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At least 127 records · Page 7

Diffusion Bonding of Silicon Carbide for MEMS-LDI Applications

A robust joining approach is critically needed for a Micro-Electro-Mechanical Systems-Lean Direct Injector (MEMS-LDI) application which requires leak free joints with high temperature mechanical capability. Diffusion bonding is well suited for the MEMS-LDI application. Diffusion bonds were fabricated using titanium interlayers between silicon carbide substrates during hot pressing. The interlayers consisted of either alloyed titanium foil or physically vapor deposited (PVD) titanium coatings. Microscopy shows that well adhered, crack free diffusion bonds are formed under optimal conditions. Under less than optimal conditions, microcracks are present in the bond layer due to the formation of intermetallic phases. Electron microprobe analysis was used to identify the reaction formed phases in the diffusion bond. Various compatibility issues among the phases in the interlayer and substrate are discussed. Also, the effects of temperature, pressure, time, silicon carbide substrate type, and type of titanium interlayer and thickness on the microstructure and composition of joints are discussed.

Halbig, Michael C.↗

NASA NDE Applications for Mobile MEMS Devices and Sensors

NASA would like new devices and sensors for performing nondestructive evaluation (NDE) of aerospace vehicles. These devices must be small in size/volume, mass, and power consumption. The devices must be autonomous and mobile so they can access the internal structures of aircraft and spacecraft and adequately monitor the structural health of these craft. The platforms must be mobile in order to transport NDE sensors for evaluating structural integrity and determining whether further investigations will be required. Microelectromechanical systems (MEMS) technology is crucial to the development of the mobile platforms and sensor systems. This paper presents NASA s needs for micro mobile platforms and MEMS sensors that will enable NDE to be performed on aerospace vehicles.

Wilson, William C.↗

Ultra-Low-Power MEMS Selective Gas Sensors

This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of low-power operation of the proprietary MEMS gas sensor platform. The algorithm is used to identify a specific target gas in a gas mixture, making the sensor selective to that target gas.

Stetter, Joseph↗

Image Registration for Stability Testing of MEMS

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

Memarsadeghi, Nargess↗

SmallSat Precision Navigation with Low-Cost MEMS IMU Swarms

The continued advancement of small satellite-based science missions requires the solution to a number of important technical challenges. Of particular note is that small satellite missions are characterized by tight constraints on cost, mass, power, and volume that make them unable to fly the high-quality Inertial Measurement Units (IMUs) required for orbital missions demanding precise orientation and positioning. Instead, small satellite missions typically fly low-cost Micro-Electro-Mechanical System (MEMS) IMUs. Unfortunately, the performance characteristics of these MEMS IMUs make them ineffectual in many spaceflight applications when employed in a single IMU system configuration.

Precision navigation↗

On-Orbit, Immuno-Based, Label-Free White Blood Cell Counting System with Microelectromechanical Sensor Technology (OILWBCS-MEMS)

Aurora Flight Sciences, in partnership with Draper Laboratory, has developed a miniaturized system to count white blood cells in microgravity environments. The system uses MEMS technology to simultaneously count total white blood cells, the five white blood cell differential subgroups, and various lymphocyte subtypes. The OILWBCS-MEMS detection technology works by immobilizing an array of white blood cell-specific antibodies on small, gold-coated membranes. When blood flows across the membranes, specific cells' surface protein antigens bind to their corresponding antibodies. This binding can be measured and correlated to cell counts. In Phase I, the partners demonstrated surface chemistry sensitivity and specificity for total white blood cells and two lymphocyte subtypes. In Phase II, a functional prototype demonstrated end-to-end operation. This rugged, miniaturized device requires minimal blood sample preparation and will be useful for both space flight and terrestrial applications.

Edmonds, Jessica↗

MEMS Reaction Control and Maneuvering for Picosat Beyond LEO

The MEMS Reaction Control and Maneuvering for Picosat Beyond LEO project will further develop a multi-functional small satellite technology for low-power attitude control, or orientation, of picosatellites beyond low Earth orbit (LEO). The Film-Evaporation MEMS Tunable Array (FEMTA) concept initially developed in 2013, is a thermal valving system which utilizes capillary forces in a microchannel to offset internal pressures in a bulk fluid. The local vapor pressure is increased by resistive film heating until it exceeds meniscus strength in a nozzle which induces vacuum boiling and provides a stagnation pressure equal to vapor pressure at that point which is used for propulsion. Interplanetary CubeSats can utilize FEMTA for high slew rate attitude corrections in addition to desaturating reaction wheels. The FEMTA in cooling mode can be used for thermal control during high-power communication events, which are likely to accompany the attitude correction. Current small satellite propulsion options are limited to orbit correction whereas picosatellites are lacking attitude control thrusters. The available attitude control systems are either quickly saturated reaction wheels or movable high drag surfaces with long response times.

Low-power attitude control↗

The Ability of NASA's Meteoroid Engineering Model (MEM) 3 to Replicate in Situ Impact Data

Meteoroid environment models must describe the mass, directionality, velocity, and density distributions of meteoroids in order to correctly predict the rate at which meteoroids impact spacecraft. We present an updated version of NASA's Meteoroid Engineering Model (MEM) that better captures the correlation between directionality and velocity and incorporates a bulk density distribution. We compare the resulting model with the rate of large particle impacts seen on the Long Duration Exposure Facility (LDEF) and the Pegasus I and II satellites. Impact crater counts are modeled using two different ballistic limit equations (BLEs), one of which assumes a constant depth-to-diameter ratio and one of which yields depth-to-diameter ratios that depend on meteoroid speed and density. MEM agrees with the in situ crater record to within the range of values associated with different BLEs, but our preliminary analysis indicates that the level of agreement could be improved by reducing the strength of the toroidal meteoroid population and increasing the strength of the helion/antihelion and apex populations.

Moorhead, Althea↗

A 1-D Submm-wave Leaky-Wave Phased Array using MEMS Phase Shifters

Beam-scanning of submillimeter-wave spectrometers and radiometers have traditionally been implemented using mechanical scanning mechanisms due to the absence of lowloss electronic phase shifters. Recently developed waveguideintegrated MEMS phase shifters are paving the way to realize electronic beam-steering using submm-wave phased arrays. In this work, two phased array demonstrators are presented that operate from 500GHz to 600GHz. A 20 dB directivity 8 ? 1 leaky-wave antenna array will be demonstrated, using fixed waveguide feeding networks, to be capable of ?20? scanning with a scan loss less than 1:7 dB. Secondly, an equivalent but smaller 17 dB directivity 4 ? 1 array will be integrated with MEMS phase shifters to demonstrate a dynamic scanning capability over a ?9:5? range. The antenna array is based on closely sampled square waveguides, terminated with a double-iris, in close proximity of a low permittivity superstrate in order to reduce the grating lobes at larger scanning angles. Measurements are expected to be presented at the conference.

Chattopadhyay, Goutam↗

Exep: Environmental Testing of High-Actuator-Count Mems Deformable Mirrors for Space-Based Applications

Coronagraph instruments on future space telescopes will rely on deformable mirrors to create high contrast images for the direct detection of exoplanets. As part of the NASA Exoplanet Explorations Program’s coronagraph technology development efforts, two sets of Micro-electro-mechanical systems (MEMS) deformable mirrors manufactured by Boston Micromachines Corporation were exposed to vibration and thermal cycles representative of launch conditions. The first set were 952-actuator Kilo-DMs that successfully demonstrated 100% actuator survival and achieved ~1e-8 contrast after the environment test. The second round used an engineering-grade 2048-actuator deformable mirror on which few changes were identified after the environmental test. However, each actuator that changed behavior was flagged as anomalous beforehand or was directly adjacent to a defective actuator. From this result, we hypothesized that typical actuators on a science grade deformable mirror are robust to environmental testing. A third set of 2048-actuator deformable mirror have been procured for a planned test to characterize the deformable mirrors using interferometric measurements, contrast results on a new in-air coronagraph testbed, and infrared microscopy on the internal structure of the MEMS devices.

Lam, Charlie↗

MEMS nanopositioner and method of fabrication

A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments.

Moheimani, Seyed Omid Reza↗

Sub-Degree-Per-Hour MEMS Gyroscope for Measurement While Drilling at 300°C

The orientation module of MWD tool offers the critical drill bit orientation information, including azimuth, inclination and toolface in order to control the path of wellbore. Although high end navigation grade gyroscope can meet the accuracy requirement for azimuth finding, the requirements of cost, size and reliability under harsh environment have largely limited the deployment of gyroscopes in MWD tools. To overcome these constraints, GE Research has developed a low cost, MEMS based Multi-Ring Gyroscope (MRG) capable of azimuth-seeking in MWD applications at 300°C. The MRG prototype has been demonstrated to achieve angular random walk (ARW) better than 0.003 deg/rt(hr) and bias instability of 0.01 deg/hr, capable of meeting azimuth finding accuracy better than 0.25 deg. It has further been tested to remain fully operational at 300 °C.

15 GEOTHERMAL ENERGY↗

Coolant Pressure Evaluations for a MEMS Sensor-Array Quench Detection in REBCO CICC Superconducting Cables

Here, the initial quench pressure developments for a CICC cable of REBCO tapes have been investigated by numerical analyzing the first law of thermodynamics. The temperature and pressure rise due to the quench has been evaluated for a REBCO CICC conductor operated in helium gas coolant at 26 K. Additionally, a MEMS sensor-in-tube array method has been proposed and discussed for quench detection.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

The Application of Quaternions to Strap-Down MEMS Sensor Data

We describe the mathematical transformations required to convert the data recorded using typical 6-axis microelectromechanical systems (MEMS) sensor packages (3-axis rate gyroscopes and 3-axis accelerometers) when attached to an object undergoing a short duration loading event, such as blast loading, where inertial data alone are sufficient to track the object motion. By using the quaternion description, the complex object rotations and displacements that typically occur are translated into the more convenient earth frame of reference. An illustrative example is presented where a large and heavy object was thrown by the action of a very strong air blast in a complex manner. The data conversion process yielded an accurate animation of the object’s subsequent motion.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection

Helium is integral in several industries, including nuclear waste management and semiconductors. Thus, developing a sensing method for detecting helium is essential to ensure the proper operation of such facilities. Several approaches can be used for helium detection, including based on the high thermal conductivity of helium, which is several times higher than air. This work utilizes the high thermal conductivity of helium to design and analyze a bimorph MEMS sensor for helium sensing applications. COMSOL Multiphysics software (version 6.2) is used to carry out this investigation. The sensor is constructed from poly-silicon and SiO 2 materials with a trenched cantilever beam configuration. The sensor is electrically heated, and its morphed displacement depends on the surrounding gas’s composition, which decreases in the presence of helium. Several factors were investigated to probe their effect on the sensor’s sensitivity to helium, including the thickness of the poly-silicon layer, the configuration of the trench, and the thickness and location of SiO 2 layer. The simulations showed that the best performance, up to 2 ppm helium detection level, can be achieved with thinner beams and medium trench lengths.

47 OTHER INSTRUMENTATION↗

Development of electroplated magnetic materials for MEMS

Soft ferromagnetic materials have thus far found the most utility in magnetic-MEMS, because the technologies necessary for depositing and micromachining them have been well developed previously by the data storage industry.

MEMS magnetic materials↗