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NASA NTRS2004

Position Sensitive Microcalorimeters

A Position Sensitive Transition-Edge Sensor (PoST) is a microcalorimeter device capable of one-dimensional imaging spectroscopy. The device consists of two Transition-Edge Sensors (TESs) connected to the ends of a long X-ray absorbing strip. The energy of a photon hitting the absorber and the position of the absorption event along the strip is measured from the response in the two sensors by analyzing the relative signal sizes, pulse rise times, and the sum of the pulses measured at each sensor, We report on the recent PoST effort at Goddard for applications to large field of view, high-energy- resolution, X-ray astrophysics.

Sadleir, J. E.↗
NASA NTRS2016

TESSIM: A Simulator for the Athena-X-IFU

We present the design of tessim, a simulator for the physics of transition edge sensors developed in the framework of the Athena end to end simulation effort. Designed to represent the general behavior of transition edge sensors and to provide input for engineering and science studies for Athena, tessim implements a numerical solution of the linearized equations describing these devices. The simulation includes a model for the relevant noise sources and several implementations of possible trigger algorithms. Input and output of the software are standard FITS-les which can be visualized and processed using standard X-ray astronomical tool packages. Tessim is freely available as part of the SIXTE package (http:www.sternwarte.uni-erlangen.deresearchsixte).

simulation↗
NASA NTRS2016

Parametric Characterization of TES Detectors Under DC Bias

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

X-ray Integral Field↗
NASA NTRS2007

Practical Considerations for Optimizing Position Sensitivity in Arrays of Position-sensitive TES's

We are developing Position-Sensitive Transitions-Edge Sensors (PoST's) for future X-ray astronomy missions such as NASA's Constellation-X. The PoST consists of one or more Transitions Edge Sensors (TES's) thermally connected to a large X-ray absorber, which through heat diffusion, gives rise to position dependence. The development of PoST's is motivated by the desire to achieve the largest the focal-plan coverage with the fewest number of readout channels. In order to develop a practical array, consisting of an inner pixellated core with an outer array of large absorber PoST's, we must be able to simultaneously read out all (-1800) channels in the array. This is achievable using time division multiplexing (TDM), but does set stringent slew rate requirements on the array. Typically, we must damp the pulses to reduce the slew rate of the input signal to the TDM. This is achieved by applying a low-pass analog filter with large inductance to the signal. This attenuates the high frequency components of the signal, essential for position discrimination in PoST's, relative to the white noise of the readout chain and degrades the position sensitivity. Using numerically simulated data, we investigate the position sensing ability of typical PoST designs under such high inductance conditions. We investigate signal-processing techniques for optimal determination of the event position and discuss the practical considerations for real-time implementation.

Smith, Stephen J.↗
NASA NTRS2019

Fabrication of Phononic Filter Structures for Far-IR/sub-mm Detector Applications

A photon noise limited sub-mm/far-IR cold telescope in space will require detectors with noise equivalent power (NEP) less than 1x10-19W/Hz1/2for imaging applications and at least an order of magnitude lower for spectroscopic studies. The detector NEP can be reduced by lowering the operation temperature and improving the thermal isolation between the bolometer and a heat bath. We report on the fabrication of membrane isolated transition edge sensor bolometers incorporating compact (<50 μm) thermal isolation beams based on phononic filters. Phononic filters are created by etching quasi-periodic nanoscale structures into supporting thermo-mechanical beams. The cross-sectional dimensions of the etched features are less than the thermal wavelength at the operating temperature, enabling coherent phonon transport to take place in one dimension. The phonon stop-band can be tuned by adjusting the scale of the quasi-periodic structures. Cascading multiple filter stages can increase bandwidth and provide improved thermal isolation similar to the function of a multi-stage electrical filter. We describe the fabrication of AlMn based transition edge sensor bolometers on silicon and silicon nitride membranes isolated by one-and two-dimensional phononic filters. The phononic filters are patterned through electron beam lithography and isolated with deep reactive ion etching.

Phononic↗
NASA NTRS2008

Implementation of Complex Signal Processing Algorithms for Position-Sensitive Microcalorimeters

We have recently reported on a theoretical digital signal-processing algorithm for improved energy and position resolution in position-sensitive, transition-edge sensor (POST) X-ray detectors [Smith et al., Nucl, lnstr and Meth. A 556 (2006) 2371. PoST's consists of one or more transition-edge sensors (TES's) on a large continuous or pixellated X-ray absorber and are under development as an alternative to arrays of single pixel TES's. PoST's provide a means to increase the field-of-view for the fewest number of read-out channels. In this contribution we extend the theoretical correlated energy position optimal filter (CEPOF) algorithm (originally developed for 2-TES continuous absorber PoST's) to investigate the practical implementation on multi-pixel single TES PoST's or Hydras. We use numerically simulated data for a nine absorber device, which includes realistic detector noise, to demonstrate an iterative scheme that enables convergence on the correct photon absorption position and energy without any a priori assumptions. The position sensitivity of the CEPOF implemented on simulated data agrees very well with the theoretically predicted resolution. We discuss practical issues such as the impact of random arrival phase of the measured data on the performance of the CEPOF. The CEPOF algorithm demonstrates that full-width-at- half-maximum energy resolution of < 8 eV coupled with position-sensitivity down to a few 100 eV should be achievable for a fully optimized device.

Smith, Stephen J.↗
NASA NTRS2012

Germanium Lift-Off Masks for Thin Metal Film Patterning

A technique has been developed for patterning thin metallic films that are, in turn, used to fabricate microelectronics circuitry and thin-film sensors. The technique uses germanium thin films as lift-off masks. This requires development of a technique to strip or undercut the germanium chemically without affecting the deposited metal. Unlike in the case of conventional polymeric lift-off masks, the substrate can be exposed to very high temperatures during processing (sputter deposition). The reason why polymeric liftoff masks cannot be exposed to very high temperatures (greater than 100 C) is because (a) they can become cross linked, making lift-off very difficult if not impossible, and (b) they can outgas nitrogen and oxygen, which then can react with the metal being deposited. Consequently, this innovation is expected to find use in the fabrication of transition edge sensors and microwave kinetic inductance detectors, which use thin superconducting films deposited at high temperature as their sensing elements. Transition edge sensors, microwave kinetic inductance detectors, and their circuitry are comprised of superconducting thin films, for example Nb and TiN. Reactive ion etching can be used to pattern these films; however, reactive ion etching also damages the underlying substrate, which is unwanted in many instances. Polymeric lift-off techniques permit thin-film patterning without any substrate damage, but they are difficult to remove and the polymer can outgas during thin-film deposition. The outgassed material can then react with the film with the consequence of altered and non-reproducible materials properties, which, in turn, is deleterious for sensors and their circuitry. The purpose of this innovation was to fabricate a germanium lift-off mask to be used for patterning thin metal films.

Brown, Ari↗
NASA NTRS2008

Development of arrays of position-sensitive microcalorimeters for Constellation-X

We are developing arrays of position-sensitive transition-edge sensor (POST) X-ray detectors for future astronomy missions such as NASA's Constellation-X. The POST consists of multiple absorbers thermally coupled to one or more transition-edge sensor (TES). Each absorber element has a different thermal coupling to the TES. This results in a distribution of different pulse shapes and enables position discrimination between the absorber elements. POST'S are motivated by the desire to achieve the largest possible focal plane area with the fewest number of readout channels and are ideally suited to increasing the Constellation-X focal plane area, without comprising on spatial sampling. Optimizing the performance of POST'S requires careful design of key parameters such as the thermal conductances between the absorbers, TES and the heat sink. as well as the absorber heat capacities. Using recently developed signal processing algorithms we have investigated the trade-off between position-sensitivity, energy resolution and pulse decay time. based on different device design parameters for PoST's. Our new generation of PoST's utilize technology successfully developed on high resolution (approximately 2.5eV) single pixels arrays of Mo/Au TESs. also under development for Constellation-X. This includes noise mitigation features on the TES and low resistivity electroplated absorbers. We report on the first experimental results from these new one and two-channel PoST"s, consisting of all Au and composite Au/Bi absorbers, which are designed to achieve an energy resolution of < 10 eV. coupled with count-rates of 100's per pixel per second and position sensitivity over the energy range 0.3-10 keV.

Smith, S. J.↗
NASA NTRS2009

Thermal Transport Model for Heat Sink Design

A document discusses the development of a finite element model for describing thermal transport through microcalorimeter arrays in order to assist in heat-sinking design. A fabricated multi-absorber transition edge sensor (PoST) was designed in order to reduce device wiring density by a factor of four. The finite element model consists of breaking the microcalorimeter array into separate elements, including the transition edge sensor (TES) and the silicon substrate on which the sensor is deposited. Each element is then broken up into subelements, whose surface area subtends 10 10 microns. The heat capacity per unit temperature, thermal conductance, and thermal diffusivity of each subelement are the model inputs, as are the temperatures of each subelement. Numerical integration using the Finite in Time Centered in Space algorithm of the thermal diffusion equation is then performed in order to obtain a temporal evolution of the subelement temperature. Thermal transport across interfaces is modeled using a thermal boundary resistance obtained using the acoustic mismatch model. The document concludes with a discussion of the PoST fabrication. PoSTs are novel because they enable incident x-ray position sensitivity with good energy resolution and low wiring density.

Chervenak, James A.↗
NASA NTRS2007

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

Finkbeiner, F. m.↗
NASA NTRS2012

Fabrication of Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors

The Cosmology Large Angular Scale Surveyor (CLASS) is a ground-based instrument that will measure the polarization of the cosmic microwave background to search for gravitational waves from a posited epoch of inflation early in the universe s history. We are currently developing detectors that address the challenges of this measurement by combining the excellent beam-forming attributes of feedhorns with the low-noise performance of Transition-Edge sensors. These detectors utilize a planar orthomode transducer that maps the horizontal and vertical linear polarized components in a dual-mode waveguide to separate microstrip lines. On-chip filters define the bandpass in each channel, and the signals are terminated in resistors that are thermally coupled to the transition-edge sensors operating at 150 mK.

Crowe, E.↗
NASA NTRS2016

The Impact of Crosstalk in the X-IFU Instrument on Athena Science Cases

In this paper we present a first assessment of the impact of various forms of instrumental crosstalk on the science performance of the X-ray Integral Field Unit (X-IFU) on the Athena X-ray mission. This assessment is made using the SIXTE end-to-end simulator in the context of one of the more technically challenging science cases for the XIFU instrument. Crosstalk considerations may influence or drive various aspects of the design of the array of high-count-rate Transition Edge Sensor (TES) detectors and its Frequency Domain Multiplexed (FDM) readout architecture. The Athena X-ray mission was selected as the second L-class mission in ESA's Cosmic Vision 2015–25 plan, with alaunch foreseen in 2028, to address the theme ''Hot and Energetic Universe"1. One of the two instruments on boardAthena is the X-ray Integral Field Unit2 (X-IFU) which is based on an array of ~3800 Transition Edge Sensors (TES's)operated at a temperature of ~90 mK. The science cases pose an interesting challenge for this instrument, as they requirea combination of high energy resolution (2.5 eV FWHM or better), high spatial resolution (5 arcsec or better) and highcount rate capability (several tens of counts per second per detector for point sources as bright as 10 mCrab).The performance at the single sensor level has been demonstrated3, but the operation of such detectors in an array, usingmultiplexed readout, brings additional challenges, both for the design of the array in which the sensors are placed and forthe readout of the sensors. The readout of the detector array will be based on Frequency Domain Multiplexing (FDM)4.In this system of detectors and readout, crosstalk can arise through various mechanisms: on the TES array, neighboringsensors can couple through thermal crosstalk. Detectors adjacent in carrier frequency may suffer from electrical crosstalkdue to the finite width of the bandpass filters, and shared sources of impedance in their signal lines. The signals from theindividual detectors are summed and then amplified by a pair of SQUID amplifiers before being sent to warm front-endelectronics. The transfer function of the SQUID amplifiers is non-linear, which will give rise to higher harmonics ofcarriers and intermodulation products when multiple signal pulses are simultaneously present in the SQUID. Under highcount rate conditions this is another source of crosstalk. The effect of all these crosstalk sources is that parasitic pulseswill appear in the record of a signal pulse which will create a stochastic offset of the measured energy and thus adegradation of the energy resolution.

SIXTE↗
NASA NTRS2016

The Focal Plane Assembly for the Athena X-Ray Integral Field Unit Instrument

This paper summarizes a preliminary design concept for the focal plane assembly of the X-ray Integral Field Unit on the Athena spacecraft, an imaging microcalorimeter that will enable high spectral resolution imaging and point-source spectroscopy. The instrument's sensor array will be a 3840-pixel transition edge sensor (TES) microcalorimeter array, with a frequency domain multiplexed SQUID readout system allowing this large-format sensor array to be operated within the thermal constraints of the instrument's cryogenic system. A second TES detector will be operated in close proximity to the sensor array to detect cosmic rays and secondary particles passing through the sensor array for off-line coincidence detection to identify and reject events caused by the in-orbit high-energy particle background. The detectors, operating at 55 mK, or less, will be thermally isolated from the instrument cryostat's 2 K stage, while shielding and filtering within the FPA will allow the instrument's sensitive sensor array to be operated in the expected environment during both on-ground testing and in-flight operation, including stray light from the cryostat environment, low-energy photons entering through the X-ray aperture, low-frequency magnetic fields, and high-frequency electric fields.

SQUID amplifier↗
NASA NTRS2019

Lynx x-ray microcalorimeter

Lynx is an x-ray telescope, one of four large satellite mission concepts currently being studied by NASA to be a flagship mission. One of Lynx’s three instruments is an imaging spectrometer called the Lynx x-ray microcalorimeter (LXM), an x-ray microcalorimeter behind an x-ray optic with an angular resolution of 0.5 arc sec and ∼2 sq. m of area at 1 keV. The LXM will provide unparalleled diagnostics of distant extended structures and, in particular, will allow the detailed study of the role of cosmic feedback in the evolution of the Universe. We discuss the baseline design of LXM and some parallel approaches for some of the key technologies. The baseline sensor technology uses transition-edge sensors, but we also consider an alternative approach using metallic magnetic calorimeters. We discuss the requirements for the instrument, the pixel layout, and the baseline readout design, which uses microwave superconducting quantum interference devices and high-electron mobility transistor amplifiers and the cryogenic cooling requirements and strategy for meeting these requirements. For each of these technologies, we discuss the current technology readiness level and our strategy for advancing them to be ready for flight. We also describe the current system design, including the block diagram, and our estimate for the mass, power, and data rate of the instrument.

Simon R. Bandler↗
NASA NTRS2006

An Ultrasensitive Hot-Electron Bolometer for Low-Background SMM Applications

We are developing a hot-electron superconducting transition-edge sensor (TES) that is capable of counting THz photons and operates at T = 0.3K. The main driver for this work is moderate resolution spectroscopy (R approx. 1000) on the future space telescopes with cryogenically cooled (approx. 4 K) mirrors. The detectors for these telescopes must be background-limited with a noise equivalent power (NEP) approx. 10(exp -19)-10(exp -20) W/Hz(sup 1/2) over the range v = 0.3-10 THz. Above about 1 THz, the background photon arrival rate is expected to be approx. 10-100/s), and photon counting detectors may be preferable to an integrating type. We fabricated superconducting Ti nanosensors with a volume of approx. 3x10(exp -3) cubic microns on planar substrate and have measured the thermal conductance G to the thermal bath. A very low G = 4x10(exp -14) W/K, measured at 0.3 K, is due to the weak electron-phonon coupling in the material and the thermal isolation provided by superconducting Nb contacts. This low G corresponds to NEP(0.3K) = 3x10(exp -19) W/Hz(sup 1/2). This Hot-Electron Direct Detector (HEDD) is expected to have a sufficient energy resolution for detecting individual photons with v > 0.3 THz at 0.3 K. With the sensor time constant of a few microseconds, the dynamic range is approx. 50 dB.

bolometers↗
NASA NTRS2016

High-Density Superconducting Cables for Advanced ACTPol

Advanced ACTPol (AdvACT) is an upcoming Atacama Cosmology Telescope (ACT) receiver upgrade, scheduled to deploy in 2016, that will allow measure- ment of the cosmic microwave background polarization and temperature to the highest precision yet with ACT. The AdvACT increase in sensitivity is partly provided by an increase in the number of transition-edge sensors (TESes) per array by up to a factor of two over the current ACTPol receiver detector arrays. The high-density AdvACT TES arrays require 70 μ m pitch superconducting flexible cables (flex) to connect the detec- tor wafer to the first-stage readout electronics. Here, we present the flex fabrication process and test results. For the flex wiring layer, we use a 400-nm-thick sputtered alu- minum film. In the center of the cable, the wiring is supported by a polyimide substrate, which smoothly transitions to a bare (uncoated with polyimide) silicon substrate at the ends of the cable for a robust wedge wire-bonding interface. Tests on the first batch of flex made for the first AdvACT array show that the flex will meet the requirements for AdvACT, with a superconducting critical current above 1 mA at 500 mK, resilience to mechanical and cryogenic stress, and a room temperature yield of 97%.

transition-edge sensors (TESes)↗
NASA NTRS2016

Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers

Advanced ACTPol (AdvACT) is a third-generation cosmic microwave background receiver to be deployed in 2016 on the Atacama Cosmology Telescope (ACT). Spanning five frequency bands from 25 to 280 GHz and having just over 5600 transition-edge sensor (TES) bolometers, this receiver will exhibit increased sensitivity and mapping speed compared to previously fielded ACT instruments. This paper presents the fabrication processes developed by NIST to scale to large arrays of feedhorn-coupled multichroic AlMn-based TES polarimeters on 150-mm diameter wafers. In addition to describing the streamlined fabrication process which enables high yields of densely packed detectors across larger wafers, we report the details of process improvements for sensor (AlMn) and insulator (SiN(sub x)) materials and microwave structures, and the resulting performance improvements.

Atacama Cosmology Telescope(ACT)↗
NASA NTRS2007

Distributed Antenna-Coupled TES for FIR Detectors Arrays

We describe a new architecture for a superconducting detector for the submillimeter and far-infrared. This detector uses a distributed hot-electron transition edge sensor (TES) to collect the power from a focal-plane-filling slot antenna array. The sensors lay directly across the slots of the antenna and match the antenna impedance of about 30 ohms. Each pixel contains many sensors that are wired in parallel as a single distributed TES, which results in a low impedance that readily matches to a multiplexed SQUID readout These detectors are inherently polarization sensitive, with very low cross-polarization response, but can also be configured to sum both polarizations. The dual-polarization design can have a bandwidth of 50The use of electron-phonon decoupling eliminates the need for micro-machining, making the focal plane much easier to fabricate than with absorber-coupled, mechanically isolated pixels. We discuss applications of these detectors and a hybridization scheme compatible with arrays of tens of thousands of pixels.

antenna↗