Results for “Program Development” — Page 71

DOE OSTI2012

LONG-TERM STEWARDSHIP AT DOE HANFORD SITE - 12575

The U.S. Department of Energy's (DOE) Hanford Site is located in southeast Washington and consists of 1,518 square kilometers (586 square miles) of land. Established in 1943 as part of the Manhattan Project, Hanford workers produced plutonium for our nation's nuclear defense program until the mid 1980's. Since then, the site has been in cleanup mode that is being accomplished in phases. As we achieve remedial objectives and complete active cleanup, DOE will manage Hanford land under the Long-Term Stewardship (LTS) Program until completion of cleanup and the site becomes ready for transfer to the post cleanup landlord - currently planned for DOE's Office of Legacy Management (LM). We define Hanford's LTS Program in the ''Hanford Long-Term Stewardship Program Plan,'' (DOE/RL-201 0-35)[1], which describes the scope including the relationship between the cleanup projects and the LTS Program. DOE designed the LTS Program to manage and provide surveillance and maintenance (S&M) of institutional controls and associated monitoring of closed waste sites to ensure the protection of human health and the environment. DOE's Richland Operations Office (DOE-RL) and Hanford cleanup and operations contractors collaboratively developed this program over several years. The program's scope also includes 15 key activities that are identified in the DOE Program Plan (DOE/RL-2010-35). The LTS Program will transition 14 land segments through 2016. The combined land mass is approximately 570 square kilometers (220 square miles), with over 1,300 active and inactive waste sites and 3,363 wells. Land segments vary from buffer zone property with no known contamination to cocooned reactor buildings, demolished support facilities, and remediated cribs and trenches. DOE-RL will transition land management responsibilities from cleanup contractors to the Mission Support Contract (MSC), who will then administer the LTS Program for DOE-RL. This process requires an environment of cooperation between the contractors and DOE-RL. Information Management (IM) is a key part of the LTS program. The IM Program identifies, locates, stores, protects and makes accessible Hanford LTS records and data to support the transfer of property ultimately to LM. As such, DOE-RL manages the Hanford LTS Program in a manner consistent with LM's goals, policies, and procedures.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

DOE OSTI2018

Analysis of hafnium configuration of FLUOLE-2 program - 25409

The purpose of this paper is to present an analysis of the hafnium configuration of FLUOLE-2 program. FLUOLE-2 is a set of benchmark-type experiments dedicated to neutron attenuation analysis with the aim of improving the TRIPOLI-4{sup R} Monte Carlo code validation and industrial neutron physics scheme. The CEA developed this program, with the support of EDF, in order to be representative of 900 and 1450 MWe Pressurized Water Reactors operated in France. For that purpose, different stainless steel structures have been designed and appropriately positioned inside the EOLE facility located at Cadarache CEA center. EOLE is a pool type zero power reactor, composed of a cylindrical aluminum vessel with an over-structure of stainless steel, that is able to contain various types of core and related structures. The FLUOLE-2 core has been designed as a 29 x 29 pins square lattice of fuel rods. Different kind of dosimeters (cobalt, gold, tin, rhodium, indium, iron, nickel, titanium, aluminum, and vanadium) were irradiated inside and outside the core. (authors)

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗

DOE OSTI2013

Evaluation of a Combined Cyclone and Gas Filtration System for Particulate Removal in the Gasification Process

The Wabash gasification facility, owned and operated by sgSolutions LLC, is one of the largest single train solid fuel gasification facilities in the world capable of transforming 2,000 tons per day of petroleum coke or 2,600 tons per day of bituminous coal into synthetic gas for electrical power generation. The Wabash plant utilizes Phillips66 proprietary E-Gas™ Gasification Process to convert solid fuels such as petroleum coke or coal into synthetic gas that is fed to a combined cycle combustion turbine power generation facility. During plant startup in 1995, reliability issues were realized in the gas filtration portion of the gasification process. To address these issues, a slipstream test unit was constructed at the Wabash facility to test various filter designs, materials and process conditions for potential reliability improvement. The char filtration slipstream unit provided a way of testing new materials, maintenance procedures, and process changes without the risk of stopping commercial production in the facility. It also greatly reduced maintenance expenditures associated with full scale testing in the commercial plant. This char filtration slipstream unit was installed with assistance from the United States Department of Energy (built under DOE Contract No. DE-FC26-97FT34158) and began initial testing in November of 1997. It has proven to be extremely beneficial in the advancement of the E-Gas™ char removal technology by accurately predicting filter behavior and potential failure mechanisms that would occur in the commercial process. After completing four (4) years of testing various filter types and configurations on numerous gasification feed stocks, a decision was made to investigate the economic and reliability effects of using a particulate removal gas cyclone upstream of the current gas filtration unit. A paper study had indicated that there was a real potential to lower both installed capital and operating costs by implementing a char cyclone-filtration hybrid unit in the E-Gas™ gasification process. These reductions would help to keep the E-Gas™ technology competitive among other coal-fired power generation technologies. The Wabash combined cyclone and gas filtration slipstream test program was developed to provide design information, equipment specification and process control parameters of a hybrid cyclone and candle filter particulate removal system in the E-Gas™ gasification process that would provide the optimum performance and reliability for future commercial use. The test program objectives were as follows: 1. Evaluate the use of various cyclone materials of construction; 2. Establish the optimal cyclone efficiency that provides stable long term gas filter operation; 3. Determine the particle size distribution of the char separated by both the cyclone and candle filters. This will provide insight into cyclone efficiency and potential future plant design; 4. Determine the optimum filter media size requirements for the cyclone-filtration hybrid unit; 5. Determine the appropriate char transfer rates for both the cyclone and filtration portions of the hybrid unit; 6. Develop operating procedures for the cyclone-filtration hybrid unit; and, 7. Compare the installed capital cost of a scaled-up commercial cyclone-filtration hybrid unit to the current gas filtration design without a cyclone unit, such as currently exists at the Wabash facility.

01 COAL, LIGNITE, AND PEAT↗

DOE OSTI2022

Sandia Wind Energy Program: FY21 Accomplishments

This report summarizes Fiscal Year 2021 accomplishments from Sandia National Laboratories Wind Energy Program. The portfolio consists of funding provided by the DOE EERE Wind Energy Technologies Office (WETO), Advanced Research Projects Agency-Energy (ARPA-E), DOE Small Business Innovation Research (SBIR), and the Sandia Laboratory Directed Research and Development (LDRD) program. These accomplishments were made possible through capabilities investments by WETO, internal Sandia investment, and partnerships between Sandia and other national laboratories, universities, and research institutions around the world.

17 WIND ENERGY↗

DOE OSTI2017

XACC - eXtreme-scale Accelerator Programming Framework

Hybrid programming models for beyond-CMOS technologies will prove critical for integrating new computing technologies alongside our existing infrastructure. Unfortunately the software infrastructure required to enable this is lacking or not available. XACC is a programming framework for extreme-scale, post-exascale accelerator architectures that integrates alongside existing conventional applications. It is a pluggable framework for programming languages developed for next-gen computing hardware architectures like quantum and neuromorphic computing. It lets computational scientists efficiently off-load classically intractable work to attached accelerators through user-friendly Kernel definitions. XACC makes post-exascale hybrid programming approachable for domain computational scientists.

McCaskey, AlexanderJ.↗

DOE OSTI2020

Partner Baseline Assessment Guide: Clean Energy for Low Income Communities

The U.S. Department of Energy Better Buildings Clean Energy for Low Income Communities Accelerator aims to lower energy bills in low to moderate income communities through expanded installation of energy efficiency and distributed renewables. Upon joining the Accelerator, partners committed to developing Action Plans after a year. As shown in the diagram below, baselining is a useful approach to informing your planning efforts, and should involve input from a broad range of stakeholders. The following guide was developed by DOE to assist partners with baselining, and identifying needs and gaps to address in action plans.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

DOE OSTI2022

Current status and grand challenges for small wind turbine technology

While modern wind turbines have become by far the largest rotating machines on Earth with further upscaling planned for the future, a renewed interest in small wind turbines (SWTs) is fostering energy transition and smart grid development. Small machines have traditionally not received the same level of aerodynamic refinement as their larger counterparts, resulting in lower efficiency, lower capacity factors, and therefore a higher cost of energy. In an effort to reduce this gap, research programs are developing worldwide. With this background, the scope of the present study is 2-fold. In the first part of this paper, an overview of the current status of the technology is presented in terms of technical maturity, diffusion, and cost. The second part of the study proposes five grand challenges that are thought to be key to fostering the development of small wind turbine technology in the near future, i.e. (1) improving energy conversion of modern SWTs through better design and control, especially in the case of turbulent wind; (2) better predicting long-term turbine performance with limited resource measurements and proving reliability; (3) improving the economic viability of small wind energy; (4) facilitating the contribution of SWTs to the energy demand and electrical system integration; (5) fostering engagement, social acceptance, and deployment for global distributed wind markets. To tackle these challenges, a series of unknowns and gaps are first identified and discussed. Based on them, improvement areas are suggested, for which 10 key enabling actions are finally proposed.

17 WIND ENERGY↗

DOE OSTI2016

XACC - eXtreme-scale Accelerator Programming Framework

Hybrid programming models for beyond-CMOS technologies will prove critical for integrating new computing technologies alongside our existing infrastructure. Unfortunately the software infrastructure required to enable this is lacking or not available. XACC is a programming framework for extreme-scale, post-exascale accelerator architectures that integrates alongside existing conventional applications. It is a pluggable framework for programming languages developed for next-gen computing hardware architectures like quantum and neuromorphic computing. It lets computational scientists efficiently off-load classically intractable work to attached accelerators through user-friendly Kernel definitions. XACC makes post-exascale hybrid programming approachable for domain computational scientists.

McCaskey, Alexander J.↗

DOE OSTI2023

Grand Challenges for Small Wind: Results of the European Academy Study

While modern wind turbines have become by far the largest rotating machines on Earth with further upscaling planned for the future, a renewed interest in small wind turbines (SWTs) is fostering energy transition and smart grid development. Small machines have traditionally not received the same level of aerodynamic refinement as their larger counterparts, resulting in lower efficiency, lower capacity factors, and therefore a higher cost of energy. In an effort to reduce this gap, research programs are developing worldwide. With this background, the scope of the present study is 2-fold. In the first part of this paper, an overview of the current status of the technology is presented in terms of technical maturity, diffusion, and cost. The second part of the study proposes five grand challenges that are thought to be key to fostering the development of small wind turbine technology in the near future, i.e. (1) improving energy conversion of modern SWTs through better design and control, especially in the case of turbulent wind; (2) better predicting long-term turbine performance with limited resource measurements and proving reliability; (3) improving the economic viability of small wind energy; (4) facilitating the contribution of SWTs to the energy demand and electrical system integration; (5) fostering engagement, social acceptance, and deployment for global distributed wind markets. To tackle these challenges, a series of unknowns and gaps are first identified and discussed. Based on them, improvement areas are suggested, for which 10 key enabling actions are finally proposed.

ENGINEERING,WIND ENERGY↗

DOE OSTI2016

Fabrication and Qualification of Small Scale Irradiation Experiments in Support of the Accident Tolerant Fuels Program

The Accident Tolerant Fuels (ATF) program aims to develop next generation Light Water Reactor (LWR) fuels with improved performance, reliability, and safety. The program has developed a roadmap to support the insertion of lead fuel rods (LFRs) or lead fuel assemblies (LFAs) of an accident tolerant fuel into a commercial LWR by the end of FY 2022. In order to achieve this goal, novel fuel compositions and cladding materials are being assembled as drop-in irradiation experiments to allow for prioritization of concepts to further the ATF mission. Development of fabrication methodology and qualification techniques for small-scale irradiation test samples is reported.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2025

Training Evaluation: A Case Study of Measuring Impact and ROI

The purpose of this case study was to evaluate the Compliance Officer/Coordinator (CO/CC) training program using Phillips’ approach to training evaluation. INL Learning Performance Consultants (LPCs) applied the ROI Methodology to measure the effectiveness of the CO/CC training program. INL CO/CCs participated in focus groups to provide feedback on their learning, enablers and barriers to applying what they learned, and opportunities to improve the CO/CC learning experience. With collaboration from the CO/CC training program owner, the LPCs demonstrated the business impact and return on investment (ROI) of the CO/CC training program. Included are training program recommendations and lessons learned using the ROI Methodology.

99 GENERAL AND MISCELLANEOUS↗

DOE OSTI2023

Computational Requirements in Clean Energy and Manufacturing: Summary report of the virtual workshop held on June 28-29, 2021

On June 28–29, 2021, the US Department of Energy’s (DOE’s) Advanced Scientific Computing Research (ASCR) program in the Office of Science convened a workshop with the Energy Efficiency and Renew able Energy (EERE) program offices to assess the future need for advanced computing resources in the areas of clean energy and advanced manufacturing. In part, this discussion served as an update to earlier workshops and townhalls. ASCR is guided by DOE mission needs as it develops research programs, computers, and networks at the leading edge of technologies. As the exascale computing era dawns, technology changes are creating new opportunities for those who must use high-performance computing (HPC) and data systems effectively. The ASCR computing facilities are augmenting their strategy to adapt to changing science needs and emerging technologies and to leverage the utility of exascale computing across the federal government.

97 MATHEMATICS AND COMPUTING↗

DOE OSTI2024

Verification of EvaluateFLux Utility Program

The EvaluateFlux program is a post-processing utility program for DIF3D, specifically DIF3D-VARIANT which handles Cartesian and hexagonal geometries. The EvaluateFlux program was developed to allow users to obtain flux and power traverses through the geometry domain, and its initial purpose was to facilitate foil analysis by evaluating the flux solution from DIF3D-VARIANT and combining it with foil cross section data. The EvaluateFlux program can calculate the neutron flux, as well as the reaction rates, at any user provided evaluation point. It does this by identifying the spatial mesh associated with the evaluation point and then evaluates the polynomial based neutron flux moments stored in the NHFLUX file at that point. The output of EvaluateFlux varies depending on the input setup. The maximum output includes the neutron flux and microscopic and macroscopic reaction rates at each evaluation point. The purpose of this work is to verify the outputs of EvaluateFlux. Simple models that have hand calculatable results are first defined and used to verify the EvaluateFlux outputs. More complex cases are then added where a duplicate program of EvaluateFlux that uses PrintTables outputs of the binary files is used to verify the EvaluateFlux outputs. In those complex cases, hand calculations of selected evaluation points were also displayed to confirm the software verification. For all the tests done, the hand calculations agreed well with those calculated by EvaluateFlux. For the larger complex problems, the duplicate program that can process hundreds of evaluation points was able to identify that zero points within some meshes have large errors. This aspect was attributed to the truncation error on the input provided to the duplicate program and is not a concern for the accuracy of the EvaluateFlux software.

97 MATHEMATICS AND COMPUTING↗

DOE OSTI2024

Verification of the EvaluateFlux Utility Program

The EvaluateFlux program is a post-processing utility program for DIF3D, specifically DIF3D-VARIANT which handles Cartesian and hexagonal geometries. The EvaluateFlux program was developed to allow users to obtain flux and power traverses through the geometry domain, and its initial purpose was to facilitate foil analysis by evaluating the flux solution from DIF3D-VARIANT and combining it with foil cross section data. The EvaluateFlux program can calculate the neutron flux, as well as the reaction rates, at any user provided evaluation point. It does this by identifying the spatial mesh associated with the evaluation point and then evaluates the polynomial based neutron flux moments stored in the NHFLUX file at that point. The output of EvaluateFlux varies depending on the input setup. The maximum output includes the neutron flux and microscopic and macroscopic reaction rates at each evaluation point. The purpose of this work is to verify the outputs of EvaluateFlux. Simple models that have hand calculatable results are first defined and used to verify the EvaluateFlux outputs. More complex cases are then added where a duplicate program of EvaluateFlux that uses PrintTables outputs of the binary files is used to verify the EvaluateFlux outputs. In those complex cases, hand calculations of selected evaluation points were also displayed to confirm the software verification. For all the tests done, the hand calculations agreed well with those calculated by EvaluateFlux. For the larger complex problems, the duplicate program that can process hundreds of evaluation points was able to identify that zero points within some meshes have large errors. This aspect was attributed to the truncation error on the input provided to the duplicate program and is not a concern for the accuracy of the EvaluateFlux software.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

DOE OSTI2025

Development of a Robust Reference Electrode in Aggressive Chemical and Radiation Environments in the Hanford Waste Tanks

The Hanford site stores more than 200 million liters of radioactive and chemically hazardous wastes from the production of weapons materials. The wastes are stored in 177 underground carbon-steel storage tanks, separated between 149 single shell tanks (SSTs) and 28 double shell tanks (DSTs). The DSTs provide critical retrieval and interim storage before the waste is vitrified in the Waste Treatment and Isolation Plant (WTP). The tanks will need to remain in-service far beyond the initial 40-year design life, and effective corrosion control practices must remain in force to extend the tanks’ lifespans. This effort includes direct measurements of corrosion rate (e.g., ultrasonic measurements and corrosion coupons) and electrochemical processes (e.g., linear polarization measurements and open circuit potential measurements). The Hanford site began monitoring the corrosion potential in select DSTs in 2008. Of the 45 reference electrodes that have been installed, 29 have failed and 6 others provided unreliable results. DOE-EM is supporting a 3-year program to develop a chemical and radiation resistant reference electrode for application in the Hanford tanks. The first year of the program focused on understanding the failure mechanism for the reference electrodes and identification of candidate construction materials that would mitigate degradation of the electrodes in the waste environment. During the second year of the program, the objectives were to: 1) test candidate materials under simulated waste conditions, 2) design components that will extend the service life of the electrode, 3) fabricate materials for prototype reference electrodes, and 4) assemble prototype reference electrodes for accelerated testing. The reference electrode is constructed of four principal parts: 1) junction, 2) casing, 3) inner chamber backfill materials, and 4) the sensing wire. Principally, improvements of the junction, casing, and inner chamber backfill materials are being pursued. The junction material at the interface between the waste and the inner chamber of the reference electrode was identified as a critical component in the failure of the reference electrodes. Nine candidate replacement junction materials were tested under simulated waste conditions to evaluate permeation rate. These materials included a variety of polymeric and ceramic materials, some of which were 3-D printed. Thus far, porous polyvinylidene fluoride materials have performed satisfactorily and are being considered for prototype development. The commercial electrode casing materials in general have performed well. Additionally, 3-D printing of chemically and mechanically stable materials is being investigated as a means for further improvement in fabrication consistency. SRNL has also investigated altering the reference electrode design to extend the service life. The new design of the interior of the reference electrode casing creates a longer, more tortuous path between the junction material and the electrode sensing wire. A finite element model was used to optimize the design without adversely impacting the circuit resistance of the electrode during the measurements, thus preserving the measurement accuracy while enhancing the service life. The inner chamber back fill materials are also critical to the performance of the reference electrode. Materials that are resistant to intruding tank waste and provide a conductive path to the sensing wire were investigated. Gel and powder materials that are interspersed with a conductive chloride bearing material were tested for their influence on diffusion and electrode resistance. All the investigated materials and components will be assembled, with collaboration from commercial vendors, to fabricate the initial prototypes. Accelerated testing of the prototypes will be initiated in Year 2 of the program and will be completed in Year 3. A recommendation on the materials of construction and the design of the new robust reference electrode will be presented to the Hanford tank farm facility.

Sykes, Kiana [Savannah River National Laboratory (↗

DOE OSTI2012

Mercury Issues and Complexities in Oak Ridge, Tennessee; Redefining the Conceptual Model - 12277

Releases of mercury from an industrial facility in Oak Ridge, Tennessee in the 1950's and early 1960's resulted in contamination of soil and groundwater within the facility, as well as downstream surface waters. Remediation efforts, which began in the 1980's, have decreased waterborne mercury concentrations near the facility, but elevated levels of mercury remain in the soil, sediment, water, and biota. Widespread distribution of mercury sources and complex mercury transport pathways are some of many challenges at the site. For effective environmental management and closure decision making relative to mercury contamination at the facilities, an up-to-date conceptual model of mercury source areas, processes, likely flow paths, and flux was deemed necessary. Recent facility and reconfiguration efforts, site characterizations, remedial actions, and research are facilitating the collection of new mercury data in Oak Ridge. To develop the current model, a multi-organizational team reviewed existing conceptual models from a variety of sources, consolidated historical data and source information, gathered input from local experts with extensive site knowledge, and used recently collected mercury data from a variety of sampling programs. The developed site conceptual model indicates that the nature and extent of mercury concentration and contaminant flux has significantly changed in the ten years since flux-based conceptual models were used for previous remedial action decisions. A new water treatment system has effectively reduced mercury inputs to the creek and is removing substantially greater quantities of mercury from groundwater than was expected. However, fish concentrations in downstream waters have not responded to decreased water concentrations in the stream. Flux from one large out-fall at the creek's headwaters appears to be a greater percentage of the overall flux leaving the site than previous years, albeit year to year variation in flux is large, and the many small sources of mercury identified in the model may also be important if the goal is to reach very low mercury levels in stream water and fish. The conceptual model is a key reference in helping to prioritize future remedial actions, defining future monitoring, conducting numerical modeling efforts, and evaluating research needs. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

DOE OSTI2013

Heterogeneous Catalysis on Atomically Dispersed Supported Metals: CO2 Reduction on Multifunctional Pd Catalysts

Temperature programmed reaction and scanning transmission electron microscopy experiments were applied to prove the requirement of two different catalyst functionalities for the reduction of CO2 with hydrogen on Pd/Al2O3 and Pd/MWCNT catalysts. The research described in this paper was supported by the Laboratory Directed Research and Development (LDRD) program of the Pacific Northwest National Laboratory (PNNL) and was performed at the Environmental Molecular Sciences Laboratory (EMSL), a national scientific user facility sponsored by the DOE’s Office of Biological and Environmental Research and located at PNNL. PNNL is operated for the US DOE by Battelle Memorial Institute.

alumina↗

DOE OSTI2019

Preparing for the Next Generation of EUV Lithography at the Center for X-ray Optics

The introduction of EUV lithography into high-volume semiconductor manufacturing this year represents a monumental milestone for EUV technology. After nearly 30 years of development, the EUV research community has overcome many of the key obstacles required to enable the long-awaited integration of EUV lithography into the lab. These obstacles have included: the development of a stable, high-powered EUV source to ensure adequate exposure tool reliability; controlling EUV mask defects and mask contamination; and the development of EUV resists with adequate sensitivity, resolution, and line width roughness to meet the tolerances required for high-volume manufacturing. As EUV moves into its second generation, there will be new challenges facing the community as it works to push EUV technology into the future. Smaller feature sizes will be achieved using higher numerical aperture optics, which are planned to have an anamorphic geometry (asymmetric magnification and numerical aperture between horizontal and vertical axes) to overcome 3D effects at the mask. This new geometry and its larger angle ranges make understanding mask absorber and multilayer effects all the more important. New methods for high-NA wavefront metrology need to be tested to ensure that these optical systems can be aligned to operate with minimal aberrations. Mask defects need to continue to be studied, and the inclusion of EUV pellicles in the roadmap requires that mask inspection and review systems adapt accordingly. Finally, new resists must be developed to support the increased resolution of feature sizes below 8 nm half pitch. The Center for X-ray Optics (CXRO) at Berkeley Lab has been a leader in EUV research for the past 25 years. Leveraging 13.5 nm EUV light from the Advanced Light Source synchrotron facility, CXRO is home to several EUV and soft X-ray (SXR) research tools that have provided important insights into EUV resists, masks, and coatings. The 0.3 NA Microfield exposure tool (MET) and Dose Calibration Tool (DCT) have played an instrumental role in the development of the current generation of high-resolution EUV resists. The Actinic Inspection Tool (AIT) and its successor, SHARP, have enabled aerial image analysis, providing key insights into mask defects, 3D mask effects, illumination, and aberrations. And the CXRO Reflectometer continues to be the industry standard in multilayer coating and EUV mask scattering metrology. To address the new challenges facing the next generation of EUV lithography, CXRO has upgraded its suite of EUV research tools. The 0.5 NA MET5 is a newly commissioned projection lithography tool that is capable of printing feature sizes down to 8 nm half pitch. A new radiation chemistry program is deploying several techniques aimed at dissecting the role of primary photoelectrons and secondary electrons in EUV resists. The SHARP microscope has been outfitted with anamorphic zone plate lenses that can emulate the geometry of next-generation EUV scanners, and the reflectometer has been applied to new scattering experiments for the purpose of understanding the 3D effects of EUV mask multilayers, as well as determining mask properties using scattering profiles. In parallel with these tools, the CXRO High-NA Wavefront Sensing Program is developing high-resolution wavefront sensors suitable for measuring aberrations at high NA. This article presents an overview of these programs and describes how they will address the primary challenges that face the EUV community as it moves to the next generation of EUV lithography.

47 OTHER INSTRUMENTATION↗