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At least 1,171 records · Page 65

A Zero-Emission Process for Direct Reduction of Iron by Hydrogen Plasma in a Rotary Kiln Reactor

This project’s goal was to demonstrate a hydrogen plasma (H-plasma)-rotary kiln process for reducing iron ore to iron as part of the steel manufacturing process. The H-plasma provides a greater thermodynamic driving force for reducing iron ores than thermal processes such as the DRI process, enabling lower reaction temperatures. We estimated that our process technology can reduce energy consumption by 45% compared to the blast furnace process and ~15% compared to the DRI process. Steel manufacturing produces about 1.8 tons of CO2/ton of steel with iron ore reduction accounting for about one-third of the CO2 produced in the overall manufacturing process. We estimated our process has the potential to reduce GHG emissions from ironmaking by 35% with today’s grid and by up to 88% with a future low-carbon grid while being cost competitive with the current blast furnace route. We demonstrated reduction of hematite and magnetite rich materials at temperatures from 600 to 800°C. We achieved 90-95% metallization on 100 gr samples in batch reduction experiments in the H-plasma rotary kiln furnace at 600-650°C. Attempts to perform tests in a continuous operation mode identified problems with the ore feed mechanism. We identified solutions but there was not time nor budget to correct these for this project

36 MATERIALS SCIENCE↗

Nonlinear MHD modeling of n = 1 RMP -induced pedestal transport and mode coupling effects on ELM suppression in KSTAR

We report fully suppressing edge-localized modes (ELMs), e.g., with resonant magnetic perturbations (RMPs), is essential to reach and sustain high-performance steady-state H-mode plasmas because large ELMs can significantly reduce the lifetime of divertor components in future tokamak reactors. RMP-driven ELM suppression in KSTAR has been modeled by coupling the neoclassical transport code PENTRC to the nonlinear 3D MHD code JOREK. We have found that the radial transport from the combined effects of the kink-peeling, tearing response, and neoclassical toroidal viscosity can explain the pedestal degradation observed in experiments. In addition, it has been found that the RMP response can increase the inter-ELM heat flux on the lower outer divertor by redistributing the heat transport between the divertor plates. In addition to the degraded pedestal, ELM suppression is also attributable to the RMP-induced mode interactions. While the linear stability of peeling-ballooning mode (PBMs) improves owing to the degraded pedestal, the PBM and RMP interaction increases the spectral transfer between edge harmonics, preventing catastrophic growth and the crash of unstable modes. Here, it turns out that the magnetic islands near the pedestal top can play a vital role in mediating the mode interactions.

mode coupling↗

Model-based real-time surface heat flux and temperature estimation for the DIII-D tokamak

A control-oriented model for monitoring of wall power flux densities on the DIII-D tokamak has been successfully implemented and validated experimentally. Future reactors will have to withstand severe steady state high heat flux loads on plasma-facing components (PFCs). Due to the difficulty of directly-measuring local heat fluxes on these components, monitoring and protection of PFCs during the plasma discharge can benefit from simplified physics-based real-time (RT) functional models to estimate and guide heat load control. As a first step into the development, a control-oriented model for monitoring of wall power flux densities and temperatures on DIII-D tokamak has been successfully implemented. The paper discusses the experimental demonstration and comparison of the 2-D model-based wall heat flux algorithm on the DIII-Dinner wall limiter (IWL) against infra-red camera heat flux measurements for limited plasma configurations. The paper also reports on the benchmarking of the field line tracing environment, SMITER, developed at ITER organization on DIII-D tokamak against experimental IR diagnostic data and the derivation of the component shaping weighting factors for the 2-D model-based approach. Here, the extension of the model-based approach for surface temperature estimation on the DIII-D IWL is also presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Coil optimization for quasi-helically symmetric stellarator configurations

Filament-based coil optimizations are performed for several quasi-helical stellarator configurations, beginning with the one from Landreman & Paul ( Phys. Rev. Lett. , vol. 128, 2022, 035001), demonstrating that precise quasi-helical symmetry can be achieved with realistic coils. Several constraints are placed on the shape and spacing of the coils, such as low curvature and sufficient plasma–coil distance for neutron shielding. The coils resulting from this optimization have a maximum curvature 0.8 times that of the coils of the Helically Symmetric eXperiment (HSX) and a mean squared curvature 0.4 times that of the HSX coils when scaled to the same plasma minor radius. When scaled up to reactor size and magnetic field strength, no fast particle losses were found in the free-boundary configuration when simulating 5000 alpha particles launched at $3.5\,\mathrm {MeV}$ on the flux surface with a normalized toroidal flux of $s=0.5$ . An analysis of the tolerance of the coils to manufacturing errors is performed using a Gaussian process model, and the coils are found to maintain low particle losses for smooth, large-scale errors up to amplitudes of approximately $0.15\,\mathrm {m}$ . Another coil optimization is performed for the Landreman–Paul configuration with the additional constraint that the coils are purely planar. Visual inspection of the Poincaré plot of the resulting magnetic field-lines reveal that the planar modular coils alone do a poor job of reproducing the target equilibrium. Additional non-planar coil optimizations are performed for the quasi-helical configuration with $5\,\%$ volume-averaged plasma beta from Landreman et al. ( Phys. Plasma , vol. 29, issue 8, 2022, 082501), and a similar configuration also optimized to satisfy the Mercier criterion. The finite beta configurations had larger fast-particle losses, with the free-boundary Mercier-optimized configuration performing the worst, losing approximately $5.5\,\%$ of alpha particles launched at $s=0.5$ .

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Developing solid-surface plasma facing components for pilot plants and reactors with replenishable wall claddings and continuous surface conditioning. Part A: concepts and questions

Abstract It is estimated that pilot plants and reactors may experience rates of net erosion and deposition of solid plasma facing component (PFC) material of 10 3 –10 5 kg yr −1 . Even if the net erosion (wear) problem can be solved, the redeposition of so much material has the potential for major interference with operation, including disruptions due to so-called ‘unidentified flying objects (UFOs)’ and unsafe dust levels. The potential implications appear to be no less serious than for plasma contact with the divertor target: a dust explosion or a major UFO-disruption could be as damaging for an actively-cooled deuterium-tritium (DT) tokamak as target failure. It will therefore be necessary to manage material deposits to prevent their fouling operation. This situation appears to require a fundamental paradigm shift with regard to meeting the challenge of taming the plasma–material interface: it appears that any acceptable solid PFC material will in effect be flow-through , like liquid–metal PFCs, although at far lower mass flow rates. Solid PFC material will have to be treated as a consumable , like brake pads in cars. ITER will use high-Z (tungsten) armor on the divertor targets and low-Z (beryllium) on the main walls. The ARIES-AT reactor design calls for a similar arrangement, but with SiC cladding on the main walls. Non-metallic low-Z refractory materials such as ceramics (graphite, SiC, etc) used as in situ replenishable, relatively thin—of order mm—claddings on a substrate which is resistant to neutron damage could provide a potential solution for the main walls, while reducing the risk of degrading the confined plasma. Separately, wall conditioning has proven essential for achieving high performance. For DT devices, however, standard methods appear to be unworkable, but recently powder droppers injecting low-Z material ∼continuously into discharges have been quite effective and may be usable in DT devices as well. The resulting massive generation of low-Z debris, however, has the same potential to seriously disrupt operation as noted above. Powder droppers provide a unique opportunity to carry out controlled studies on the management of low-Z slag in all current tokamaks, independent of whether their protection tiles use low-Z or high-Z material.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Assessment of vertical stability for negative triangularity pilot plants

Abstract Negative triangularity (NT) tokamak configurations may be more susceptible to magneto-hydrodynamic instability, posing challenges for recent reactor designs centered around their favorable properties, such as improved confinement and operation free of edge-localized modes. In this work, we assess the vertical stability of plasmas with NT shaping and develop potential reactor solutions. When coupled with a conformal wall, NT equilibria are confirmed to be less vertically stable than equivalent positive triangularity (PT) configurations. Unlike PT, their vertical stability is degraded at higher poloidal beta. Furthermore, improvements in vertical stability at low aspect ratio do not translate to the NT geometry. NT equilibria are stabilized in PT vacuum vessels due to the increased proximity of the plasma and the wall on the outboard side, but this scenario is found to be undesirable due to reduced vertical gaps which give less spatial margin for control recovery. Instead, we demonstrate that informed positioning of passively conducting plates can lead to improved vertical stability in NT configurations on par with stability metrics expected in PT scenarios. An optimal setup for passive plates in highly elongated NT devices is presented, where plates on the outboard side of the device reduce vertical instability growth rates to 16% of their baseline value. For lower target elongations, integration of passive stabilizers with divertor concepts can lead to significant improvements in vertical stability. Plates on the inboard side of the device are also uniquely enabled in NT geometries, providing opportunity for spatial separation of vertical stability coils and passive stabilizers.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Integrated control of individual plasma scalars with simultaneous neoclassical tearing-mode suppression

A novel integrated-control architecture has been tested in nonlinear, one-dimensional simulations using the control-oriented transport simulator (COTSIM©) and in DIII-D experiments. Integrated architectures that can perform continuous-mission control while also handling off-normal events will be vital in future reactor-grade tokamaks. Continuous-mission controllers for individual magnetic and kinetic scalars (thermal stored-energy (W), volume-average toroidal rotation (Ω Φ ), and safety factor profile (q) at different spatial locations) have been integrated in this work with event-triggered neoclassical tearing-mode (NTM) suppression controllers by combining them into an architecture augmented by a supervisory and exception handling (S&EH) system and an actuator management (AM) system. Here, the AM system, which enables the integration of competing controllers, solves in real time a nonlinear optimization problem that takes into account the high-level control priorities dictated by the S&EH system. The resulting architecture offers a high level of integration and some of the functionalities that will be required to fulfill the advanced-control requirements anticipated for ITER. Initial simulations using COTSIM suggest that the plasma performance and its MHD stability may be improved under integrated feedback control. In addition, the integrated-control architecture has been implemented in the DIII-D plasma control system and tested experimentally for the first time ever in DIII-D in a high-q min scenario, which is a candidate for steady-state operation in ITER.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

High-pressure CO 2 dissociation with nanosecond pulsed discharges

Herein we investigate the conversion of CO 2 into CO and O 2 with nanosecond repetitively pulsed (NRP) discharges in a high-pressure batch reactor. Stable discharges are obtained at up to 12 bar. By-products are measured with gas chromatography. The energy efficiency is determined for a range of processing times, pulse energy, and fill pressures. It is only weakly sensitive to the plasma operating parameters, i.e the extent of CO 2 conversion is almost linearly-dependent on the specific energy invested. A conversion rate as high as 14% is achieved with an energy efficiency of 23%. For long processing times, saturation in the yield and a drop in efficiency are observed, due to the increasing role of three-body recombination reactions, as described by zero-dimensional detailed kinetic modeling. The modeling reveals the presence of three-stage kinetics between NRP pulses, controlled by electron-impact CO 2 dissociation, vibrational relaxation, and neutral elementary kinetics. Transport effects are shown to be important for CO 2 conversion at high pressures. For fill pressures beyond 10 bar, CO 2 may locally transit into supercritical states. The supercritical plasma kinetics may bypass atomic oxygen pathways and directly convert CO 2 into O 2 . This work provides a detailed analysis of plasma-based high-pressure CO 2 conversion, which is of great relevance to future large-scale sustainable carbon capture, utilization, and storage.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Species, Pathways, and Timescales for NH 3 Formation by Low-Temperature Atmospheric Pressure Plasma Catalysis

Species, pathways, and timescales for NH3 production by plasma catalysis over transition-metal wools are determined by measuring plasma-derived species densities [N, H, and N 2 (v)], quantitatively correlating consumption of these species with NH 3 formation, and measuring consumption of plasma-derived species at different residence times. These findings are enabled by a capillary flow through Ar/N 2 /H 2 plasma jet reactor setup that allows for the measurement of gas-phase species densities by molecular beam mass spectrometry. Surface-mediated reactions involving N radicals are responsible for NH 3 formation over Fe, Ni, and Ag surfaces. N reacts to form NH 3 with ~100% selectivity over Ni and Ag when H/N > 3 and % H 2 ≥ 0.5. The selectivity to ammonia drops as H and H 2 densities decrease for each catalyst. A comparison between amounts of NH 3 formed and N consumed with and without catalysts present shows that surface reactions enable higher and more selective conversion of N to NH 3 than gas-phase reactions alone. The conversion of N to NH 3 is negligible in the absence of H, demonstrating that H is required to produce NH 3 at these operating conditions. The consumption of N occurs on the same timescale as NH 3 formation, further confirming that reactions involving N contribute to NH 3 formation. Though vibrationally excited N 2 [N 2 (v)] is produced in quantities exceeding N by 100-fold, consumption of N 2 (v) on the catalytic surface does not contribute to NH 3 formation. Furthermore, these findings show that for low-temperature atmospheric pressure plasma catalysis, surface- mediated reactions among radical N and H species drive NH 3 formation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

W-band system-on-chip electron cyclotron emission imaging system on DIII-D

Monolithic, millimeter wave “system-on-chip” (SoC) technology has been employed in heterodyne receiver integrated circuit radiometers in a newly developed Electron Cyclotron Emission Imaging (ECEI) system on the DIII-D tokamak for 2D electron temperature profile and fluctuation evolution diagnostics. Here, a prototype module operating in E-band (72-80 GHz) was first employed in a 2 x 10 element array that demonstrated significant improvements over the previous quasi-optical Schottky diode mixer arrays during the 2018 operational campaign of the DIII-D tokamak. For compatibility with International Thermonuclear Experimental Reactor (ITER) relevant scenarios on DIII-D, the SoC ECEI system was upgraded with 20 horn-waveguide receiver modules. Each individual module contains a University of California at Davis designed W-band (75 -110 GHz) receiver die that integrates a broadband low noise amplifier (LNA), a double balanced down-converting mixer, and a x4 multiplier on the local oscillator (LO) chain. A x2 multiplier and two IF amplifiers are packaged and selected to further boost the signal strength as well as downconvert the signal frequency. The upgraded W-band array exhibits > 30 dB additional gain and 20x improvement in noise temperature comparing with the previous Schottky diode radio frequency (RF) mixer input systems; an internal 8 times multiplier chain is used to bring down the LO frequency below 12 GHz, thereby obviating the need for a large aperture for quasi-optical LO coupling and replacing it with coaxial connectors. The horn-waveguide shielding housing avoids out-of-band noise interference on each individual module. The upgraded ECEI system plays an important role for absolute electron temperature evolution and fluctuation measurements for edge and core region transport physics studies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Benchmarking core turbulence and transport predictions for an inductive compact tokamak reactor plasma

Motivated by the need for accurate, timely, and efficient calculations of plasma transport, predictions of plasma turbulence properties made using different TGLF saturation rules are benchmarked against corresponding predictions from linear and nonlinear gyrokinetic CGYRO simulations. This benchmarking is carried out using parameters taken from an inductive burning plasma scenario in a hypothetical compact high-field (R maj = 4 m, B T = 8 T) tokamak, lying in a much different regime of parameter space than either the TGLF calibration regime or current-day experiments. The core turbulent transport in this scenario is predicted to be dominated by ion temperature gradient (ITG) turbulence. In general, the ITG critical gradients predicted by various TGLF saturation rules are quite close to the CGYRO predictions. Both codes predict similar linear ITG growth rates and frequency spectra, as well as their scaling with R/L T i = −Rd ln(T i )/dr. However, TGLF systematically predicts unstable trapped-electron modes (TEMs) above k y ρ s ≃ 0.5 not seen by CGYRO for the same parameters, due to TGLF predicting a lower threshold in R/L T e than CGYRO for TEM onset. It is shown that for this scenario, nonlinear CGYRO simulations predict stiffer ITG turbulence than the TGLF SAT0 and SAT1 saturation rules, with energy fluxes close in magnitude and scaling with R/L T i to what is predicted by the SAT2 saturation rule. Self-consistent core profiles calculated using nonlinear CGYRO flux predictions and the PORTALS transport solver are shown to agree fairly well with corresponding predictions made using the TGLF SAT2 model, including a similar level of density peaking.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Design considerations for high entropy alloys in advanced nuclear applications

The demanding operating environments of advanced nuclear reactors require the development of new nuclear materials that can withstand their increased physical, chemical, thermal, and radiation-related challenges. High-entropy alloys (HEAs) have shown often-impressive mechanical, thermomechanical, and corrosion-resistant properties, and offer a massive, unexplored compositional space which allows for the targeted development of application-specific materials. Furthermore, although still in a nascent stage, research has shown that HEAs may exhibit unique irradiation tolerance, including reduced defect production and resistance to irradiation-induced swelling and hardening. The mechanisms behind this increased tolerance are not yet well-understood, although the HEA-specific attributes of a complex energy landscape, reduced thermal conductivity, and shift in defect migration energies and pathways provide promising explanations. Here this work assesses the current and future challenges faced by structural nuclear materials, identifying the specific applications in which HEAs may provide a competitive advantage compared to industry-standard materials with the aid of Ashby material selection maps. Considerations are provided for the design of future nuclear HEAs, including calculations of nuclear-relevant properties to assist in the initial down-selection of elements depending on application requirements (e.g., low neutron capture for in-core applications), narrowing the existing compositional space of HEAs to a manageable scope.

36 MATERIALS SCIENCE↗

Beryllium-driven structural evolution at the divertor surface

Erosion of the beryllium first wall material in tokamak reactors has been shown to result in transport and deposition on the tungsten divertor. Experimental studies of beryllium implantation in tungsten indicate that mixed W–Be intermetallic deposits can form, which have lower melting temperatures than tungsten and can trap tritium at higher rates. To better understand the formation and growth rate of these intermetallics, we performed cumulative molecular dynamics (MD) simulations of both high and low energy beryllium deposition in tungsten. In both cases, a W–Be mixed material layer (MML) emerged at the surface within several nanoseconds, either through energetic implantation or a thermally-activated exchange mechanism, respectively. While some ordering of the material into intermetallics occurred, fully ordered structures did not emerge from the deposition simulations. Targeted MD simulations of the MML to further study the rate of Be diffusion and intermetallic growth rates indicate that for both cases, the gradual re-structuring of the material into an ordered intermetallic layer is beyond accessible MD time scales(≤1 μs). However, the rapid formation of the MML within nanoseconds indicates that beryllium deposition can influence other plasma species interactions at the surface and begin to alter the tungsten material properties. Therefore, beryllium deposition on the divertor surface, even in small amounts, is likely to cause significant changes in plasma-surface interactions and will need to be considered in future studies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Full-wave simulations on helicon and parasitic excitation of slow waves near the edge plasma

Helicon waves are thought to be promising in various tokamaks, such as DIII-D, because they can penetrate reactor-grade high-density cores and drive the off-axis current with higher efficiency. In the frequency regime ~476 MHz, both slow electrostatic and fast electromagnetic helicon waves can coexist in DIII-D. If the antenna parasitically excites the slow mode, these waves can propagate along the magnetic field line into the scrape-off layer (SOL). Although the importance of the misalignment of the Faraday screen and the electron density in the SOL on the excitation and propagation of slow modes is well known, the conditions for minimizing slow mode excitation have yet to be optimized. Using the Petra-M simulation code in the 2D domain, we analyze the effects of the misalignment of the antenna in the poloidal direction, the misalignment of the Faraday screen in the toroidal direction, and the density in front of the antenna on slow mode generation. Our results suggest that the misalignment of the Faraday screen is a critical factor in reducing the slow mode and that the misalignment angle should be below ~5° to minimize the slow wave excitation. When the electron density is higher than 3.5 x 10 18 m –3 in the SOL, the generation of the slow mode from the antenna is minimized and unaffected by the misalignment of the Faraday screen.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Impact of collisionality on turbulence in the edge of tokamak plasma using 3D global simulations

Collisionality is one of the key parameters in determining turbulent transport in the plasma edge, regulating phenomena such as 'shoulder formation', separation of scale lengths in the scrape-off layer (SOL), turbulence damping and zonal flow dynamics. Understanding its role is therefore of primary importance for future reactors like ITER. Getting reliable predictions and a better characterization of plasma flow properties when varying collisionality remains, however, a critical challenge for the simulations. This paper focuses on the impact of varying collisionality in a non-isothermal three-dimensional fluid model of the plasma edge. A high field side limited configuration encompassing open and closed magnetic field lines with parameters typical of a medium-sized tokamak is considered. The present model can consistently account for the variations of collisionality and its impact on both the parallel resistivity η ∥ and the ion and electron parallel thermal conductivities χ ∥e,i . Details on mean flow and turbulence properties are given. Changing collisionality leads to significant changes in the flow properties both on the mean and fluctuating quantities. In particular, lowering collisionality decreases the size of coherent structures, the fluctuation levels of turbulence, and steepens the density and temperature equilibrium profiles around the separatrix leading to a global reduction of the turbulent transport. The SOL width is observed to increase with collisionality, eventually resulting in the disappearance of the scale lengths separation between near and far SOL, consistently with previous experimental observations. At low collisionality, where the presence of narrow feature is well-established, a contribution of heat conduction increases up to compete with heat convection.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Numerical modeling of pedestal stability and broadband turbulence of wide-pedestal QH-mode plasmas on DIII-D

The wide-pedestal quiescent high confinement mode discovered on DIII-D in recent years is a stationary and quiescent H-mode (QH-mode) with the pedestal width exceeding EPED prediction by at least 25%. Its characteristics, such as low rotation, high energy confinement and edge localized mode-free operation, make it an attractive operation mode for future reactors. Linear and nonlinear simulations using BOUT++ reduced two fluid MHD models and awere carried out to investigate the bursty broadband turbulence often observed in the edge of wide-pedestal QH-mode plasmas. Two kinds of MHD-scale instabilities in different spatial locations within the pedestal were found in the simulations: one mild peeling–ballooning (PB) mode γ PB < 0.04ω A ) located near the minimum in E r</:sub> well propagating in ion diamagnetic drift direction; and one drift-Alfvén wave locates at smaller radius compared to E r</:sub> well propagating in the electron diamagnetic drift direction and unstable only when the parallel electron dynamics is included in the simulation. The coupling between drift wave and shear Alfvén wave provides a possible cause of the experimentally observed local profile flattening in the upper-pedestal. The rotation direction, mode location, as well as the wavenumber of these two modes from BOUT++ simulations agree reasonably well with the experimental measurements, while the lack of quantitative agreement is likely due to the lack of trapped electron physics in current fluid model. This work presents improved physics understanding of the pedestal stability and turbulence dynamics for wide-pedestal QH-mode.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Designing a validation experiment for radio frequency condensation

Abstract Theoretical studies have suggested that nonlinear effects can lead to ‘radio frequency (RF) condensation’, where an initially broad current profile can coalesce in islands when they reach sufficient width. In suitable conditions, RF condensation can ‘self-focus’ the driven current to the center of an island, improving stabilization efficiency and reducing control complexity. In unsuitable conditions, the effect can prematurely deplete the RF energy before it reaches the island center, impairing stabilization. It is predicted that the RF condensation effect can significantly impact reactor-scale tokamaks. This paper presents a set of simulations investigating the conditions under which RF condensation might be encountered in present-day tokamaks. For concreteness, the calculations use equilibrium reconstructions for two shots from DIII-D and AUG. The Current Condensation Amid Magnetic Islands (OCCAMI) simulation code has been used for this investigation. The code takes as its input a numerically specified axisymmetric EFIT equilibrium solution, and it perturbatively constructs a 3D field with an island embedded at the appropriate rational surface. In the OCCAMI code, the GENRAY code is used for ray tracing and for calculating the power deposition along a ray trajectory, and GENRAY is coupled self-consistently to a solution of the thermal diffusion equation in the island. The simulation results described in the paper illuminate the conditions required for experimental validation of the theory of RF condensation. The simulations also provide an explanation of why the effect was not noticed in experiments prior to the publication of theoretical papers on the subject.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

It is recognized that standing wave effects appearing in large-area, very-high-frequency capacitively coupled plasma (CCP) reactors cause center-high plasma non-uniformity. Using a high-frequency magnetic probe, we present a direct experimental diagnostic of the nonlinear standing waves and bulk ohmic electron power absorption dynamics in low pressure CCP discharges for different driving frequencies of 13.56, 30, and 60 MHz. The design, principle, calibration, and validation of the probe are described in detail. Spatial structures of the harmonics of the magnetic field, determined by the magnetic probe, were used to calculate the distributions of the harmonic current and the corresponding ohmic electron power deposition, providing insights into the behavior of nonlinear harmonics. At a low driving frequency, i.e. 13.56 MHz, no remarkable nonlinear standing waves were identified and the bulk ohmic electron power absorption was observed to be negligible. Here, the harmonic magnetic field/current was found to increase dramatically with the driving frequency, due to decreased sheath reactance and more remarkable nonlinear standing waves at a higher driving frequency, leading to the enhancements of the ohmic heating and the plasma density in the bulk, specifically at the electrode center. At a high driving frequency, i.e. 60 MHz, the high-order harmonic current density and the corresponding ohmic electron power absorption exhibited a similar node structure, with the main peak on axis, and one or more minor peaks between the electrode center and the edge, contributing to the center-high profile of the plasma density.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗