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SALSA - A Synthesis Array for Lunar Submillimeter Astronomy

A conceptual design is described for a lunar submillimeter wavelength interferometer called SALSA, a Synthesis Array for Lunar Submillimeter Astronomy. Its design is greatly simplified over conventional submillimeter wavelength arrays because it takes advantage of a beam waveguide to relay signals to a centrally-located receiver system. The array is optimized to synthesize images at wavelengths between 60 and 300 microns, and it has an angular resolution of 10 milliarcsecs at 60 microns. Observations in this region provide unique insights into fundamental issues in astrophysics such as star formation, but are impossible from the earth's surface because of atmospheric absorption. The baseline design for SALSA consists of twelve, 3.5-meter diameter antennas arranged in a Y-shaped configuration consisting of three 0.5-km long arms, each with four antennas distributed according to a power-law function of distance. Such a beam-waveguide approach has significant advantages, since all the high-power-consumption items (active cryogenics, correlator) are at a central location and could share a single power source. In addition, the antennas can be quite simple and maintenance is greatly reduced. The primary technology challenges for developing such an array are the coherent detectors (mixers and local oscillator sources), and ensuring the dimensional stability of the optical elements under the extreme lunar thermal environment (85-385 K).

Mahoney, M. J.↗

Ka-band MMIC array system for ACTS aeronautical terminal experiment (Aero-X)

During the summer of 1994, the Advanced Communication Technology Satellite (ACTS) Aeronautical Terminal Experiment (Aero-X) was successfully completed by the NASA Lewis Research Center (LeRC) and the Jet Propulsion Laboratory (JPL). 4.8 and 9.6 Kbps duplex voice links were established between the LeRC Learjet and the ACTS Link Evaluation Terminal (LET) in Cleveland, Ohio, via the ACTS. The antenna system used in this demonstration was developed by LeRC and featured LeRC and US Air Force experimental arrays using GaAs MMIC devices at each radiating element for electronic beam steering and distributed power amplification. The antenna system consisted of three arrays mounted inside the LeRC Learjet, pointing out through the windows. An open loop tracking controller developed by LeRC used information from the aircraft position and attitude sensors to automatically steer the arrays toward ACTS during flight JPL ACTS Mobile Terminal (AMT) system hardware was used as transceivers both on the aircraft and at the LET. The single 32 element MMIC transmit array developed by NASA/LeRC and Texas Instruments has an EIRP of 23.4 dBW at boresight. The two 20 GHz MMIC receive arrays were developed in a cooperative effort with the USAF Rome Laboratory/Electronic System Center, taking advantage of existing USAF array development contracts with Boeing and Martin Marietta. The Boeing array has 23 elements and a G/T of 16/6 db/degK at boresight. The Martin Marietta array has 16 elements and a G/T of 16.1 db/degK at boresight. The three proof-of-concept arrays, the array control system and their integration and operation in the Learjet for Aero-X are described.

Raquet, Charles A.↗

NASA and Superalloys: A Customer, a Participant, and a Referee

NASA has had a long history of research and development in the field of superalloys. These efforts have continued today, where the latest advancements in turbine disk and blade technologies are being developed Although NASA does support military flight systems, it s predominant role is in supporting civilian air transportation systems, and thus has goals for improving fuel efficiency, emissions, noise, and safety of today s aircraft. NASA has traditionally served several distinct but complimentary roles as participants in multi-disciplinary research teams, as customers who fund research and development efforts at industry and universities, and as referees who can address broad issues that affect the entire aeronautics community. Because of our longer range viewpoint, we can take on higher risk, higher reward research topics. NASA can also serve as an intermediary between the basic research performed primarily at universities and the development efforts emphasized by industry. By interacting with individual companies, NASA can identify areas of general interest and problems common to a large portion of the aeronautics community, and devise programs aimed at solving these problems. In space missions, NASA is a direct customer responsible for developing vehicles. In the case of the Space Shuttle, NASA has worked with various contractors to design and build numerous components out of superalloys. Another fascinating area for the use of superalloys is in power systems for long life applications in space. Potential missions include providing electric power for deep space missions, surface rovers, including lunar and Mars, and stationary power generators on the lunar surface.

Nathal, Michael V.↗

NASA and Superalloys: A Customer, a Participant, and a Referee

NASA has had a long history of research and development in the field of superalloys. These efforts have continued today, where the latest advancements in turbine disk and blade technologies are being developed. Although NASA does support military flight systems, its predominant role is in supporting civilian air transportation systems, and thus has goals for improving fuel efficiency, emissions, noise, and safety of today s aircraft. NASA has traditionally served several distinct but complimentary roles as participants in multi-disciplinary research teams, as customers who fund research and development efforts at industry and universities, and as referees who can address broad issues that affect the entire aeronautics community. Because of our longer range viewpoint, we can take on higher risk, higher reward research topics. NASA can also serve as an intermediary between the basic research performed primarily at universities and the development efforts emphasized by industry. By interacting with individual companies, NASA can identify areas of general interest and problems common to a large portion of the aeronautics community, and devise programs aimed at solving these problems. In space missions, NASA is a direct customer responsible for developing vehicles. In the case of the Space Shuttle, NASA has worked with various contractors to design and build numerous components out of superalloys. Another fascinating area for the use of superalloys is in power systems for long life applications in space. Potential missions include providing electric power for deep space missions, surface rovers, including lunar and Mars, and stationary power generators on the lunar surface.

Nathal, Michael V.↗

What if Things Get Worse? Really Grand Challenges for Modeling and Simulation in a Risky and Complex World or Modeling and Simulation for the "Greater Good"?

Today Modeling and Simulation-- ---as an important practice or industry or area of expertise ----- is at a complex crossroad - a sort of cyber-highway--where these complexities meet-technical, economic, environmental, geopolitical and cultural. They may converge or collide. Let's not kid ourselves. It is all too much for anyone person or organization Malcolm Gladwell said it. "We have constructed a world in which the potential for high tech catastrophe is embedded in the fabric of everyday life." We are surrounded by problems that scream at us from our television, Internet and social networks along with billboards and protest signs. We face not just high tech catastrophes but, also, landslides, earthquakes, tornados, floods and hurricanes and large-scale criminality. Evil, war, famine and pestilence have not gone away. It is all too much to think about. My friend, George Peabody, who taught me everything I know about power said that addressing such issues requires that we constantly build our network, information resources and the credibility and visibility of our work. That is how we will build the power of simulation so it can change the world --even maybe, save it. We need all the help we can get and give one another because our human early warning systems appear to be out of kilter. We seem to have trouble imagining how small failings can continue to lead to catastrophic disaster. Think about O-rings and blowout preventers. One is reminded of the old nursery rhyme, "For want of a nail, a shoe was lost! for want of a shoe the horse was lost! for want of a rider the battle was lost and so the kingdom fell." Although the investigation will take more time for real answers, it is worrisome that a rig worker reported to the BBC that-- weeks before the explosion of Deep Ocean Horizon. -he identified a leak in the oil rig's safety equipment -the Control Pod of the blowout preventer which has giant shears designed to cut and seal off the well's main pipe. With both electronics and hydraulics, these are effectively the brains of the blowout preventer. No one fixed it, he alleges, they just shut it down and relied on the other control pod -an act deemed unacceptable by petroleum expert, Tad Patzek, at the University of Texas. The US Congress has identified numerous other problems with the blowout preventer, including design problems and unexpected modifications.

Fifrey, Priscilla↗

Oxygen-Partial-Pressure Sensor for Aircraft Oxygen Mask

A device that generates an alarm when the partial pressure of oxygen decreases to less than a preset level has been developed to help prevent hypoxia in a pilot or other crewmember of a military or other high-performance aircraft. Loss of oxygen partial pressure can be caused by poor fit of the mask or failure of a hose or other component of an oxygen distribution system. The deleterious physical and mental effects of hypoxia cause the loss of a military aircraft and crew every few years. The device is installed in the crewmember s oxygen mask and is powered via communication wiring already present in all such oxygen masks. The device (see figure) includes an electrochemical sensor, the output potential of which is proportional to the partial pressure of oxygen. The output of the sensor is amplified and fed to the input of a comparator circuit. A reference potential that corresponds to the amplified sensor output at the alarm oxygen-partial-pressure level is fed to the second input of the comparator. When the sensed partial pressure of oxygen falls below the minimum acceptable level, the output of the comparator goes from the low state (a few millivolts) to the high state (near the supply potential, which is typically 6.8 V for microphone power). The switching of the comparator output to the high state triggers a tactile alarm in the form of a vibration in the mask, generated by a small 1.3-Vdc pager motor spinning an eccentric mass at a rate between 8,000 and 10,000 rpm. The sensation of the mask vibrating against the crewmember s nose is very effective at alerting the crewmember, who may already be groggy from hypoxia and is immersed in an environment that is saturated with visual cues and sounds. Indeed, the sensation is one of rudeness, but such rudeness could be what is needed to stimulate the crewmember to take corrective action in a life-threatening situation.

Kelly, Mark↗

Evolution of the Preliminary Fault Management Architecture and Design for the Psyche Mission

The Psyche Mission presents the first opportunity toexplore the largest metal asteroid in the solar system, (16)Psyche, which is believed to be the exposed core of a largerplanetesimal that was stripped of its rocky mantle throughmultiple collisions during early solar system formation. Themission was selected in January 2017 for a 2022 launch as partof NASA’s Discovery Program and is uniquely enabled by theintegration of a Solar Electric Propulsion (SEP) Chassisdelivered by Maxar Space Solutions with JPL’s core deepspace avionics, flight software, and fault managementarchitectures. One of the key design tasks is the development ofa fault management system capable of being responsive to theunique elements of the combined JPL and Maxar spacecraftarchitecture. This new design leverages the strengths of eachorganization, with Maxar delivering its well-proven highvoltage power bus and low-thrust electric propulsionsubsystem from its GEO communications satellite product line,and JPL delivering its deep space mission expertise and thehardware and software most critical to deep space missiondesign. The development of a robust low-thrust mission andthe integration of design philosophies and hardware from twoorganizations is not without its challenges though.A key challenge in the development of the Psyche faultmanagement architecture and design is in the integration ofdesign philosophies and hardware from JPL and Maxar. Atthe architecture level, Maxar GEO communications satellitesare developed under the premise of highly responsive groundin the loop for the resolution of anomalies, and theimplementation takes a fail-operational approach to minimizedown time for its customers. In contrast, a deep space missionmust be able to maintain safety with long periods of groundcommunication outage. Additionally, with no time-criticalevents after launch, the Psyche spacecraft will generally failsafe in the presence of anomalous conditions; specialconsideration is being given to this approach, however, tominimize the loss of electric propulsion thrust time, which iscritical to low-thrust missions. At the hardware level, thedetailed definition of interfaces between JPL and Maxarhardware presents a unique challenge in the development andflowdown of fault management requirements, the developmentand implementation of fault monitors and responses, and thedevelopment and verification of fault containment boundaries.This paper describes the evolution of the Psyche faultmanagement architecture and design from the concept studyinto the preliminary design phase, with a focus on the uniquechallenges associated with flying GEO communicationssatellite hardware in deep space, implementing a robust lowthrust mission, and the integration of design philosophies andhardware from JPL and Maxar. Details regarding how thesechallenges are addressed in the fault management design inorder to maximize heritage, leverage the strengths of eachorganization, and minimize risk across the design are alsodiscussed.

Marsh, Danielle↗

Priority scheme planning for the robust SSM/PMAD testbed

Whenever mixing priorities of manually controlled resources with those of autonomously controlled resources, the space station module power management and distribution (SSM/PMAD) environment requires cooperating expert system interaction between the planning function and the priority manager. The elements and interactions of the SSM/PMAD planning and priority management functions are presented. Their adherence to cooperating for common achievement are described. In the SSM/PMAD testbed these actions are guided by having a system planning function, KANT, which has insight to the executing system and its automated database. First, the user must be given access to all information which may have an effect on the desired outcome. Second, the fault manager element, FRAMES, must be informed as to the change so that correct diagnoses and operations take place if and when faults occur. Third, some element must engage as mediator for selection of resources and actions to be added or removed at the user's request. This is performed by the priority manager, LPLMS. Lastly, the scheduling mechanism, MAESTRO, must provide future schedules adhering to the user modified resource base.

Elges, Michael R.↗

Decision Making In A High-Tech World: Automation Bias and Countermeasures

Automated decision aids and decision support systems have become essential tools in many high-tech environments. In aviation, for example, flight management systems computers not only fly the aircraft, but also calculate fuel efficient paths, detect and diagnose system malfunctions and abnormalities, and recommend or carry out decisions. Air Traffic Controllers will soon be utilizing decision support tools to help them predict and detect potential conflicts and to generate clearances. Other fields as disparate as nuclear power plants and medical diagnostics are similarly becoming more and more automated. Ideally, the combination of human decision maker and automated decision aid should result in a high-performing team, maximizing the advantages of additional cognitive and observational power in the decision-making process. In reality, however, the presence of these aids often short-circuits the way that even very experienced decision makers have traditionally handled tasks and made decisions, and introduces opportunities for new decision heuristics and biases. Results of recent research investigating the use of automated aids have indicated the presence of automation bias, that is, errors made when decision makers rely on automated cues as a heuristic replacement for vigilant information seeking and processing. Automation commission errors, i.e., errors made when decision makers inappropriately follow an automated directive, or automation omission errors, i.e., errors made when humans fail to take action or notice a problem because an automated aid fails to inform them, can result from this tendency. Evidence of the tendency to make automation-related omission and commission errors has been found in pilot self reports, in studies using pilots in flight simulations, and in non-flight decision making contexts with student samples. Considerable research has found that increasing social accountability can successfully ameliorate a broad array of cognitive biases and resultant errors. To what extent these effects generalize to performance situations is not yet empirically established. The two studies to be presented represent concurrent efforts, with student and professional pilot samples, to determine the effects of accountability pressures on automation bias and on the verification of the accurate functioning of automated aids. Students (Experiment 1) and commercial pilots (Experiment 2) performed simulated flight tasks using automated aids. In both studies, participants who perceived themselves as accountable for their strategies of interaction with the automation were significantly more likely to verify its correctness, and committed significantly fewer automation-related errors than those who did not report this perception.

Mosier, Kathleen L.↗

Rough Surfaces: Is the Dark Stuff Just Shadow?: "Who knows what evil lurks in the hearts of men? The shadow knows!"

Remote observations of the surfaces of airless planetary objects are fundamental to inferring the physical structure and compositional makeup of the surface material. A number of forward models have been developed to reproduce the photometric behavior of these surfaces, based on specific, assumed structural properties such as macroscopic roughness and associated shadowing. Most work of this type is applied to geometric albedos, which are affected by complicated effects near zero phase angle that represent only a tiny fraction of the net energy reflected by the object. Other applications include parameter fits to resolved portions of some planetary surface as viewed over a range of geometries. The spherical albedo of the entire object (when it can be determined) captures the net energy balance of the particle more robustly than the geometric albedo. In most treatments involving spherical albedos, spherical albedos and particle phase functions are often treated as if they are independent, neglecting the effects of roughness. In this paper we take a different approach. We note that whatever function captures the phase angle dependence of the brightness of a realistic rough, shadowed, flat surface element relative to that of a smooth granular surface of the same material, it is manifested directly in both the integral phase function and the spherical albedo of the object. We suggest that, where broad phase angle coverage is possible, spherical albedos may be easily corrected for the effects of shadowing using observed (or assumed) phase functions, and then modeled more robustly using smooth-surface regolith radiative transfer models without further imposed (forward-modeled) shadowing corrections. Our approach attributes observed "power law" phase functions of various slope (and "linear" ranges of magnitude-vs.-phase angle) to shadowing, as have others, and goes on to suggest that regolith-model-based inferences of composition based on shadow-uncorrected spherical albedos overestimate the amount of absorbing material contained in the regolith.

geometric albedos↗

Optimization of large area solar cells for low cost space application

The development of large-area solar cell manufacturing techniques for production of up to 10 kW/month of cells for use on the Shuttle Power Extension Package is detailed. Design goals for the cells were 14% efficiency at 135.3 mW/sq cm AM0 illumination for a 10 ohm-cm BSF/reflector cell, or 12.8% for a 2 ohm-cm BSR cell. Use of terrestrial cell technology to produce CVD SiO2 dielectric insulators for 3-in. ingot cells yielded satisfactory contact integrity. Fused silica coverings with thicknesses of 0.004 in. have allowed exploration of conventional and wraparound cell configurations due to inherent flexibilities of the frosted covers. One production run can now handle 108 3-in. wafers for the wraparound form or 216 in one-sided contact evaporations, with both processes taking 70 mins. Current contact grid designs for space use production permits average efficiencies of 12.8%.

Matthei, K. W.↗

A reexamination of the laser supported combustion wave

Kantrowitz (1972) and Minovitch (1972) have proposed the use of laser sustained plasmas as a means to heat a rocket propellant. Recent studies of laser-powered propulsion have been directed toward the application of high-specific-impulse space propulsion systems for orbital transfer missions. Analyses of rocket performance relied heavily on the concept of the laser-supported combustion (LSC) wave. Raizer (1971) first drew the analogy between laser-sustained plasmas and combustion waves in an analysis. The Raizer model was later applied to hydrogen by Kemp and Root (1979). In connection with certain problems arising with the approach considered by Kemp and Root, the present investigation is concerned with a reexamination of the Raizer model. Attention is given to a numerical approach for the entire LSC wave in hydrogen, taking into account the incorporation of the proper boundary conditions far downstream of the wave.

Keefer, D.↗

Fractal Characterization of Multitemporal Remote Sensing Data

Scale is an "innate" concept in geographic information systems. It is recognized as something that is intrinsic to the capture, storage, manipulation, analysis, modeling, and output of space and time data within a GIS purview, yet the relative meaning and ramifications of scaling spatial and temporal data from this perspective remain enigmatic. As GISs become more sophisticated as a product of more robust software and more powerful computer systems, there is an urgent need to examine the issue of scale, and its relationship to the whole body of spatiotemporal data, as imparted in GISs. Scale is fundamental to the characterization of geo-spatial data as represented in GISs, but we have relatively little insight on how to measure the effects of scale in representing data that are acquired in different formats and exist in varying spatial, temporal and radiometric configurations. Moreover, the complexities associated with the integration of multiscaled data sets in a multitude of formats are exacerbated by the confusion of what the term "scale" is from a multidisciplinary perspective. "Scale" takes on significantly different meanings depending upon one's disciplinary background and spatial perspective which lead to substantial confusion in the input, manipulation, analysis, and output operations. Hence, we must begin to look at the universality of scale and begin to develop the theory, methods, and techniques necessary to advance knowledge on the "Science of Scale' across all disciplines that use GISs.

Quattrochi, Dale A.↗

The Disk Wind in the Rapidly Spinning Stellar-mass Black Hole 4U 1630-472 Observed with NuSTAR

We present an analysis of a short NuSTAR observation of the stellar-mass black hole and low-mass X-ray binary 4U 1630−472. Reflection from the inner accretion disk is clearly detected for the first time in this source, owing to the sensitivity of NuSTAR. With fits to the reflection spectrum, we find evidence for a rapidly spinning black hole, a∗ = 0.985(+0.005/−0.014) (1 sigma statistical errors). However, archival data show that the source has relatively low radio luminosity. Recently claimed relationships between jet power and black hole spin would predict either a lower spin or a higher peak radio luminosity. We also report the clear detection of an absorption feature at 7.03 +/- 0.03 keV, likely signaling a disk wind. If this line arises in dense, moderately ionized gas (log xi = 3.6(+0.2/−0.3) and is dominated by He-like Fe xxv, the wind has a velocity of v/c = 0.043(+0.002/−0.007) (12900(+600/−2100) km s(exp −1)). If the line is instead associated with a more highly ionized gas (log xi = 6.1(+0.7/−0.6)), and is dominated by Fe xxvi, evidence of a blueshift is only marginal, after taking systematic errors into account. Our analysis suggests the ionized wind may be launched within 200-1100 Rg, and may be magnetically driven.

accretion disks↗

Earth-Moon Cycler Mission Design for Lunar Logistics

One of the key functions of the Artemis program is to drive a sustainable approach to manned Lunar exploration. Current planning takes steps to achieve this through the development of Gateway and a Human Landing System. However, establishing and maintaining a supply chain to and from the Gateway and the Lunar south pole requires a more robust and sustainable approach to logistics. This paper explores the benefits that an Earth-Moon cycler may provide to lunar logistics by removing the necessity for large and often expensive rockets in lieu of more frequent but smaller missions. Furthermore, such a cycler can open up possibilities for lunar cargo return which is currently only fulfilled by Orion's limited return capability. The Earth-Moon cylcer offers a platform for power, thermal systems, guidance, navigation, and control, as well as communications which can open opportunities for the growing market of commercial satellites. This work explores the available families of Earth-Moon cyclers with an inclination near 90° with respect to the Moon, and the capabilities such a notional system can offer to desirable locations in cis-lunar space.

Cycler↗

Automated Euler and Navier-Stokes Database Generation for a Glide-Back Booster

The past two decades have seen a sustained increase in the use of high fidelity Computational Fluid Dynamics (CFD) in basic research, aircraft design, and the analysis of post-design issues. As the fidelity of a CFD method increases, the number of cases that can be readily and affordably computed greatly diminishes. However, computer speeds now exceed 2 GHz, hundreds of processors are currently available and more affordable, and advances in parallel CFD algorithms scale more readily with large numbers of processors. All of these factors make it feasible to compute thousands of high fidelity cases. However, there still remains the overwhelming task of monitoring the solution process. This paper presents an approach to automate the CFD solution process. A new software tool, AeroDB, is used to compute thousands of Euler and Navier-Stokes solutions for a 2nd generation glide-back booster in one week. The solution process exploits a common job-submission grid environment, the NASA Information Power Grid (IPG), using 13 computers located at 4 different geographical sites. Process automation and web-based access to a MySql database greatly reduces the user workload, removing much of the tedium and tendency for user input errors. The AeroDB framework is shown. The user submits/deletes jobs, monitors AeroDB's progress, and retrieves data and plots via a web portal. Once a job is in the database, a job launcher uses an IPG resource broker to decide which computers are best suited to run the job. Job/code requirements, the number of CPUs free on a remote system, and queue lengths are some of the parameters the broker takes into account. The Globus software provides secure services for user authentication, remote shell execution, and secure file transfers over an open network. AeroDB automatically decides when a job is completed. Currently, the Cart3D unstructured flow solver is used for the Euler equations, and the Overflow structured overset flow solver is used for the Navier-Stokes equations. Other codes can be readily included into the AeroDB framework.

Chaderjian, Neal M.↗

Distributed Propulsion Vehicles

Since the introduction of large jet-powered transport aircraft, the majority of these vehicles have been designed by placing thrust-generating engines either under the wings or on the fuselage to minimize aerodynamic interactions on the vehicle operation. However, advances in computational and experimental tools along with new technologies in materials, structures, and aircraft controls, etc. are enabling a high degree of integration of the airframe and propulsion system in aircraft design. The National Aeronautics and Space Administration (NASA) has been investigating a number of revolutionary distributed propulsion vehicle concepts to increase aircraft performance. The concept of distributed propulsion is to fully integrate a propulsion system within an airframe such that the aircraft takes full synergistic benefits of coupling of airframe aerodynamics and the propulsion thrust stream by distributing thrust using many propulsors on the airframe. Some of the concepts are based on the use of distributed jet flaps, distributed small multiple engines, gas-driven multi-fans, mechanically driven multifans, cross-flow fans, and electric fans driven by turboelectric generators. This paper describes some early concepts of the distributed propulsion vehicles and the current turboelectric distributed propulsion (TeDP) vehicle concepts being studied under the NASA s Subsonic Fixed Wing (SFW) Project to drastically reduce aircraft-related fuel burn, emissions, and noise by the year 2030 to 2035.

Kim, Hyun Dae↗

Fabrication of Phononic Filter Structures for Far-IR/sub-mm Detector Applications

A photon noise limited sub-mm/far-IR cold telescope in space will require detectors with noise equivalent power (NEP) less than 1x10-19W/Hz1/2for imaging applications and at least an order of magnitude lower for spectroscopic studies. The detector NEP can be reduced by lowering the operation temperature and improving the thermal isolation between the bolometer and a heat bath. We report on the fabrication of membrane isolated transition edge sensor bolometers incorporating compact (<50 μm) thermal isolation beams based on phononic filters. Phononic filters are created by etching quasi-periodic nanoscale structures into supporting thermo-mechanical beams. The cross-sectional dimensions of the etched features are less than the thermal wavelength at the operating temperature, enabling coherent phonon transport to take place in one dimension. The phonon stop-band can be tuned by adjusting the scale of the quasi-periodic structures. Cascading multiple filter stages can increase bandwidth and provide improved thermal isolation similar to the function of a multi-stage electrical filter. We describe the fabrication of AlMn based transition edge sensor bolometers on silicon and silicon nitride membranes isolated by one-and two-dimensional phononic filters. The phononic filters are patterned through electron beam lithography and isolated with deep reactive ion etching.

Phononic↗