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At least 1,243 records · Page 69

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗

The Forward Physics Facility: Sites, experiments, and physics potential

The Forward Physics Facility (FPF) is a proposal to create a cavern with the space and infrastructure to support a suite of far-forward experiments at the Large Hadron Collider during the High Luminosity era. Located along the beam collision axis and shielded from the interaction point by at least 100 m of concrete and rock, the FPF will house experiments that will detect particles outside the acceptance of the existing large LHC experiments and will observe rare and exotic processes in an extremely low-background environment. In this work, we summarize the current status of plans for the FPF, including recent progress in civil engineering in identifying promising sites for the FPF and the experiments currently envisioned to realize the FPF’s physics potential. We then review the many Standard Model and new physics topics that will be advanced by the FPF, including searches for long-lived particles, probes of dark matter and dark sectors, high-statistics studies of TeV neutrinos of all three flavors, aspects of perturbative and non-perturbative QCD, and high-energy astroparticle physics.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗

Analytical characterization of laser induced plasmas towards uranium isotopic analysis in gaseous uranium hexafluoride

To perform direct enrichment assay on gaseous uranium hexafluoride (UF 6 ) with laser induced breakdown spectroscopy (LIBS), the dominant spectral-line features, evolution of the signal and background of the U II 424.437 nm line, and its Stark width and shift, were studied as a function of UF 6 gas pressure and pulse energy of a nanosecond Nd:YAG laser. In this work, vapor pressure of UF 6 was found to be the most important parameter for LIBS analysis of gaseous UF 6 . Spectral congestion with numerous U lines of high excitation potential was observed and signal-to-background ratio (SBR) was low for measurements with 80 Torr UF 6 . Only when both UF 6 vapor pressure and laser pulse energy were low, for example, less than 20 Torr pressure and 30 mJ pulse energy, the resultant LIBS spectra from gaseous UF 6 resembled those obtained from solid U samples. The experimental data also suggest that U and F atoms recombine back to UF 6 after the laser pulse. The U emission was found to decay fast with a persistent background signal, degrading SBR with delay time. Systematic positive biases were found for UF 6 enrichment assays performed with the 235 U– 238 U line pair at 424.412–424.437 nm, which was confirmed to be caused by self-absorption. Even with optimization of experimental parameters and incorporation of a self-absorption term into the spectral-fitting algorithm, to reduce and compensate for self-absorption, self-absorption is still a main factor limiting accurate UF 6 enrichment assay. The use of another spectral window which contains no resonance lines is a prospective solution for the self-absorption issue.

38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEA↗

Advancing the Performance of Lithium-Rich Oxides in Cooperation with Inherent Complexities: Engineering Domain Structure

The nanodomain structure of lithium- and manganese-rich, composite cathode materials has been systematically altered through synthesis conditions while keeping larger-scale morphological differences to a minimum. Clear changes in electrochemical performance across the samples studied are observed, especially with respect to the anomalous impedance at low states-of-charge. Atomic-scale modeling, coupled to electrochemical measurements and physical characterization, reveals the local consequences of the high-voltage activation charge process as a function of specific domain structures. Furthermore, the results explain the influence of different postactivation structures on the insertion of Li-ions and the associated impedance during discharge. This work adds to our series of studies on lithium- and manganese-rich oxides, demonstrating that the inherent performance of LMRs can be greatly enhanced through rational, highly controlled synthetic strategies based on an understanding of synthesis–structure–property relationships across length scales.

25 ENERGY STORAGE↗

Cation Selectivity in Capacitive Deionization: Elucidating the Role of Pore Size, Electrode Potential, and Ion Dehydration

Capacitive deionization (CDI) is a promising water desalination technology that is applicable to the treatment of low-salinity brackish waters and the selective removal of ionic contaminants. In this work, we show that by making a small change in the synthetic procedure of hierarchical carbon aerogel monolith (HCAM) electrodes, we can adjust the pore-size distribution and tailor the selectivity, effectively switching between selective adsorption of calcium or sodium ions. Ion selectivity was measured for a mixture of 5 mM NaCl and 2.5 mM CaCl 2 . For the low activated flow-through CDI (fteCDI) cell, we observed extremely high sodium selectivity over calcium (S Na/Ca $\gg$ 10, no Ca 2+ adsorbed) at all of the applied potentials, while for the highly activated fteCDI cell, we observed a selectivity value of 6.6 ± 0.8 at 0.6 V for calcium over sodium that decreased to 2.2 ± 0.03 at 1.2 V. Molecular dynamics simulations indicated that the loss in Ca 2+ selectivity over Na+ at high applied voltages could be due to a competition between ion-pore electrostatic interactions and volume exclusion (“crowding”) effects. Interestingly, we also find with these simulations that the relative sizes of the ions change due to changes in hydration at a higher voltage.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

A Novel Magnetic Material by Design: Observation of Yb 3+ with Spin-1/2 in Yb x Pt 5 P

The localized f-electrons enrich the magnetic properties in rare-earth-based intermetallics. Among those, compounds with heavier 4d and 5d transition metals are even more fascinating because anomalous electronic properties may be induced by the hybridization of 4f and itinerant conduction electrons primarily from the d orbitals. Here, we describe the observation of trivalent Yb 3+ with S = 1/2 at low temperatures in Yb x Pt 5 P, the first of a new family of materials. Yb x Pt 5 P (0.23 ≤ x ≤ 0.96) phases were synthesized and structurally characterized. They exhibit a large homogeneity width with the Yb ratio exclusively occupying the 1a site in the anti-CeCoIn 5 structure. Moreover, a sudden resistivity drop could be found in Yb x Pt 5 P below ~0.6 K, which requires further investigation. First-principles electronic structure calculations substantiate the antiferromagnetic ground state and indicate that two-dimensional nesting around the Fermi level may give rise to exotic physical properties, such as superconductivity. Yb x Pt 5 P appears to be a unique case among materials.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Quantum Emitters Induced by High Pressure and UV Laser Irradiation in Multilayer GaSe

In this work, we report on defect generation in multilayer GaSe through hydrostatic pressure quenching and UV laser irradiation. The Raman line width from the UV 266 nm irradiated sample is much wider than that in pressure-quenched GaSe, corresponding to a wider defect energy distribution range in the former sample than the latter. After quenching from 11.2 GPa, three photoluminescence (PL) peaks from defect states are observed at 657, 681, and 695 nm at a low temperature of 93 K. Defect-related peaks at 649, 694, 750, and 774 nm also appear in low-temperature PL spectra after UV laser irradiation, with a nonmonotonous intensity dependence on irradiation duration. There are common features in defects produced by these two methods: the PL peaks with the lowest energy are sharp, and their PL intensities increase linearly with the excitation laser power and saturate above a certain excitation laser power. These two features are similar to those in defects for single-photon emission (SPE) in other 2D materials at even lower temperatures. Fluorescence lifetime imaging shows distinguished short (2.3 ns) and long (75.6 nm) lifetimes of the 695 nm PL line in pressure-quenched GaSe. The density functional theory predicts defect energy levels related to Se vacancy.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Field-tunable valley coupling in a dodecagonal semiconductor quasicrystal

Quasicrystals are characterized by atomic arrangements having long-range order without periodicity. Van der Waals bilayers provide an opportunity to controllably vary the atomic alignment between two layers from a periodic moiré crystal to an aperiodic quasicrystal. Here, in this work, we reveal that in a dodecagonal WSe 2 quasicrystal, two separate valleys in separate layers are brought arbitrarily close in momentum space through higher-order Umklapp scatterings. A modest perpendicular electric field is then sufficient to induce strong interlayer valley hybridization, manifested as another hybrid excitonic doublet. Concurrently, we observe the disappearance of the trion that exists at low field, which we attribute to a modified spatial distribution of the wavefunction due to the quasicrystal potential. This is possibly a precursor to localization. Our findings highlight the ability of incommensurate systems to bring any pair of momenta into close proximity, thereby introducing opportunities for valley engineering.

electronic properties and materials↗

Interlayer spacing in pillared and grafted MCM-22 type silicas: density functional theory analysis versus experiment

Pillaring of synthetic layered crystalline silicates and aluminosilicates provides a strategy to enhance their adsorption and separation performance, and can facilitate the understanding of such behavior in more complex natural clays. In this study, we perform the first-principles density functional theory calculations for the pillaring of the pure silica polymorph of an MCM-22 type molecular sieve. Starting with a precursor material MCM-22P with fully hydroxylated layers, a pillaring agent, (EtO) 3 SiR, can react with hydroxyl groups (–OH) on adjacent internal surfaces, 2(–OH) + (EtO) 3 SiR + H 2 O → (–O) 2 SiOHR + 3EtOH, to form a pillar bridging these surfaces, or with a single hydroxyl, –OH + (EtO) 3 SiR + 2H 2 O → (–O)Si(OH) 2 R + 3EtOH, grafting to one surface. For computational efficiency, we replace the experimental organic ligand, R, by a methyl group. We find that the interlayer spacing in MCM-22 is reduced by 2.66 Å relative to weakly bound layers in the precursor MCM-22P. Including (–O) 2 SiR bridges for 50% (100%) of the hydroxyl sites in MCM-22P increases the interlayer spacing relative to MCM-22 by 2.52 Å (2.46 Å). For comparison, we also analyze the system where all –OH groups in MCM-22P are replaced by non-bridging grafted (–O)Si(OH) 2 R which results in a smaller interlayer spacing expansion of 2.17 Å relative to MCM-22. Our results for the interlayer spacing in the pillared materials are compatible with experimental observations for a similar MCM-22 type material with low Al content (Si : Al = 51 : 1) of an expansion relative to MCM-22 of roughly 2.8 Å and 2.5 Å from our x-ray diffraction and scanning transmission electron microscopy analyses, respectively. The latter analysis reveals significant variation in individual layer spacings.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Decoding NGC 7252 as a blue elliptical galaxy

Elliptical galaxies with blue optical colours and significant star formation are hypothesised to be major merger remnants of gas-rich spiral galaxies or normal elliptical galaxies with a sudden burst of star formation. We present here a scenario in which blue elliptical galaxies identified in shallow imaging surveys may fail to recover faint features that are indicative of past merger activity using a nearby major merger remnant. Based on deep optical imaging data of the post-merger galaxy, NGC 7252, we demonstrate that the galaxy can appear as an elliptical galaxy if it is observed at higher redshifts. The main body and the low surface brightness merger features found at the outskirts of the galaxy are blue in the optical g – r colour map. We argue that the higher-redshift blue elliptical galaxies discovered in surveys as shallow as the SDSS or DECaLS may be advanced mergers whose defining tidal features fall below the detection limits of the surveys. This should be taken into consideration during the morphological classification of these systems in future and ongoing surveys.

79 ASTRONOMY AND ASTROPHYSICS↗

Electric dipole excitations near the neutron separation energies in 96 Mo

Electric dipole strength near the neutron separation energy significantly impacts nuclear structure properties and astrophysical scenarios. These excitations are complex in nature and may involve the so-called pygmy dipole resonance (PDR). Transition densities play a crucial role in understanding the nature of nuclear excited states, including collective excitations, as well as in constructing transition potentials in DWBA or coupled-channels equations. In this work, we focus on electric dipole excitations in spherical molybdenum isotopes, particularly 96 Mo, employing fully consistent Hartree-Fock-Bogoliubov (HFB) and Quasiparticle Random Phase Approximation (QRPA) methods. We analyze the dipole strength near the neutron separation energy, which represents the threshold for neutron capture processes, and examine the isospin characteristics of PDR states through transition density calculations. Examination of proton and neutron transition densities reveals distinctive features of each dipole state, indicating their isoscalar and isovector nature. We observe that the primary component in the enhanced low-energy region exhibits isovector character. The PDR displays a mixture of isoscalar and isovector nature, distinguishing it from the isovector giant dipole resonance (IVGDR). These findings lay the groundwork for future investigations into the role of transition densities in reaction models and for their application to inelastic scattering calculations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Lithium, a path to make fusion energy affordable

In this tutorial article, we review the technological, physics, and economic basis for a magnetic fusion device utilizing a flowing liquid lithium divertor (molten metal velocity in the range of cm/s) and operating in a low-recycling plasma regime. When extrapolated to magnetic fusion reactor scale, the observed effects of a liquid lithium boundary on recycling reduction, confinement increase, and anomalous heat transport mitigation may offer a fundamentally distinct and promising alternative route to fusion energy production. In addition, this lithium-driven low recycling regime could accelerate fusion’s commercial viability since such a device would be smaller, dramatically decreasing plant and electricity costs if all technological complexities are solved. First, the theoretical basis of the energy confinement and fusion performance as well as the related possibilities of low recycling regimes driven by flowing lithium plasma-facing components are reviewed. Then the paper emphasizes the technological obstacles that need to be overcome for developing the necessary systems for such a flowing liquid lithium solution at reactor scale and details how many of these have been overcome at laboratory and/or proof-of-concept scale. Finally, the current and planned scientific and engineering endeavors being performed at the University of Illinois at Urbana-Champaign regarding this alternative reactor option are discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analysis of core asymmetries in inertial confinement fusion implosions using three-dimensional hot-spot reconstruction

Three-dimensional effects play a crucial role during the hot-spot formation in inertial confinement fusion (ICF) implosions. A data analysis technique for 3D hot-spot reconstruction from experimental observables has been developed to characterize the effects of low modes on 3D hot-spot formations. In nuclear measurements, the effective flow direction, governed by the maximum eigenvalue in the velocity variance of apparent ion temperatures, has been found to agree with the measured hot-spot flows for implosions dominated by mode ℓ = 1. Asymmetries in areal-density (ρR) measurements were found to be characterized by a unique cosine variation along the hot-spot flow axis. In x-ray images, a 3D hot-spot x-ray emission tomography method was developed to reconstruct the 3D hot-spot plasma emissivity using a generalized spherical-harmonic Gaussian function. The gradient-descent algorithm was used to optimize the mapping between the projections from the 3D hot-spot emission model and the measured x-ray images along multiple views. Furthermore, this work establishes a platform to analyze 3D low-mode core asymmetries in ICF.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Assessing effective radiative forcing from aerosol–cloud interactions over the global ocean

How clouds respond to anthropogenic sulfate aerosols is one of the largest sources of uncertainty in the radiative forcing of climate over the industrial era. This uncertainty limits our ability to predict equilibrium climate sensitivity (ECS)—the equilibrium global warming following a doubling of atmospheric CO 2 . Here, we use satellite observations to quantify relationships between sulfate aerosols and low-level clouds while carefully controlling for meteorology. We then combine the relationships with estimates of the change in sulfate concentration since about 1850 to constrain the associated radiative forcing. We estimate that the cloud-mediated radiative forcing from anthropogenic sulfate aerosols is − 1.11 ± 0.43 W m −2 over the global ocean (95% confidence). This constraint implies that ECS is likely between 2.9 and 4.5 K (66% confidence). Our results indicate that aerosol forcing is less uncertain and ECS is probably larger than the ranges proposed by recent climate assessments.

54 ENVIRONMENTAL SCIENCES↗

Designing the stripe-ordered cuprate phase diagram through uniaxial-stress

The ability to efficiently control charge and spin in the cuprate high-temperature superconductors is crucial for fundamental research and underpins technological development. Here, we explore the tunability of magnetism, superconductivity and crystal structure in the stripe phase of the cuprate La 2-x Ba x CuO 4 , with x = 0.115 and 0.135, by employing temperature-dependent (down to 400 mK) muon-spin rotation and AC susceptibility, as well as X-ray scattering experiments under compressive uniaxial stress in the CuO 2 plane. A sixfold increase of the 3-dimensional (3D) superconducting critical temperature T c and a full recovery of the 3D phase coherence is observed in both samples with the application of extremely low uniaxial stress of 0.1 GPa. This finding demonstrates the removal of the well-known 1/8-anomaly of cuprates by uniaxial stress. On the other hand, the spin-stripe order temperature as well as the magnetic fraction at 400 mK show only a modest decrease under stress. Moreover, the onset temperatures of 3D superconductivity and spin-stripe order are very similar in the large stress regime. However, a substantial decrease of the magnetic volume fraction and a full suppression of the low-temperature tetragonal structure is found at elevated temperatures, which is a necessary condition for the development of the 3D superconducting phase with optimal T c . Our results evidence a remarkable cooperation between the long-range static spin-stripe order and the underlying crystalline order with the three-dimensional fully coherent superconductivity. Overall, these results suggest that the stripe- and the SC order may have a common physical mechanism.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Keldysh tuning of photoluminescence in a lead halide perovskite crystal

In 1964, Keldysh laid the groundwork for strong-field physics in atomic, molecular, and solid-state systems by delineating a ubiquitous transition from multiphoton absorption to quantum electron tunneling under intense AC driving forces. While both processes in semiconductors can generate carriers and result in photon emission through electron-hole recombination, the low quantum yields in most materials have hindered direct observation of the Keldysh crossover. Leveraging the large quantum yields of photoluminescence in lead halide perovskites, we show that we can not only induce bright light emission from extreme sub-bandgap light excitation but also distinguish between photon-induced and electric-field-induced processes. Our results are rationalized by the Landau-Dykhne formalism, providing insights into the non-equilibrium dynamics of strong-field light-matter interactions. These findings open new avenues for light upconversion and sub-bandgap photon detection, highlighting the potential of lead halide perovskites in advanced optoelectronic applications.

FOS: Physical sciences↗

Progress in DIII-D towards validating divertor power exhaust predictions

In this study, UEDGE simulations highlight the role of cross-field drifts on the onset of detached conditions, and new calibrated divertor vacuum ultra violet (VUV) spectroscopy is used to challenge the predictions of radiative constituents in these simulations. UEDGE simulations for DIII-D H-mode plasmas with the open divertor with the ion ∇B-drift towards the X-point show a bifurcated onset of the low field side (LFS) divertor detachment, consistent with experimentally observed step-like detachment onset (Jaervinen A.E. et al 2018 Phys. Rev. Lett. 121 075001). The divertor plasma in the simulations exhibits hysteresis in upstream separatrix density between attached and detached solution branches. Reducing the drift magnitude by a factor of 3 eliminates the step-like detachment onset in the simulations, confirming the strong role of drifts in the bifurcated detachment onset. When measured local plasma densities and temperatures are within proximity of predicted values in the simulations, there is no shortfall of the local emission of the dominant resonant radiating lines. However, the simulations systematically predict a factor of two lower total integrated radiated power than measured by the bolometer with the difference lost through radial heat flow out of the computational domain. Even though there is no shortfall in the emission of the dominant lines, a shortfall of total radiated power can be caused by underpredicted spatial extent of the radiation front, indicating a potential upstream or divertor transport physics origin for the radiation shortfall, or shortfall of radiated power in the spectrum between the dominant lines. In addition to the underpredicted spatial extent, in detached conditions, the simulations overpredict the peak radiation and dominant carbon lines near the X-point, which can be alleviated by manually increasing divertor diffusivity in the simulations, highlighting the ad hoc cross-field transport as one of the key limitations of the predictive capability of these divertor fluid codes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Simulation of pellet ELM triggering in low-collisionality, ITER-like discharges

3D nonlinear, as well as 2D linear M3D-C1 simulations are used to model ELM triggering by small pellets in DIII-D discharges in the ITER relevant, peeling-limited pedestal stability regime. A critical pellet size threshold is found in both experiment and modeling depending on pedestal conditions, pellet velocity and injection direction. Using radial injection at the outboard midplane, the threshold is determined by M3D-C1 for multiple time slices of a DIII-D low-collisionality discharge that has pellet ELM triggering. Experimental observations show that a larger pellet size than the standard 1.3 mm diameter is necessary for ELM triggering; 1.8 mm pellets triggered several ELMs in cases where a smaller pellet failed. The M3D-C1 simulations are in good agreement with these observations. While the 2D linear simulations give insight into the change of growth rates for various toroidal modes with pellet size, the 3D nonlinear simulations apply a pellet ablation model that mimics the actual injection with good match to the experiment. The 3D nonlinear simulation confirms the pellet ELM triggering for a pellet size larger than the threshold found by the linear simulations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗