Microwave N{sub 2}-Ar plasma torch. I. Modeling
The spatial structure of a microwave plasma torch driven by an azimuthally symmetric surface wave operating in a N{sub 2}-Ar mixture at atmospheric pressure is investigated. A two-dimensional (2D) self-consistent theoretical model is developed to investigate the entire spatial structure of the source, including the discharge zone, sustained by the field of the surface TM{sub 00} mode, and the postdischarge plasma. Maxwell's equations, the rate balance equations for the most important excited species - vibrationally and electronically excited states, ions and nitrogen atoms N({sup 4}S) - and the Boltzmann equation for electrons are consistently solved. Model calculations of the 2D spatial distributions of species of interest such as charged particles (electrons and positive ions), N{sub 2}({Chi} {sup 1{Sigma}}{sub g}{sup +},v) vibrationally excited molecules, N{sub 2}(A {sup 3{Sigma}}{sub u}{sup +}) metastable molecules, and N({sup 4}S) ground state atoms are presented and discussed.