. In particular, we introduce a Langevin bath for the auxiliary electronic variable to correct for its unphysically low coupling with the nuclear degrees of freedom. This work demonstrates that the KC-RPMD method is well suited for the direct simulation of non-adiabatic donor–acceptor chemistries associated with many complex systems, including those for which solvent dynamics plays an important role in the reaction mechanism.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Hierarchical electrode design of highly efficient and stable unitized regenerative fuel cells (URFCs) for long-term energy storage

The unitized regenerative fuel cell (URFC) is a promising electrochemical device for intermittent renewable energy storage in chemical bonds. However, widespread application has been hindered due to low round-trip efficiencies (RTEs) and disappointing durability, in particular at high rates. In this study, we break through that barrier by demonstrating highly efficient, flexible, and stable URFCs via hierarchical design of the multiscale catalyst-layer structures. A more porous and less tortuous Pt and Ir catalyst layer is realized using a doctor blade fabrication method that significantly improves URFC performance. We demonstrate RTEs of 56% and 53% under constant-electrode and constant-gas mode, respectively, while operating at 1000 mA cm –2 , and significantly, a RTE of 45% at 2000 mA cm –2 , achievements that were previously viewed as unfeasible under the onerous demands of URFC operation. At the same time we demonstrate URFCs under both constant-electrode and constant-gas mode operated continuously for over 500 h with negligible degradation. These results demonstrate the viability of applying URFCs for long-term energy storage at previously unattainable efficiencies and cast new light on electrode design and optimization of URFCs.

25 ENERGY STORAGE↗

A Practical Comparison of Data-Driven Prognostics Methods for Energy Systems

This study explores data-driven prognostics for nuclear power plant (NPP) condensers, focusing on tube fouling. We utilized the Asherah nuclear power plant simulator (ANS) to compare four methods: Random Forest (RF), Support Vector Regressor (SVR), Fully Connected Neural Network (FCNN), and Long Short-Term Memory Neural Network (LSTM). By simulating various fouling scenarios in the ANS, we generated data with different degradation rates under transient operations. The models were trained and tested on these data, with performance evaluated visually and numerically including uncertainty assessment. The LSTM model excelled, exhibiting minimal prediction noise and the most accurate remaining useful life estimates across all degradation levels. Its ability to capture long-term dependencies and produce cleaner outputs makes it a strong candidate, although accurate training data across the entire component lifespan are crucial. The RF model emerged as a robust alternative, providing reliable predictions with high confidence. The FCNN and SVR models, while less effective overall, showed potential under specific conditions. FCNN offers a less complex alternative to LSTM and might benefit from larger datasets. SVR excels in precision when the quality of the training data is high. Furthermore, this study highlights the operational benefits of advanced prognostics in the energy sector and emphasizes the need for further research in NPP condenser health management through real-life experiments.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗

Challenges in atomic layer etching of gallium nitride using surface oxidation and ligand-exchange

Two atomic layer etching (ALE) methods were studied for crystalline GaN, based on oxidation, fluorination, and ligand exchange. Etching was performed on unintentionally doped GaN grown by hydride vapor phase epitaxy. For the first step, the GaN surfaces were oxidized using either water vapor or remote O 2 -plasma exposure to produce a thin oxide layer. Removal of the surface oxide was addressed using alternating exposures of hydrogen fluoride (HF) and trimethylgallium (TMG) via fluorination and ligand exchange, respectively. Several HF and TMG super cycles were implemented to remove the surface oxide. Each ALE process was monitored in situ using multiwavelength ellipsometry. X-ray photoelectron spectroscopy was employed for the characterization of surface composition and impurity states. Additionally, the thermal and plasma-enhanced ALE methods were performed on patterned wafers and transmission electron microscopy (TEM) was used to measure the surface change. The x-ray photoelectron spectroscopy measurements indicated that F and O impurities remained on etched surfaces for both ALE processes. Ellipsometry indicated a slight reduction in thickness. TEM indicated a removal rate that was less than predicted. In conclusion, we suggest that the etch rates were reduced due to the ordered structure of the oxide formed on crystalline GaN surfaces.

36 MATERIALS SCIENCE↗