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At least 109 records · Page 6

TlCaBaCuO high Tc superconducting microstrip ring resonators designed for 12 GHz

Microwave properties of sputtered Tl-Ca-Ba-Cu-O thin films were investigated by designing, fabricating, and testing microstrip ring resonators. Ring resonators designed for 12 GHz fundamental resonance frequency, were fabricated and tested. From the unloaded Q values for the resonators, the surface resistance was calculated by separating the conductor losses from the total losses. The penetration depth was obtained from the temperature dependence of resonance frequency, assuming that the shift in resonance frequency is mainly due to the temperature dependence of penetration depth. The effective surface resistance at 12 GHz and 77 K was determined to be between 1.5 and 2.75 mOmega, almost an order lower than Cu at the same temperature and frequency. The effective penetration depth at 0 K is approximately 7000 A.

Subramanyam, G.↗

Point-node gap structure of the spin-triplet superconductor UTe 2

In this work, low-temperature electrical and thermal transport, magnetic penetration depth, and heat capacity measurements were performed on single crystals of the actinide superconductor UTe 2 to determine the structure of the superconducting energy gap. Heat transport measurements performed with currents directed along both crystallographic a and b axes reveal a vanishingly small residual fermionic component of the thermal conductivity. The magnetic field dependence of the residual term follows a rapid, quasilinear increase consistent with the presence of nodal quasiparticles, rising toward the a -axis upper critical field where the Wiedemann-Franz law is recovered. Together with a quadratic temperature dependence of the magnetic penetration depth up to T / T c = 0.3 , these measurements provide evidence for an unconventional spin-triplet superconducting order parameter with point nodes. Millikelvin specific heat measurements performed on the same crystals used for thermal transport reveal an upturn below 300 mK that is well described by a divergent quantum-critical contribution to the density of states (DOS). Modeling this contribution with a T - 1 / 3 power law allows restoration of the full entropy balance in the superconducting state and a resultant cubic power law for the electronic DOS below T c , consistent with the point-node gap structure determined by thermal conductivity and penetration depth measurements.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Direct evidence for a pressure-induced nodal superconducting gap in the Ba 0.65 Rb 0.35 Fe 2 As 2 superconductor

The superconducting gap structure in iron-based high-temperature superconductors (Fe-HTSs) is non-universal. Contrasting with other unconventional superconductors, in the Fe-HTSs both d-wave and extended s-wave pairing symmetries are close in energy. Probing the proximity between these very different superconducting states and identifying experimental parameters that can tune them is of central interest. Here we report high-pressure muon spin rotation experiments on the temperature-dependent magnetic penetration depth in the optimally doped nodeless s-wave Fe-HTS Ba 0.65 Rb 0.35 Fe 2 As 2 . Upon pressure, a strong decrease of the penetration depth in the zero-temperature limit is observed, while the superconducting transition temperature remains nearly constant. More importantly, the low-temperature behaviour of the inverse-squared magnetic penetration depth, which is a direct measure of the superfluid density, changes qualitatively from an exponential saturation at zero pressure to a linear-in-temperature behaviour at higher pressures, indicating that hydrostatic pressure promotes the appearance of nodes in the superconducting gap.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

A simple vaporous probe with atomic-scale sensitivity to structural ordering and orientation of molecular assembly

Understanding the structural ordering and orientation of interfacial molecular assemblies requires an insight into the penetration depth of the probe molecules which determines the interfacial reactivity. In contrast to the conventional liquid probe-based contact angle measurement in which penetration depth is complicated by the liquid cohesive interaction, we report here a new approach that features a simple combination of vaporous hexane, which involves only van der Waals interaction, and quartz crystal microbalance operated at the third harmonic resonance, which is sensitive to sub-monolayer (0.2%) adsorption. Using this combination, we demonstrated the ability of probing the structural ordering and orientation of the self-assembled monolayers with a sensitivity from penetrating the top portion of the monolayers to interacting with the very top atomic structure at the interface. The determination of the dependence of the adsorption energy of vaporous hexane on the penetration depth in the molecular assembly allowed us to further reveal the atomic-scale origin of the odd–even oscillation, which is also substantiated by density functional theory calculations. The findings have broader implications for designing interfacial reactivities of molecular assemblies with atomic-scale depth precision.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Dimensional crossover in the quasi-one-dimensional superconductor Tl 2 Mo 6 Se 6

Here, we present magnetic penetration depth and electrical transport data in single crystals of quasi-one-dimensional (q1D) Tl 2 Mo 6 Se 6 , which reveal a 1D→3D superconducting dimensional crossover. The c-axis penetration depth shows the onset of superconducting fluctuations below T ons 1D = 6.7 K, whereas signatures of superconductivity in the ab-plane penetration depth (a uniquely sensitive probe of the transverse phase stiffness) only emerge below T ons 3D = 4.9 K. An anomalously low superfluid density persists down to ~3 K before rising steeply, in agreement with a theoretical model for crossovers in q1D superconductors. Our data analysis suggests that a sequence of pairing and phase fluctuation regimes controls the unusually broad superconducting transition. In particular, the electrical resistivity below T ons 3D is quantitatively consistent with the establishment of phase coherence through gradual binding of Josephson vortex strings to form 3D loops. This dimensional crossover within the superconducting state occurs despite the relatively large transverse hopping predicted from the band structure. Furthermore, our results have important consequences for the low-temperature normal state in Tl 2 Mo 6 Se 6 and similar q1D metals, which may retain one-dimensional behavior to lower temperatures than expected from theory.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Crystallographic and temperature effects in low-energy collisions for plasma–material interactions

The interaction of plasma with materials is critical for the fundamental understanding of non-equilibrium processes and their wide application. Recent achievements in fusion energy research emphasize the importance of this problem. Because modelling and predicting plasma–material interactions (PMI) require considering a tremendous number of single plasma particle–surface interaction events, this type of modelling was, until recently, possible only within a binary collision approximation (BCA). The BCA approach considers materials as uniform temperature-insensitive media. The research presented here addresses the PMI problem within an atomistic-based approach for the first time at a statistically significant level. Approximately 10 5 molecular dynamics trajectories were generated for 100 eV deuterium ions interacting with a tungsten surface. The research demonstrated the critical importance of incorporating the discrete lattice structure of matter into the model. Deuterium penetration depth and fraction of backscattered deuterium ions strongly depend on the surface orientation, the impact incident ion directions, and the ions’ initial positions. On average, the BCA-based calculations underestimate the penetration depth by a factor of two or more, and the fraction of backscattered atoms is overestimated by a factor of two or more. As a result, increasing the material temperature from 500 to 3000 K reduces penetration depth by about 30% and increases the fraction of backscattered atoms by 250%.

36 MATERIALS SCIENCE↗

TEM Characterization of U-Mo Irradiated with High-Energy Xe Ions

U-Mo alloys (with 7-10 wt.% Mo) with a low U-235 enrichment (< 20%) have been developed to be used in high-performance research and test reactors, replacing the current highly enriched uranium (HEU) fuels. A number of in-pile irradiation tests of U-Mo fuels show that drastic microstructural changes occurred during reactor irradiation, including the formation of U-Mo-Al interaction products and large gas-filled pores. These microstructural changes might lead to breakaway swelling and deterioration of plate mechanical integrity. Hence, it is critical to understand the underlying mechanisms of these microstructural changes in order to improve the irradiation behavior of UMo fuels. Heavy ion irradiation was employed in this study to investigate separate effects of the irradiation behavior of U-Mo fuels. 1.7 mm diameter disks punched out from UMo/ Al dispersion fuel mini-plates were irradiated with 84 MeV Xe ions at the ATLAS accelerator at Argonne National Laboratory (ANL). This particular ion source was selected for two reasons: (1) to simulate the irradiation response of the fuel to fission fragment bombardments, and (2) to study fission gas behavior, as fission gas bubble formation and growth is the primary cause of U-Mo fuel swelling. The ion-irradiated samples have been characterized with scanning electron microscopy (SEM). This study focuses on the characterization of the samples using transmission electron microscopy (TEM). With the high magnification details, microstructures in U-Mo along the ion penetration depth were revealed. The U-7Mo/Al dispersion fuel sample irradiated with 84 MeV Xe ions to a dose of 2.9 x 10{sup 17} ions/cm{sup 3} was characterized using TEM. The TEM results exhibit that the sample microstructure varies along the ion penetration depth. Near the sample surface (zone A) is a layer of nano-crystalline U-Mo-Al interdiffusion product. After passing through zone A, the Xe ions resided in zone B, where gas bubbles formed in U-Mo. TEM images of this region displayed that large gas bubbles formed on grain boundaries and high-density nano-bubbles lay inside grains. The random distribution of intragranular bubbles indicates that the irradiation conditions of this sample cannot lead to gas bubble superlattice formation. Outside of the Xe penetration depth (zone C), significant amount of α-uranium precipitates were identified. The fact that no α-uranium precipitates were found in zone B suggests that the dose rate in this irradiation is sufficient to facilitate a phase reversal by means of a displacement spike mechanism. (authors)

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Anomalous thermodynamic properties of quantum critical superconductors

Recent high-precision measurements employing different experimental techniques have unveiled an anomalous peak in the doping dependence of the London penetration depth which is accompanied by anomalies in the heat capacity in iron-pnictide superconductors at the optimal composition associated with the hidden antiferromagnetic quantum critical point. Here, we argue that finite temperature effects can be a cause of observed features. Specifically we show that quantum critical magnetic fluctuations under superconducting dome can give rise to a nodal-like temperature dependence of both specific heat and magnetic penetration depth in a fully gapped superconductor. In the presence of line nodes in the superconducting gap fluctuations can lead to the significant renormalization of the relative slope of T-linear penetration depth which is steepest at the quantum critical point. The results we obtain are general and can be applied beyond the model we use.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Completing the Feedback Loop: The Impact of Chlorophyll Data Assimilation on the Ocean State

In anticipation of the integration of a full biochemical model into the next generation GMAO coupled system, an intermediate solution has been implemented to estimate the penetration depth (1Kd_PAR) of ocean radiation based on the chlorophyll concentration. The chlorophyll is modeled as a tracer with sources-sinks coming from the assimilation of MODIS chlorophyll data. Two experiments were conducted with the coupled ocean-atmosphere model. In the first, climatological values of Kpar were used. In the second, retrieved daily chlorophyll concentrations were assimilated and Kd_PAR was derived according to Morel et al (2007). No other data was assimilated to isolate the effects of the time-evolving chlorophyll field. The daily MODIS Kd_PAR product was used to validate the skill of the penetration depth estimation and the MERRA-OCEAN re-analysis was used as a benchmark to study the sensitivity of the upper ocean heat content and vertical temperature distribution to the chlorophyll input. In the experiment with daily chlorophyll data assimilation, the penetration depth was estimated more accurately, especially in the tropics. As a result, the temperature bias of the model was reduced. A notably robust albeit small (2-5 percent) improvement was found across the equatorial Pacific ocean, which is a critical region for seasonal to inter-annual prediction.

MERRA-OCEAN↗

Development of SRF monolayer/multilayer thin film materials to increase the performance of SRF accelerating structures beyond bulk Nb

The minimization of cost and energy consumption of future particle accelerators, both large and small, depends upon the development of new materials for the active surfaces of superconducting RF (SRF) accelerating structures. SRF properties are inherently a surface phenomenon as the RF only penetrates the London penetration depth ?, typically between 20 and 400 nm depending on the material. The greatest potential for dramatic new performance capabilities lies with methods and materials which deliberately produce the sub-micron-thick critical surface layer in a controlled way. Thus, two opportunities arise for the use of SRF thin ?lms as single layer superconductor or multilayer Superconductor-Insulator-Superconductor structures: SRF properties are inherently a surface phenomenon, and when other technological processes are optimized, the fundamental limit to the maximum supportable RF ?eld amplitude is understood to be the ?eld at which the magnetic ?ux ?rst penetrates into the surface, Hc1. Niobium, the material most exploited for SRF accelerator applications, has Hc1 ? 170 mT, which yields a maximum acceler?ating gradient of less than 50 MV/m. Thus, new materials must be investigated to push this limit to the desired range. Although many compounds have shown higher critical superconducting transition temperature (Tc), their critical ?eld (Hc1) is lower than niobium. To circumvent this issue, a Super?conductor/Insulator/Superconductor (S-I-S) multilayer ?lms approach has been proposed to achieve performance in excess of that of bulk Nb. In this system, the critical ?eld is enhanced and the ?uxon penetration delayed by using, on top of the Nb surface, a superposition of superconductor layers, each less than a penetration depth in thickness, separated by a dielectric layer a few nanometers thick. For bulk type-II superconducting materials, vortex entry occurs at surface magnetic ?eld Hc1. The key aspect of Gurevich's analysis is the recognition that vortex entry is inhibited if the surface layer thick?ness (d) of the superconductor is less than the penetration depth, ?. The overlayer provides magnetic screening of the underlying Nb with the attenuation factor exp(d/ ?0). The Nb surface can remain in the Meissner state at ?elds much higher than in bulk due to the increase of the parallel Hc1 in a thin ?lm. This could potentially lead to further improvement in RF cavity performance using the bene?t of the higher-Tc superconductors without being limited by their lower Hc1. Niobium on copper (Nb/Cu) technology for superconducting cavities has proven over the years to be a viable alternative to bulk niobium. However the deposition techniques used for cavities, mainly magnetron sputtering, have not yielded, so far, SRF surfaces suitable for high ?eld performance. High quality ?lms can be grown using methods of energetic condensation, such as Electron Cy?clotron Resonance (ECR) Nb ion source in UHV and High Power Impulse Magnetron Sputtering (HiP?IMS) with energetic ions only and neutral atoms signi?cantly blocked. The main advantages of these techniques are the production of higher ?ux of ions with controllable incident angle and kinetic energy and the absence of macroparticle production. The project in general, is focusing onto understanding the physics underlying the RF superconduc?tivity in layered structures and developing SRF material ?lms suitable as substrate and S-I-S multilayer structures. In ?rst hand, the primary focus is to understand the physics governing the relationship be?tween growth conditions, ?lm microstructure and RF performance for SRF materials produced by energetic condensation. The deposition by energetic condensation in UHV via ECR and HiPIMS are studied for Nb and B1 superconducting compounds on substrates with various lattice match and sur?face conditions (in-situ etching, high energy assisted atomic annealing, deposition temperature). The general energy-temperature zone model developed by André Anders is explored to de?ne the optimized coating conditions for ?lms suitable for single layer and multilayer SRF structures. The contribution of both the ion incident energy and the substrate lattice energy on the nucleation of the SRF materials considered, and some insulating materials (AlN and MgO) and the in?uence of the coating conditions on the resulting materials, superconducting and/or RF properties will be investigated. Attention is be given to minimize the residual stress (intrinsic and thermal) with the choice of lattice match between the ?lm and substrate materials, the coating temperature, and to evaluate the coating methods used in terms of conformality for 3D structures. In second hand, as a proof of concept, the coating condi?tions developed will be used to prepare multi-layer superconductor/insulator/superconductor (S-I-S) ?lms having high quality factor and high gradient breakthrough potential. A thick Nb ?lm (> 1µm) could be used as a substrate. Particular attention is given to the interface between superconducting and insulator ?lms. For this work, various material analyses techniques have been used to character?ize each type of thin ?lm material: electron backscatter di?raction (EBSD), X-ray di?raction (XRD), high-resolution scanning electron microscopy (SEM), transmission electron microscopy (TEM), stylus and AFM pro?lometry, secondary ion mass spectroscopy (SIMS), scanning auger microscopy (SAM). Superconducting and RF measurements are also performed (RRR, Tc, and low-temperature SRF sur- face impedance, SQUID-magnetometry). The insight gained from this project on the physics involved in RF superconductivity of layered structures open the way to enable major reductions in both capital and operating costs associated with future particle accelerators across the spectrum from low foot?print compact machines to energy frontier facilities. Realization of quality thin ?lm SRF cavities may dramatically change the cost structure of acceleration systems and signi?cantly improve performance consistency and reliability.

VALENTE-FELICIANO, Anne-Marie↗

Analytical model for laser-induced transient grating measurements of thermal diffusivity in non-opaque materials

The thermal transport and elastic properties of materials are often measured using the laser-induced transient grating spectroscopy (TGS) technique. The analysis of the TGS signal usually involves fitting well-known expressions, derived assuming the limiting cases of opaque or transparent materials, to the measured data. In this paper, the system of thermoelastic equations is analytically solved for an isotropic homogeneous material assuming finite laser penetration depth, which is an important consideration when the penetration depth is on the order of the acoustic wavelength. The need to use such a solution is discussed and compared to the expression for opaque material. The solution is benchmarked against TGS signal measured on single-crystal silicon with {100} surface orientation and is found to significantly improve the accuracy of the calculated thermal diffusivity as compared to using the expression for opaque material.

36 MATERIALS SCIENCE↗

Cosmic rays and MHD turbulence generation in interstellar giant molecular clouds

The diffusive propagation of nonrelativistic cosmic ray (CR) protons undergoing energy losses by ionization in a dense homogeneous infinitely extended interstellar molecular cloud (MC) is investigated. The steady-state transport equation for the differential number density of nonrelativistic CR protons is solved with the boundary condition that at the edge of cloud it agrees with the interstellar CR number density. It is shown that giant interstellar MCs with column depths much greater than about 7⋅10{sup 22} cm{sup −2} are an efficient sink of nonrelativistic CRs. At small penetration depths the CRs lose energy by ionizing and heating the molecular gas, whereas at large penetration depths they are collectively dissipated by the streaming instability, which transfers one-half of the energy density of the incoming interstellar nonrelativistic CRs to Alfvénic magnetic field turbulence.

79 ASTRONOMY AND ASTROPHYSICS↗

Probing Thermal Transport in Fluidized Bed Using Modulated Photothermal Radiometry

Abstract In concentrated solar power (CSP) applications, fluidized bed is a promising approach for high heat transfer coefficient (HTC) solar receivers and heat exchangers. However, the complexity of multiphase mixing has made it difficult to characterize and analyze the heat transfer mechanism. This paper presents an experimental study on simultaneously characterizing heat transfer in both the near-wall and the bulk regions of a fluidized bed using modulated photothermal radiometry (MPR). The MPR is a non-contact frequency-domain technique using an intensity-modulated laser as the heat source and surface infrared emission as thermometry. The thermal penetration depth of the laser heating is varied by controlling its modulation frequency, and thus the measurement can resolve the near-wall and the bulk thermal resistances. With the MPR technique, we measured fluidized silica sands with a mean size of 164 μm in a vertical channel of 6 mm depth. Our results show that the near-wall thermal resistance is substantially increased with increasing gas velocity, which partially offsets the benefit of higher HTC brought by stronger particle mixing during the fluidization. We also used the MPR to quantify the improvement in particle-wall heat transfer in an inclined channel. We found that an 8° inclination towards the heat exchanging side led to a lower near-wall thermal resistance and a higher HTC at high gas velocities. This work demonstrates that the MPR technique is a useful tool to quantify the important near-wall thermal resistance from a bulk particle bed, which not only advances our understanding of heat transfer in fluidized beds, but may also contribute to the design of fluidized bed heat exchangers with higher HTC.

14 SOLAR ENERGY↗

Effect of quantum correction on nonlinear thermal wave of electrons driven by laser heating

In thermal interaction of laser pulse with a deuterium-tritium (DT) plane, the thermal waves of electrons are generated instantly. Since the thermal conductivity of electron is a nonlinear function of temperature, a nonlinear heat conduction equation is used to investigate the propagation of waves in solid DT. This paper presents a self-similar analytic solution for the nonlinear heat conduction equation in a planar geometry. The thickness of the target material is finite in numerical computation, and it is assumed that the laser energy is deposited at a finite initial thickness at the initial time which results in a finite temperature for electrons at initial time. Since the required temperature range for solid DT ignition is higher than the critical temperature which equals 35.9 eV, the effects of quantum correction in thermal conductivity should be considered. This letter investigates the effects of quantum correction on characteristic features of nonlinear thermal wave, including temperature, penetration depth, velocity, heat flux, and heating and cooling domains. Although this effect increases electron temperature and thermal flux, penetration depth and propagation velocity are smaller. This effect is also applied to re-evaluate the side-on laser ignition of uncompressed DT.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Thermodynamic properties of nodal superconductors close to a magnetic quantum critical point

In this work we study thermodynamic manifestations of the quantum criticality in multiband unconventional superconductors. As a guiding example we consider the scenario of magnetic quantum critical point in the model that captures superconductivity coexistence with the spin-density wave. We show that in situations when the superconducting order parameter has incidental nodes at isolated points, quantum magnetic fluctuations lead to the renormalization of the relative 𝑇-linear slope of the London penetration depth. This leads to the nonmonotonic dependence of the penetration depth as a function of doping and the concomitant peak structure across the quantum critical point. In addition, we determine contribution of magnetic fluctuations to the specific heat at the onset of the coexistence phase. Furthermore, our theoretical analysis is corroborated by making a comparison of our results with the recent experimental data from the low-temperature thermodynamic measurements at optimal composition in BaFe 2 (As 1-x P x ) 2 .

36 MATERIALS SCIENCE↗

Discrete numerical simulations of torpedo anchor installation in granular soils

Torpedo anchors are a viable approach for mooring marine hydrokinetic (MHK) energy devices to the seafloor. These anchors can serve to maintain station and to provide the reaction force for an MHK device. The ability of the anchor to perform these duties is a strong function of its penetration depth during installation. This is a large-strain problem not amenable to typical continuum numerical approaches. In the current work, we propose that the discrete element method (DEM) is a more appropriate tool to investigate the shallow penetration of torpedo anchors in sands. The effects of anchor mass, impact velocity, and soil interparticle friction are considered in the DEM simulations. The relative maximum penetration depths for different penetration conditions are quantified and presented. Granular material response at the microscale during penetration are used to provide insight into system response. Energy dissipation in the assembly by both friction and collision at the particle scale are considered. Results show that anchor penetration increases approximately linearly with an increase in impact velocity or anchor weight. Penetration decreases with an increase in interparticle friction (i.e., soil strength). Observations of microscale behaviors and energy calculations are used to provide insight into overall system response.

58 GEOSCIENCES↗

Comparative analysis of silicon and black phosphorous as an add-layer in nanomaterial based plasmonic sensor

In the proposed article silicon and black phosphorous as an add-layer above the plasmonic metal in nanomaterial (graphene and MoS{sub 2}) based plasmonic sensor are compared. The reflectance curves are obtained for different thickness of silicon and black phosphorous by using transfer matrix method. The performance defining parameters i.e. shift in resonance angle, beam width of reflectance curve, and minimum reflectance intensity for a minute change of 0.005 in refractive index of sensing medium at the optimized thickness 5 nm of silicon and black-phosphorous, and conventional are (13.86, 10.96, 2.415), (4.956, 3.817, 1.419), and (0.012, 0.002, 0.002) respectively. Further, the addition of nanomaterials increases these parameters and generally follows the order MoS{sub 2}-graphene > MoS{sub 2} > graphene. Furthermore, transverse-magnetic electric field shows that nanomaterial covered silicon have higher penetration depth than the nanomaterial covered black-phosphorous. The analysis shows that nanomaterial covered silicon can replace nanomaterial covered black-phosphorous in terms of higher sensitivity and penetration depth.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Low damage etching method of low-k material with a neutral beam for interlayer dielectric of semiconductor device

To reduce the cross-talk between nanoscale devices, low-k materials such as methyl silsesquioxane (MSQ), which is damaged easily during plasma etching, are introduced as an intermetallic dielectric material in addition to the use of copper as the conducting material for the reduction of parasitic resistance and capacitance. In this study, beam techniques such as neutral/ion beams were used in the etching of MSQ and the effect of these beam techniques on the reduction of the degradation of the MSQ were investigated. When MSQ was etched using the same CF{sub 4} etch gas at the similar etch rate as that used for conventional MSQ etching using inductively coupled plasmas (ICPs), the neutral/ion beam etching showed lower F contents and lower penetration depth of F, indicating decreased degradation by fluorination of MSQ during etching using the beam techniques. Especially, the neutral beam etching technique showed the lowest F contamination and the lower penetration depth of F among the etch methods. When the dielectric constant was measured after the etching of the same depth, the MSQ etched with the neutral beam showed the lowest change of the dielectric constant, while that etched using the ICP showed the highest change of dielectric constant. The lower degradation, that is, the lower chemical modification of MSQ material with the beam technique is believed to be related to the decreased concentration of radical species in the processing chamber reacting with the MSQ surface, while the lowest degradation using the neutral beam is believed to be due to the lower reaction rate of the reactive neutral compared to reactive ions.

36 MATERIALS SCIENCE↗