SEARCH · Engineering Papers

Results for “active plasma spectroscopy”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

SourceResearch connectionFrom yearThrough year

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 109 records · Page 6

All sources NASA NTRS DOE OSTI

DOE OSTI2024

Diamond surface functionalization via visible light–driven C–H activation for nanoscale quantum sensing

Nitrogen-vacancy (NV) centers in diamond are a promising platform for nanoscale NMR sensing. Despite significant progress toward using NV centers to detect and localize nuclear spins down to the single spin level, NV-based spectroscopy of individual, intact, arbitrary target molecules remains elusive. Such sensing requires that target molecules are immobilized within nanometers of NV centers with long spin coherence. The inert nature of diamond typically requires harsh functionalization techniques such as thermal annealing or plasma processing, limiting the scope of functional groups that can be attached to the surface. Solution-phase chemical methods can be readily generalized to install diverse functional groups, but they have not been widely explored for single-crystal diamond surfaces. Moreover, realizing shallow NV centers with long spin coherence times requires highly ordered single-crystal surfaces, and solution-phase functionalization has not yet been shown with such demanding conditions. In this work, we report a versatile strategy to directly functionalize C–H bonds on single-crystal diamond surfaces under ambient conditions using visible light, forming C–F, C–Cl, C–S, and C–N bonds at the surface. This method is compatible with NV centers within 10 nm of the surface with spin coherence times comparable to the state of the art. As a proof-of-principle demonstration, we use shallow ensembles of NV centers to detect nuclear spins from surface-bound functional groups. Our approach to surface functionalization opens the door to deploying NV centers as a tool for chemical sensing and single-molecule spectroscopy.

Science & Technology - Other Topics↗

DOE OSTI2024

Survey of tungsten gross erosion from main plasma facing components in WEST during a L-mode high fluence campaign

An initial high fluence campaign was performed in WEST, in 2023, on the newly installed actively cooled tungsten divertor composed of ITER-grade monoblocks. The campaign consisted in the repetition of a 60 s long Deuterium L-mode pulse in attached divertor conditions, cumulating over 10000s of plasma exposure. A maximum deuterium fluence of approximately 5⋅1⁢026 m−2 was reached in the outer strike point region, representative of a few high performance ITER pulses. Gross tungsten erosion inferred from visible spectroscopy shows that the most eroded plasma facing component is the inner divertor target with rates ten times larger than on the outer divertor target. The outer midplane tungsten bumpers, located a few centimeters from the plasma, show gross erosion rates two times lower than at the outer divertor. We conclude that the outer midplane bumpers have a negligible contribution to the long range tungsten migration and deposition onto the lower divertor. The cumulated gross erosion rate on the inner divertor translates in an effective gross erosion thickness of about 20μ⁢m, while it is about 2μ⁢m for the outer divertor. Strikingly, these orderings coincide with the thickness of deposits found locally on the divertor: the exposed surfaces of high field side monoblocks are covered with several tens of μ⁢m tungsten deposits, while on the lower field side, few μ⁢m thin tungsten deposits are only found on the magnetically shadowed parts of monoblocks. The strong impact of those deposits on WEST operation, namely perturbation of surface temperature measurement with infra-red thermography, and the emission of flakes causing radiative perturbation of the confined plasma, calls for anticipating similar issues in ITER. In particular, the start of research operation shall consider the definition of a divertor erosion budget in order to anticipate the formation of deleterious deposits.

Fedorczak, N.↗

DOE OSTI2023

Direct Conversion of Methane to Ethylene and Acetylene over an Iron-Based Metal–Organic Framework

Conversion of methane (CH 4 ) to ethylene (C 2 H 4 ) and/or acetylene (C 2 H 2 ) enables routes to a wide range of products directly from natural gas. However, high reaction temperatures and pressures are often required to activate and convert CH 4 controllably, and separating C 2+ products from unreacted CH 4 can be challenging. Here, we report the direct conversion of CH 4 to C 2 H 4 and C 2 H 2 driven by non-thermal plasma under ambient (25 °C and 1 atm) and flow conditions over a metal–organic framework material, MFM-300(Fe). The selectivity for the formation of C 2 H 4 and C 2 H 2 reaches 96% with a high time yield of 334 μmol g cat –1 h –1 . At a conversion of 10%, the selectivity to C 2+ hydrocarbons and time yield exceed 98% and 2056 μmol g cat –1 h –1 , respectively, representing a new benchmark for conversion of CH 4 . In situ neutron powder diffraction, inelastic neutron scattering and solid-state nuclear magnetic resonance, electron paramagnetic resonance (EPR), and diffuse reflectance infrared Fourier transform spectroscopies, coupled with modeling studies, reveal the crucial role of Fe–O(H)–Fe sites in activating CH 4 and stabilizing reaction intermediates via the formation of an Fe–O(CH 3 )–Fe adduct. In addition, a cascade fixed-bed system has been developed to achieve online separation of C 2 H 4 and C 2 H 2 from unreacted CH 4 for direct use. Integrating the processes of CH 4 activation, conversion, and product separation within one system opens a new avenue for natural gas utility, bridging the gap between fundamental studies and practical applications in this area.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

NASA NTRS1997

End-to-End System Test and Optical Performance Evaluation for the Solar and Heliosphere Observatory (SOHO) Ultraviolet Coronagraph Spectrometer (UVCS)

The UVCS is one of the instruments carried by the Solar and Heliospheric Observatory (SOHO), a joint NASA/ESA Spacecraft launched in November 1995. It is designed to perform ultraviolet spectroscopy and visible light polarimetry of the extended solar corona. The primary scientific objectives of the UVCS investigation are to study the physical processes occurring in the extended solar corona, such as: the mechanism of acceleration of the solar wind, the mechanism of coronal plasma heating, the identification of solar wind sources, and the investigation of the plasma properties of the solar wind. The UVCS End-to-End test activities included a comprehensive set of system level functional and optical tests. Although performed under severe schedule constraints, the End-to-End System Test was very successful and served to fully validate the UVCS optical design. All test results showed that the primary scientific objectives of the UVCS Mission were achievable.

Carosso, Paolo A.↗

NASA NTRS1985

Substorm effects on the plasma sheet ion composition on March 22, 1979 (CDAW 6)

One of the potentially most useful aspects of mass spectroscopy in magnetospheric research is related to the ability to distinguish between ions of solar wind and terrestrial origins. Knowing the source of the plasmas in various regions and under various geomagnetic conditions is crucial in improving the understanding of particle flows in the magnetosphere. Sharp et al. (1982) found that the plasma sheet ions in the 0.1- to 16-keV/e range, were predominantly of solar wind origin during low geomagnetic activity, while there was a large terrestrial component during active times. This paper presents a set of data from March 22, 1979. The reported investigation represents the first detailed case study of the relation between geomagnetic substorm activity and the ion composition in the plasma sheet. A decrease in solar wind ion flow at ISEE 1 and the subsequent increase in the flow of ionospheric ions is interpreted as evidence of a fundamental change in the particle flow pattern following the start of substorm activity.

Lennartsson, W.↗

DOE OSTI2026

Effect of glutathione-coated Mn-doped ZnS quantum dots on nutrient delivery in basil ( Ocimum basilicum ) plants

Ensuring efficient nutrient delivery while minimizing environmental impacts remains a significant challenge for modern agriculture. Nanotechnology-based fertilizers offer promising strategies to improve nutrient uptake and bioavailability in plants. This research aims to evaluate the use of Glutathione-coated Manganese-doped Zinc Sulfide quantum dots (GSH-ZnS-Mn QDs) as a potential nano fertilizer for basil (Ocimum basilicum). QDs' physicochemical properties were characterized using UV–Vis spectroscopy, photoluminescence, FTIR, and energy-dispersive X-ray spectroscopy, confirming successful Mn doping and glutathione surface functionalization. Basil plants were exposed to different concentrations of GSH-ZnS-Mn QDs under soil and hydroponic conditions. Plant growth parameters, oxidative stress responses, photosynthetic pigments, and macro- and micronutrient uptake were assessed using biochemical assays and inductively coupled plasma optical emission spectrometry (ICP-OES). Elemental uptake, spatial distribution, and zinc speciation were further investigated using synchrotron-based micro-X-ray fluorescence (μ-XRF) imaging and X-ray absorption near-edge structure (XANES) spectroscopy. Results show that exposure to GSH-ZnS-Mn QDs resulted in a concentration-dependent increase in leaf and stem biomass, accompanied by enhanced Zn accumulation in plant tissues. Catalase activity decreased across all tested concentrations, suggesting a shift toward glutathione-dependent antioxidant pathways rather than oxidative damage. Chlorophyll levels exhibited moderate reductions at higher concentrations. The higher increase in macronutrient (K, Ca, and Mg) uptake was reported in plants exposed to 200 ppm of QDs. μ-XRF imaging indicated a selective accumulation of Zn in roots and stems, with partial translocation to leaves. XANES analyses revealed that Zn from QDs was mainly converted into organic Zn species, such as Zn-phytate, Zn-acetate, and Zn-cysteine, indicating transformation and complexation within the plant. The findings demonstrate that a glutathione coating on GSH-ZnS-Mn QDs improves biocompatibility and nutrient delivery efficiency. These results highlight the relevance of surface functionalization in regulating nanoparticle fate, transformation, and nutrient bioavailability, supporting the potential application of GSH–ZnS–Mn QDs as modern nano fertilizers.

Basil↗

DOE OSTI2026

Ionic liquid-enhanced recycling of lithium-ion battery black mass via heavy liquid centrifugal separation

Direct recycling of lithium-ion batteries (LIBs) is of great significance to supply chain security and environmental protection by restoring spent battery materials to their original purpose without destroying their chemical structure. One of the key processes for direct recycling is to separate valuable anode and cathode active materials from black mass. This study evaluates ionic liquid-enhanced Heavy Liquid Centrifugal Separation (HLCS) as an efficient method for separating LIB black mass into its constituent anode and cathode materials. The optimized HLCS process achieved a separation efficiency of over 95%, yielding a graphite-rich upper layer and an NMC-rich lower layer. Characterization by thermogravimetric analysis (TGA), X-ray diffraction (XRD), and inductively coupled plasma-optical emission spectroscopy (ICP-OES) confirmed the purity and structural integrity of the recovered fractions. The addition of N-methyl-2-pyrrolidone and ionic liquid 1-ethyl-3-methylimidazolium bromide decoupled entangled particles, while subsequent treatment of the anode layer with 1-(2,3-dihydroxypropyl)-3-methylimidazolium chloride further enhanced separation purity. The recycled graphite exhibited comparable battery performance to pristine graphite. These results demonstrate HLCS as a promising LIB recycling strategy, advancing sustainable battery manufacturing.

Adigun, Babafemi [Univ. of Tennessee, Knoxville, T↗

NASA NTRS1993

Microwave digestion preparation and ICP determination of boron in human plasma

A microwave digestion procedure, followed by Inductively Coupled Argon Plasma Spectroscopy, is described for the determination of boron (B) in human plasma. The National Institute of Standards and Technology (NIST) currently does not certify the concentration of B in any substance. The NIST citrus leaves 1572 (CL) Standard Reference Material (SRM) and wheat flour 1567a (WF) were chosen to determine the efficacy of digestion. CL and WF values compare favorably to those obtained from an open-vessel, wet digestion followed by ICP, and by neutron activation and mass spectrometric measurements. Plasma samples were oxidized by doubled-distilled ultrapure HNO3 in 120 mL PFA Teflon vessels. An MDS-81D microwave digestion procedure allows for rapid and relatively precise determination of B in human plasma, while limiting handling hazards and sources of contamination.

Ferrando, A. A.↗

DOE OSTI2023

Ammonia generation in Ns pulse and Ns pulse/RF discharges over a catalytic surface

Plasma-catalytic ammonia synthesis in a ns pulse discharge and a 'hybrid' ns pulse/RF discharge in plane-to-plane geometry is studied by Fourier Transform infrared absorption spectroscopy. The data are taken in a preheated H 2 –N 2 mixture, with and without Ni/γ-Al 2 O 3 or Co/γ-Al 2 O 3 catalyst placed in the discharge section. The measurement results are taken using two different approaches. The first is a 'single-stage' process, where a ns pulse discharge in the H 2 –N 2 mixture is sustained continuously. In this case, the ammonia yield increases slowly, over a period of tens of minutes. The second is a 'two-stage' process, where the catalyst is first activated by the ns pulse discharge sustained in pure nitrogen, and then the activated catalyst is exposed to the H 2 –N 2 flow, with or without the discharge. In this case, a strong overshoot of the NH 3 number density at the reactor exit is detected, by over a factor of two compared to the single-stage process. After the initial overshoot, the ammonia yield gradually decreases to the 'single stage' value (with the discharge on), or to near zero (with the discharge off). The results demonstrate that the ammonia yield in the plasma-catalytic reactor is controlled by the N atom accumulation on the catalyst surface, which reacts with H atoms thermally dissociated on the catalyst or generated in the plasma. The results also show that the plasma-catalytic ammonia yield is significantly higher compared to that in the ns pulse discharge without the catalyst. The accumulation of H atoms on the catalyst, with their subsequent reactions with N atoms generated in the plasma, is of relatively minor importance at the present conditions. An additional series of measurements was made with a sub-breakdown RF waveform overlapped with the ns pulse discharge train, to enhance the vibrational excitation of nitrogen. The ammonia yield measured with the RF waveform added is approximately 20% higher compared to that at the baseline ns pulse discharge conditions, both with and without the catalyst. This effect is weaker compared to that of the catalyst activation by N atoms. Additional data are necessary to isolate the possible effect of the vibrationally excited N 2 molecules on the ammonia synthesis in the plasma catalytic reactions.

surface reactions↗

DOE OSTI2021

Low-Activity Waste Glass Standards Preparation and Characterization for Calibration of Analytical Instruments

A matrix of seven low-activity waste (LAW) glasses was fabricated and characterized to be used by the Hanford Waste Treatment and Immobilization Plant (WTP) as analytical instrument calibration and matrix interference standards when measuring LAW glass compositions. The matrix of glasses was designed to represent the range of LAW glass compositions that will be generated by the WTP. Samples from each of the seven glasses were measured with electron probe microanalysis (EPMA), ion chromatography (IC), and bulk inductively coupled plasma mass spectroscopy (ICP-MS) to determine the variability and accuracy across batches and within individually poured glass bar samples. High relative percent differences and standard deviations were calculated for components with low concentrations due to instrument detection limits. IC and ICP-MS percent differences and standard deviations were higher at low component concentrations. Otherwise, variability in measured compositions from IC and ICP-MS was generally lower than measurements from EPMA, with the exclusion of Cl, F, Si, and B. Overall, the two methods proved comparable and complementary. From EPMA, IC, and ICP-MS data, volatile elements were underrepresented compared to batched compositions, which suggested loss of these elements during melting. EPMA data was statistically analyzed to evaluate homogeneity within single bars and whole compositions for each of the seven glasses. Most of the variability within glass compositions occurred at the bar-to-bar level; however, no clear systematic trends were observed. Based on these analyses, when using these glasses as reference material, it is recommended that the overall mean and variance of each composition be used for performing instrument calibrations and analytical corrections.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

DOE OSTI2024

Insights into Sustainable Nitrogen Fixation by Gas-phase Spectroscopic Measurements and Global Modeling of Reaction Intermediates in Humid Nitrogen Plasma

In this article, there is growing interest in reacting molecular nitrogen and water to sustainably synthesize fixed forms of nitrogen such as ammonia. In particular, low-temperature plasmas can activate these relatively inert feedstocks at or near room temperature without a catalyst. However, because of the enhanced reactivity and nonequilibrium chemistry, a diverse range of products is formed, and the underlying reaction mechanisms are exceedingly complex. In this work, we studied a simplified reactor consisting of a gaseous plasma containing controlled mixtures of nitrogen gas and water vapor. Densities of key chemical species such as N, H, OH, NH, and NO were measured by emission and laser-based spectroscopy as a function of the relative humidity. A global model was constructed and the reaction network was validated by comparing calculated species densities with experiments. We discover that N, a key initial intermediate for ammonia, strongly decreases in the presence of water vapor, and as a result, ammonia formation becomes limited at high relative humidity. This decrease is surprisingly not because N itself reacts, but because one of its main sources, an excited molecular nitrogen state, is reacted away. In addition, oxidation pathways for nitrogen, which lead to NO and related products, are found to be favored over reduction pathways because the corresponding reverse reactions are less significant. Together, this understanding helps explain previously reported observations of selectivity toward nitrogen oxides over ammonia, particularly at higher relative humidities.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2023

Chemical durability assessment of enhanced low-activity waste glasses through EPA method 1313

In this work, we report the progress of the Glass Leaching Assessment for Durability (GLAD) program on the implementation of the United States Environmental Protection Agency (EPA) Leaching Environmental Assessment Framework pH-dependent leach test (EPA Method 1313) to low-activity nuclear waste (LAW) glasses. The GLAD program seeks to develop new strategies to understand the chemical durability of nuclear waste glasses for the disposal in near-surface conditions. A series of 16 high-waste loading LAW glasses, currently under development, were selected using machine learning methods to study the corrosion behavior using EPA Method 1313. Reacted glass powders were examined using scanning electron microscopy and the eluate compositions were examined using inductively coupled plasma-optical emission spectroscopy. Compositional modeling was used to fit the measured elemental releases from EPA Method 1313. The compositional models demonstrated that elements such as Si reduce elemental release while B can increase elemental release (consistent with elemental modeling of the Product Consistency Test and Vapor Hydration Test) while other elements, such as Fe, exhibit pH-dependent behavior. The amount of acid added during the EPA testing was found to significantly impact the observed result, which was only apparent after preforming the present matrix study. The overall titration curves were able to be compositionally modeled for future process optimization.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

DOE OSTI2023

Speciation of Transition Metal Dissolution in Electrolyte from Common Cathode Materials

Abstract Significant capacity loss has been observed across extended cycling of lithium‐ion batteries cycled to high potential. One of the sources of capacity fade is transition metal dissolution from the cathode active material, ion migration through the electrolyte, and deposition on the solid‐electrolyte interphase on the anode. While much research has been conducted on the oxidation state of the transition metal in the cathode active material or deposited on the anode, there have been limited investigations of the oxidation state of the transition metal ions dissolved in the electrolyte. In this work, X‐ray absorption spectroscopy has been performed on electrolytes extracted from cells built with four different cathode active materials (LiMn 2 O 4 (LMO), LiNi 0.5 Mn 1.5 O 4 (LNMO), LiNi 0.8 Mn 0.1 Co 0.1 O 2 (NMC811), and (x Li 2 MnO 3 *(1‐x) LiNi a Mn b Co c O 2 , with a+b+ c =1) (LMRNMC)) that were cycled at either high or standard potentials to determine the oxidation state of Mn and Ni in solution. Inductively coupled plasma‐mass spectrometry has been performed on the anodes from these cells to determine the concentration of deposited transition metal ions. While transition metal ions were found dissolved in all electrolytes, the oxidation state(s) of Mn and Ni were determined to be dependent on the cathode material and independent of cycling potential.

Rynearson, Leah↗

NASA NTRS2002

Quantitative X-ray - UV Line and Continuum Spectroscopy with Application to AGN: State-Specific Hydrogenic Recombination Cooling Coefficients for a Wide Range of Conditions

Recombination cooling, in which a free electron emits light while being captured to an ion, is an important cooling process in photoionized clouds that are optically thick or have low metallicity. State specific rather than total recombination cooling rates are needed since the hydrogen atom tends to become optically thick in high-density regimes such as Active Galactic Nuclei. This paper builds upon previous work to derive the cooling rate over the full temperature range where the process can be a significant contributor in a photoionized plasma. We exploit the fact that the recombination and cooling rates are given by intrinsically similar formulae to express the cooling rate in terms of the closely related radiative recombination rate. We give an especially simple but accurate approximation that works for any high hydrogenic level and can be conveniently employed in large-scale numerical simulations.

LaMothe, J.↗

DOE OSTI2026

Influence of thermal treatment on structure and catalytic performance of ceria-zirconia supported copper oxide (CuO x /Ce y Zr 1-y O 2 ) catalysts for CO oxidation

Copper oxide (CuO x ) supported on ceria-zirconia (Ce y Zr 1-y O 2 , y = 1.0, 0.5, 0.0) catalysts were investigated to elucidate the effects of thermal treatment on their physicochemical properties and catalytic performance in carbon monoxide (CO) oxidation. Here, the catalysts were synthesized via a one-pot chemical vapor deposition (OP-CVD) method at 700˚C and 900˚C with controlled Cu loading. Characterization techniques, including synchrotron X-ray diffraction (S-XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), inductively coupled plasma spectroscopy (ICP), and N 2 adsorption-desorption, were implemented to probe the crystalline structure, molecular and electronic structure, oxygen vacancies, specific surface area (SSA) and metal loading. CO oxidation was chosen as a model reaction to explore the structure-catalytic performance relationship. A ∼100% CO conversion was achieved at < 150˚C, particularly with the CuO x /CeO 2 catalyst calcined at 700˚C. In contrast, calcination at 900˚C caused a ∼90% decrease in SSA and a ∼24% increase in T 50 . Activity tests revealed that increasing ZrO 2 content lowered CO oxidation activity despite generating more defect sites. In-situ measurement of the 700 °C calcined samples revealed the presence of stable and unstable defects in CuO x /Ce 0.5 Zr 0.5 O 2 and CeO 2 respectively, which play a key role in the activity of the catalysts. The results highlight that catalytic performance is closely related to the SSA. Furthermore, an optimum calcination temperature favor significant oxygen vacancy formation with required CuO x -support interactions, enhancing redox properties and catalytic performance.

36 MATERIALS SCIENCE↗

DOE OSTI2024

High power actively Q-switched downhole LIBS analysis systems

An actively Q-switched laser induced breakdown spectroscopy (LIBS) probe, utilizing an optical fiber, a pump beam transmitted through the optical fiber, a coupler, and a lens for collimating the pump beam. The actively Q-switched laser, coupled to a sensor which provides information to a computer that controls a high voltage pulser providing a pulse to a Pockels cell located within the laser which can selectively cause the laser to pulse, resulting in high energy pulses and a second lens for focusing the output pulse such that it creates a plasma or spark. The light from the spark is captured and directed back through an optical system to remote equipment for elemental and/or molecular analysis.

McIntyre, Dustin Langdon↗

NASA NTRS1994

Gamma-ray and millimeter-wave emissions from the 1991 June X-class solar flares

We have studied the spectacular 1991 June X-class flares using gamma-ray data from the Charged Particle Detectors (CPDs) of the Burst and Transient Source Experiment (BATSE) on the Compton Gamma Ray Observatory (CGRO) and 80 GHz millimeter data from Nobeyama, Japan. The CPDs were the only CGRO instrument that did not saturate during the extremely intense 1991 June 4 flare. We have shown that for this flare the CPDs respond to MeV photons, most of which are due to bremsstrahlung produced by relativistic electrons at the Sun. We have further shown that the gamma-ray and millimeter observations agree numerically if the 80 GHz radiation is gyrosynchrotron radiation produced by trapped electrons and the gamma rays are thick-target bremsstrahlung due to electrons precipitating out of the trap. The requirement that the trapping time obtained from the numerical comparison be consistent with the observed time profiles implies a magnetic field between about 200 and 300 G and an electron spectral index between about 3 to 5. By comparing the CPD observations with both the 80 GHz data and nuclear line data from the Energetic Gamma Ray Experiment Telescope (EGRET) and the Oriented Scintillation Spectroscopy Experiment (OSSE) on CGRO for the flares of June 4, 6, 9, and 11, we found that the ratio of the CPD counts to both the millimeter flux densities and the nuclear line fluences decreases with decreasing flare heliocentric angle. All of these flares were produced in the same active region. We interpreted this result in terms of a loop model in which the gyrosynchrotron emission is produced in the coronal portion of the loop where the electrons are kept isotropic by pitch angle scattering due to plasma turbulence, while the bremsstrahlung is produced by precipitating electrons that interact anisotropically. We found that the trapping time in the coronal portion is time dependent, reaching a minimum of about 10 s at the peak of the CPD count rate. We suggested the damping of the turbulence as a possible reason for the variation of the trapping time. turbulence as a possible reason for the variation of the trapping time.

Ramaty, Reuven↗

NASA NTRS1985

Role of GaAs surface clearing in plasma deposition of silicon nitride films for encapsulated annealing

The role of GaAs surface cleaning and plasma reactor cleaning prior to deposition of silicon nitride films for encapsulated annealing has been investigated. X-ray photoelectron spectroscopy was employed to determine the surface characteristics of GaAs treated with HCl, HF, and NH4OH solutions preceded by a degreasing procedure. The HCl clean left the least amount of oxygen on the surface. Fluorine contamination resulting from the CF4 plasma used to clean the reactor was found to be located at the film-substrate interface by Auger electron spectroscopy with argon-ion sputtering. A modified deposition procedure was developed to eliminate the fluorine contamination. Plasma deposition of silicon nitride encapsulating films was found to modify the I-V characteristics of Schottky diodes subsequently formed on GaAs surface. The reverse current of the diodes was slightly reduced. Substrates implanted with Si at 100 keV and a dose of 5 x 10 to the 12th/sq cm showed a peak electron concentration of 1.7 x 10 to the 17th/cu cm at a depth of 0.1-micron with 60 percent activation after encapsulation and annealing at 800 C for 7 min.

Valco, G. J.↗