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At least 1,081 records · Page 60

Entropy generation method to quantify thermal comfort

The present paper presents a thermodynamic approach to assess the quality of human-thermal environment interaction and quantify thermal comfort. The approach involves development of entropy generation term by applying second law of thermodynamics to the combined human-environment system. The entropy generation term combines both human thermal physiological responses and thermal environmental variables to provide an objective measure of thermal comfort. The original concepts and definitions form the basis for establishing the mathematical relationship between thermal comfort and entropy generation term. As a result of logic and deterministic approach, an Objective Thermal Comfort Index (OTCI) is defined and established as a function of entropy generation. In order to verify the entropy-based thermal comfort model, human thermal physiological responses due to changes in ambient conditions are simulated using a well established and validated human thermal model developed at the Institute of Environmental Research of Kansas State University (KSU). The finite element based KSU human thermal computer model is being utilized as a "Computational Environmental Chamber" to conduct series of simulations to examine the human thermal responses to different environmental conditions. The output from the simulation, which include human thermal responses and input data consisting of environmental conditions are fed into the thermal comfort model. Continuous monitoring of thermal comfort in comfortable and extreme environmental conditions is demonstrated. The Objective Thermal Comfort values obtained from the entropy-based model are validated against regression based Predicted Mean Vote (PMV) values. Using the corresponding air temperatures and vapor pressures that were used in the computer simulation in the regression equation generates the PMV values. The preliminary results indicate that the OTCI and PMV values correlate well under ideal conditions. However, an experimental study is needed in the future to fully establish the validity of the OTCI formula and the model. One of the practical applications of this index is that could it be integrated in thermal control systems to develop human-centered environmental control systems for potential use in aircraft, mass transit vehicles, intelligent building systems, and space vehicles.

Models, Biological↗

Real-Time Optical Monitoring of Flow Kinetics and Gas Phase Reactions Under High-Pressure OMCVD Conditions

This contribution addresses the real-time optical characterization of gas flow and gas phase reactions as they play a crucial role for chemical vapor phase depositions utilizing elevated and high pressure chemical vapor deposition (HPCVD) conditions. The objectives of these experiments are to validate on the basis of results on real-time optical diagnostics process models simulation codes, and provide input parameter sets needed for analysis and control of chemical vapor deposition at elevated pressures. Access to microgravity is required to retain high pressure conditions of laminar flow, which is essential for successful acquisition and interpretation of the optical data. In this contribution, we describe the design and construction of the HPCVD system, which include access ports for various optical methods of real-time process monitoring and to analyze the initial stages of heteroepitaxy and steady-state growth in the different pressure ranges. To analyze the onset of turbulence, provisions are made for implementation of experimental methods for in-situ characterization of the nature of flow. This knowledge will be the basis for the design definition of experiments under microgravity, where gas flow conditions, gas phase and surface chemistry, might be analyzed by remote controlled real-time diagnostics tools, developed in this research project.

Dietz, N.↗

Application and Certification of Comparative Vacuum Monitoring Sensors for Structural Health Monitoring of 737 Wing Box Fittings

Multi-site fatigue damage, hidden cracks in hard-to-reach locations, disbonded joints, erosion, impact, and corrosion are among the major flaws encountered in today's extensive fleet of aging aircraft and space vehicles. The use of in-situ sensors for real-time health monitoring of aircraft structures are a viable option to overcome inspection impediments stemming from accessibility limitations, complex geometries, and the location and depth of hidden damage. Reliable, structural health monitoring systems can automatically process data, assess structural condition, and signal the need for human intervention. Prevention of unexpected flaw growth and structural failure can be improved if on-board health monitoring systems are used to continuously assess structural integrity. Such systems are able to detect incipient damage before catastrophic failures occurs. Condition-based maintenance practices could be substituted for the current time-based maintenance approach. Other advantages of on-board distributed sensor systems are that they can eliminate costly, and potentially damaging, disassembly, improve sensitivity by producing optimum placement of sensors and decrease maintenance costs by eliminating more time- consuming manual inspections. This report presents a Sandia Labs-aviation industry effort to move SHM into routine use for aircraft maintenance. This program addressed formal SHM technology validation and certification issues so that the full spectrum of concerns, including design, deployment, performance and certification were appropriately considered. The Airworthiness Assurance NDI Validation Center (AANC) at Sandia Labs, in conjunction with Boeing, Delta Air Lines, Structural Monitoring Systems Ltd., Anodyne Electronics Manufacturing Corp. and the Federal Aviation Administration (FAA) carried out a certification program to formally introduce Comparative Vacuum Monitoring (CVM) as a structural health monitoring solution to a specific aircraft wing box application. Validation tasks were designed to address the SHM equipment, the health monitoring task, the resolution required, the sensor interrogation procedures, the conditions under which the monitoring will occur, the potential inspector population, adoption of CVM into an airline maintenance program and the document revisions necessary to allow for routine use of CVM as an alternate means of performing periodic structural inspects. To carry out the validation process, knowledge of aircraft maintenance practices was coupled with an unbiased, independent evaluation. Sandia Labs designed, implemented, and analyzed the results from a focused and statistically-relevant experimental effort to quantify the reliability of the CVM system applied to the Boeing 737 Wing Box fitting application. All factors that affect SHM sensitivity were included in this program: flaw size, shape, orientation and location relative to the sensors, as well as operational and environmental variables. Statistical methods were applied to performance data to derive Probability of Detection (POD) values for CVM sensors in a manner that agrees with current nondestructive inspection (NDI) validation requirements and also is acceptable to both the aviation industry and regulatory bodies. This report presents the use of several different statistical methods, some of them adapted from NDI performance assessments and some proposed to address the unique nature of damage detection via SHM systems, and discusses how they can converge to produce a confident quantification of SHM performance An important element in developing SHM validation processes is a clear understanding of the regulatory measures needed to adopt SHM solutions along with the knowledge of the structural and maintenance characteristics that may impact the operational performance of an SHM system. This report describes the major elements of an SHM validation approach and differentiates the SHM elements from those found in NDI validation. The activities conducted in this program demonstrated the feasibility of routine SHM usage in general and CVM in particular for the application selected. They also helped establish an optimum OEM-airline-regulator process and determined how to safely adopt SHM solutions. This formal SHM validation will allow aircraft manufacturers and airlines to confidently make informed decisions about the proper utilization of CVM technology. It will also streamline the regulatory actions and formal certification measures needed to assure the safe application of SHM solutions.

42 ENGINEERING↗

Monitoring the daily evolution and extent of snow drought

Abstract. Snow droughts are commonly defined as below-average snowpack at a point in time, typically 1 April in the western United States (wUS). This definition is valuable for interpreting the state of the snowpack but obscures the temporal evolution of snow drought. Borrowing from dynamical systems theory, we applied phase diagrams to visually examine the daily evolution of snow water equivalent (SWE) and accumulated precipitation conditions in maritime, intermountain, and continental snow climates in the wUS using station observations as well as spatially distributed estimates of SWE and precipitation. Using a percentile-based drought definition, phase diagrams of SWE and precipitation highlighted decision-relevant aspects of snow drought such as onset, evolution, and termination. The phase diagram approach can be used in tandem with spatially distributed estimates of daily SWE and precipitation to reveal variability in snow drought type and extent. When combined with streamflow or other environmental data, phase diagrams and spatial estimates of snow drought conditions can help inform drought monitoring and early warning systems and help link snow drought type and evolution to impacts on ecosystems, water resources, and recreation. A web tool is introduced allowing users to create real-time or historic snow drought phase diagrams.

54 ENVIRONMENTAL SCIENCES↗

Remote Whispering Applying Time Reversal

The purpose of this project was to explore the use of time reversal technologies as a means for communication to a targeted individual or location. The idea is to have the privacy of whispering in one’s ear, but to do this remotely from loudspeakers not located near the target. Applications of this work include communicating with hostages and survivors in rescue operations, communicating imaging and operational conditions in deep drilling operations, monitoring storage of spent nuclear fuel in storage casks without wires, or clandestine activities requiring signaling between specific points. This technology provides a solution in any application where wires and radio communications are not possible or not desired. It also may be configured to self calibrate on a regular basis to adjust for changing conditions. These communications allow two people to converse with one another in real time, converse in an inaudible frequency range or medium (i.e. using ultrasonic frequencies and/or sending vibrations through a structure), or send information for a system to interpret (even allowing remote control of a system using sound). The time reversal process allows one to focus energy to a specific location in space and to send a clean transmission of a selected signal only to that location. In order for the time reversal process to work, a calibration signal must be obtained. This signal may be obtained experimentally using an impulsive sound, a known chirp signal, or other known signals. It may also be determined from a numerical model of a known environment in which the focusing is desired or from passive listening over time to ambient noise.

42 ENGINEERING↗

Diagnosing Ghost Bunches with the Upstream Extinction Monitor in the Mu2e Experiment

The Mu2e experiment has a stringent requirement for extinction of the pulsed proton beam, referring to the elimination of particles between proton bunches to a relative level of 10$^-10$, which means a single out-of-time particle in the inter-pulse gaps for every 250 complete proton pulses. As the construction of the Mu2e experiment nears completion, it is crucially important to make an early measurement of the beam extinction in its current condition. Hence the upstream extinction monitor was constructed and operated to probe for problems in the proton pulse structure or a higher than expected incidence rate of out-of-time particles. The analysis in this work comes from data taken in March 2026. The long data run showed a significant presence of out-of-time particles from ghost bunches in the Delivery Ring approximately 388 ns after the centers of the main proton pulses. These are hypothesized to be the result of a combination of a RF frequency mismatch, particle space charge, and machine impedance during the rebunching sequence in the Recycler Ring, which can lead to particles leaking into adjacent buckets, but further studies and simulations are needed to confirm this

Hensley, R. [UC, Davis] (ORCID:0000000216064485)↗

Soil Moisture Drought Monitoring and Forecasting Using Satellite and Climate Model Data over Southwestern China

In this paper, an experimental soil moisture drought monitoring and seasonal forecasting framework based on the Variable Infiltration Capacity model (VIC) over southwestern China (SW) is presented. Satellite precipitation data are used to force VIC for a near-real-time estimate of land surface hydrologic conditions. Initialized with satellite-aided monitoring (MONIT), the climate model (CFSv2)-based forecast (MONIT+CFSv2) and ensemble streamflow prediction (ESP)-based forecast (MONIT+ESP) are both performed. One dry season drought and one wet season drought are employed to test the ability of this framework in terms of real-time tracking and predicting the evolution of soil moisture (SM) drought, respectively. The results show that the skillful CFSv2 climate forecasts (CFs) are only found at the first month. The satellite-aided monitoring is able to provide a reasonable estimate of forecast initial conditions (ICs) in real-time mode. In the presented cases, MONIT+CFSv2 forecast exhibits comparable performance against the observation-based estimates for the first month, whereas the predictive skill largely drops beyond 1 month. Compared to MONIT+ESP, MONIT+CFSv2 ensembles give more skillful SM drought forecast during the dry season, as indicated by a smaller ensemble range, while the added value of MONIT+CFSv2 is marginal during the wet season. Furthermore, a quantitative attribution analysis of SM forecast uncertainty demonstrates that SM forecast skill is mostly controlled by ICs at the first month and that uncertainties in CFs have the largest contribution to SM forecast errors at longer lead times. This study highlights a value of this framework in generating near-real-time ICs and providing a reliable SM drought prediction with 1 month ahead, which may greatly benefit drought diagnosis, assessment, and early warning.

54 ENVIRONMENTAL SCIENCES↗

Automated Monitoring with a BCP Fault-Decision Test

The Bayesian conditional probability (BCP) technique is a statistical fault-decision technique that is suitable as the mathematical basis of the fault-manager module in the automated-monitoring system and method described in the immediately preceding article. Within the automated-monitoring system, the fault-manager module operates in conjunction with the fault-detector module, which can be based on any one of several fault-detection techniques; examples include a threshold-limit-comparison technique or the BSP or SPRT technique mentioned in the preceding article. The present BCP technique is used to evaluate a series of one or more fault-detection events for the purpose of filtering out occasional false alarms produced by many types of statistical fault-detection procedures. The BCP technique increases the probability that an automated monitoring system produces a correct decision regarding the presence or absence of a fault. Because occasional false alarms are an inevitable consequence of the SPRT, BSP, or any other statistically based fault-detection test, there is a need for a logical procedure to distinguish between true and false alarms. Heretofore, it has been common practice to make a fault decision on an ad hoc basis for example by following a multiple-observation voting strategy in which a signal is declared to be indicative of a fault if m of the last n observations produced a fault-detection alarm. The BCP technique was developed to obtain results more reliable than those afforded by a voting strategy. The BCP technique involves a test in which one applies Bayesian inference techniques to a series of one or more single-observation alarms produced by a fault-detection test. One considers the last n decisions generated by a fault-detection test in order to evaluate the conditional probability that a failure is indicated (see figure). Each new decision reached by a fault-detection test is treated as a new piece of evidence about the state of the monitored asset, and the conditional probability of failure for the system is updated on the basis of this new evidence. The conditional probability of failure is compared with a predefined limit. For a probability below the limit, the asset is declared to be healthy. For a probability above the limit, the asset is declared to be faulty.

Bickford, Randall L.↗

Random Vibration Testing of Advanced Wet Tantalum Capacitors

Advanced wet tantalum capacitors allow for improved performance of power supply systems along with substantial reduction of size and weight of the systems that is especially beneficial for space electronics. Due to launch-related stresses, acceptance testing of all space systems includes random vibration test (RVT). However, many types of advanced wet tantalum capacitors cannot pass consistently RVT at conditions specified in MIL-PRF-39006, which impedes their use in space projects. This requires a closer look at the existing requirements, modes and mechanisms of failures, specifics of test conditions, and acceptance criteria. In this work, different lots of advanced wet tantalum capacitors from four manufacturers have been tested at step stress random vibration conditions while their currents were monitored before, during, and after the testing. It has been shown that the robustness of the parts and their reliability are mostly due to effective self-healing processes and limited current spiking or minor scintillations caused by RVT do not increase the risk of failures during operation. A simple model for scintillations events has been used to simulate current spiking during RVT and optimize test conditions. The significance of scintillations and possible effects of gas generation have been discussed and test acceptance criteria for limited current spiking have been suggested.

cracking↗

Random Vibration Testing of Advanced Wet Tantalum Capacitors

Advanced wet tantalum capacitors allow for improved performance of power supply systems along with substantial reduction of size and weight of the systems that is especially beneficial for space electronics. Due to launch-related stresses, acceptance testing of all space systems includes random vibration test (RVT). However, many types of advanced wet tantalum capacitors cannot pass consistently RVT at conditions specified in MIL-PRF-39006, which impedes their use in space projects. This requires a closer look at the existing requirements, modes and mechanisms of failures, specifics of test conditions, and acceptance criteria. In this work, different lots of advanced wet tantalum capacitors from four manufacturers have been tested at step stress random vibration conditions while their currents were monitored before, during, and after the testing. It has been shown that the robustness of the parts and their reliability are mostly due to effective self-healing processes and limited current spiking or minor scintillations caused by RVT do not increase the risk of failures during operation. A simple model for scintillations events has been used to simulate current spiking during RVT and optimize test conditions. The significance of scintillations and possible effects of gas generation have been discussed and test acceptance criteria for limited current spiking have been suggested.

cracking↗

Random Vibration Testing of Advanced Wet Tantalum Capacitors

Advanced wet tantalum capacitors allow for improved performance of power supply systems along with substantial reduction of size and weight of the systems that is especially beneficial for space electronics. Due to launch-related stresses, acceptance testing of all space systems includes random vibration test (RVT). However, many types of advanced wet tantalum capacitors cannot pass consistently RVT at conditions specified in MIL-PRF-39006, which impedes their use in space projects. This requires a closer look at the existing requirements, modes and mechanisms of failures, specifics of test conditions, and acceptance criteria. In this work, different lots of advanced wet tantalum capacitors from four manufacturers have been tested at step stress random vibration conditions while their currents were monitored before, during, and after the testing. It has been shown that the robustness of the parts and their reliability are mostly due to effective self-healing processes and limited current spiking or minor scintillations caused by RVT do not increase the risk of failures during operation. A simple model for scintillations events has been used to simulate current spiking during RVT and optimize test conditions. The significance of scintillations and possible effects of gas generation have been discussed and test acceptance criteria for limited current spiking have been suggested.

wet tantalum capacitors↗

Performance consequences of automation-induced 'complacency'

The effect of variations in the reliability of an automated monitoring system on human operator detection of automation failures was examined in two experiments. For four 30-min sessions, 40 subjects performed an IBM PC-based flight simulation that included manual tracking and fuel-management tasks, as well as a system-monitoring task that was under automation control. Automation reliability - the percentage of system malfunctions detected by the automation routine - either remained constant at a low or high level over time or alternated every 10 min from low to high. Operator detection of automation failures was substantially worse for constant-reliability than for variable-reliability automation after about 20 min under automation control, indicating that the former condition induced 'complacency'. When system monitoring was the only task, detection was very efficient and was unaffected by variations in automation reliability. The results provide the first empirical evidence of the performance consequences of automation-induced 'complacency'. We relate findings to operator attitudes toward automation and discuss implications for cockpit automation design.

Parasuraman, Raja↗

Dual-comb spectroscopy of laser-induced plasmas

Dual-comb spectroscopy has become a powerful spectroscopic technique in applications that rely on its broad spectral coverage combined with high frequency resolution capabilities. Experiments to date have primarily focused on detection and analysis of multiple gas species under semi-static conditions, with applications ranging from environmental monitoring of greenhouse gases to high resolution molecular spectroscopy. Here, we utilize dual-comb spectroscopy to demonstrate broadband, high-resolution, and time-resolved measurements in a laser induced plasma for the first time. As a first demonstration, we simultaneously detect trace amounts of Rb and K in solid samples with a single laser ablation shot, with transitions separated by over 6 THz (13 nm) and spectral resolution sufficient to resolve isotopic and ground state hyperfine splittings of the Rb D 2 line. This new spectroscopic approach offers the broad spectral coverage found in the powerful techniques of laser-induced breakdown spectroscopy (LIBS) while providing the high-resolution and accuracy of cw laser-based spectroscopies.

Frequency comb↗

A Novel Concentrating Solar Weathering Apparatus for Experimental Validation of Multi-Modal Degradation Models

High-performance coatings for Concentrating Solar Power (CSP) receivers are subjected to remarkable environmental stressors during normal operations. Applied to the receiver tubes, these coatings serve to maximize the solar absorptivity of the receiver, transferring as much heat as possible from the solar collectors into the heat-transfer fluid (HTF). The lifecycle of these coatings is not well-defined, and the harsh operational conditions make them difficult to test. NREL has designed, built, and tested an apparatus to expose these samples to design levels of environmental stress and well beyond, into accelerated and destructive conditions. The chamber is actively cooled, monitored, and has the capability to supply humidification for cycling tests, allowing us to test multi-modal degradation and failure conditions at high temperature, high flux, and high humidity conditions. These conditions can catalyze high-temperature oxidation, mechanical degradation, and other modes of absorptivity loss seen in selective solar receiver coatings. The experimental data can feed lifecycle models for expensive and necessarily resilient materials, offering insights to aid maintenance schedules, technoeconomic analysis, and material industry performance benchmarks. This presentation will demonstrate the apparatus design and performance, as well as initial results for aging on a selective receiver coating.

14 SOLAR ENERGY↗

Microscopic assessment of ASR-affected concrete under confinement conditions

The Damage Rating Index (DRI), a semi-quantitative microscopic procedure, has been successfully used to describe alkali-silica reaction (ASR) damage development of concrete under “free expansion” conditions. Yet, the confinement impact on ASR-induced cracks' generation and propagation has not been fully investigated. This work aims to understand the influence of confinement on ASR development through the DRI. Eighteen concrete blocks incorporating a highly reactive coarse aggregate and distinct reinforcement configurations were manufactured, stored in conditions enabling ASR development, and monitored over time. Two expansion levels were selected for analysis (0.08% and 0.15%) and once reached, cores were extracted from three different directions (longitudinal, transverse and vertical) and the DRI conducted on those. Results demonstrate that ASR-induced expansion and deterioration change according to the direction and confinement configuration. Moreover, distinct crack features and orientations are generated in confined concrete, which attests that ASR displays different damage mechanisms under free and confinement conditions.

36 MATERIALS SCIENCE↗

Tonopah Test Range Air Monitoring: CY2013 Meteorological, Radiological, and Airborne Particulate Observations

In 1963, the U.S. Department of Energy (DOE) (formerly the Atomic Energy Commission [AEC]), implemented Operation Roller Coaster on the Tonopah Test Range (TTR) and an adjacent area of the Nevada Test and Training Range (NTTR) (formerly the Nellis Air Force Range). This test resulted in radionuclide-contaminated soils at Clean Slate I, II, and III. This report documents observations made during on-going monitoring of radiological, meteorological, and dust conditions at stations installed adjacent to Clean Slate I and Clean Slate III and at the TTR Range Operations Control center. The primary objective of the monitoring effort is to determine if winds blowing across the Clean Slate sites are transporting particles of radionuclide-contaminated soils beyond both the physical and administrative boundaries of the sites. Results for the calendar year (CY) 2013 monitoring include: (1) the gross alpha and gross beta values from the monitoring stations are approximately equivalent to the highest values observed during the CY2012 reporting at the surrounding Community Environmental Monitoring Program (CEMP) stations (this was the latest documented data available at the time of this writing); (2) only naturally occurring radionuclides were identified in the gamma spectral analyses; (3) the ambient gamma radiation measurements indicate that the average annual gamma exposure is similar at all three monitoring stations and periodic intervals of increased gamma values appear to be associated with storm fronts passing through the area; and (4) the concentrations of both resuspended dust and saltated sand particles generally increase with increasing wind speed. However, differences in the observed dust concentrations are likely due to differences in the soil characteristics immediately adjacent to the monitoring stations. Neither the resuspended particulate radiological analyses nor the ambient gamma radiation measurements suggest wind transport of radionuclide-contaminated soils.

(1)↗

Comparison of CO 2 Detection Methods Tested in Shallow Groundwater Monitoring Wells at a Geological Sequestration Site

The geological storage of anthropogenic carbon dioxide (CO 2 ) is one method of reducing the amount of CO 2 released into the atmosphere. Monitoring programs typically determine baseline conditions in surface and near-surface environments before, during, and after CO 2 injection to evaluate if impacts related to injection have occurred. Because CO 2 concentrations in groundwater fluctuate naturally due to complex geochemical and geomicrobiologicalinteractions, a clear understanding of the baseline behavior of CO 2 in groundwater near injection sites is important. Numerous ways of measuring aqueous CO 2 in the field and lab are currently used, but most methods have significant shortcomings (e.g., are tedious, lengthy, have interferences, or have significant lag time before a result is determined). In this study, we examined the effectiveness of two novel CO 2 detection methods and their ability to rapidly detect CO2in shallow groundwater monitoring wells associated with the Illinois Basin –Decatur Project geological sequestration site. The CarboQC beverage carbonation meter was used to measure the concentration of CO 2 in water by monitoring temperature and pressure changes and calculating the PCO 2 from the ideal gas law. Additionally, a non-dispersive infrared (NDIR) CO< sub>2 sensor enclosed in a gas-permeable, water-impermeable membrane measured CO2by determining an equilibrium concentration. Results showed that the CarboQC method provided rapid (< 3 min) and repeatable results under field conditions within a measured concentration range of 15 –125 mg/L CO 2 . The NDIR sensor results correlated well (r 2 = 0.93) with the CarboQC data, but CO 2 equilibration required at least 15 minutes, making the method somewhat less desirable under field conditions. In contrast, NDIR-based sensors have a greater potential for long-term deployment. Both systems are adaptable to in-line groundwater sampling methods. Other specific advantages and disadvantages associated with the two approaches, and anomalies associated with specific samples, are discussed in greater detail in this poster.

54 ENVIRONMENTAL SCIENCES↗

Detection of Chamber Conditioning Through Optical Emission and Impedance Measurements

During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalls can cause run-to-run drift and will necessitate some time for conditioning and seasoning of the reactor. Though diagnostics can be applied to study and understand these phenomena, many of them are not practical for use in an industrial reactor. For instance, measurements of ion fluxes and energy by mass spectrometry show that the buildup of insulating fluorocarbon films on the reactor surface will cause a shift in both ion energy and current in an argon plasma. However, such a device cannot be easily integrated into a processing system. The shift in ion energy and flux will be accompanied by an increase in the capacitance of the plasma sheath. The shift in sheath capacitance can be easily measured by a common commercially available impedance probe placed on the inductive coil. A buildup of film on the chamber wall is expected to affect the production of fluorocarbon radicals, and thus the presence of such species in the optical emission spectrum of the plasma can be monitored as well. These two techniques are employed on a GEC (Gaseous Electronics Conference) Reference Cell to assess the validity of optical emission and impedance monitoring as a metric of chamber conditioning. These techniques are applied to experimental runs with CHF3 and CHF3/O2/Ar plasmas, with intermediate monitoring of pure argon plasmas as a reference case for chamber conditions.

Cruden, Brett A.↗