Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “plasma processing”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 127 records · Page 7

Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry

Occurrence of unintended gas breakdown in the narrow gaps of plasma processing chambers is one of the critical challenges in developing advanced plasma sources. Here, we present a combined experimental and theoretical study of unintended discharges in the narrow gaps of plasma processing chambers and report significant drop of the gas breakdown voltage in the presence of a background plasma facing the gap. Experimentally measured breakdown voltages decrease in subsequent breakdown events due to wall erosion caused by the discharge. Therefore, preventing and mitigating the first discharge is of paramount importance. An analysis of kinetic simulation results indicates that the charged particle influx from the background plasma in the processing chamber into the gap is responsible for the onset of early breakdown: higher charged particle density within the gap modifies the electric field profile, allowing unintended breakdowns to occur at a significantly reduced threshold voltage.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Integrated RMP-based ELM-crash-control process for plasma performance enhancement during ELM crash suppression in KSTAR

The integrated Resonant Magnetic Perturbation (RMP)-based Edge-Localized Mode (ELM)-crash-control process aims to enhance the plasma performance during the RMP-driven ELM crash suppression, where the RMP induces an unwanted confinement degradation. In this study, the normalized beta ($\beta_\textrm{N}$) is introduced as a metric for plasma performance. The integrated process incorporates the latest achievements in the RMP technique to enhance $\beta_\textrm{N}$ efficiently. The integrated process triggers the n = 1 Edge-localized RMP (ERMP) at the L–H transition timing using the real-time Machine Learning (ML) classifier. The pre-emptive RMP onset can reduce the required external heating power for achieving the same $\beta_\textrm{N}$ by over 10% compared to the conventional onset. During the RMP phase, the adaptive feedback RMP ELM controller, demonstrating its performance in previous experiments, plays a crucial role in maximizing $\beta_\textrm{N}$ during the suppression phase and sustaining the $\beta_\textrm{N}$-enhanced suppression state by optimizing the RMP strength. The integrated process achieves $\beta_\textrm{N}$ up to ~2.65 during the suppression phase, which is ~10% higher than the previous KSTAR record but ~6% lower than the target of the K-DEMO first phase ($\beta_\textrm{N}$ = 2.8), and maintains the suppression phase above the lower limit of target $\beta_\textrm{N}$ (= 2.4) for ~4 s (~60$\tau_\textrm{E}$). In addition to $\beta_\textrm{N}$ enhancement, the integrated process demonstrates quicker restoration of the suppression phase and recovery of $\beta_\textrm{N}$ compared to the adaptive control with the n = 1 Conventional RMP (CRMP). The post-analysis of the experiment shows the localized effect of the ERMP spectrum in radial and the close relationship between the evolution of $\beta_\textrm{N}$ and the electron temperature.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma kinetic processes in a strong d.c. magnetic field

The electrostatic guiding center approximation is used to describe the kinetic processes of a strongly magnetized tenuous plasma in two dimensions, in both the fluid and charged rod descriptions. The basic kinetic description of the plasma is in terms of the statistically-distributed Fourier coefficients associated with the velocity and enstrophy (charge density) fields. It is shown that the system exhibits a tendency to long range order characterized by macroscopic vorticity concentrations comparable in size to that of the system. These types of structure have historically been called convection cells and can be quite efficient at transporting particles transverse to a magnetic field.

Montgomery, D.↗

Effects of eletron heating on the current driven electrostatic ion cyclotron instability and plasma transport processes along auroral field lines

Fluid simulations of the plasma along auroral field lines in the return current region have been performed. It is shown that the onset of electrostatic ion cyclotron (EIC) related anomalous resistivity and the consequent heating of electrons leads to a transverse ion temperature that is much higher than that produced by the current driven EIC instability (CDICI) alone. Two processes are presented for the enhancement of ion heating by anomalous resistivity. The anomalous resistivity associated with the turbulence is limited by electron heating, so that CDICI saturates at transverse temperature that is substantially higher than in the absence of resistivity. It is suggested that this process demonstrates a positive feedback loop in the interaction between CDICI, anomalous resistivity, and parallel large-scale dynamics in the topside ionosphere.

Ganguli, Supriya B.↗

DEVELOPMENT OF PLASMA SIMULATION TOOL FOR THE ACCEL-ERATING CAVITIES

Plasma processing of superconducting radio frequency (SRF) cavities has shown an improvement in accelerating gradient by reducing the radiation due to field emission and multipacting. Plasma processing is a common tech-nique where the free oxygen produced by the plasma breaks down and removes hydrocarbons from surfaces. This increases the work function and reduces the second-ary emission coefficient. The hydrocarbon fragments of H2, CO, CO2, and H2O are removed from the system with the process gas which is flowing through the system. Here, we present COMSOL for the first time to simulate the plasma processing of an SRF cavity. In this work, we use Jefferson Lab's C75 SRF cavities design as our case study. Using simulation, we predict the condition of plasma ignition inside the SRF cavity. The simulation provides information about the optimal rf coupling to the cavity, mode for plasma ignition, choice of gas concen-tration, power, and pressure.

Senevirathne, I.↗

Advanced Inductively Coupled Plasma Etching Processes for Fabrication of Resonator-Quantum Well Infrared Photodetector

Resonator-quantum well infrared photodetectors (R-QWIPs) are the next generation of QWIP detectors that use resonances to increase the quantum efficiency (QE). To achieve the expected performance, the detector geometry must be produced in precise specification. In particular, the height of the diffractive elements (DE) and the thickness of the active resonator must be uniformly and accurately realized to within 0.05 lm accuracy and the substrates of the detectors have to be removed totally. To achieve these specifications, two optimized inductively coupled plasma (ICP) etching processes are developed. Using these etching techniques, we have fabricated a number of R-QWIP test detectors and FPAs with the required dimensions and completely removed the substrates of the test detectors and FPAs. Their QE spectra were tested to be in close agreement with the theoretical predictions. The operability and spectral non-uniformity of the FPA is about 99.57% and 3% respectively.

plasma etching process↗

Selective Plasma Deposition of Fluorocarbon Films on SAMs

A dry plasma process has been demonstrated to be useful for the selective modification of self-assembled monolayers (SAMs) of alkanethiolates. These SAMs are used, during the fabrication of semiconductor electronic devices, as etch masks on gold layers that are destined to be patterned and incorporated into the devices. The selective modification involves the formation of fluorocarbon films that render the SAMs more effective in protecting the masked areas of the gold against etching by a potassium iodide (KI) solution. This modification can be utilized, not only in the fabrication of single electronic devices but also in the fabrication of integrated circuits, microelectromechanical systems, and circuit boards. In the steps that precede the dry plasma process, a silicon mold in the desired pattern is fabricated by standard photolithographic techniques. A stamp is then made by casting polydimethylsiloxane (commonly known as silicone rubber) in the mold. The stamp is coated with an alkanethiol solution, then the stamp is pressed on the gold layer of a device to be fabricated in order to deposit the alkanethiol to form an alkanethiolate SAM in the desired pattern (see figure). Next, the workpiece is exposed to a radio-frequency plasma generated from a mixture of CF4 and H2 gases. After this plasma treatment, the SAM is found to be modified, while the exposed areas of gold remain unchanged. This dry plasma process offers the potential for forming masks superior to those formed in a prior wet etching process. Among the advantages over the wet etching process are greater selectivity, fewer pin holes in the masks, and less nonuniformity of the masks. The fluorocarbon films formed in this way may also be useful as intermediate layers for subsequent fabrication steps and as dielectric layers to be incorporated into finished products.

Crain, Mark M., III↗

Analysis of Wave and Particle Signatures Observed in Plasma Escape at Venus

Atmospheric gases escape from Venus as neutral and ionized atoms and molecules. Ion escape, considered here, occurs through ion pickup or collective plasma processes. The latter can arise from upward flow of nightside ionospheric plasma into the ionotail, day to night ionospheric flow into the ionotail, and scavenging of ionospheric plasma by ionosphere-magnetosheath instabilities at the ionopause. These plasma processes produce differing signatures in ion velocity and energy distributions and in ULF waves in the magnetic field. Using plasma ion spectra measured by the Pioneer Venus Orbiter (PVO) Orbiter Plasma Analyzer (OPA) and magnetic field fluctuations observed by the PVO Orbiter Magnetometer (OMAG) along with the expected particle and field signatures, various ion escape processes occurring along Pioneer Venus orbits are identified. In particular, OPA ion energy distributions are used in parallel with magnetic field power spectra and wave phase angles derived from OMAG measurements to study the characteristics of escaping ions. The principle ions observed escaping the influence of Venus are H+, He+ and 0'. In the ion energy distributions of the OPA, pickup ions appear hot relative to the much cooler ions flowing away from Venus in the ionotail and in the plasma clouds detached from the ionopause. This energy contrast is particularly evident downstream when PVO crosses the ionotail boundary from the hot solar wind plasma to the much cooler plasma within the tail. Magnetic field signatures accompanying the escaping ions appear as peaks in the power spectra at the corresponding ion cyclotron frequencies. Also, coherent wave trains at the same frequencies are observed in the phase angle plots of magnetic field fluctuations about the mean field.

Hartle, R. E.↗

Carbon Dioxide Utilization for Plasma Nanosynthesis of Carbon

This DOE Phase I SBIR project has developed a glow discharge-based plasma process to convert carbon dioxide to sold carbon and water. By adding natural gas, the additional enthalpy can be used to reform the output carbon dioxide to value added carbon and EPA-compliance-grade water, thus creating a process that has no gaseous products at all, such as: CO 2 + CH 4 → 2C + 2H 2 O, which is simply the exothermic reverse of the syngas reaction. During the Phase I work, several milestones were accomplished successfully. a. First, a synthesis reactor was designed, assembled, and successfully operated using the combined simultaneous operation of glow discharge and microwaves. DC discharge and microwaves can also be operated individually, allowing multiple configurations to be used This is one of the first reactors of its kind, and perhaps the first ever. b. Second, the research team successfully produced carbon nanomaterials using carbon dioxide as the source of carbon via CO 2 + 2H 2 → C + 2H 2 O. This is certainly one of the first processes to use plasma to convert carbon dioxide to nanocarbon, and perhaps the first ever demonstration. c. Third, it was also shown that carbon monoxide and carbon dioxide can be used with methane to reduce the synthesis temperature of ASI graphene decorated carbon nanotubes (GDCNT). Hitherto GDCNT were only fabricated above 1200 °C. GDCNT was synthesized at 780 °C. CO 2 + C → 2CO; 2 CO + CH 4 → 3 C + 2H 2 O, and also, CH 4 + CO 2 → 2 C + 2H 2 O. d. Fourth, closed cycle synthesis of nanomaterial was demonstrated with over 80% conversion of carbon dioxide to carbon and water was achieved, on the basis of pressure drop during glow discharge. e. Fifth, plasma operation was achieved via glow discharge and microwaves at 500 Torr, demonstrating a path forward to atmospheric pressure operation f. Sixth, using carbon monoxide and carbon dioxide in an electrothermal furnace, we produced 350 grams per hour of high-quality nanotubes in a single furnace, compared to 200 grams per hour for the commercial process. Controlling the enthalpy prevents self-extinguishing hot gas pyrolysis. Thus, carbon dioxide enhances the properties and reduces the production cost. This is a near term advance that can go into trial production in the near term. g. Seventh, economic analysis suggests an economic plan forward, producing carbon nanotubes for less than $50 per pound. The use of hydrogen and carbon dioxide as the feedstocks is acceptable from a cost basis, and in fact hydrogen is less expensive than carbon monoxide. Niche applications are available in the near term, though quantities relevant to sequestration remain a far-term goal. h. Eighth, though it was not the research team’s intention to create a new process for producing carbon monoxide, it was realized that almost by accident we demonstrated plasma reforming of carbon dioxide via a plasma version of the reverse Boudouard reaction. Accordingly, we have contacted a major gas manufacturer (Matheson Gas) to determine whether there is interest in creating an industrial version of the process. i. Ninth, a long-range strategy is identified in which a progressively more carbon-conscious world will seek to create solid carbon as a means of sequestering carbon dioxide, impeding its return to the atmosphere. In the long term the price must drop by orders of magnitude with larger production, and assuming success, solid carbon could be the preferred form for sequestration rather than underground storage. If carbon can be made as cheaply as dirt, or nearly so, then it can serve a useful purpose as structural material for housing, soil amendments in agriculture and fillers to modify low areas.

03 NATURAL GAS↗

Geotail MCA Plasma Wave Investigation Data Analysis

The primary goals of the International Solar Terrestrial Physics/Global Geospace Science (ISTP/GGS) program are identifying, studying, and understanding the source, movement, and dissipation of plasma mass, momentum, and energy between the Sun and the Earth. The GEOTAIL spacecraft was built by the Japanese Institute of Space and Astronautical Science and has provided extensive measurements of entry, storage, acceleration, and transport in the geomagnetic tail and throughout the Earth's outer magnetosphere. GEOTAIL was launched on July 24, 1992, and began its scientific mission with eighteen extensions into the deep-tail region with apogees ranging from around 60 R(sub e) to more than 208 R(sub e) in the period up to late 1994. Due to the nature of the GEOTAIL trajectory which kept the spacecraft passing into the deep tail, GEOTAIL also made 'magnetopause skimming passes' which allowed measurements in the outer magnetosphere, magnetopause, magnetosheath, bow shock, and upstream solar wind regions as well as in the lobe, magnetosheath, boundary layers, and central plasma sheet regions of the tail. In late 1994, after spending nearly 30 months primarily traversing the deep tail region, GEOTAIL began its near-Earth phase. Perigee was reduced to 10 R(sub e) and apogee first to 50 R(sub e) and finally to 30 R(sub e) in early 1995. This orbit provides many more opportunities for GEOTAIL to explore the upstream solar wind, bow shock, magnetosheath, magnetopause, and outer magnetosphere as well as the near-Earth tail regions. The WIND spacecraft was launched on November 1, 1994 and the POLAR spacecraft was launched on February 24, 1996. These successful launches have dramatically increased the opportunities for GEOTAIL and the GGS spacecraft to be used to conduct the global research for which the ISTP program was designed. The measurement and study of plasma waves have made and will continue to make important contributions to reaching the ISTP/GGS goals and solving the significant problems of sun-earth connections. Plasma waves are involved in the energization and de-energization of plasma and energetic particles via numerous wave-particle interaction processes. Plasma waves in many instances are the source for the heating or cooling of the particles. They can cause particle precipitation by scattering particles into the loss cone. They move particles across boundaries in mass and energy dependent ways. Identifying the waves and the instabilities which produce them are thus crucial for understanding the plasma processes. Wave-particle interaction processes are especially important at various boundaries between the different regions of geospace including the bow shock, magnetopause, and interfaces in the geomagnetic tail between the magnetosheath, lobe, plasmasheet, boundary layers, and neutral sheet. In addition to identifying the characteristics of the instabilities and generation mechanisms encountered, plasma wave measurement are used in conjunction with other fields and particle measurements to identify the region of space the spacecraft is in or the boundary that is being crosed.

Anderson, Roger R.↗

Lost alpha Faraday cup foil noise characterization during Joint European Torus plasma post-processing analysis

Capacitive plasma pickup is a well-known and difficult problem for plasma-facing edge diagnostics. This problem must be addressed to ensure an accurate and robust interpretation of the real signal measurements vs noise. The Faraday cup fast ion loss detector array of the Joint European Torus (JET) is particularly prone to this issue and can be used as a testbed to prototype solutions. The issue of separation and distinction between warranted fast ion signal and electromagnetic plasma noise has traditionally been solved with hardware modifications, but a more versatile post-processing approach is of great interest. This work presents post-processing techniques to characterize the signal noise. While hardware changes and advancements may be limited, the combination with post-processing procedures allows for more rapid and robust analysis of measurements. The characterization of plasma pickup noise is examined for alpha losses in a discharge from JET’s tritium campaign. In addition to highlighting the post-processing methodology, the spatial sensitivity of the detector array is also examined, which presents significant advantages for the physical interpretation of fast ion losses.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Relativistic thermal plasmas - Pair processes and equilibria

The work of Bisnovatyi-Kogan, Zel'dovich and Sunyaev (1971) is extended and generalized, through the inclusion of pair-producing photon processes and effects due to the finite size of the plasma, in an investigation of the equilibria of relativistic thermal plasmas which takes into account electron-positron creation and annihilation and photons produced within the plasma. It is shown that the bridge between an effectively thin plasma and an effectively thick plasma occurs in the transrelativistic region, where the dimensionless temperature value is between 0.1 and 1.0 and the temperature remains in this region over a great luminosity range.

Lightman, A. P.↗

Scaling of atomic layer etching of SiO 2 in fluorocarbon plasmas: Transient etching and surface roughness

Fabricating sub-10 nm microelectronics places plasma processing precision at atomic dimensions. Atomic layer etching (ALE) is a cyclic plasma process used in semiconductor fabrication that has the potential to remove a single layer of atoms during each cycle. In self-limiting ideal ALE, a single monolayer of a material is consistently removed in each cycle, typically expressed as EPC (etch per cycle). In plasma ALE of dielectrics, such as SiO 2 and Si 3 N 4 , using fluorocarbon gas mixtures, etching proceeds through deposition of a thin polymer layer and the process is not strictly self-terminating. As a result, EPC is highly process dependent and particularly sensitive to the thickness of the polymer layer. In this paper, results are discussed from a computational investigation of the ALE of SiO 2 on flat surfaces and in short trenches using capacitively coupled plasmas consisting of a deposition step (fluorocarbon plasma) and an etch step (argon plasma). We found that ALE performance is a delicate balance between deposition of polymer during the first half cycle and etching (with polymer removal) during the second half cycle. In the absence of complete removal of the overlying polymer in each cycle, ALE may be transient as the polymer thickness grows with each cycle with a reduction in EPC until the thickness is too large to enable further etching. Small and statistical amounts of polymer left from a previous cycle can produce statistical variation in polymer thickness on the next cycle, which in turn can lead to a spatially dependent EPC and ALE roughness. Based on synergy between T i (sputtering time) and T p (passivation time), dielectric ALE can be described as having three modes: deposition, roughening surface (transitioning to etch-stop), and smooth surface with steady-state EPC.

Materials Science↗

Plasma kinetic processes in a strong d.c. magnetic field

Recent results in the kinetic theory of a strongly magnetized plasma are surveyed. Emphasis is on the electrostatic guiding-center plasma in two dimensions, in both the fluid and 'charged rod' descriptions. The basic kinetic description of the plasma is in terms of the statistically-distributed Fourier coefficients associated with the velocity and 'enstrophy' (charge density) fields. It is a universal tendency in such media for enstrophy to flow to shorter wavelengths but for energy to flow to longer wavelengths. A consequence of the energy flow to longer wavelengths is the generation of long-range order in the form of macroscopic vortices. These kinds of structure have been called 'convection cells' and can be extraordinarily efficient in transporting particles transverse to a magnetic field. The tendency to vortex formation can be disrupted by collisions between particles. Modifications of the Fokker-Planck equation for a plasma produced by a strong dc magnetic field are considered in both two and three dimensions.

Montgomery, D.↗

Laser-stimulated photodetachment of electrons from the negatively charged dielectric substrates

The photon-stimulated emission of bulk electrons has been extensively studied for various types of materials, while the photodetachment of surplus surface electrons has not been fully explored. The photodetachment barrier energy is commonly defined by the surface electron affinity of material, which is typically less than the work function and more pronounced for non-conducting substrates and in environments with a continuous flux of electrons to the surface, such as in gas discharge plasmas. Herein, it is experimentally shown that the photodetachment yield of surplus electrons created by plasma-induced charging of non-conductive surfaces of dielectric materials depends on the initial surface charge density and do not correlate with the tabulated affinity values of these materials under gas discharge charging conditions. In cocnclusion, this result obtained using laser-stimulated photodetachment for fused silica, boron nitride, and alumina, is critically important for the understanding of charging and discharging dynamics, secondary electron emission, and photo emission effects affecting plasma–wall interactions relevant to surface and capacitively coupled discharges, dusty plasmas, electrostatic probe diagnostics, and applications for plasma processing of materials, plasma propulsion, and gas breakdown.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma Assisted Combustion and Chemical Processing: Chapter 9 - Plasma Diagnostics

Plasma dynamics and chemistry have a broad range of timescales from picoseconds to milliseconds. In addition, it involves nonequilibrium energy transfer between electrons, ions, electronically and vibrationally excited states, radicals, intermediate species, and reactants and products as well as surface charges and chemistry. To understand plasma physics and chemistry, it is essential to conduct time and space resolved, quantitative detection of nonequilibrium temperature distributions, electron energy and number density, electric field, and species concentrations. There are enormous publications and review articles on this subject. The focus of this chapter is to be placed on the most recent progress in gas phase plasma properties and chemistry, especially on optical emission spectroscopy, laser absorption spectroscopy, Faraday rotational spectroscopy, Raman and Thompson scattering, femtosecond and picosecond (fs/ps) coherent anti-Stokes Raman scattering (CARS) spectroscopy, and electric field-induced second harmonic generation methods.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Theory of Dust Voids in Plasmas

Dusty plasmas in a gas discharge often feature a stable void, i.e., a dust-free region inside the dust cloud. This occurs under conditions relevant to both plasma processing discharges and plasma crystal experiments. The void results from a balance of the electrostatic and ion drag forces on a dust particle. The ion drag force is driven by a flow of ions outward from an ionization source and toward the surrounding dust cloud, which has a negative space charge. In equilibrium the force balance for dust particles requires that the boundary with the dust cloud be sharp, provided that the particles are cold and monodispersive. Numerical solutions of the one-dimensional nonlinear fluid equations are carried out including dust charging and dust-neutral collisions, but not ion-neutral collisions. The regions of parameter space that allow stable void equilibria are identified. There is a minimum ionization rate that can sustain a void. Spatial profiles of plasma parameters in the void are reported. In the absence of ion-neutral collisions, the ion flow enters the dust cloud's edge at Mach number M = 1. Phase diagrams for expanding or contracting voids reveal a stationary point corresponding to a single stable equilibrium void size, provided the ionization rate is constant. Large voids contract and small voids expand until they attain this stationary void size. On the other hand, if the ionization rate is not constant, the void size can oscillate. Results are compared to recent laboratory and microgravity experiments.

Goree, J.↗

Additive manufacturing of high‐density silicon carbide ceramics through post‐processing spark plasma sintering

This research advances the field of additive manufacturing (AM) of silicon carbide (SiC) ceramics by integrating spark plasma sintering (SPS) to enhance material density, mechanical strength, and thermal properties. Traditional AM techniques struggle to achieve the high‐density SiC required for demanding applications, such as aerospace engineering, where high thermal conductivity and mechanical strength are paramount. Here, our study addresses these challenges by incorporating SPS as a post‐processing step, achieving near‐theoretical maximum densities and significantly reducing porosity, thereby resulting in outstanding thermal conductivity in SiC ceramics. We developed a specialized SiC ink optimized for 3D printing, ensuring structural integrity after deposition through tailored rheological properties. The application of SPS facilitates rapid, uniform sintering, essential for attaining superior density, mechanical properties, and thermal performance. Our experimental results, confirmed through scanning electron microscopy analysis, demonstrate significant microstructural properties, mechanical strength, and thermal conductivity, showcasing the effectiveness of integrating SPS in AM processes. This innovative approach not only expands the capabilities of AM in producing complex, high‐density ceramic structures but also broadens the potential applications of SiC in demanding environments.

36 MATERIALS SCIENCE↗