Influence of Ga/N ratio on morphology, vacancies, and electrical transport in GaN grown by molecular beam epitaxy at high temperature
The effect of Ga/N flux ratio on surface morphology, incorporation of point defects and electrical transport properties of GaN films grown by plasma-assisted molecular beam epitaxy in a recently developed high-temperature growth regime was investigated. The homoepitaxial (0001) GaN films grown at {approx}780-790 deg. C showed smoothest morphologies near the cross-over between N-rich and Ga-rich growth (0.75<Ga/N<1.1) contrasting previous observations for low-temperature growth. The higher-quality growth near Ga/N{approx}1 resulted from lower thermal decomposition rates and was corroborated by slightly lower Ga vacancy concentrations [V{sub Ga}], lower unintentional oxygen incorporation, and improved electron mobilities. The consistently low [V{sub Ga}], i.e., {approx}10{sup 16} cm{sup -3} for all films attribute further to the significant benefits of the high-temperature growth regime.