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At least 127 records · Page 7

TaN resistor process development and integration.

This paper describes the development and implementation of an integrated resistor process based on reactively sputtered tantalum nitride. Image reversal lithography was shown to be a superior method for liftoff patterning of these films. The results of a response surface DOE for the sputter deposition of the films are discussed. Several approaches to stabilization baking were examined and the advantages of the hot plate method are shown. In support of a new capability to produce special-purpose HBT-based Small-Scale Integrated Circuits (SSICs), we developed our existing TaN resistor process, designed for research prototyping, into one with greater maturity and robustness. Included in this work was the migration of our TaN deposition process from a research-oriented tool to a tool more suitable for production. Also included was implementation and optimization of a liftoff process for the sputtered TaN to avoid the complicating effects of subtractive etching over potentially sensitive surfaces. Finally, the method and conditions for stabilization baking of the resistors was experimentally determined to complete the full implementation of the resistor module. Much of the work to be described involves the migration between sputter deposition tools - from a Kurt J. Lesker CMS-18 to a Denton Discovery 550. Though they use nominally the same deposition technique (reactive sputtering of Ta with N{sup +} in a RF-excited Ar plasma), they differ substantially in their design and produce clearly different results in terms of resistivity, conformity of the film and the difference between as-deposited and stabilized films. We will describe the design of and results from the design of experiments (DOE)-based method of process optimization on the new tool and compare this to what had been used on the old tool.

36 MATERIALS SCIENCE↗

RAMI Analysis for Designing and Optimizing Tokamak Cooling Water System (TCWS) for the ITER's Fusion Reactor

U.S.-ITER is responsible for the design, engineering, and procurement of the Tokamak Cooling Water System (TCWS). TCWS is designed to provide cooling and baking for client systems that include the first wall/blanket, vacuum vessel, divertor, and neutral beam injector. Additional operations that support these primary functions include chemical control of water provided to client systems, draining and drying for maintenance, and leak detection/localization. TCWS interfaces with 27 systems including the secondary cooling system, which rejects this heat to the environment. TCWS transfers heat generated in the Tokamak during nominal pulsed operation - 850 MW at up to 150 C and 4.2 MPa water pressure. Impurities are diffused from in-vessel components and the vacuum vessel by water baking at 200-240 C at up to 4.4 MPa. TCWS is complex because it serves vital functions for four primary clients whose performance is critical to ITER's success and interfaces with more than 20 additional ITER systems. Conceptual design of this one-of-a-kind cooling system has been completed; however, several issues remain that must be resolved before moving to the next stage of the design process. The 2004 baseline design indicated cooling loops that have no fault tolerance for component failures. During plasma operation, each cooling loop relies on a single pump, a single pressurizer, and one heat exchanger. Consequently, failure of any of these would render TCWS inoperable, resulting in plasma shutdown. The application of reliability, availability, maintainability, and inspectability (RAMI) tools during the different stages of TCWS design is crucial for optimization purposes and for maintaining compliance with project requirements. RAMI analysis will indicate appropriate equipment redundancy that provides graceful degradation in the event of an equipment failure. This analysis helps demonstrate that using proven, commercially available equipment is better than using custom-designed equipment with no field experience and lowers specific costs while providing higher reliability. This paper presents a brief description of the TCWS conceptual design and the application of RAMI tools to optimize the design at different stages during the project.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Exploration of methods to remove implanted 210 Pb and 210 Po contamination from silicon surfaces

Radioactive contaminants on the surfaces of detector components can be a problematic source of background events for physics experiments searching for rare processes. Exposure to radon is a specific concern because it can result in the relatively long-lived 210 Pb (and progeny) being implanted to significant subsurface depths such that removal is challenging. Here, in this article, we present results from a broad exploration of cleaning treatments to remove implanted 210 Pb and 210 Po contamination from silicon, which is a material frequently used in rare-events searches. We demonstrate for the first time that heat treatments (“baking”) can effectively mitigate such surface contamination, with a 1200 °C bake resulting in a 97$^{+2}_{-3}$% reduction. We also report results using wet-chemistry and plasma-based methods, which show that etching can be highly effective provided the etch depth is sufficiently aggressive. Our survey of cleaning methods suggests consideration of multiple approaches during the different phases of detector construction to enable greater flexibility for efficient removal of 210 Pb and 210 Po surface contamination.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Investigation of the silicon coated film characteristics on tungsten surface in EAST fusion device

Siliconization using 10 % SiD 4 + 90 % He assisted by ion cyclotron range of frequency discharge (ICRF) or glow discharge (GD) was performed in EAST with full tungsten (W) diverters. It was found that the coated Si film on W sample at a higher baking temperature (160 °C) was smoother than that at a lower baking temperature (60 °C). This was mainly because physically adsorbed gaseous impurities were released at a higher baker temperature. This process improved the adhesion between the film and the surface of W. An increase in the ICRF working power from 20 kW to 40 kW further increased the Si content and the film thickness by 1.5 times. The cleaning efficiency of ICRF on the surface of the W sample before siliconization was higher at 40 kW than that at 20 kW, which facilitated the removal of oxides and other compounds from the surface of W. The ratio of silicon/oxygen (Si/O) and the thickness improved considerably due to greater ionization and deposition of SiD 4 . Additionally, siliconization via GD was more uniform and 1.5 nm thicker than that via ICRF, which was because of the greater working gas pressure, coating duration, and homogeneity in GD. These results might be used as a reference for evaluating the effect of siliconization on plasma performance and its application in fusion devices.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Mixed Material Plasma-Surface Interactions in ITER: Recent Results from the PISCES Group

This paper summarizes recent PISCES studies focused on the effects associated with mixed species plasmas that are similar in composition to what one might expect in ITER. Formation of nanometer scale whiskerlike features occurs in W surfaces exposed to pure He and mixed D/He plasmas and appears to be associated with the formation of He nanometer-scaled bubbles in the W surface. Studies of Be-W alloy formation in Be-seeded D plasmas suggest that this process may be important in ITER all metal wall operational scenarios. Studies also suggest that BeD formation via chemical sputtering of Be walls may be an important first wall erosion mechanism. D retention in ITER mixed materials has also been studied. The D release behavior from beryllium co-deposits does not appear to be a diffusion dominated process, but instead is consistent with thermal release from a number of variable trapping energy sites. As a result, the amount of tritium remaining in codeposits in ITER after baking will be determined by the maximum temperature achieved, rather than by the duration of the baking cycle.

36 MATERIALS SCIENCE↗

Measurement of the ratio of hydrogen to deuterium at the KSTAR 2009 experimental campaign

The control of the ratio of hydrogen to the deuterium is one of the very important issues for ion cyclotron range of frequency (ICRF) minority heating as well as the plasma wall interaction in the tokamak. The ratio of hydrogen to deuterium during the tokamak shot was deduced from the emission spectroscopy measurements during the KSTAR 2009 experimental campaign. Graphite tiles were used for the plasma facing components (PFCs) at KSTAR and its surface area exposed to the plasma was about 11 m{sup 2}. The data showed that it remained as high as around 50% during the campaign period because graphite tiles were exposed to the air for about two months and the hydrogen contents at the tiles are not fully pumped out due to the lack of baking on the PFC in the 2009 campaign. The validation of the spectroscopy method was checked by using the Zeeman effects and the ratio of hydrogen to the deuterium is compared with results from the residual gas analysis. During the tokamak shot, the ratio is low below 10% initially and saturated after around 1 s. When there is a hydrogen injection to the vessel via ion cyclotron wall conditioning and the boronization process where the carbone is used, the ratio of the hydrogen to the deuterium is increased by up to 100% and it recovers to around 50% after one day of operation. However it does not decrease below 50% at the end of the experimental campaign. It was found that the full baking on the PFC (with a high temperature and sufficient vacuum pumping) is required for the ratio control which guarantees the efficient ICRF heating at the KSTAR 2010 experimental campaign.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Permanent magnet electron beam ion source/trap systems with bakeable magnets for improved operation conditions

The magnetic system of a Dresden electron beam ion source (EBIS) generating the necessary magnetic field with a new type of permanent magnet made of high energy density NdFeB-type material operable at temperatures above 100 °C has been investigated and tested. The employment of such kind of magnets provides simplified operation without the time-consuming installation and de-installation procedures of the magnets for the necessary baking of the ion source after commissioning and maintenance work. Furthermore, with the use of a new magnetization technique the geometrical filling factor of the magnetic Dresden EBIS design could be increased to a filling factor of 100% leading to an axial magnetic field strength of approximately 0.5 T exceeding the old design by 20%. Simulations using the finite element method software Field Precision and their results compared with measurements are presented as well. It could be shown that several baking cycles at temperatures higher than 100 °C did not change the magnetic properties of the setup.

43 PARTICLE ACCELERATORS↗

Dependence of the residual surface resistance of superconducting radio frequency cavities on the cooling dynamics around T{sub c}

We report a strong effect of the cooling dynamics through T{sub c} on the amount of trapped external magnetic flux in superconducting niobium cavities. The effect is similar for fine grain and single crystal niobium and all surface treatments including electropolishing with and without 120 °C baking and nitrogen doping. Direct magnetic field measurements on the cavity walls show that the effect stems from changes in the flux trapping efficiency: slow cooling leads to almost complete flux trapping and higher residual resistance, while fast cooling leads to the much more efficient flux expulsion and lower residual resistance.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

A highly miniaturized vacuum package for a trapped ion atomic clock

We report on the development of a highly miniaturized vacuum package for use in an atomic clock utilizing trapped ytterbium-171 ions. The vacuum package is approximately 1 cm{sup 3} in size and contains a linear quadrupole RF Paul ion trap, miniature neutral Yb sources, and a non-evaporable getter pump. We describe the fabrication process for making the Yb sources and assembling the vacuum package. To prepare the vacuum package for ion trapping, it was evacuated, baked at a high temperature, and then back filled with a helium buffer gas. Once appropriate vacuum conditions were achieved in the package, it was sealed with a copper pinch-off and was subsequently pumped only by the non-evaporable getter. We demonstrated ion trapping in this vacuum package and the operation of an atomic clock, stabilizing a local oscillator to the 12.6 GHz hyperfine transition of {sup 171}Y b{sup +}. The fractional frequency stability of the clock was measured to be 2 × 10{sup −11}/τ{sup 1/2}.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Robust Optical Richness Estimation with Reduced Scatter

Reducing the scatter between cluster mass and optical richness is a key goal for cluster cosmology from photometric catalogs. We consider various modifications to the red-sequence matched filter richness estimator of Rozo et al. (2009b), and evaluate their impact on the scatter in X-ray luminosity at fixed richness. Most significantly, we find that deeper luminosity cuts can reduce the recovered scatter, finding that {sigma}{sub ln L{sub X}|{lambda}} = 0.63 {+-} 0.02 for clusters with M{sub 500c} {approx}> 1.6 x 10{sup 14} h{sub 70}{sup -1} M{sub {circle_dot}}. The corresponding scatter in mass at fixed richness is {sigma}{sub ln M|{lambda}} {approx} 0.2-0.3 depending on the richness, comparable to that for total X-ray luminosity. We find that including blue galaxies in the richness estimate increases the scatter, as does weighting galaxies by their optical luminosity. We further demonstrate that our richness estimator is very robust. Specifically, the filter employed when estimating richness can be calibrated directly from the data, without requiring a-priori calibrations of the red-sequence. We also demonstrate that the recovered richness is robust to up to 50% uncertainties in the galaxy background, as well as to the choice of photometric filter employed, so long as the filters span the 4000 {angstrom} break of red-sequence galaxies. Consequently, our richness estimator can be used to compare richness estimates of different clusters, even if they do not share the same photometric data. Appendix A includes 'easy-bake' instructions for implementing our optimal richness estimator, and we are releasing an implementation of the code that works with SDSS data, as well as an augmented maxBCG catalog with the {lambda} richness measured for each cluster.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Control of hydrogen content and fuel recycling for long pulse high performance plasma operation in EAST

Control of fuel recycling and hydrogen content in the Experimental Advanced Superconducting Tokamak (EAST) using various methods is studied for high-power long pulse high confinement mode (H-mode) plasma operation. The results show that long duration first wall baking and discharge cleaning in EAST provides the necessary clean vacuum environment with a high ultimate vacuum of 3.6 × 10 -6 Pa and low outgassing rate of ~1.5 × 10 -4 Pa m 3 s -1 for plasma operation. In-vessel cryopumps are found to provide an efficient method for particle recycling control in the divertor region to decrease global recycling coefficient (R global ) from ~1.0 to ~0.8 during ohmic heating plasmas, and it provides a high particle exhausting rate of 10 20_ 10 21 D-atoms s -1 in high-power plasma operations. Long duration silicon coating is found to be more powerful than baking and discharge cleaning, which reduces the H/(H + D) ratio gradually to a value as low as 8%, and lithium coating is more effective and more efficient than silicon coating, to further reduce the H/(H + D) ratio to 3%. Real-time lithium powder injection is a novel method for recycling control, which reduces R global from 0.94 to 0.82 under lithium coating wall conditioning. By the combination and optimization of the above methods, H-mode plasmas with low hydrogen content and low fuel recycling have been achieved in EAST and have been extended gradually to 101 s in 2017. Recycling flux has even decreased gradually during 101 s H-mode plasmas due to increased first wall temperature and the resulting increased Li-II emission. These results provide valuable references on hydrogen content and fuel recycling control for long pulse H-mode plasmas of up to 400–1000 s with high-power heating in EAST and future fusion devices.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Feasibility of raised inner strike point equilibria scenario in ITER for detritiation from beryllium co-deposits

Abstract In ITER, tritium retention primarily occurs through co-deposition with beryllium. To avoid exceeding the strict tritium inventory limit, efficient tritium recovery techniques are essential. Baking is the ITER baseline for tritium recovery, but its effectiveness in removing tritium from thick beryllium layers is limited. A raised strike point scenario is considered an alternative method for removing tritium from the ITER inner vertical divertor target by heating components via plasma flux. This paper presents SOLPS-ITER code simulations conducted under various conditions, assessing the divertor performance and tritium outgassing of the raised strike point scenario. As the strike point is raised, recycled neutrals are not efficiently baffled by the dome and scrape-off layer, significantly changing the neutral trajectory and ionization source distribution. This improves detachment accessibility but worsens core-edge compatibility compared to the baseline scenario. However, in the partially detached condition, the impact of raising the strike point, perpendicular transport, and q 95 on target heat flux is not significant, as it primarily scales with the input power. Target heat flux is translated to target surface temperature using a simplified heat transfer model that considers the 3D target monoblock geometry and active cooling condition, excluding Be layer thermal properties. For partially detached divertor conditions, the bulk tungsten monoblock surface temperature remains below the baking temperature, which is insufficient for efficient tritium outgassing under the actively cooled ITER divertor condition. However, considering the potential thermal contact resistance between the beryllium and tungsten layers, which may significantly impact temperature distribution, the temperature of the beryllium layer can be raised to a level sufficient for efficient tritium outgassing. Therefore, the raised strike point scenario can be considered as an alternative in-vessel tritium removal technique.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

The Effect of Heat Treatments and Coatings on the Outgassing Rate of Stainless Steel Chambers

The outgassing rates of four nominally identical 304L stainless steel vacuum chambers were measured to determine the effect of chamber coatings and heat treatments. One chamber was coated with titanium nitride (TiN) and one with amorphous silicon (a-Si) immediately following fabrication. One chamber remained uncoated throughout, and the last chamber was first tested without any coating, and then coated with a-Si following a series of heat treatments. The outgassing rate of each chamber was measured at room temperatures between 15 and 30 deg C following bakes at temperatures between 90 and 400 deg C. Measurements for bare steel showed a significant reduction in the outgassing rate by more than a factor of 20 after a 400 deg C heat treatment (3.5 x 10{sup 12} TorrL s{sup -1}cm{sup -2} prior to heat treatment, reduced to 1.7 x 10{ sup -13} TorrL s{sup -1}cm{sup -2} following heat treatment). The chambers that were coated with a-Si showed minimal change in outgassing rates with heat treatment, though an outgassing rate reduced by heat treatments prior to a-Si coating was successfully preserved throughout a series of bakes. The TiN coated chamber exhibited remarkably low outgassing rates, up to four orders of magnitude lower than the uncoated stainless steel. An evaluation of coating composition suggests the presence of elemental titanium which could provide pumping and lead to an artificially low outgassing rate. The outgassing results are discussed in terms of diffusion-limited versus recombination-limited processes.

43 PARTICLE ACCELERATORS↗

Use of non evaporable getter pumps to ensure long term performances of high quantum efficiency photocathodes

High quantum efficiency photocathodes are routinely used as laser triggered emitters in the advanced high brightness electron sources based on radio frequency guns. The sensitivity of “semiconductor” type photocathodes to vacuum levels and gas composition requires special care during preparation and handling. This paper will discuss the results obtained using a novel pumping approach based on coupling a 20 l s{sup −1} sputter ion getter pump with a CapaciTorr® D100 non evaporable getter (NEG) pump. A pressure of 8⋅10{sup −8} Pa was achieved using only a sputter ion pump after a 6 day bake-out. With the addition of a NEG pump, a pressure of 2⋅10{sup −9} Pa was achieved after a 2 day bake-out. These pressure values were maintained without power due to the ability of the NEG to pump gases by chemical reaction. Long term monitoring of cathodes quantum efficiencies was also carried out at different photon wavelengths for more than two years, showing no degradation of the photoemissive film properties.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers

We present the details of our study on the internal stresses and adhesion strengths of SU-8 structures to different substrate seed layers. The effect of adhesion promoter - methacryloxy [propl] trimethoxysilane (MPTS), and OmniCoat - and different seed layer combinations (Ti/Cu/Ti, Ti/Cu, Cr/Au, and Cr/Au/Cr) was examined for internal stress and adhesion strength in 650-{micro}m-thick SU-8 films. Increased stress and poor adhesion have led to the delamination of SU-8 in some cases. Adhesion and stress have proven to be the function of process parameters such as soft bake (time and temperature), exposure dose, post-exposure bake (time and temperature), and development time. We have found that a <100> silicon wafer containing a titanium-copper-titanium (Ti/Cu/Ti) seed layer with MPTS as the adhesion promoter yielded a thick SU-8 film with a lower value of stress and consequently better adhesion for processing in deep x-ray lithography (DXRL). A detailed correlation of the effects of adhesion and internal stress on the SU-8 film is discussed. An analysis of the possible chemical bonding interactions occurring between SU-8, and its adhesion promoter and/or substrate is also presented.

36 MATERIALS SCIENCE↗

RESCue Model (RESCue Experiment and Model) [SWR-24-84]

The Renewable Energy and Storage Cybersecurity Research (RESCue) project is a collaborative effort aimed at securing the rapidly growing deployment of transmission-connected hybrid renewable energy systems, consisting of a combination of wind, solar, and/or energy storage equipment, against escalating cyber threats. This project brings together major original equipment manufacturers (OEMs) of wind, solar, and energy storage, along with major asset owners and DOE National Laboratories, to collectively identify cyber threats, assess risks, and develop robust cybersecurity strategies and solutions. The development of hybrid reference architectures has provided comprehensive blueprints for the secure design and integration of hybrid renewable energy systems, accounting for their unique characteristics and interdependencies. Additionally, NREL has created a cyber-resilient design framework that integrates cybersecurity considerations from the start of the system lifecycle, ensuring security is "baked in" from the initial design phase. The research thrusts for the project included (i) development of hybrid reference architectures and (ii) a cyber-resilient design framework for hybrid energy systems. The reference architectures has provided comprehensive blueprints for the secure design and integration of hybrid renewable energy systems, accounting for their unique characteristics and interdependencies. Additionally, NREL has created a cyber-resilient design framework that integrates cybersecurity considerations from the start of the system lifecycle, ensuring security is "baked in" from the initial design phase. A demonstration experiment was developed for one of the architectures using NREL's Cyber Range resources. This experiment configuration, deployable using open-source tools, is provided here in this repository. Additional models were developed for the wind and solar architectures as well, however the configurations for only the Energy Storage scenario are provided here: https://www.nrel.gov/docs/fy24osti/89921.pdf

Hasandka, Adarsh↗

Scalability of high-performance PDE solvers

Performance tests and analyses are critical to effective high-performance computing software development and are central components in the design and implementation of computational algorithms for achieving faster simulations on existing and future computing architectures for large-scale application problems. In this article, we explore performance and space-time trade-offs for important compute-intensive kernels of large-scale numerical solvers for partial differential equations (PDEs) that govern a wide range of physical applications. We consider a sequence of PDE-motivated bake-off problems designed to establish best practices for efficient high-order simulations across a variety of codes and platforms. We measure peak performance (degrees of freedom per second) on a fixed number of nodes and identify effective code optimization strategies for each architecture. In addition to peak performance, we identify the minimum time to solution at 80% parallel efficiency. The performance analysis is based on spectral and p-type finite elements but is equally applicable to a broad spectrum of numerical PDE discretizations, including finite difference, finite volume, and h-type finite elements.

97 MATHEMATICS AND COMPUTING↗

Taguchi Design of Experiment Enabling the Reduction of Spikes on the Sides of Patterned Thin Films for Tunnel Junction Fabrication

Photolithographically patterned thin films often possess unwanted spikes along the side edges. These spikes are a significant issue for the development of spinvalve memory, tunnel junction based molecular devices, and micro-electromechanical systems. Here, we report a very simple, economical, and fast way of creating an optimum photoresist profile for the production of spike-free patterned films. This approach is based on performing a soaking step in the positive-photoresist’s developer solution before the UV exposure. However, the success of this method depends on multiple photolithography factors: photoresist thickness (governed by spin speed), soft baking temperature, soaking time in developer, and exposure time. In this paper, we report our systematic experiments to study the effect of these factors by following the L9 experimental scheme of the Taguchi Design of experiment (TDOE) approach. The L9 experiment scheme effectively accommodated the study of four photolithography factors, each with three levels. After performing photolithography as per L9 TDOE scheme, we sputter deposited 20 nm Tantalum to check the side edge profile of the patterned film by atomic force microscope (AFM). We measured the heights of the spikes along the thin film edges. We utilized spike height as the desired property and chose “smaller the better” criteria for the TDOE analysis. TDOE enabled us to understand the relative importance of the parameters, relationship among the parameters, and impact of the various levels of the parameters on the thin film edge profile. TDOE analysis yielded an optimum combination of levels for the four photolithography factors. The optimum combination of photolithography factors included spin speed 4000 rpm, 100 °C soft baking temperature, 60 sec pre-soaking in the developer solution, and 15 sec UV exposure. We validated the TDOE by AFM and observed spike free patterned films. Here, we also made complete tunnel junction devices by utilizing the optimized photolithography factors for the bottom electrode and obtained excellent tunneling behavior. In summary, this study provides a very simple, economical, and fast photolithography approach for creating optimum photoresist profile for the micro-nano scale devices and electromechanical structures.

36 MATERIALS SCIENCE↗