Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “GaSe”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 1,225 records · Page 68
All sourcesNASA NTRSDOE OSTI
DOE OSTI2020

Experimental Study of the Effect of Start of Injection and Blend Ratio on Single Fuel Reformate RCCI

Abstract A new concept of single fuel reactivity-controlled compression ignition (RCCI) has been proposed through the catalytic partial oxidation (CPOX) reformation of diesel fuel. The reformed fuel mixture is then used as the low reactivity fuel and diesel itself is used as the high reactivity fuel. In this paper, two reformate mixtures from the reformation of diesel were selected for further analysis. Each reformate fuel mixture contained a significant fraction of inert gases (89% and 81%). The effects of the difference in the molar concentrations of the reformate mixtures were studied by experimenting with diesel as the direct injected fuel in RCCI over a varying start of injection timings and different blend ratios (i.e., the fraction of low and high reactivity fuels). The reformate mixture with the lower inert gas concentration had earlier combustion phasing and shorter combustion duration at any given diesel start of injection timing. The higher reactivity separation between reformate mixture and diesel, compared with gasoline and diesel, causes the combustion phasing of reformate-diesel RCCI to be more sensitive to the start of injection timing. The maximum combustion efficiency was found at a CA50 before top dead center (TDC), whereas the maximum thermal efficiency occurs at a CA50 after TDC. The range of energy-based blend ratios in which reformate-diesel RCCI is possible is between 25% and 45%, limited by ringing intensity (RI) at the low limit of blend ratios, and coefficient of variance (COV) of net indicated mean effective pressure (IMEPn) and combustion efficiency at the high limit. Intake boosting becomes necessary due to the oxygen deficiency caused by the low energy density of the reformate mixtures as it displaces intake air.

Engineering↗
DOE OSTI2020

Experiments and Simulations on the Turbulent, Rarefaction Wave Driven Rayleigh–Taylor Instability

Experiments were performed to observe the growth of the turbulent, Rayleigh–Taylor unstable mixing layer generated between air and SF 6 , with an Atwood number of A=(ρ 2 –ρ 1 )/(ρ 2 +ρ 1 ) = 0.64, where ρ 1 and ρ 2 are the densities of air and SF 6 , respectively. A nonconstant acceleration with an average value of 2300g 0 , where g 0 is the acceleration due to gravity, was generated by interaction of the interface between the two gases with a rarefaction wave. Three-dimensional, multimode perturbations were generated on the diffuse interface, with a diffusion layer thickness of δ = 3.6 mm, using a membraneless vertical oscillation technique, and 20 experiments were performed to establish a statistical ensemble. The average perturbation from this ensemble was extracted and used as input for a numerical simulation using the Lawrence Livermore National Laboratory (LLNL) Miranda code. Good qualitative agreement between the experiment and simulation was observed, while quantitative agreement was best at early to intermediate times. Several methods were used to extract the turbulent growth constant α from experiments and simulations while accounting for time varying acceleration. Experimental, average bubble and spike asymptotic self-similar growth rate values range from α = 0.022 to α = 0.032 depending on the method used, and accounting for variable acceleration. Values found from the simulations range from α = 0.024 to α = 0.041. Here, the values of α measured in the experiments are lower than what are typically measured in the literature but are more in line with those found in recent simulations.

42 ENGINEERING↗
DOE OSTI2021

Attached and Attaching Three-Dimensional Jets from Circular Nozzles: Analytical Model

Here we evaluate velocity profiles of three dimensional attached jets emerging from circular nozzles. These jets lose momentum due to interactions with nearby surfaces and are important to evaluating flows in mixing vessels and to suspending solids and trapped gases in radioactive waste tanks. Despite the industrial importance of attached jets, simple, complete, and quantitative expressions for their velocity profiles remain elusive. Here we present a quantitative analytical model of the three dimensional velocity profiles of attached jets inclusive of a local skin coefficient of friction. We compare these expressions to experimental velocity profiles at moderate and high nozzle Reynolds numbers to find reasonable quantitative agreement.

Jet, attached jet, offset jet, reattaching offset ↗
DOE OSTI2022

Experimental Investigation of Gaseous Mixtures of Ethane, Methane, and Carbon Dioxide as an Alternative to Conventional Fuel in Spark Ignition Engines

This study investigates the viability and performance of certain synthetic fuels in spark ignition internal combustion engine based stationary power generation wherein the fuel comprises a mixture of methane and ethane in high dilutions of carbon dioxide (CO 2 ). The fuel of concern is a byproduct of a novel method for producing ethylene from ethane. The byproduct gas mixture has a concentration of approximately 41% CO 2 , 40% ethane, and 5% methane by weight along with other minor compounds. Varying mixtures of ethane and methane combined with between 42% and 46% by weight CO 2 were used to evaluate the viability and efficiency of this fuel to operate in existing internal combustion engines as a means of reducing emissions and increasing industrial process efficiency. A 13 hp gasoline generator was repurposed as a test stand by incorporating a modified fuel induction system and instrumentation for data collection. A gas metering and mixing system was installed to precisely control the mass flow of gases induced into the engine. Various instrumentations were installed to monitor in-cylinder pressure, temperature at various locations, emissions, and fuel and airflow rates. Varying fuel mixtures and loads were tested and compared to gasoline. It was found that under a high load, the mixed gas was able to generate comparable thermal efficiency and power to gasoline. But under no load or a part load condition the indicated thermal efficiency was found to be about 21% lower than that of gasoline. Further, the mixed gas also resulted in up to 50% reduction in CO and NOx emissions when compared to gasoline.

42 ENGINEERING↗
DOE OSTI2023

Experimental and Computational Investigation of Shaped Film Cooling Holes Designed to Minimize Inlet Separation

Abstract Film cooling is used to protect turbine components from the extreme temperatures by ejecting coolant through arrays of holes to create an air buffer from the hot combustion gases. Limitations in traditional machining meant film cooling holes universally have sharp inlets, which create separation regions at the hole entrance. The present study uses experimental and computational data to show that these inlet separation are a major cause of performance variation in crossflow fed film cooling holes. Three-hole designs were experimentally tested by independently varying the coolant velocity ratio (VR) and the coolant channel velocity ratio (VRc) to isolate the effects of crossflow on hole performance. Leveraging additive manufacturing (AM) technologies, the addition of a 0.25D radius fillet to the inlet of a 7-7-7 shaped hole is shown to significantly improve diffuser usage and significantly reduce variation in performance with VRc. A second AM design used a very large radius of curvature inlet to reduce biasing caused by the inlet crossflow. Experiments showed that this “swept” hole design did minimize biasing of the coolant flow to one side of the shaped hole, and it significantly reduced variations due to varying VRc. RANS simulations at six VR and three VRc conditions were made for each geometry to better understand how the new geometries changed the velocity field within the hole. The sharp and rounded inlets were seen to have very similar tangential velocity fields and jet biasing. Both AM inlets created more uniform, slower velocity fields entering the diffuser. The results of this article indicate that large improvements in film cooling performance can be found by leveraging AM technology.

Engineering↗
DOE OSTI2023

Modeling Tool Development and Validation for Solar Industry Process Heat Using Particle Thermal Energy Storage

U.S. industry sectors used 26.2 quadrillion Btu and accounted for 33% of total energy consumption in 2021 according to the Energy Information Agency. Industrial process heat accounts for 70% of industrial energy use with application temperatures ranging from 60 degrees -1100 degrees C. Industry processes, heavily relying on fossil fuels of cheap coal or natural gas, differ widely in operating conditions and load requirements which makes them difficult to standardize and imposes great challenges in decarbonization. Industry processes require reliable energy supply and vary widely in temperature ranges. Storing energy from renewable sources is necessary to improve reliability and to mitigate renewable intermittency when replacing carbon fuel-based heat supplies to achieve energy savings and reduce emissions. To this end, we have developed a particle-based thermal energy storage (TES) technology using low-cost and highly stable silica sand as a storage medium. The economic and performance-based analysis is key for renewable energy sources to reliably supply industry process heat and ultimately displace fossil fuels for decarbonization. The diversified industrial processes need case-by-case analysis and design. Therefore, an adaptive modeling tool is key for renewable power with energy storage to meet industry demands. Thus, a modeling tool to simulate a solar industry process heat system using the particle TES has been developed using the object-oriented equation-based language Modelica and the commercial platform of Modelon Impact. The Modelica-based software tool provides a general simulation environment for the design of reliable solar energy sources integrated with TES for various industrial process applications at different temperatures for economic competence with fossil fuels such as coal and natural gases. It uses both customized and standard component modeling modules in Modelon libraries for the flexibility to be adapted to a specific energy demand application. The particle TES system establishes a uniform energy supply platform with an efficient heat exchanger and particle thermal energy reservoir integrated with renewable powers. The particle TES system can provide a wide temperature range and can have a large storage temperature difference that increases storage energy density; therefore, it can be an adaptable energy storage system integrated with renewable power to supply 24/7 heat for industry decarbonization.

concentrated solar thermal↗
DOE OSTI2020

Attached Jet Velocity Profiles in Mixing Tanks

Free jets have been studied in detail over much of the last century, but the theory for offset and attached jets remains incomplete. Attached jets differ from free jets in that they lose momentum to nearby surfaces, attenuating their velocities. The velocity profiles of free circular jets are nearly Gaussian, with quantitative mathematical descriptions derived from first principles by Goertler and Tollmien (Rajaratnam, 1976). In contrast, mathematical descriptions of three-dimensional attached jets from circular nozzles remain much less mature. Agelin-Chaab and Tachie (2011) used particle imaging velocimetry of a three-dimensional attached jet to show that the scaled velocity decays with scaled distance from the nozzle with a power law exponent between -1.15 and -1.21, which is larger in magnitude than that of a free jet. However, quantitative analytical expressions for the velocity profiles of attached jets similar to those of free jets remain elusive. This paper addresses this critical gap. Here we evaluate the velocity profiles of three-dimensional offset jets emerging from circular nozzles that that become attached jets. These jets lose momentum due to interactions with nearby surfaces and are important to evaluating flows in mixing vessels and to suspending solids and trapped gases in radioactive waste tanks. Despite the importance of attached jets, prior insight has been purely experimental, limited to overly simplistic analytical models, or restricted to computationally expensive computational fluid dynamics case studies. We compare the expression of Verhoff (1963) to experimental results to find reasonable quantitative agreement. As stated by Agelin-Chaab and Tachie (2011), “detailed velocity measurements of 3D offset jets are rare.” Such remains the case. This study adds to the literature by providing information at two additional Reynolds numbers (1.43 106 and 1.87 106) and evaluating simple but accurate expressions for velocity profiles. These Reynolds numbers are an order of magnitude higher than prior reports. The semi-empirical stream wise velocity profile perpendicular to the surface proposed by Verhoff (1963) is in approximate agreement with these velocity profiles, which is surprising because these attached jets are three-dimensional instead of two-dimensional as evaluated by Verhoff. However, additional work is necessary to fully describe these profiles quantitatively.

jet, attached jet, offset jet↗
DOE OSTI2023

THE IMPACT OF OXIDATION-INDUCED DEGRADATION ON MATERIALS USED IN HYDROGEN-FIRED MICROTURBINES

Hydrogen-fueled microturbines are being considered as part of the future green microgrid. However, the use of hydrogen as a fuel presents new challenges for selection and development of suitable high temperature materials for hydrogen combustion. The burning of hydrogen is expected to result in higher operating temperatures and higher than typically observed water vapor contents in exhaust gases than after burning natural gas. In the present work, foil specimens of various Fe- and Ni-based alloys were oxidized in air + 10vol.% H2O and air + 60vol.% H2O for up to 5,000 h at 700 °C to simulate the exhaust atmosphere of natural gas and hydrogen-fueled microturbines. The impact of alloy composition and water vapor content on the oxidation/ volatilization induced loss of wall thickness was experimentally evaluated. Enhanced external oxidation and volatilization of Cr¬2O3 and Ti-doped Cr2O3 scales was observed in 60 % H2O compared to 10% H2O. No significant impact of the higher water vapor content was observed on Al2O3 scales formed on Fe-based alumina forming alloys. Lifetime modeling was employed to predict the combined effects of water vapor content, gas flow rates, temperature and alloy composition on the oxidation-induced lifetime of the investigated materials

Romedenne, Marie↗
DOE OSTI2020

Joining Techniques for Novel Metal Polymer Hybrid Heat Exchangers

In the United States, over 50% of the unrecovered energy from industrial processes is in the form of low-grade heat (< 220°C). Materials and maintenance costs of common heat exchangers are typically too high to justify their usage. Polymers, though more affordable, are usually unsuitable for HX applications due to their low thermal conductivity (~0.2 W/mK). Here, we show that metal-polymer hybrids may be attractive from both performance and cost perspectives. The use of polymers further increases the resistance to corrosion by sulfuric and carbonic acids often present in flue gases. An ongoing work explores different configurations of layered polyimide-copper macroscale hybrids for heat exchanger applications using numerical simulations. This paper explores a manufacturing pathway for producing such layered hybrid tubes that involves directly rolling and bonding tapes made of polymer and copper foil into tubes. A critical problem in the fabrication process is the bonding of metal and polymers. We explore approaches involving adhesives (epoxy, acrylic and silicone) for metal/polymer interfaces and direct welding (ultrasonic) for metal/metal interfaces that can be integrated into the manufacturing process. We report characterizations of the thermomechanical properties of these joining processes. This work paves the way for realizing cost-effective manufacturing of heat exchangers for low grade waste heat recovery.

Kuntumalla, Gowtham↗
DOE OSTI2024

STUDIES ON PIPELINE POLYETHYLENES IN HYDROGEN GAS ENVIRONMENTS USING IN-SITU AND EX-SITU CHARACTERIZATION METHODS

Polymeric materials are commonplace in the natural gas infrastructure as distribution pipes, coatings, seals, and gaskets. Under the auspices of the U.S. Department of Energy HyBlend program, one of the means to reduce greenhouse gas emissions is with replacing natural gas, either partially or completely, with hydrogen. This approach makes it imperative that we conduct near-term and long-term materials compatibility research in these relevant environments. Insights into the effects of hydrogen and hydrogen gas blends on polymer integrity can be gained through both ex-situ and in-situ analytical methods. Our work represented here highlights a study of the behavior of pipeline polyethylene (PE) materials, including HDPE (Dow 2490 and GDB50) and MDPE (Ineos and legacy Dupont Aldyl A), when exposed to hydrogen by means of in-situ X-ray scattering and ex-situ Raman spectroscopy techniques. Samples were tested in ex-situ hydrogen and argon gas environments and in-situ hydrogen environments to identify differences due to permeation and solubility of these gases. These methods complemented each other because Raman spectroscopy could capture permanent effects after materials were removed from gaseous environments, and in-situ X-ray scattering analysis collected real-time data to elucidate the impact of the gas environment on polymer microstructure. Data collected revealed that the aforementioned polymers did not show significant changes in crystallinity and microstructure under the exposure conditions tested. Our findings from these studies will help establish real-time effects caused by hydrogen gas transport through pipeline polyethylenes by way of its influence on polymer structure and chemistry, which is directly related to pipeline mechanical strength and longevity of service.

Hydrogen materials compatibility, Natural gas pipe↗
DOE OSTI2025

DESIGN ISSUES AND QUALIFICATION OF HYDROFORMED DOUBLE WALLED EXPANSION JOINTS IN VACUUM SERVICE

The Vacuum Auxiliary System for ITER is devoted to pumping out, venting, and purging the vacuum volumes of the tokamak. Over 5000 clients including the cryostat and vacuum vessel, at 8500 m3 and 1400 m3 respectively, are serviced by approximately 150 pumping stations through 6 km of pipework. The piping and functions provided to the clients include component operation, routing of potentially tritiated gases, and timely leak localization. Expansion joints are used to reduce loadings on pumps and piping stresses but also to qualify in-line components having low allowable design loads. The ITER project utilizes vacuum valves that are not designed to withstand typical piping system loadings and require detailed design and evaluation. Loading scenarios prescribed by governing system specifications must be considered. To maintain allowable design loads for components and to keep piping stresses below code requirements, double walled hydroformed expansion joints have been employed in the design. These are not standard items and require custom fabrication. Installation space constraints and adjacent pipe support attachment location availability at ITER limit standard expansion joint installation guidelines provided by the Expasion Joint Manufacturers Association (EJMA). Careful consideration must be given to the analysis model to ensure proper function and life expectancy of the component. These considerations include accurate accounting of thrust forces, thermal movements, seismic accelerations, equipment and building differential displacements. In addition to displacements, the process internal, external, and interspace pressures affect the qualification and selection of the double walled expansion joints. The calculation results shall confirm that deflections, forces, and moments are reasonable for the size and type required for the system’s demands as evaluated against the manufacturer’s design.

Clark, Forrest [ORNL] (ORCID:0009000678106843)↗
DOE OSTI2021

Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles

Here this paper describes the theory and results for a new class of low-cost chemoresistive gas sensors designed for selective hydrocarbon gas detection. The sensors utilize a multiwalled carbon nanotube (MWCNT) backbone functionalized with metal oxide nanocrystals. Specifically, nanoparticles were grown on the surface of the MWCNTs using atomic layer deposition. The crystallinity of the ZnO-MWCNTs' heterostructure was examined by using a high-resolution transmission electron microscope. The structure of the ZnO/MWCNTs was analyzed using a scanning electron microscope and energy dispersive x ray. The Hall effect measurement shows p-type characteristics of the MWCNTs, supporting the typical PN junction formation with n-type ZnO nanocrystals. The electron-donating ability of ZnO provided a strong response to the ppm levels of toluene at room temperature (25 °C) and showed strong selectivity with other volatile organic compound gases such as benzene, methane, and formaldehyde.

47 OTHER INSTRUMENTATION↗
DOE OSTI2021

Many routes to ferroelectric HfO 2 : A review of current deposition methods

Although 10 years have passed since the initial report of ferroelectricity in hafnia (HfO 2 ), researchers are still intensely fascinated by this material system and the promise it holds for future applications. A wide variety of deposition methods have been deployed to create ferroelectric HfO 2 thin films such as atomic layer deposition, chemical solution deposition, and physical vapor deposition methods such as sputtering and pulsed laser deposition. Process and design parameters such as deposition temperature, precursor choice, target source, vacuum level, reactive gases, substrate strain, and many others are often integral in stabilizing the polar orthorhombic phase and ferroelectricity. We examine processing parameters across four main different deposition methods and their effect on film microstructure, phase evolution, defect concentration, and resultant electrical properties. The goal of this review is to integrate the process knowledge collected over the past 10 years in the field of ferroelectric HfO 2 into a single comprehensive guide for the design of future HfO 2 -based ferroelectric materials and devices.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Nanoscale interplay of native point defects near Sr-deficient SrxTiO 3 /SrTiO 3 interfaces

SrTiO 3 has many applications involving interfaces with other materials, but defects that affect the properties of SrTiO 3 films can also play a significant role at its heterointerfaces and even at junctions with nonstoichiometric SrTiO 3 . Depth-resolved cathodoluminescence spectroscopy (DRCLS) combined with systematic cation Sr content reduction in SrxTiO 3 ultrathin films grown on SrTiO 3 showed an interplay of native point defects and electronic structure within the Sr-deficient film and how interplay extends tens of nanometers into the substrate below. Understanding how defects form and affect interface electronic structure during epitaxial growth is central to improving complex oxide devices. Controlling the balance of oxygen vacancy defects with strontium vacancies and other acceptor-like defects can improve control over free carrier densities. Likewise, control over nanoscale defect charge distributions can advance new device features such as two-dimensional hole gases and the performance of existing devices such as ferroelectric tunnel junctions. This study shows how DRCLS directly measures the relative densities and spatial distributions of multiple native defects within and extending away from nanoscale SrxTiO 3 /SrTiO 3 junctions and how their interplay varies with controlled epitaxial growth. In turn, these growth-dependent defect variations can help guide SrTiO 3 epitaxial growth with other complex oxides.

36 MATERIALS SCIENCE↗
DOE OSTI2024

In-house synthesized poly(ether ether ketone) ionenes. I. ToF-SIMS spectra in the positive ion mode

Static time-of-flight secondary ion mass spectrometry (ToF-SIMS) was performed for acquiring the high-resolution surface spectra of four types of synthesized imidazolium ionene membranes. These novel membranes have aromatic ether–ketone–ether linkages inspired by poly(ether ether ketone) (PEEK). The PEEK-ionenes synthesized for this study have imidazolium cations placed in the polymeric backbone with bistriflimide [Tf 2 N]- counterions. The attention given to synthetically modified PEEK derivatives, such as PEEK-ionenes, is considerable due to their ability to selectively capture CO 2 molecules and other light gases. Therefore, it is important to characterize the surface of these synthesized novel PEEK-ionenes. In this work, characteristic and unique peaks were identified in the positive spectra of each sample. The differences in mass spectra among the samples provide insights for optimizing or fine-tuning the PEEK-ionenes synthesis to achieve a high-performance CO 2 separation membrane with enhanced permeability, selectivity, and mechanical stability. The SIMS spectra and identified characteristic peaks of these synthesized ionenes will serve as a reference in the positive mode, complementing the corresponding spectra reported in the negative ion mode (Paper II).

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

In-house synthesized poly(ether ether ketone) ionenes. II. ToF-SIMS spectra in the negative ion mode

Time-of-flight secondary ion mass spectrometry (ToF-SIMS) was used to analyze poly(ether ether ketone) (PEEK) based membranes. PEEK membranes have been shown to be effective in the separation of CO 2 from flue gases (post-combustion technique). The PEEK membranes were synthesized using novel aromatic ether-ketone linkages inspired by PEEK with polymeric backbone bistriflimide [Tf2N]− counterions. One of the keys to advancing this technology is developing membranes that are selective and permeable toward CO 2 , in which PEEK based membranes have been shown to be. Furthermore, the compatibility between various water lean solvents also needs to be investigated. Surface analytical techniques such as x-ray photoelectron spectroscopy and ToF-SIMS are useful for investigating chemical changes between membranes. Herein, we present ToF-SIMS data obtained in the negative ion mode for four different PEEK membranes designed for use in CO 2 capture systems. Positive ion mode spectra are reported in Paper I.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

Future of plasma etching for microelectronics: Challenges and opportunities

Plasma etching is an essential semiconductor manufacturing technology required to enable the current microelectronics industry. Along with lithographic patterning, thin-film formation methods, and others, plasma etching has dynamically evolved to meet the exponentially growing demands of the microelectronics industry that enables modern society. At this time, plasma etching faces a period of unprecedented changes owing to numerous factors, including aggressive transition to three-dimensional (3D) device architectures, process precision approaching atomic-scale critical dimensions, introduction of new materials, fundamental silicon device limits, and parallel evolution of post-CMOS approaches. The vast growth of the microelectronics industry has emphasized its role in addressing major societal challenges, including questions on the sustainability of the associated energy use, semiconductor manufacturing related emissions of greenhouse gases, and others. The goal of this article is to help both define the challenges for plasma etching and point out effective plasma etching technology options that may play essential roles in defining microelectronics manufacturing in the future. The challenges are accompanied by significant new opportunities, including integrating experiments with various computational approaches such as machine learning/artificial intelligence and progress in computational approaches, including the realization of digital twins of physical etch chambers through hybrid/coupled models. These prospects can enable innovative solutions to problems that were not available during the past 50 years of plasma etch development in the microelectronics industry. To elaborate on these perspectives, the present article brings together the views of various experts on the different topics that will shape plasma etching for microelectronics manufacturing of the future.

Engineering↗
DOE OSTI2024

Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride

Etching of high aspect ratio features into alternating SiO 2 and SiN layers is an enabling technology for the manufacturing of 3D NAND flash memories. In this paper, we study a low-temperature or cryo plasma etch process, which utilizes HF gas together with other gas additives. Compared with a low-temperature process that uses separate fluorine and hydrogen gases, the etching rate of the SiO 2 /SiN stack doubles. Both materials etch faster with this so-called second generation cryo etch process. Pure HF plasma enhances the SiN etching rate, while SiO 2 requires an additional fluorine source such as PF 3 to etch meaningfully. Further, the insertion of H 2 O plasma steps into the second generation cryo etch process boosts the SiN etching rate by a factor of 2.4, while SiO 2 etches only 1.3 times faster. We observe a rate enhancing effect of H 2 O coadsorption in thermal etching experiments of SiN with HF. Ammonium fluorosilicate (AFS) plays a salient role in etching of SiN with HF with and without plasma. AFS appears weakened in the presence of H 2 O. Density functional theory calculations confirm the reduction of the bonding energy when NH 4 F in AFS is replaced by H 2 O.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗