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At least 109 records · Page 6
All sourcesNASA NTRSDOE OSTI
DOE OSTI2026

Lithium–Sulfur Batteries Enabled by Fluorine-Free Electrolytes with a Compressed Solvation Structure

In this paper, a fluorine-free aromatic cosolvent strategy is presented to regulate electrolyte solvation chemistry in Li-S batteries with sulfurized polyacrylonitrile (SPAN) cathodes. Assisted by the Uni-ELF AI tool and experimental validation, toluene is identified as an optimal weakly solvating cosolvent. Its incorporation compresses the Li⁺ solvation sheath and induces an anion-dominated solvation structure, thereby enhancing interfacial ion transport and sulfur redox kinetics through controlled π-π interactions with polysulfides. Consequently, Li || Li symmetric cells exhibit stable cycling for over 1,000 cycles at a current density of 1 mA cm⁻². Meanwhile, Li-S cells employing high-loading SPAN cathodes retain more than 75% of their initial capacity after 250 cycles at -10 °C. Additionally, a practical pouch cell with high SPAN loading and a low electrolyte-to-SPAN ratio of 3 µL mg⁻¹ delivers an initial capacity of around 600 mAh gSPAN⁻¹, underscoring the potential of fluorine-free electrolytes for practical metal-sulfur batteries.

25 ENERGY STORAGE↗
DOE OSTI2020

Comparative analysis of characteristics of a supersonic cw chemical HF laser on molecular fluorine and nitrogen trifluoride

We have experimentally studied the characteristics of a supersonic cw chemical HF laser with a flat nozzle array based on a nozzle – nozzle reagent mixing scheme operating with the use of F{sub 2} – D{sub 2} – He and NF{sub 3} – D{sub 2} – He fuel compositions in an atomic fluorine generator. The active medium flow field pattern, its gas-dynamic characteristics, and the laser radiation spectrum are considered. The comparison of these characteristics has made it possible to establish a strong impact on the flow field (lasing zone length) of the chemical composition of the combustion products from the atomic fluorine generator. The gas-dynamic parameters of the active medium formed by using a NF{sub 3} – D{sub 2} – He fuel have turned out to be less acceptable in terms of the gas flow pressure recovery than in the case of F{sub 2} – D{sub 2} – He fuel, while the radiation spectrum was more preferable from the viewpoint of passing through the atmosphere. (paper)

36 MATERIALS SCIENCE↗
DOE OSTI2020

Efficient lasing in mixtures of helium and fluorine in diffuse discharges formed by runaway electrons

The parameters of stimulated lasing in diffuse discharges formed in mixtures of helium and fluorine in a strongly inhomogeneous electric field are investigated. Lasing is obtained in the visible and VUV spectral regions on the transitions of fluorine atoms and molecules. It is shown that lasing in He – F{sub 2} mixtures at a wavelength of 157 nm continues for several half-periods of the discharge current. Due to the homogeneity of the diffuse discharge, the maximum lasing efficiency of the F{sub 2} laser is 0.15 %, which corresponds to the efficiency of this type of lasers pumped by pre-ionised transverse volume discharges. (paper)

74 ATOMIC AND MOLECULAR PHYSICS↗
DOE OSTI2020

Fluorine Limits and Impacts in High-Level Waste Glass Compositions

The impact of elevated fluorine (F) content on Hanford high-level waste (HLW) glasses has not previously been studied in detail. This effort represents the first systematic study to determine what F concentration limits should be used for the design of alkali-borosilicate-based Hanford Waste Treatment and Immobilization Plant (WTP) HLW glasses, and to document the technical basis for that limit. If alkali borosilicate glass made from Hanford HLW can accommodate a large amount of F, the large capital costs for complex sludge washing facilities may be avoided, as would much of the operational costs and negative schedule impacts associated with handling the large volumes of water required to dissolve these salts. In order to determine a limit for F in likely HLW glass compositions, an evaluation was conducted on glasses with F ≤ 0.90 mass% from previous nuclear waste glass studies. The collected dataset contains 239 glasses (232 HLW glasses and 7 LAW glasses) including 109 glasses with 0.9 ≤ F mass% ≤ 2.5, 116 with 2.5 < F mass% ≤ 8.0, and 14 with F mass% ≥ 8 (max. F mass% = 17.42). The collected composition and property data were analyzed to determine the basis for the F tolerance, i.e. the maximum F concentration that can be processed without potential issues. Fluorine volatility, product consistency test (PCT) response, liquidus temperature (T L ), glass melt viscosity, and crystallinity have been investigated. No limits for F concentration can be made based on F volatility, T L , or glass melt viscosity, because the data show that high F in glasses do not indicate, with high probability, being restricted by those property constrains. However, crystallinity and PCT response were used to estimate the F tolerance. The results show that glasses with high F (≥ 0.90 mass%) are more likely to form large fractions of F-containing crystal phases which may increase PCT responses, i.e. decrease the glass durability. Based on the results of crystallinity and PCT data, the F tolerance of 4.5 mass% is estimated. There is no evidence of other glass components, such as calcium oxides and alkali metal oxides have combined impacts with F on the glass properties. Overall, the available high-F glass data is limited, especially in the designed HLW glass composition regions. Future work on formulation and testing of HLW glasses with F ≥ 0.9 mass% will close the data gaps and expand operational flexibility with respect to the fluoride tolerances. Volatility of F from melters and corrosion of materials in contact with glass melts are important for processing of high-F wastes; yet no test data are currently available. It is recommended tests be conducted to address these two potential issues.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
DOE OSTI2022

Fluorination‐Enhanced Surface Stability of Disordered Rocksalt Cathodes

Abstract Cation‐disordered rocksalt (DRX) oxides are a promising new class of high‐energy‐density cathode materials for next‐generation Li‐ion batteries. However, their capacity fade presents a major challenge. Partial fluorine (F) substitution into the oxygen (O) lattice appears to be an effective strategy for improving the cycling stability, but the underlying atomistic mechanism remains elusive. Here, using a combination of advanced transmission electron microscopy based imaging and spectroscopy techniques, the structural and chemical evolution upon cycling of Mn‐based DRX cathodes with an increasing F content (Li–Mn–Nb–O–F x , x = 0, 0.05, 0.2) are probed. The atomic origin behind the beneficial effect of high‐level fluorination for enhancing the surface stability of the DRX is revealed. It is discovered that, due to the reduced O redox activity while with increasing F concentration, F in the DRX lattice mitigates the formation of an O‐deficient surface layer upon cycling. For low F‐substituted DRX, the O loss near the surface results in the formation of an amorphous cathode–electrolyte interphase layer and nanoscale voids after extended cycling. Increased F concentration in the DRX lattice minimizes both O loss and the interfacial reactions between DRX and the liquid electrolyte, enhancing the surface stability of DRX. These results provide guidance on the development of next‐generation cathode materials through anion substitution.

Li, Linze↗
DOE OSTI2024

Comprehensive review of combustion ion chromatography for the analysis of total, adsorbable, and extractable organic fluorine

Poly‐ and perfluoroalkyl substances (PFAS) are a class of persistent organic pollutants whose high stability and appreciable water solubility have led to near‐global contamination. PFAS are bioaccumulative toxins that have been linked to a myriad of disorders and have been detected nearly universally in human blood. Liquid chromatography‐tandem mass spectrometry is the most frequent method used for quantitation, though this typically only measures a few dozen of the >14 000 known PFAS and has been shown to account for a small portion of the total organic fluorine present. Sum parameter methods such as total, extractable, and adsorbable organic fluorine have emerged as alternative measurements for PFAS determination. Combustion ion chromatography has become the preferred method for organofluorine measurement where the sorbent or extract containing PFAS is combusted and the emitted hydrofluoric acid (HF) is a measure of the cumulative organofluorine present. Herein we critically review the types of organofluorine measurement, their separation from the sample matrix, and key parameters of the analytical instrument that affect sensitivity, reproducibility, and recovery with regards to PFAS analysis.

Chemistry↗
DOE OSTI2024

Ionic Pairs-Engineered Fluorinated Covalent Organic Frameworks Toward Direct Air Capture of CO 2

The covalent organic frameworks (COFs) possessing high crystallinity and capability to capture low-concentration CO 2 (400 ppm) from air are still underdeveloped. The challenge lies in simultaneously incorporating high-density active sites for CO 2 insertion and maintaining the ordered structure. Herein, a structure engineering approach is developed to afford an ionic pair-functionalized crystalline and stable fluorinated COF (F-COF) skeleton. The ordered structure of the F-COF is well maintained after the integration of abundant basic fluorinated alcoholate anions, as revealed by synchrotron X-ray scattering experiments. The breakthrough test demonstrates its attractive performance in capturing (400 ppm) CO 2 from gas mixtures via O$-$C bond formation, as indicated by the in situ spectroscopy and operando nuclear magnetic resonance spectroscopy using 13 C-labeled CO 2 sources. Both theoretical and experimental thermodynamic studies reveal the reaction enthalpy of ≈-40 kJ mol -1 between CO 2 and the COF scaffolds. This implies weaker interaction strength compared with state-of-the-art amine-derived sorbents, thus allowing complete CO 2 release with less energy input. The structure evolution study from synchrotron X-ray scattering and small-angle neutron scattering confirms the well-maintained crystalline patterns after CO 2 insertion. In conclusion, the as-developed proof-of-concept approach provides guidance on anchoring binding sites for direct air capture (DAC) of CO 2 in crystalline scaffolds.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2021

Optimized molecular aggregation via incorporating fluorinated unit in the polymer donor for 17.3% efficiency organic solar cells

Regulating molecular aggregation state via chemical modification of photovoltaic materials to optimize the blend morphology is an effective and challenging strategy to improve the photovoltaic performance of organic solar cells (OSCs). Here, in this work, we demonstrate a random terpolymerization strategy by incorporating 1,3-bis(5-bromo-4-fluorothiophen-2-yl)-5,7-bis(2-ethylhexyl)-4H,8H-benzo[1,2-c:4,5-c']bisthiophene-4,8-dione (BFT, 30 mol%) unit with fluorinated π-bridges into the molecular backbone of PM6 and develop a terpolymer PF1. Benefiting from the strong electronegativity of fluorine atom and noncovalent interaction of F---S, the energy levels, molecular ordering, and aggregation properties of the polymer donors are precisely regulated. Notably, in the active layer film based on PF1: Y6, the π-π stacking distance can reduce to 3.51 Å, which is significantly smaller than that of PM6:Y6 (3.65 Å) and boosts the effective exciton dissociation and charge transport, thereby effectively optimize the photovoltaic properties of the related devices. As a result, the PF1:Y6-based OSCs achieved a power conversion efficiency (PCE) of up to 17.3%, which is much higher than that of the controlled OSCs based on PM6:Y6 (PCE = 16.2%). These results demonstrate high-efficiency OSCs enabled by regulating molecular aggregation via terpolymerization strategy.

14 SOLAR ENERGY↗
DOE OSTI2023

Impact of fluorination on Li + solvation and dynamics in ionic liquid-hydrofluoroether locally concentrated electrolytes

The thermal, physical, structural, and transport properties of ionic liquid (IL) electrolytes based on n-methyl-n-butylpyrrolidinium bis(trifluoromethanesulfonyl)imide [PYR14][TFSI] and Li-salts of lithium (nonafluorobutane)(trifluoromethanesulfonyl)imide [Li][IM14] and [Li][TFSI] (0 ≤ x Li ≤ 0.3), with addition of 1,1,2,2-tetrafluoroethyl 2,2,3,3-tetrafluoropropyl ether (TTE) (0 ≤ x TTE ≤ 0.45) were studied. While [IM14] increases glass transition, TTE improves conductivity over a wider liquidus range. Li + is solvated primarily by [TFSI] with some contribution by [IM14]. However, both 7 Li- 19 F HOESY NMR and spatial distribution functions (SDFs) derived from molecular dynamics (MD) indicate short contacts between the fluorines of TTE and Li + . This is a result of tighter anion-solvated Li + without aggregation of the Li + solvates, consistent with Raman measurements, thus confirming the existence of fluorous domains in the bulk which leads to improved fluidity and a Li + diffusivity of 1.26 x 10 –12 m 2 /s at 0 °C (x Li = 0.20) with a Li + transference of 0.16. Improved transport properties translated to a higher capacity of the TTE/IL electrolyte in a Li||LiFePO 4 half-cell with 95mAh/g at 0.1C, compared to the IL electrolyte without TTE (60 mAh/g). Furthermore, this study demonstrates the tunability of solvation and transport properties in IL electrolytes by asymmetric fluorinated anions and hydrofluoroether co-solvents for low temperature Li-ion batteries.

25 ENERGY STORAGE↗
DOE OSTI2021

High-performance multiblock PEMs containing a highly acidic fluorinated-hydrophilic domain for water electrolysis

The present paper describes the design and evaluation of novel hydrophilic–hydrophobic poly(arylene ether sulfone) (PAES) multiblock copolymers for their synergistic effects upon transport properties and their potential use in proton exchange membrane water electrolysis. The multiblock copolymers are prepared via a coupling reaction between (i) a hydrophilic segment consisting of a disulfonated quinone fluorinated biphenyl group that contains fluorine moieties next to the sulfonated groups to increase the acidity, and (ii) hydrophobic segments composed of non-sulfonated biphenyl sulfone to provide dimensional stability. Two different lengths (molecular weights; 5k and 10k, where k represents 10 3 g mol -1 ) of hydrophobic segments are used to investigate the effects of the membrane properties compared with those of Nafion® and PAES random copolymer (i.e., BPSH40). Atomic force microscopy images of the BPSH40 and multiblock membranes are shown to agree closely with a mesoscale simulation, thus confirming the importance of the morphological effect upon the transport properties. Furthermore, the multiblock copolymer with a higher proportion of hydrophilic segments (10 k–5k) was shown to provide enhanced performance (3.41 A cm -2 at 1.9 V) compared to the multiblock copolymer with equal proportions of hydrophilic and hydrophobic segments (10 k–10 k) due to the greater continuity of nano-sized ionic channels.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2025

Expanded View of NMR Spin–Lattice Relaxation in Fluorine-Containing Ionic Liquids

Fluorine-containing anions are widely used in ionic liquids due to their unique physicochemical properties. However, the local dynamics of both cations and anions and their associated relaxation mechanisms remain incompletely understood. Here, we present a 1 H and 19 F spin–lattice relaxation rate (R1) study as a function of frequency over a broad frequency range from 30 kHz to 800 MHz for ionic liquids containing BF 4 – , PF 6 – , TFSI – , and FSI – anions and EMIM + cation. By combining experimental R 1 H and R 1 F NMR dispersion (NMRD) profiles with relaxation models for both dipolar spin interactions and chemical shift anisotropy (CSA) contributions, we demonstrate that CSA is needed to accurately describe the R 1 F relaxation behavior above ∼300 MHz, the extent of which depends on the anion structure. These findings challenge the long-standing assumption that dipolar contribution is the main source of 19 F relaxation in these systems and highlight the importance of including CSA to accurately interpret 19 F relaxation in ionic liquids, particularly at high frequencies. This work provides new insights into the molecular dynamics of fluorine-containing species.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

Proton Conducting Silicon Oxide Membranes as a Fluorine Free Alternative to Nafion for Low Temperature Water Electrolysis

Driven by environmental and health concerns related to per- and polyfluoroalkyl substances (PFAS), there has been growing interest in developing fluorine-free proton (H + ) exchange membrane (PEM) materials for fuel cells and water electrolyzers. In this study, we present a side-by-side comparison of the key transport properties of submicron thick, PFAS-free amorphous silicon dioxide (SiO 2 ) membranes to Nafion, a fluorinated polymer electrolyte membrane that represents the industry standard for PEM fuel cells and electrolyzers. Here, measurements of proton (H + ) conductivity (σ H + ), hydrogen (H 2 ) permeability (P H 2 ), and electrical resistivity (ρ e – ) were conducted using model thin films comprised of SiO 2 membranes deposited by atomic layer deposition (ALD). Although the H + conductivity of the SiO 2 membranes is 2–3 orders of magnitude lower than Nafion, the addition of phosphorus dopants (PO x ) improves H + conductivity such that the area specific membrane resistance of thin (<50 nm) PO x -doped SiO 2 membranes is more than an order of magnitude lower than Nafion-117. Importantly, the safe operation of such nanoscale membranes within a PEM electrolyzer is feasible thanks to the low H 2 permeability of dense SiO 2 -based membranes, which are predicted to limit H 2 crossover rates to acceptable levels for pressures up to ≈ 100 bar. As a proof-of-principle demonstration, a chip-scale water electrolyzer based on 100 nm thick PO x -SiO 2 membrane is shown to achieve a current density of 2 A cm –2 at a potential of 2.5 V. If this technology can be successfully scaled up, H + conducting oxide membranes offer an attractive PFAS-free alternative to Nafion for efficient and durable water electrolysis and fuel cell technologies.

Nafion↗
DOE OSTI2020

Surpassing the Organic Cathode Performance for Lithium-Ion Batteries with Robust Fluorinated Covalent Quinazoline Networks

Organic electrode materials have promising application prospects in energy storage, but issues including rapid capacity fading and poor power capacity restrict their practical applications. In this study, nanoporous fluorinated covalent quinazoline networks (F-CQNs) were constructed by condensation of fluorinated aromatic aminonitrile precursors via an ionothermal pathway. Precise control of the reaction parameters afforded F-CQN-1-600 material featuring high surface area, permanent porosity, high nitrogen content (23.49 wt %), extended π-conjugated architecture, layered structure, and bipolar combination of benzene and tricycloquinazoline. Synergy among these unique properties leads to a good performance as a cathode source for lithium-ion batteries (LIBs) in terms of high capacity (250 mA h g –1 at 0.1 A g –1 ), high rate capability (105 mA h g –1 at 5.0 A g –1 ), and impressive cycling stability (95.8% retention rate after 2000 cycles at 2.0 A g –1 together with a high Coulombic efficiency of 99.95%), surpassing most of the previous organic cathode counterparts.

25 ENERGY STORAGE↗
DOE OSTI2021

Robust Unencapsulated Perovskite Solar Cells Protected by a Fluorinated Fullerene Electron Transporting Layer

The emergent perovskite photovoltaics technology faces challenges like the long-term durability combining moisture, thermal, and photo stresses that prevents them from competing with established technologies. In this work, we introduce a series of new fluorinated fullerenes as an electron-transporting layer (ETL) for robust perovskite photovoltaics that deliver a high power conversion efficiency of 21.27% with substantially improved durability against environmental stressing. The hydrophobic nature of the new fullerene protects the unencapsulated perovskite cell with stability over 1400 h in 85% relative humidity. Notably, the unencapsulated device maintained 80% of their original performance (T-80) after being immersed in water for over 10 min. Detailed characterizations suggest that the fluorinated fullerene can immobilize the cations in perovskites and passivate the surface traps. Therefore, the T-80 lifetime of the devices under constant illumination reached 1920 h. On the basis of the accelerated test, we estimate a lifetime approaching 10 years with encapsulation. The successful demonstration of the new ETL can stimulate further research and momentum for future photovoltaic technology development.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2023

Facile Room-Temperature Electrodeposition of Rare Earth Metals in a Fluorine-Free Task-Specific Electrolyte

Electrochemical deposition of rare earth metals at room temperature has attracted increasing interest due to its advantage in energy efficiency over traditional hydrometallurgical and pyrometallurgical processes. Recent progress has been made with fluorinated electrolyte systems; however, the formation of an electrode-passivating fluoride layer by electrolyte decomposition is often overlooked. Such a passivation layer causes significant and rapid decay of the deposition current and significantly hinders practical application. To address this issue, we demonstrate a fluorine (F)-free task-specific electrolyte utilizing the borohydride anion for the efficient electrodeposition of rare earth metals. By eliminating the passivation effect, the deposition process exhibits a stable current and accumulates a thick neodymium deposit on the electrode. Raman spectroscopy of the electrolyte reveals a synergetic effect between rare earth borohydride and lithium borohydride which promotes the dissociation of both borohydride salts, resulting in significantly increased ionic conductivity and electrochemical performance. Cyclic voltammetry and in-depth X-ray photoelectron spectroscopy of the deposits suggest that the electrodeposition of rare earth metals could undergo a Li-mediated reduction process. Finally, quantitative analysis of the deposits reveals that the overall concentration of the rare earth elements reaches 75% which contains 40–48% metallic phase.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Non-fluorinated electrolyte for high-voltage anode-free sodium metal battery

Abundant sodium (Na) batteries are a sustainable alternative to resource-constrained lithium-ion batteries, offering huge cost advantages. However, developing high-voltage anode-free sodium metal batteries (SMBs) to narrow the energy density gap with lithium-ion batteries is hindered by a critical challenge: existing electrolytes cannot simultaneously achieve ultra-high Na coulombic efficiency and anodic stability. Here, in this study, we present a rationally designed non-fluorinated electrolyte (1.0 M NaPF 6 in 1,2-diethoxyethane/1,2-di-tert-butoxyethane) to address this key limitation, achieving Na coulombic efficiency of >99.95% and anodic stability of >4.8 V. For coin cells (2.0 mAh cm −2 , N/P = 1.7), our electrolyte design enables 4.0 V Na | |Na 3 V 2 (PO 4 ) 3 (NVP) at 5 C and 4.3 V Na | |NaNi 0.6 Mn 0.2 Co 0.2 O 2 (NMC622) at 0.3 C for 5,000 and 500 cycles with a capacity retention >80%. Remarkably, the 50 mAh anode-free pouch cells 4.0 V Al | |NVP and 4.3 V Al | |NMC622 also achieve 500 and 300 cycles (retention >75%) with a specific energy of >360 Wh kg (electrode) −1 . This work focuses on electrolyte optimization and conceptual advances, whereas critical aspects such as safety, large-scale manufacturability and practical feasibility of SMBs require further investigation. The electrolyte design using non-fluorinated solvents enhances the anodic stability without sacrificing Na efficiency, laying groundwork for advancing low-cost, high-energy SMBs and supporting the transition to sustainable battery technologies.

25 ENERGY STORAGE↗
DOE OSTI2022

Approaching theoretical specific capacity of iron-rich lithium iron silicate using graphene-incorporation and fluorine-doping

Lithium iron silicate, Li 2 FeSiO 4 , is a promising cathode material for lithium ion batteries due to its high theoretical specific capacity, earth abundance, low cost, and environmental friendliness. The challenges of Li 2 FeSiO 4 as a practical cathode material are (1) the low electronic and ionic conductivity and (2) the low discharge voltage. The approach of incorporating graphene sheets into the nanostructure of Li 2 FeSiO 4 is used for dealing with the low conductivities while fluorine doping is intended to increase the discharge voltage. The fluorine-doped and graphene-incorporated iron-rich lithium iron silicate F-LFSO/G nanomaterials were successfully synthesized using a facile/efficient hydrothermal method with excellent performance, 328.43 mA h g -1 at 0.1C rate, approaching their theoretical specific capacity, 99% of 331 mA h g -1 . This clearly reveals that the reversible (de)lithiation of 2 Li + ions per F-LFSO has been realized as a result of these approaches. The (de)lithiation process has been studied using in operando high energy synchrotron X-ray absorption near edge spectroscopy and X-ray photoelectron spectroscopy aided by theoretical modeling, which reveals that F doping deeply changes the O electron configuration in F-LFSO, and consequently makes the Li + ion transfer easier, while the reversible redox of oxygen can be utilized to achieve high specific capacity.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2023

Orientation-dependent etching of silicon by fluorine molecules: A quantum chemistry computational study

Anisotropic etching is a widely used process in semiconductor manufacturing, in particular, for micro- and nanoscale texturing of silicon surfaces for black silicon production. The typical process of plasma-assisted etching uses energetic ions to remove materials in the vertical direction, creating anisotropic etch profiles. Plasmaless anisotropic etching, considered here, is a less common process that does not use ions and plasma. The anisotropy is caused by the unequal etching rates of different crystal planes; the etching process, thus, proceeds in a preferred direction. In this paper, we have performed quantum chemistry modeling of gas-surface reactions involved in the etching of silicon surfaces by molecular fluorine. The results confirm that orientation-dependent etch rates are the reason for anisotropy. The modeling of F 2 dissociative chemisorption on F-terminated silicon surfaces shows that Si–Si bond breaking is slow for the Si(111) surface, while it is fast for Si(100) and Si(110) surfaces. Both Si(100) and Si(110) surfaces incorporate a larger number of fluorine atoms resulting in Si–Si bonds having a larger amount of positive charge, which lowers the reaction barrier of F 2 dissociative chemisorption, yielding a higher etch rate for Si(100) and Si(110) surfaces compared to Si(111) surfaces. Molecular dynamics modeling of the same reactions has shown that the chosen reactive bond order potential does not accurately reproduce the lower reaction barriers for F 2 dissociative chemisorption on Si(100) and Si(100) surfaces. Furthermore, reparameterization is necessary to model the anisotropic etching process that occurs at lower temperatures.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗