Methods of measurement for semiconductor materials, process control, and devices Quarterly report, 1 Jan. - 31 Mar. 1970
Methods of measurement for semiconductor materials process control, and devices
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Methods of measurement for semiconductor materials process control, and devices
Tuning and photovoltaic methods and identification of test conditions for measurement of semiconductor materials, process control, and devices
The design, construction and calibration of a computer-linked multicolor pyrometer is described. The device was constructed for ready adaptation to a spacecraft and for use in the control of thermal processes for manufacturing materials in space. The pyrometer actually uses only one color at a time, and is relatively insensitive to uncertainties in the heated object's emissivity because the product of the color and the temperature has been selected to be within a regime where the radiant energy emitted from the body increases very rapidly with temperature. The instrument was calibrated and shown to exceed its design goal of temperature measurements between 300 and 2000 C, and its accuracy in the face of imprecise knowledge of the hot object's emissivity was demonstrated.
Active research tasks as of the end of fiscal year 1981 of the materials processing in space program, NASA Office of Space and Terrestrial Applications are summarized to provide an overview of the program scope for managers and scientists in industry, university, and government communities. The program, its history, strategy, and overall goal are described the organizational structures and people involved are identified and a list of recent publications is given for each research task. Four categories: Crystal Growth; Solidification of Metals, Alloys, and Composites; Fluids, Transports, and Chemical Processes, and Ultrahigh Vacuum and Containerless Processing Technologies are used to group the tasks. Some tasks are placed in more than one category to insure complete coverage of each category.
Information on anticipated g-jitter on Space Station Freedom and the effect of the jitter on materials processes is given in viewgraph form. It was concluded that g-jitter will dominate the acceleration environment; that it is a 3D multifrequency phenomenon; and that it varies dramatically in orientation. Information is given on calculated or measured sources of residual acceleration, aerodynamic drag, Shuttle acceleration measurements, the Space Station environment, tolerable g-levels as a function of frequency, directional solidification, vapor crystal growth, protein crystal growth, float zones, and liquid bridges.
An experiment to create and characterize an ultra-vacuum environment in low earth orbit is being developed. A wake region is known to form behind a satellite in low earth orbit. Limited theoretical and experimental results for flowfields around spacecraft are available and a brief discussion of these results is presented. The space experiment package to create an ultra-vacuum condition in the wake region is referred to as the Wake Shield Facility (WSF), manifested for flight on the Space Shuttle in 1993. In the vacuum region, epitaxial thin-films will be processed by molecular and chemical beam epitaxial growth techniques. Various particle flowfield and materials processing considerations for this experiment are presented.
A list of active research tasks as of the end of 1978 of the Materials Processing in Space Program of the Office of Space and Terrestrial Applications, involving several NASA Centers and other organizations is reported. An overview of the program scope for managers and scientists in industry, university and government communities is provided. The program, its history, strategy and overall goal; the organizational structures and people involved; and each research task are described. Tasks are categorized by ground based research according to four process areas. Cross references to the performing organizations and principal investigators are provided.
Active research areas as of the end of the fiscal year 1982 of the Materials Processing in Space Program, NASA-Office of Space and Terrestrial Applications, involving several NASA centers and other organizations are highlighted to provide an overview of the program scope for managers and scientists in industry, university, and government communities. The program is described as well as its history, strategy and overall goal; the organizational structures and people involved are identified and each research task is described together with a list of recent publications. The tasks are grouped into four categories: crystal growth; solidification of metals, alloys, and composites; fluids, transports, and chemical processes; and ultrahigh vacuum and containerless processing technologies.
The availability status (as of November 1985) of NASA space and ground facilities for commercial materials-processing activities is surveyed. The organizational structure of the agencies managing these activities is outlined; ongoing joint-endeavor agreements are listed and described; the legal procedures involved are considered; the capabilities and limitations of the Shuttle middeck and cargo bay and the Hitchhiker module are characterized; experiments using the Drop Tower are examined; and the Industrial Guest Investigator program is reviewed. Extensive drawings, diagrams, and tables are provided.
NBS activities in developing methods of measurement for semiconductor materials, process control, and devices
This progress report describes NBS activities directed toward the development of methods of measurement for semiconductor materials, process control, and devices. Significant accomplishments during this reporting period include design of a plan to provide standard silicon wafers for four-probe resistivity measurements for the industry, publication of a summary report on the photoconductive decay method for measuring carrier lifetime, publication of a comprehensive review of the field of wire bond fabrication and testing, and successful completion of organizational activity leading to the establishment of a new group on quality and hardness assurance in ASTM Committee F-1 on Electronics. Work is continuing on measurement of resistivity of semiconductor crystals; characterization of generation-recombination-trapping centers in silicon; study of gold-doped silicon; development of the infrared response technique; evaluation of wire bonds and die attachment; and measurement of thermal properties of semiconductor devices, delay time and related carrier transport properties in junction devices, and noise properties of microwave diodes.
The physical acoustics group at the Jet Propulsion Laboratory developed a single mode acoustic levitator technique for advanced containerless materials processing. The technique was successfully demonstrated in ground based studies to temperatures of about 1000 C in a uniform temperature furnace environment and to temperatures of about 1500 C using laser beams to locally heat the sample. Researchers are evaluating microwaves as a more efficient means than lasers for locally heating a positioned sample. Recent tests of a prototype single mode hybrid microwave/acoustic levitator successfully demonstrated the feasibility of using microwave power as a heating source. The potential advantages of combining acoustic positioning forces and microwave heating for containerless processing investigations are presented in outline form.
This experiment introduces students to the application of computer-aided design (CAD) and analysis of materials processing in the context of integrated circuit (IC) fabrication. The fabrication of modern IC's is a complex process which consists of several sequential steps. These steps involve the precise control of processing variables such as temperature, humidity, and ambient gas composition. In essence, the particular process employed during the fabrication becomes a 'recipe'. Due to economic and other considerations, CAD is becoming an indispensable part of the development of new recipes for IC fabrication. In particular, this experiment permits the students to explore the CAD of the thermal oxidation of silicon.
Alpha and gamma radiation detectors and measuring instruments for semiconductor materials, process control, and devices
This study is concerned with the effects of g-jitter, the residual acceleration aboard spacecraft, on selected classes of materials processes. In particular, the anticipated acceleration environment aboard Space Station Freedom (SSF) and its potential effects are analyzed, but the topic is covered with a sufficient level of generality as to apply to other processes and to other vehicles as well. Some of the key findings of this study include: The present acceleration specifications for SSF are inadequate to assure a quality level low-g environment. The local g vector orientation is an extremely sensitive parameter for certain key processes, but can not be controlled to within the desired tolerance. Therefore, less emphasis should be placed upon achieving a tight control of SSF attitude, but more emphasis should be focused on reducing the overall level of the g-jitter magnitude. Melt-based crystal growth may not be successfully processed in the relatively noisy environment of a large inhabited space structure. Growth from vapor or from solution appears more favorable. A smaller space structure and/or a free flyer can provide better alternatives in terms of g-jitter considerations. A high priority (including budgetary) should be given to coordinated efforts among researchers, SSF designers, and equipment contractors, to develop practical experiment-specific sensitivity requirements. Combined focused numerical simulations and experiments with well-resolved acceleration measurements should be vigorously pursued for developing reliable experiment-specific sensitivity data. Appendices provide an extensive cross-referenced bibliography, a discussion of the merits offered by g-jitter analysis techniques, as well as definitions of relevant nondimensional quantities and a brief description of available accelerometry hardware.
The history, strategy, and overall goal of NASA's Office of Space and Terrestrial Applications program for materials processing in space are described as well as the organizational structures and personnel involved. An overview of each research task is presented and recent publications are listed.
Over 190 reports published in the open literature by workers in the materials processing in space program are listed according to year as well as alphabetically by author. Thirty five reports submitted for publication are also cited. Supported either directly or indirectly by NASA, the research generally pertains to the influence (or lack of influence) of gravity on processes involved in crystal growth, solidification, fluid transport, containerless phenomena, and various separation techniques of interest to the biomedical community. Studies of the possibilities of using the high vacuum in the wake of orbiting vehicles for performing processes involving large heat loads and evolution of gases are also included.
The theme of this paper is that governmental resources will not permit the simultaneous development of all viable lunar materials processing (LMP) candidates. Choices will inevitably be made, based on the results of system integration trade studies comparing candidates to each other for high-leverage applications. It is in the best long-term interest of the LMP community to lead the selection process itself, quickly and practically. The paper is in five parts. The first part explains what systems integration means and why the specialized field of LMP needs this activity now. The second part defines the integration context for LMP -- by outlining potential lunar base functions, their interrelationships and constraints. The third part establishes perspective for prioritizing the development of LMP methods, by estimating realistic scope, scale, and timing of lunar operations. The fourth part describes the use of one type of analytical tool for gaining understanding of system interactions: the input/output model. A simple example solved with linear algebra is used to illustrate. The fifth and closing part identifies specific steps needed to refine the current ability to study lunar base system integration. Research specialists have a crucial role to play now in providing the data upon which this refinement process must be based.