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NASA NTRS1999

The Astro-E High Resolution X-Ray Spectrometer

The Astro-E High Resolution X-ray Spectrometer (XRS) was developed jointly by the NASA/Goddard Space Flight Center and the Institute of Space and Astronautical Science in Japan. The instrument is based on a new approach to spectroscopy, the X-ray microcalorimeter. This device senses the energies of individual X-ray photons as heat with extreme precision. A 32 channel array of microcalorimeters is being employed, each with an energy resolution of about 12 eV at 6 keV (the Fe-K region). This will provide spectral resolving power 10 times higher than any other non-dispersive X-ray spectrometer. The instrument incorporates a three stage cooling system capable of operating the array at 60 mK for about two years in orbit. The array sits at the focus of a grazing incidence conical mirror. The quantum efficiency of the microcalorimeters and the reflectivity of the X-ray mirror system combine to give high throughput over the 0.3-12 keV energy band. This new capability will enable the study of a wide range of high-energy astrophysical sources with unprecedented spectral sensitivity. This paper presents the basic design requirements and implementation of the XRS, and also describes the instrument parameters and performance.

Kelley, Richard L.↗
NASA NTRS2001

Microcalorimetry: The First Two Decades

Our group at GSFC began experimental and theoretical work on microcalorimetry almost twenty years ago, in August of 1982. Over the next 10 months, we completed the initial demonstration of a Si impurity thermometer-based calorimeter as an X-ray spectrometer. This successful demonstration resulted in the development by many investigators of scientific applications for microcalorimeters, ranging from optical spectroscopy to dark matter detection to particle physics applications. Many new technical approaches for cryogenic detectors were proposed by investigators and have been developed. In this presentation, I will describe the early development of microcalorimeters at GSFC and University of Wisconsin and the subsequent rapid growth of this work around the world The key milestones in the early development were the initial spectroscopy demonstrations and the selection of XRS, our microlcalorimeter-based instrument for the Advanced X-ray Astrophysics Facility (AXAF) and ultimately for ASTRO-E. An additional key event was the development of the direct detection of dark matter experiment and the formation of the Center for Particle Astrophysics. Both of these programs provided long term support for this technology in its precarious early days. A major additional technical step in the development of detectors was the demonstration of devices based on superconducting transition edge sensors (TES). These detectors promised (and have delivered) improved energy resolution and higher event rate capabilities. They couple naturally to SQUIDS, which operate well at the low temperatures where the detectors must operate. The past two decades have taken microcalorimeters from their infancy to applications in real experiments. I will provide an overview of the early development of the devices and review the breadth of the present technology and applications.

Moseley, Harvey↗
NASA NTRS2005

Cosmology, Clusters and Calorimeters

I will review the current state of Cosmology with Clusters and discuss the application of microcalorimeter arrays to this field. With the launch of Astro-E2 this summer and a slew of new missions being developed, microcalorimeters are the next big thing in x-ray astronomy. I will cover the basics and not-so-basic concepts of microcalorimeter designs and look at the future to see where this technology will go.

Figueroa-Feliciano, Enectali↗
NASA NTRS2006

On-orbit Performance Of The Suzaku/XRS

The Suzaku high-resolution X-Ray Spectrometer (XRS) is the first orbiting x-ray microcalorimeter. This instrument, which maintains the sensor at less than 0.1K and utilizes liquid He and solid Ne cryogens, is capable of providing very high, non-dispersive x-ray spectroscopy. The microcalorimeter approach enables increasing spectral resolving power toward increasing energy. This fundamental characteristic makes it the instrument of choice for a variety of spectral diagnostics that can be uniquely obtained from studies of Fe K-line features common in such objects as cluster of galaxies and active galaxies, to name only two important classes out of many. The array aspect allows for imaging spectroscopy of extended sources without spectral degradation. Unfortunately, a design flaw in the XRS dewar/spacecraft interface caused the premature loss of liquid helium and rendered the instrument miusable. Nonetheless, during the three weeks following the launch of Suzaku, the instrument performed extremely well and demonstrated that the basic microcalorimeter concept is sound for space applications. An energy resolution of 7 eV FWHM at 6keV was obtained in orbit as measured using internal calibration sources. We will describe the XRS design and operation, explain what happened, and then present some lessons learned for future space missions utilizing this powerful technology.

Kelley, Richard↗
NASA NTRS2007

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

Finkbeiner, F. m.↗
NASA NTRS2011

Development of a TES-Based Anti-Coincidence Detector for Future X-ray Observatories

Microcalorimeters onboard future x-ray observatories require an anti-coincidence detector to remove environmental backgrounds. In order to most effectively integrate this anticoincidence detector with the main microcalorimeter array, both instruments should use similar read-out technology. The detectors used in the Cryogenic Dark Matter Search (CDMS) use a phonon measurement technique that is well suited for an anti-coincidence detector with a microcalorimeter array using SQUID readout. This technique works by using a transition-edge sensor (TES) connected to superconducting collection fins to measure the athermal phonon signal produced when an event occurs in the substrate crystal. Energy from the event propagates through the crystal to the superconducting collection fins, creating quasiparticles, which are then trapped as they enter the TES where they produce a signal. We are currently developing a prototype anti-coincidence detector for future x-ray missions and have recently fabricated test devices with Mo/Au TESs and Al collection fins. We will present results from the first tests of these devices which indicate a proof of concept that quasiparticle trapping is occurring in these materials.

Bailey, Catherine↗
NASA NTRS2011

Development of Position-Sensitive Magnetic Calorimeters for X-Ray Astronomy

Metallic magnetic calorimeters (MMC) are one of the most promising devices to provide very high energy resolution needed for future astronomical x-ray spectroscopy. MMC detectors can be built to large detector arrays having thousands of pixels. Position-sensitive magnetic (PoSM) microcalorimeters consist of multiple absorbers thermally coupled to one magnetic micro calorimeter. Each absorber element has a different thermal coupling to the MMC, resulting in a distribution of different pulse shapes and enabling position discrimination between the absorber elements. PoSMs therefore achieve the large focal plane area with fewer number of readout channels without compromising spatial sampling. Excellent performance of PoSMs was achieved by optimizing the designs of key parameters such as the thermal conductance among the absorbers, magnetic sensor, and heat sink, as well as the absorber heat capacities. Micro fab ri - cation techniques were developed to construct four-absorber PoSMs, in which each absorber consists of a two-layer composite of bismuth and gold. The energy resolution (FWHM full width at half maximum) was measured to be better than 5 eV at 6 keV x-rays for all four absorbers. Position determination was demonstrated with pulse-shape discrimination, as well as with pulse rise time. X-ray microcalorimeters are usually designed to thermalize as quickly as possible to avoid degradation in energy resolution from position dependence to the pulse shapes. Each pixel consists of an absorber and a temperature sensor, both decoupled from the cold bath through a weak thermal link. Each pixel requires a separate readout channel; for instance, with a SQUID (superconducting quantum interference device). For future astronomy missions where thousands to millions of resolution elements are required, having an individual SQUID readout channel for each pixel becomes difficult. One route to attaining these goals is a position-sensitive detector in which a large continuous or pixilated array of x-ray absorbers shares fewer numbers of temperature sensors. A means of discriminating the signals from different absorber positions, however, needs to be built into the device for each sensor. The design concept for the device is such that the shape of the temperature pulse with time depends on the location of the absorber. This inherent position sensitivity of the signal is then analyzed to determine the location of the event precisely, effectively yielding one device with many sub-pixels. With such devices, the total number of electronic channels required to read out a given number of pixels is significantly reduced. PoSMs were developed that consist of four discrete absorbers connected to a single magnetic sensor. The design concept can be extended to more than four absorbers per sensor. The thermal conductance between the sensor and each absorber is different by design and consequently, the pulse shapes are different depending upon which absorber the xrays are received, allowing position discrimination. A magnetic sensor was used in which a paramagnetic Au:Er temperature-sensitive material is located in a weak magnetic field. Deposition of energy from an x-ray photon causes an increase in temperature, which leads to a change of magnetization of the paramagnetic sensor, which is subsequently read out using a low noise dc-SQUID. The PoSM microcalorimeters are fully microfabricated: the Au:Er sensor is located above the meander, with a thin insulation gap in between. For this position-sensitive device, four electroplated absorbers are thermally linked to the sensor via heat links of different thermal conductance. One pixel is identical to that of a single-pixel design, consisting of an overhanging absorber fabricated directly on top of the sensor. It is therefore very strongly thermally coupled to it. The three other absorbers are supported directly on a silicon-nitride membrane. These absorbers are thermally coupled to the sensor via Ti (5 nm)/Au250 nm) metal links. The strength of the links is parameterized by the number of gold squares making up the link. For detector performance, experimentally different pulse-shapes were demonstrated with 6 keV x-rays, which clearly show different rise times for different absorber positions. For energy resolution measurement, the PoSM was operated at 32 mK with an applied field that was generated using a persistent current of 50 mA. Over the four pixels, energy resolution ranges from 4.4 to 4.7 eV were demonstrated.

Bandler, SImon↗
NASA NTRS2012

Blocking Filters with Enhanced Throughput for X-Ray Microcalorimetry

New and improved blocking filters (see figure) have been developed for microcalorimeters on several mission payloads, made of high-transmission polyimide support mesh, that can replace the nickel mesh used in previous blocking filter flight designs. To realize the resolution and signal sensitivity of today s x-ray microcalorimeters, significant improvements in the blocking filter stack are needed. Using high-transmission polyimide support mesh, it is possible to improve overall throughput on a typical microcalorimeter such as Suzaku s X-ray Spectrometer by 11%, compared to previous flight designs. Using polyimide to replace standard metal mesh means the mesh will be transparent to energies 3 keV and higher. Incorporating polyimide s advantageous strength-to-weight ratio, thermal stability, and transmission characteristics permits thinner filter materials, significantly enhancing through - put. A prototype contamination blocking filter for ASTRO-H has passed QT-level acoustic testing. Resistive traces can also be incorporated to provide decontamination capability to actively restore filter performance in orbit.

Grove, David↗
NASA NTRS2012

Development of a TES-Based Anti-Coincidence Detector for Future X-Ray Observations

Microcalorimeters onboard future x-ray observatories require an anticoincidence detector to remove environmental backgrounds. In order to most effectively integrate this anti-coincidence detector with the main microcalorimeter array, both instruments should use similar read-out technology. The detectors used in the Cryogenic Dark Matter Search (CDMS) use a phonon measurement technique that is well suited for an anti-coincidence detector with a microcalorimeter array using SQUID readout. This technique works by using a transition-edge sensor (TES) connected to superconducting collection fins to measure the athermal phonon signal produced when an event occurs in the substrate crystal. Energy from the event propagates through the crystal to the superconducting collection fins, creating quasiparticles, which are then trapped as they enter the TES where they produce a signal. We are currently developing a prototype anti-coincidence detector for future x-ray missions and have recently fabricated test devices with Mo/Au TESs and Al collection fins. We present results from the first tests of these devices which indicate a proof of concept that quasiparticle trapping is occurring in these materials.

Bailey, Catherine N.↗
NASA NTRS2018

Integration of Multilevel Superconducting Buried Wiring Layers with Transition-Edge Sensor Detectors for Large Scale Arrays

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

Detector↗
NASA NTRS2019

Multiabsorber Transition-Edge Sensors for X-Ray Astronomy

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Smith, Stephen J.↗
NASA NTRS2016

The Focal Plane Assembly for the Athena X-Ray Integral Field Unit Instrument

This paper summarizes a preliminary design concept for the focal plane assembly of the X-ray Integral Field Unit on the Athena spacecraft, an imaging microcalorimeter that will enable high spectral resolution imaging and point-source spectroscopy. The instrument's sensor array will be a 3840-pixel transition edge sensor (TES) microcalorimeter array, with a frequency domain multiplexed SQUID readout system allowing this large-format sensor array to be operated within the thermal constraints of the instrument's cryogenic system. A second TES detector will be operated in close proximity to the sensor array to detect cosmic rays and secondary particles passing through the sensor array for off-line coincidence detection to identify and reject events caused by the in-orbit high-energy particle background. The detectors, operating at 55 mK, or less, will be thermally isolated from the instrument cryostat's 2 K stage, while shielding and filtering within the FPA will allow the instrument's sensitive sensor array to be operated in the expected environment during both on-ground testing and in-flight operation, including stray light from the cryostat environment, low-energy photons entering through the X-ray aperture, low-frequency magnetic fields, and high-frequency electric fields.

SQUID amplifier↗
NASA NTRS2016

Ground Calibration of the Astro-H (Hitomi) Soft X-Ray Spectrometer

The Astro-H (Hitomi) Soft X-ray Spectrometer (SXS) was a pioneering imaging x-ray spectrometer with 5 eV energy resolution at 6 keV. The instrument used a microcalorimeter array at the focus of a high-throughput soft x-ray telescope to enable high-resolution non-dispersive spectroscopy in the soft x-ray waveband (0.3-12 keV). We present the suite of ground calibration measurements acquired from 2012-2015, including characterization of the detector system, anti-coincidence detector, optical blocking filters, and filter-wheel filters. The calibration of the 36-pixel silicon thermistor microcalorimeter array includes parameterizations of the energy gain scale and line spread function for each event grade over a range of instrument operating conditions, as well as quantum efficiency measurements. The x-ray transmission of the set of five Al/polyimide thin-film optical blocking filters mounted inside the SXS dewar has been modeled based on measurements at synchrotron beamlines, including with high spectral resolution at the C, N, O, and Al K-edges. In addition, we present the x-ray transmission of the dewar gate valve and of the filters mounted on the SXS filter wheel (external to the dewar), including beryllium, polyimide, and neutral density filters.

detectors↗
NASA NTRS1989

Progress in kinetic inductance thermometers for X-ray calorimeters

Conventional X-ray microcalorimeters have so far used ionimplanted resistors for thermometers. Recently, however, several new methods for sensing small temperature changes have been suggested that are nondissipative. Such devices may have intrinsically better energy resolution by eliminating the Johnson noise present in resistive devices. The use of kinetic inductance thermometers for X-ray microcalorimeters is being investigated. This technique exploits the strong temperature dependence of magnetic penetration depth of thin superconducting films. The prototype system, designed for operation at 1.5 K, uses films of aluminum and tin. Once the expected temperature sensitivity and alpha particle detection have been demonstrated, aluminum will be replaced with titanium or another material with a suitable critical temperature and the device will be operated at 0.3 K. At this temperature, the energy resolution from thermal noise should be sufficiently good to allow X-ray detection.

Rawley, G. L.↗
NASA NTRS1990

A new thermal sensor for X-ray microcalorimetry

A concept for a detector is introduced which exploits the significant temperature dependence of the dielectric constant in ferroelectric materials. The concept permits the use of a microcalorimeter without the resistive sensors which are associated with heat dissipation and increased Johnson noise in the electronic conversion circuit. General calorimeter features are listed, and the concepts related to dielectric calorimeters are discussed in terms of operational and detection advantages. The use of the device is delineated both theoretically and experimentally with the results of an operational dielectric material. The mixed-crystal quantum ferroelectric is employed and detects 6 MeV alpha particles while operating at 1.2 K in the first detection conducted. The temperature dependence of the dielectric constant in the materials allows for the elimination of resistive sensors in microcalorimeters, thereby improving the ultimate sensitivity of the instrument.

Silver, Eric↗
NASA NTRS2002

Laboratory Studies of the X-ray Emission Produced by the Interaction of Solar Wind Heavy Ions with Comets

The process of X-ray emission following charge exchange between solar wind heavy ions and cometary gases is studied in the laboratory. The emission is recorded with the spare ASTRO-E 6x6 microcalorimeter array. The microcalorimeter affords a resolution of better than 10 eV in the range of X-ray energies of interest arid thus individual emission lines can be resolved. Our present measurements focus on the most abundant K-shell heavy ions found in the solar wind. In particular, we measure the K-shell emission of bare C, N, O, and Ne, and their hydrogenlike counter parts interacting with such gases as CO2, N2, and CH4. Several results are noted that had not been considered in the early cometary X-ray models.

Beiersdorfer, P.↗
NASA NTRS2003

Development of a Cryogen-Free Continuous ADR for the Constellation-X Mission

Constellation-X is a multi-satellite x-ray astronomy mission presently being planned for launch in the 2010 time frame. Each of 4 identical satellites will contain a telescope and instruments for imaging and spectroscopic analysis of both hard and soft x-rays. The X- ray Microcalorimeter Spectrometer (XMS) instrument will use arrays of microcalorimeters to detect X-rays with energies from 0.2 to 6 keV. The technologies under development for this instrument include Transition-Edge Sensors (TES) with multiplexed SQUID readouts and NTD-Ge detectors with JFET readouts. Both will be operated at temperatures in the 50-60 mK range and both have a projected cooling power requirement of approximately 5 microwatts. In addition, in order to meet the lifetime requirement of 6 years (with a goal of 10 years), a mechanical cryocooler will be used to provide a heat sink for the low temperature cooler. The required performance is 20 mW at 6 K, with a goal of 4 K operation. In this paper we present the development status of an adiabatic demagnetization refigerator (ADR) that meets the cooling requirements of the X M S instrument. At present we have demonstrated a 4-stage ADR that operates continuously at 50 mK using a 4.2 K helium bath as a heat sink. The cooling power is 21 microwatts at 100 mK and 6 microwatts at 50 mK. Its efficiency when operating at 50 mK is 1 1 % of Carnot (accounting for all dissipation at 4.2 K and below, but not including power dissipation in the room temperature electronics), but this is expected to rise to 25% in the next generation system in which active gas-gap heat switches are replaced with passive devices. This will reduce the peak heat rejection rate of the ADR to less than 7 mW at 6 K. Details of the ADR s design and operation, as well as the development program leading up to a flight-qualified instrument, will be discussed.

Shirron, Peter↗
NASA NTRS2004

X-ray Spectrometer

The X-ray Spectrometer (XRS) instrument is a revolutionary non-dispersive spectrometer that will form the basis for the Astro-E2 observatory to be launched in 2005. We have recently installed a flight spare X R S microcalorimeter spectrometer at the EBIT-I facility at LLNL replacing the XRS from the earlier Astro-E mission and providing twice the resolution. The X R S microcalorimeter is an x-ray detector that senses the heat deposited by the incident photon. It achieves a high energy resolution by operating at 0.06K and by carefully controlling the heat capacity and thermal conductance. The XRS/EBIT instrument has 32 pixels in a square geometry and achieves an energy resolution of 6 eV at 6 keV, with a bandpass from 0.1 to 12 keV (or more at higher operating temperature). The instrument allows detailed studies of the x-ray line emission of laboratory plasmas. The XRS/EBIT also provides an extensive calibration "library" for the Astro-E2 observatory.

Porter, F. Scott↗