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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 109 records · Page 6
All sourcesNASA NTRSDOE OSTI
NASA NTRS2003

Wafer-Level Membrane-Transfer Process for Fabricating MEMS

A process for transferring an entire wafer-level micromachined silicon structure for mating with and bonding to another such structure has been devised. This process is intended especially for use in wafer-level integration of microelectromechanical systems (MEMS) that have been fabricated on dissimilar substrates. Unlike in some older membrane-transfer processes, there is no use of wax or epoxy during transfer. In this process, the substrate of a wafer-level structure to be transferred serves as a carrier, and is etched away once the transfer has been completed. Another important feature of this process is that two electrodes constitutes an electrostatic actuator array. An SOI wafer and a silicon wafer (see Figure 1) are used as the carrier and electrode wafers, respectively. After oxidation, both wafers are patterned and etched to define a corrugation profile and electrode array, respectively. The polysilicon layer is deposited on the SOI wafer. The carrier wafer is bonded to the electrode wafer by using evaporated indium bumps. The piston pressure of 4 kPa is applied at 156 C in a vacuum chamber to provide hermetic sealing. The substrate of the SOI wafer is etched in a 25 weight percent TMAH bath at 80 C. The exposed buried oxide is then removed by using 49 percent HF droplets after an oxygen plasma ashing. The SOI top silicon layer is etched away by using an SF6 plasma to define the corrugation profile, followed by the HF droplet etching of the remaining oxide. The SF6 plasma with a shadow mask selectively etches the polysilicon membrane, if the transferred membrane structure needs to be patterned. Electrostatic actuators with various electrode gaps have been fabricated by this transfer technique. The gap between the transferred membrane and electrode substrate is very uniform ( 0.1 m across a wafer diameter of 100 mm, provided by optimizing the bonding control). Figure 2 depicts the finished product.

Yang, Eui-Hyeok↗
NASA NTRS2014

Mass Dependency of Isotope Fractionation of Gases Under Thermal Gradient and Its Possible Implications for Planetary Atmosphere Escaping Process

Physical processes that unmix elements/isotopes of gas molecules involve phase changes, diffusion (chemical or thermal), effusion and gravitational settling. Some of those play significant roles for the evolution of chemical and isotopic compositions of gases in planetary bodies which lead to better understanding of surface paleoclimatic conditions, e.g. gas bubbles in Antarctic ice, and planetary evolution, e.g. the solar-wind erosion induced gas escaping from exosphere on terrestrial planets.. A mass dependent relationship is always expected for the kinetic isotope fractionations during these simple physical processes, according to the kinetic theory of gases by Chapman, Enskog and others [3-5]. For O-bearing (O16, -O17, -O18) molecules the alpha O-17/ alpha O-18 is expected at 0.5 to 0.515, and for S-bearing (S32,-S33. -S34, -S36) molecules, the alpha S-33/ αlpha S-34 is expected at 0.5 to 0.508, where alpha is the isotope fractionation factor associated with unmixing processes. Thus, one isotope pair is generally proxied to yield all the information for the physical history of the gases. However, we recently] reported the violation of mass law for isotope fractionation among isotope pairs of multiple isotope system during gas diffusion or convection under thermal gradient (Thermal Gradient Induced Non-Mass Dependent effect, TGI-NMD). The mechanism(s) that is responsible to such striking observation remains unanswered. In our past studies, we investigated polyatomic molecules, O2 and SF6, and we suggested that nuclear spin effect could be responsible to the observed NMD effect in a way of changing diffusion coefficients of certain molecules, owing to the fact of negligible delta S-36 anomaly for SF6.. On the other hand, our results also showed that for both diffusion and convection under thermal gradient, this NMD effect is increased by lower gas pressure, bigger temperature gradient and lower average temperature, which indicate that the nuclear spin effect may not be the significant contributor as the energies involved in the hyperfine effect are much smaller than those with molecular collisions, especially under convective conditions.

Sun, Tao↗
DOE OSTI2020

Efficient SF 6 /N 2 separation at high pressures using a zirconium-based mesoporous metal–organic framework

Adsorptive separation of SF 6 /N 2 mixtures is an important issue since SF 6 is a significant greenhouse gas. Although separation performances should be evaluated under high pressure conditions to find an efficient adsorbent candidate for pressure swing adsorption (PSA) processes, no studies on metal–organic frameworks (MOFs) have focused on SF 6 /N 2 separation at high pressures above 1 bar. In this study, we evaluated the potential of three hydrothermally stable adsorbents, including two MOFs (UiO-66 and UiO-67) and zeolite-13X, for SF 6 /N 2 separation under normal PSA operation pressures (~10 bar). Interestingly, UiO-67 with a high surface area and large pore size exhibited very high SF6/N2 selectivity (30~37) at 10 bar as well as a significantly large SF6 working capacity (5.94 mmol g-1) between 10 bar and 1 bar. Moreover, UiO-67 showed facile regeneration at the ambient temperature as well as good cyclic adsorption and desorption behavior during 20 cycles. These results show that UiO-67 is a potential adsorbent for adsorptive SF 6 /N 2 separation.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

Enhancing predictive understanding and accuracy in geological carbon dioxide storage monitoring: Simulation and history matching of tracer transport dynamics

Co-injection of conservative tracers with carbon dioxide (CO 2 ) is a viable tool for monitoring subsurface processes during geological CO 2 storage (GCS). This research investigates the simulation and history-matching of a gas tracer (sulfur hexafluoride, SF 6 ) during CO 2 flooding, employing a core flooding result in Berea sandstone. Four extensively used saturation functions are assessed for their efficacy in history matching of CO 2 /SF 6 injection at the core scale. The history-matching process incorporates particle swarm optimization (PSO) to fine-tune constitutive relationships parameters. Next, employing transport models at the aquifer scale, we interrogate the impact on tracer transport and mixing of saturation function uncertainties, arising from the non-uniqueness of constitutive relationships parameters and saturation function types. To assess the effects of geological heterogeneity on behavior of tracer breakthrough curves (BTCs), we employ two normalized parameters assessing the degree of mixing and SF 6 breakthrough time. The aquifer-scale investigation encompasses both homogeneous and heterogeneous systems with and without capillary heterogeneity effects. Our findings underscore the critical importance of addressing saturation function uncertainties, emphasizing the significance of auxiliary experiments and innovative methodologies to enhance predictive accuracy. The findings highlight significant disparities in arrival times, BTC peaks, tails, and mixing levels, even under optimal conditions. Heterogeneity, with or without capillary heterogeneity, plays a crucial role in shaping BTC variations, resulting in accelerated SF 6 breakthrough times and reduced BTC peaks. Evaluation of monitoring points distant from the injector reveals a dampening effect on the SF6 BTC peak, particularly in heterogeneous systems with capillary heterogeneity, where the peak is halved. These insights underscore the challenges associated with tracer monitoring and the necessity for enhanced methodologies to improve predictive accuracy in subsurface processes during GCS.

58 GEOSCIENCES↗
DOE OSTI2021

Measurement of Poly-Si Film Thickness on Textured Surfaces by X-Ray Diffraction in Poly-Si/SiOx Passivating Contacts for Monocrystalline Si Solar Cells

Polycrystalline Silicon on tunneling silicon oxide (poly-Si/SiOx) passivating contacts have shown great potential for the next-generation monocrystalline Si (c-Si) industrial photovoltaic technology. However, these cells typically suffer from strong parasitic absorption in the thick front poly-Si layer, which is designed to reduce metal-induced recombination. In previous work, we demonstrated an improved short-circuit current density, Jsc, by thinning the front poly-Si film in an SF6 plasma using the front metal grids as a self-aligned mask, but the sub - 100 nm thick poly-Si film is difficult to measure on an alkaline textured surface. Conventional optical techniques such as spectroscopic ellipsometry cannot be used due to the high scattering nature of the random pyramids. At poly-Si thicknesses below 50 nm, secondary electron microscopy (SEM) has difficulty distinguishing the poly-Si from the underlying c-Si substrate. Here, we demonstrate X-ray diffraction as an effective method to quantitatively measure the front poly-Si thickness. The thickness calculated from the diffraction peak height of the Si(111) crystallographic plane agrees well with the cross-section SEM analysis and simulations using SunSolve. We show that by thinning the front poly-Si from 200 to 60 nm, Jsc increased by 2.4 mA/cm2, while maintaining the same Voc. This led to an absolute efficiency gain of 1.73%. In addition, we also discuss possible reasons for the premature loss of passivation before the removal of all poly-Si, which prevented an even higher gain in Jsc.

light/electron beam induced current↗
DOE OSTI2023

Mitigation of shunt in poly -Si/SiO$_{x}$ passivated interdigitated back contact monocrystalline Si solar cells by self-aligned etching between doped fingers

Polycrystalline silicon on silicon oxide (poly-Si/SiO x ) passivating contacts can be used for ultra-high-efficiency interdigitated back contact (IBC) monocrystalline silicon solar cells. We evaluate the use of intrinsic poly-Si for the region that isolates the p- and n-type fingers at the back side of IBC devices. To mitigate shunt across the isolation region between the doped p- and n-type fingers, we demonstrate self-aligned subtractive processing by etching the poly-Si in the isolation region using SF6 plasma followed by etching in a tetramethylammonium hydroxide (TMAH) solution. After removal of the poly-Si, the isolation region was passivated with SiN x and Al 2 O 3 , which resulted in an 11.7% increase in the fill factor in a 19.8% efficient device. Furthermore, we evaluate the limitations of this device through Suns-V oc analysis and simulations using SunSolve and Quokka3 solar cell simulation software. Through Quokka3, we show that the most significant efficiency losses come from junction recombination current (J 02 ) in the isolation region between doped fingers. We predict that the cell efficiency can be most improved with reduced J 02 through better isolation of heavily doped fingers by etching the isolation region deeper into the bulk or through enhanced surface chemical passivation in this region.

14 SOLAR ENERGY↗
DOE OSTI2026

X‑ray Coherent Diffractive Imaging of Large Helium Nanodroplets Doped with Small Molecules

We report the first X-ray coherent diffractive imaging experiment on molecule-doped helium nanodroplets. It complements previous work, where we reported single-shot X-ray coherent diffractive imaging studies of Xe dopant clusters formed in 4He and 3He droplets. These noble gas clusters were used to visualize the impact of rotational excitation of the droplets on the spatial distribution of atomic dopants within the droplets, and to study the differences and connections between quantum and classical droplet rotational motion. Here, we expand our studies to the molecular dopants CF4, CHF3, CH3CN, and SF6, imaged with 1.5 keV photons. We find multiple Bragg spots in the diffraction patterns of molecule-doped droplets with radii of approximately 600 nm, which provide evidence that molecules form elongated clusters with preferential alignment along the angular momentum axis of the 4He droplets, in agreement with our previous results on the aggregation of Xe clusters on quantum vortices. Real-space reconstructions of molecular dopant cluster density profiles are obtained for droplets with smaller radii of approximately 300 nm. The diffuse images suggest the formation of low-density, potentially porous, molecular clusters upon aggregation at T = 0.4 K in 4He droplets. In the normal fluid 3He droplets, molecules aggregate into loose clusters on the droplets' equator, similar to previous observations for Xe atoms. Time-of-flight mass spectra reveal that the doped helium nanodroplet moieties fragment extensively into constituent atomic ions, producing only a small fraction of molecular fragment ions. The findings are discussed in the context of previously proposed schemes to use He droplets as potential tamper materials for ultrafast X-ray imaging experiments.

Feinberg, AlexandraJ↗
DOE OSTI2020

Electron Bernstein wave conversion of high-field side injected X-modes in QUEST

This paper presents a detailed design of the Q-shu University experimental steady state spherical tokamak's (QUEST's) high-field side (HFS) injection system for electron Bernstein wave (EBW) excitation and the results of an experimental comparison of the HFS eXtraordinary X-mode and low-field side (LFS) ordinary O-mode injection of 8.2 GHz radio frequency (RF) power. Waveguides, as an alternative to mirror polarizers for transmitting RF X-mode power from LFS to HFS for EBW conversion, were used instead of the installation of an RF mirror. Testing of LFS-to-HFS RF power transmission at 8.2 GHz, using an RG-50-type vacuum waveguide in a bench-scale device filled with SF6 gas at 0.03 Mpa, revealed that an RF power of 10.8 kW could traverse the fundamental electron cyclotron resonance layer for 60 s without breakdown. The short-length, open-ended waveguide antenna used in the HFS injection-induced wave diffraction reduced the efficiency of power delivery to the upper hybrid resonance (UHR) by approximately 7% at an electron temperature of 50 eV. The HFS injection was able to produce brighter camera images than the standard LFS injection. The location of the UHR, as estimated by measuring the density with an interferometer, agreed with its location as measured by plasma radiation low-field, side-edge positions shown by fast camera imaging. This indicates that the plasma was produced by mode-converted EBW. The HFS injection had an absorption efficiency of 96%, compared to 40% for LFS. A greater fluctuation of floating potential adjustable to the lower hybrid wave (LHW) was observed in the HFS case by installing a Langmuir probe, confirming that EBW conversion efficiency was higher in the HFS case. Moreover, after setting the poloidal field to B PF = 7.6 mT, plasma current (I P ) in the HFS peaked at 1.3 kA, as opposed to 0.3 kA for LFS, despite LFS injection having a total power of 55 kW, compared to 40 kW for HFS. However, as the impurity level was comparatively high, it is believed that this I P is dominated by pressure-drive, which makes it difficult to analyze EBWCD. Finally, the line-integrated density in the HFS injection peaked at 1.6 × 10 18 m -2 , compared to 8 × 10 17 m -2 in the LFS one.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Submicron Thickness Characterization of Poly-Si Thin Films on Textured Surfaces by X-Ray Diffraction for Minimizing Parasitic Absorption in Poly-Si/SiO2 Passivating Contact Cells

Poly-Si/SiO2 passivating contacts have shown great potential for industry-relevant next-generation solar cells. Previous work has demonstrated an improved Jsc from dry reactive ion etching in an SF6 environment, using front metal grids as a self-aligned mask. Here, we show an effective method to measure the front poly-Si thickness on an alkaline textured surface using X-ray diffraction. The calculated thicknesses are compared with cross-section SEM analysis and Quokka simulation. We show that by thinning the front poly-Si from 200 nm to 60 nm, Jsc increases by 2.4 mA/cm2, leading to an absolute efficiency gain of 1.73%. Finally, we discuss possible reasons for the premature loss of passivation before the removal of all poly-Si.

41 EE - Solar Energy Technologies Office (EE-4S)↗
DOE OSTI2020

Novel High-Power Microwave Circulator Employing Circularly Polarized Waves

A novel four-port circulator is presented which uses an inline ferromagnetic element to allow for transmission or reflection depending on the sense of the incident circularly polarized wave. This configuration has been shown to reduce the dependency on ferrite anisotropy and support higher power, low rf loss, operation. An analytic analysis of this device is presented here alongside corroborating cold test data of the first prototype. High-power operation was performed at 2.856 GHz, with input power levels up to 8 MW for 3.5 μs in a pressurized nitrogen environment. The results from this research not only demonstrate ability to eliminate the use of greenhouse insulators, such as SF6, but also provide conceptual groundwork for a new class of ultrahigh power (50 MW+) nonreciprocal networks including circulators, isolators, phase shifters, and rf switches.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Etching with electron beam-generated plasmas: Selectivity versus ion energy in silicon-based films

In the ideal case, plasma-enhanced atomic layer etching enables the ability to not only remove one monolayer of material but also leave adjacent layers undamaged. This dual mandate requires fine control over the flux of species to ensure efficacy, while maintaining an often arduously low ion energy. Electron beam-generated plasmas are well-suited for etching at low ion energies as they are generally characterized by highly charged particle densities (10 10 –10 11 cm –3 ) and low electron temperatures (<1.0 eV), which provide the ability to deliver a large flux of ions whose energies are <5 eV. Raising the ion energy with substrate biasing thus enables process control over an energy range that extends down to values commensurate with the bond strength of most material systems. In this work, we discuss silicon nitride etching using pulsed, electron beam-generated plasmas produced in argon-SF6 backgrounds. We pay particular attention to the etch rates and selectivity versus oxidized silicon nitride and polycrystalline silicon as a function of ion energy from a few eV up to 50 eV. Here, we find the blanket etch rate of Si 3 N 4 to be in the range of 1 A/s, with selectivities (versus SiO 2 and poly-Si) greater than 10:1 when ion energies are below 30 eV.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

A data-driven approach to sampling matrix selection for compressive sensing

Sampling is a fundamental aspect of any implementation of compressive sensing. Typically, the choice of sampling method is guided by the reconstruction basis. However, this approach can be problematic with respect to certain hardware constraints and is not responsive to domain-specific context. We propose a method for defining an order for a sampling basis that is optimal with respect to capturing variance in data, thus allowing for meaningful sensing at any desired level of compression. We focus on the Walsh-Hadamard sampling basis for its relevance to hardware constraints, but our approach applies to any sampling basis of interest. We illustrate the effectiveness of our method on the Physical Sciences Inc. Fabry-Perot interferometer sensor multispectral dataset, the Johns Hopkins Applied Physics Lab FTIR-based longwave infrared sensor hyperspectral dataset, and a Colorado State University Swiss Ranger depth image dataset. The spectral datasets consist of simulant experiments, including releases of chemicals such as GAA and SF6. We combine our sampling and reconstruction with the adaptive coherence estimator (ACE) and bulk coherence for chemical detection and we incorporate an algorithmic threshold for ACE values to determine the presence or absence of a chemical. We compare results across sampling methods in this context. We have successful chemical detection at a compression rate of 90%. For all three datasets, we compare our sampling approach to standard orderings of sampling basis such as random, sequency, and an analog of sequency that we term `frequency.' In one instance, the peak signal to noise ratio was improved by over 30% across a test set of depth images.

compressive sensing, hyperspectral imaging, Walsh-↗
DOE OSTI2023

Constraining Bedrock Groundwater Residence Times in a Mountain System with Environmental Tracer Observations and Bayesian Uncertainty Quantification: Modeling and Data Package

Groundwater residence times provide fundamental descriptions of hydrologic dynamics and mixing processes in mountainous watersheds. Yet, few observational datasets that can constrain groundwater residence times over broad timescales are available in high elevation mountain systems. Here we present field observations from May 2021 of dissolved noble gases (He, Ne, Ar, Kr, and Xe), Chloroflourcarbons (CFCs), Sulfurhexaflouride (SF6), and tritium (3H) sampled from the Pumphouse Lower Montane study site (wells PLM1, PLM6, and PLM7) within the East River Watershed, Colorado. The presented noble gas (PLM_noblegas_2021.csv) and environmental tracer (PLM_tracers_2021.csv) observation datasets, along with the associated modeling scripts, aide in quantifying groundwater residence times and recharge conditions in a high elevation mountain system. Furthermore, the modeling scripts quantify groundwater residence time and noble gas recharge condition uncertainties using a novel Markov-chain Monte Carlo approach. All data modeling scripts are written in the Python code.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2022

A 500 KV INVERTED GEOEMTRY FEEDTHROUGH FOR A HIGH VOLT-AGE DC ELECTRON GUN

The Continuous Electron Beam Accelerator Facility injector at Jefferson Lab (JLab) utilizes an inverted-geometry ceramic insulator photogun operating at 130 kV direct current to generate spin-polarized electron beams for high-energy nuclear physics experiments. A second photogun delivers 180 keV beam for commissioning a SRF booster in a testbed accelerator, and a larger version delivers 300 keV magnetized beam in a test stand beam line. This contribution reports on the development of an unprecedented inverted-insulator with cable connector for reliably applying 500 kV DC to a future polarized beam photogun, to be designed for operating at 350 kV without field emission. Such a photogun design could then be used for generating a polarized electron beam to drive a spin-polarized positron source as a demonstrator for high energy nuclear physics at JLab. There are no commercial cable connectors that fit the large inverted insulators required for that voltage range. Our proposed concept is based on a modified epoxy receptacle with intervening SF6 layer and a test electrode in a vacuum vessel.

Hernandez-Garcia, C.↗
DOE OSTI2020

UNESE Data Analysis - Disko Elm Gas Transport Characteristics (NA-22 Quarterly Report)

Two research papers describing gas transport studies in subsurface containment environments appropriate for underground nuclear explosions were revised and accepted for publication in the peer-reviewed journals, Nature – Scientific Reports and Journal of Geophysical Research. The Nature – Scientific Reports paper is a primary deliverable and describes the gas-transport experiment performed in P Tunnel (NNSS) and 1) subsequent analysis of field data as part of the UNESE program. The Journal of Geophysical Research paper describes an experiment, supported mainly by DARPA and led by researchers at Weston Geophysical and New Mexico Tech., with 2) analyses supported by this project to evaluate the ability of SF6 gas tracer to track xenon gas migration under conditions related to a previous UNESE experiment. Two new tasks consider 3) evaluation of detonation heating and multiphase flow on arrival of xenon at the surface and 4) the impact of surface or Langmuir adsorption of gases being transported through pores and along fractures.

58 GEOSCIENCES↗
DOE OSTI2022

1MV Febetron Pulse Generator Operator's Manual

The Febetron Pulse Generator (FPG) is an experimental assembly used to store electrical energy for a period of time and then release that energy over a short duration pulse to achieve high instantaneous power outputs. The FPG is an ideal device to be used for a variety high energy physics experiments. For mobility and ease of repeatable operation, the FPG is secured on a rolling test fixture and paired with a diagnostic and controls rack. The combination of the FPG, test fixture cart, SF6 gas cart, and controls rack is identified as the Pulse Generator Testing Assembly (PGTA). This document outlines all necessary information regarding the working principles, assembly/disassembly, maintenance, operation, uses, hazards, and experimental procedures of the 1 Mega Volt (MV) PGTA. This document, in addition to the manufacturer’s manuals, should be utilized as a reference whenever working with the PGTA and any of its components.

42 ENGINEERING↗
DOE OSTI2022

A 500 KV INVERTED GEOEMTRY FEEDTHROUGH FOR A HIGH VOLT-AGE DC ELECTRON GUN

This contribution reports on the development of an unprecedented inverted-insulator with cable connector for reliably applying 500 kV dc to a future polarized beam photogun, to be designed for operating at 350kV without field emission. Such a photogun design could then be used for generating a polarized electron beam to drive a spin-polarized positron source as a demonstrator for high energy nuclear physics at JLab. There are no commercial cable connectors that fit the large inverted insulators required for that voltage range. Our proposed concept is based on a modified epoxy receptacle with intervening SF6 layer and a test electrode in a vacuum vessel.

Hernandez-Garcia, C.↗