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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 127 records · Page 7
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

Application of cyclic fluorocarbon/argon discharges to device patterning

With increasing demands on device patterning to achieve smaller critical dimensions and pitches for the 5 nm node and beyond, the need for atomic layer etching (ALE) is steadily increasing. In this work, a cyclic fluorocarbon/Ar plasma is successfully used for ALE patterning in a manufacturing scale reactor. Self-limited etching of silicon oxide is observed. The impact of various process parameters on the etch performance is established. The substrate temperature has been shown to play an especially significant role, with lower temperatures leading to higher selectivity and lower etch rates, but worse pattern fidelity. The cyclic ALE approach established with this work is shown to have great potential for small scale device patterning, showing self-limited etching, improved uniformity and resist mask performance.

36 MATERIALS SCIENCE↗
DOE OSTI2012

Radial behavior of the pulsed dielectric-barrier discharge in atmospheric helium

The radial behavior of the pulsed dielectric-barrier discharge in atmospheric helium is studied by a two-dimensional, self-consistent fluid model. It is found that the two discharges ignited during one voltage pulse can possess different radial behaviors, and the discharge behavior is determined by the electron density distribution right before this discharge is ignited. The electron density distributions before the two discharges start depend on the time intervals between two discharges and their previous discharge processes. If the electron density distribution is radially uniform at the end of the previous discharge, the shorter the time interval between two discharges is, the more uniform the electron density distribution before the next discharge is, and thus the more homogenous the subsequent discharge becomes. In pulsed discharge, the time intervals between two discharges are mainly determined by the duration and repetition frequency of applied voltage pulse. These results are further supported by the investigation of the discharge behaviors under different pulse durations and repetition frequencies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Subglacial discharge effects on basal melting of a rotating, idealized ice shelf

When subglacial meltwater is discharged into the ocean at the grounding line, it acts as a source of buoyancy, enhancing flow speeds along the ice base that result in higher basal melt rates. The effects of subglacial discharge have been well studied in the context of a Greenland-like, vertical calving front, where Earth's rotation can be neglected. Here we study these effects in the context of Antarctic ice shelves, where rotation is important. We use a numerical model to simulate ocean circulation and basal melting beneath an idealized three-dimensional ice shelf and vary the rate and distribution of subglacial discharge. For channelized discharge, we find that in the rotating case, total melt-flux anomaly increases with two-thirds power of the discharge, in contrast to existing non-rotating results for which the melt-flux anomaly increases with one-third power of the discharge. The higher melt-flux anomaly with discharge is attributed to a more extensive area of the ice-shelf base being exposed to direct high melting by the rising plume as it is deflected due to Earth's rotation and its path is prolonged. For distributed discharge, we find that in both the rotating and the non-rotating cases, the melt-flux anomaly increases with two-thirds power of the discharge. Furthermore, in the rotating case, the addition of channelized, subglacial discharge can produce either a higher or a lower ice-shelf basal melt-flux anomaly than the equivalent amount of distributed discharge, depending on its location along the grounding line relative to the directionality of the Coriolis force. This contrasts with previous results from non-rotating, vertical ice-cliff simulations, where distributed discharge was always found to be more efficient than channelized discharge at enhancing the terminus-averaged melt rate. The implication, based on our idealized simulations, is that melt-rate parameterizations attempting to include subglacial discharge effects that are not geometry- and rotation-aware may produce total melt-flux anomalies that are off by a factor of 2 or more.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2022

Initial transient stage of pin-to-pin nanosecond repetitively pulsed discharges in air

In this work, evolution of parameters of nanosecond repetitively pulsed (NRP) discharges in pin-to-pin configuration in air was studied during the transient stage of initial 20 discharge pulses. Gas and plasma parameters in the discharge gap were measured using coherent microwave scattering, optical emission spectroscopy, and laser Rayleigh scattering for NRP discharges at repetition frequencies of 1, 10, and 100 kHz. Memory effects (when perturbations induced by the previous discharge pulse would not decay fully until the subsequent pulse) were detected for the repetition frequencies of 10 and 100 kHz. For 10 kHz NRP discharge, the discharge parameters experienced significant change after the first pulse and continued to substantially fluctuate between subsequent pulses due to rapid evolution of gas density and temperature during the 100 μs inter-pulse time caused by intense redistribution of the flow field in the gap on that time scale. For 100 kHz NRP discharge, the discharge pulse parameters reached a new steady-state at about five pulses after initiation. Further, this new steady-state was associated with well-reproducible parameters between the discharge pulses and substantial reduction in breakdown voltage, discharge pulse energy, and electron number density in comparison to the first discharge pulse. For repetition frequencies 1–100 kHz considered in this work, the memory effects can be likely attributed to the reduction in gas number density and increase in the gas temperature that cannot fully recover to ambient conditions before subsequent discharge pulses.

42 ENGINEERING↗
DOE OSTI2016

Investigation of nanosecond pulsed dielectric barrier discharge using plate-to-plate electrode with asymmetric dielectric arrangement in airflow

Atmospheric pressure dielectric barrier discharge plasma is produced in airflow by applying nanosecond high voltage pulses with peak voltage about 35 kV and rising time about 40 ns on a plate-to-plate electrode arrangement. The effects of airflow rate (0–50 m/s) on the discharge characteristics are investigated under different barrier conditions (the bare anode case and the bare cathode case). For both cases, the breakdown voltage and the time lag increase distinctly and the discharge intensity decreases sharply when the airflow rate increases from 0 to 30 m/s, and then keep almost constant until the airflow rate is further increased to 50 m/s. For the bare anode case (the cathode is covered by dielectric plate), the discharge mode transforms gradually from filamentary to diffuse discharge with the increasing airflow rate. While for the bare cathode case, some micro-discharge channels are still excited, though the discharge becomes more diffuse when the airflow rate is higher than 30 m/s. By acquiring the time-resolved images of the discharge, it is proved that it is the primary discharge which becomes diffuse when airflow is introduced and the following two discharges of the same voltage pulse occur principally at the positions where the primary discharge is more intense. And in both cases, the plasma temperatures are reduced, but the degree is different. All the phenomena can be explained mainly by the variation of the space charge distribution when the airflow is introduced into the discharge gap. And it is indicated that the bare anode case has an advantage in obtaining diffuse discharge.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2017

Hydrodynamic model of a dielectric-barrier discharge in pure chlorine

A one-dimensional hydrodynamic model of a dielectric-barrier discharge (DBD) in pure chlorine is developed, and the properties of the discharge are modeled. The discharge is excited in an 8-mm-long discharge gap between 2-mm-thick dielectric quartz layers covering metal electrodes. The DBD spatiotemporal characteristics at gas pressures of 15–100 Torr are modeled for the case in which a 100-kHz harmonic voltage with an amplitude of 8 kV is applied to the electrodes. The average power density deposited in the discharge over one voltage period is 2.5–5.8 W/cm{sup 3}. It is shown that ions and electrons absorb about 95 and 5% of the discharge power, respectively. In this case, from 67 to 97% of the power absorbed by electrons is spent on the dissociation and ionization of Cl{sub 2} molecules. Two phases can be distinguished in the discharge dynamics: the active (multispike) phase, which follows the breakdown of the discharge gap, and the passive phase. The active phase is characterized by the presence of multiple current spikes, a relatively high current, small surface charge density on the dielectrics, and large voltage drop across the discharge gap. The passive phase (with no current spikes) is characterized by a low current, large surface charge density on the dielectrics, and small voltage drop across the discharge gap. The peak current density in the spikes at all pressures is about 4 mA/cm{sup 2}. In the multispike phase, there are distinct space charge sheaths with thicknesses of 1.5–1.8 mm and a mean electron energy of 4.3–7 eV and the central region of quasineutral plasma with a weak electric field and a mean electron energy of 0.8–3 eV. The degree of ionization of chlorine molecules in the discharge is ~0.02% at a pressure of 15 Torr and ~0.01% at 100 Torr. The DBD plasma is electronegative due to the fast attachment of electrons to chlorine atoms: e + Cl{sub 2} → Cl + Cl{sup –}. The most abundant charged particles are Cl{sub 2}{sup +} and Cl{sup −} ions, and the degree of ionization during current spikes in the active phase is (4.1–5.5) × 10{sup –7}. The mechanism of discharge sustainment is analyzed. The appearance of a series of current spikes in the active phase of the discharge is explained.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS2022

Space Induced Discharge Model to Be Used on Interface Circuit Vulnerability Assessment

Charging can occur in space due to plasma and high energy particles. Charging is especially severe in certain earth orbits such as geostationary orbit, medium earth orbit and highly inclined orbit. A spacecraft that travels to other planets such as Jupiter also encounters high level of charging due to Jupiter’s radiation belt. The major concern for spacecraft operation due to charging is the survival of sensitive electrical circuits. Dielectrics and floating metal can charge up and discharge onto interface circuits. The electrical circuits need to be evaluated for survival from the electrostatic-discharge (ESD) threat. Both ESD induced upset and damage need to be assessed. The interface circuits are often located inside a shielded unit in the spacecraft structure or a shielded vault with sufficient radiation shielding to avoid surface and internal charging. The materials external to the highly shielded area can charge up and discharge onto wires that can directly dissipate the ESD onto the interface circuits. Figure 1 shows a possible discharge mechanism onto the interfacing circuits. If the wire has an external shield or a coaxial line, some or most of the discharge can flow on the shield to chassis ground. There is always coupling from external discharge. If the wire has no shield, the discharge flows onto the interface circuit. Fig. 1 Possible discharge paths onto the interface circuits. The purpose of this article is to address how to model the ESD threat to be used as the discharge source onto the interface circuit based on the electron beam test data. Different models are needed for different impedances associated with the interface circuits. Once those models are derived, one needs to analyze the interface circuit with the corresponding model using an electrical simulation tool. Then, the circuit’s front-end components can be assessed for damage and upset. Upset is highly dependent on the circuit operation and system requirements, and thus it is not addressed any further. Damage of electrical parts is often rated under Human-Body-Model (HBM) ESD. One can utilize this industry-wide available information to assess the damage vulnerability due to space discharges. However, the HBM waveform does not always match the discharge waveform. To estimate the damage vulnerability of the circuit and set margin, one needs to compare the equivalent energy delivered to the victim between a HBM discharge and the results from an ESD source model based on actual discharges. This paper presents such a comparison for a few select cases.

Xie, Julie↗
DOE OSTI2015

Two-dimensional simulation of spatiotemporal generation of dielectric barrier columnar discharges in atmospheric helium

A two-dimensional (2D) fluid model is presented to investigate the spatiotemporal generation and dynamic mechanics of dielectric barrier columnar discharges in atmospheric helium. The model was examined with discharge currents measured in experiments and images taken by an intensified charge couple device camera. Based on the model, a columnar discharge was simulated for several cycles after being ignited. The discharge could be regarded as an initial unstable stage for the first three and a half cycles, then a steady state for the following cycles. In the initial stage, the discharge evolves from a uniform pattern into a columnar one. The calculated equipotential lines, 2D radial electric field, and electron density distributions at the edge of uniform discharges show the radial electric field accounts for the shrinking discharge area and the formation of discharge columns in the end. The columnar glow discharges and the Townsend discharges beyond the columns could coexist in the initial stage, and a Townsend discharge might develop into a new glow column in the next half-cycle. The radial electric field surrounding a glow discharge column has an inhibiting effect on the ionization in the peripheral area.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗