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At least 1,063 records · Page 59
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗
NASA NTRS2012

Adhesive-Bonded Composite Joint Analysis with Delaminated Surface Ply Using Strain-Energy Release Rate

This paper presents an analytical model to determine the strain energy release rate due to an interlaminar crack of the surface ply in adhesively bonded composite joints subjected to axial tension. Single-lap shear-joint standard test specimen geometry with thick bondline is followed for model development. The field equations are formulated by using the first-order shear-deformation theory in laminated plates together with kinematics relations and force equilibrium conditions. The stress distributions for the adherends and adhesive are determined after the appropriate boundary and loading conditions are applied and the equations for the field displacements are solved. The system of second-order differential equations is solved to using the symbolic computation tool Maple 9.52 to provide displacements fields. The equivalent forces at the tip of the prescribed interlaminar crack are obtained based on interlaminar stress distributions. The strain energy release rate of the crack is then determined by using the crack closure method. Finite element analyses using the J integral as well as the crack closure method are performed to verify the developed analytical model. It has been shown that the results using the analytical method correlate well with the results from the finite element analyses. An attempt is made to predict the failure loads of the joints based on limited test data from the literature. The effectiveness of the inclusion of bondline thickness is justified when compared with the results obtained from the previous model in which a thin bondline and uniform adhesive stresses through the bondline thickness are assumed.

Chadegani, Alireza↗
DOE OSTI2019

Experimental and Numerical Investigations of Cyclic Plastic Deformation of Al-Mg Alloy

In this work, low-cycle fatigue (LCF) tests are performed on as-received and solution-treated Al-Mg alloy (AA 5754). Solution heat treatment of the as-received alloy is performed at 530 °C for 2 h and then quenched in water at room temperature. The low-cycle fatigue response of the as-received and solution-treated alloy is evaluated at five different strain amplitudes from 0.2 to 0.6%. The strain rate of 0.5 × 10{sup −3} s{sup −1} is kept constant in all the LCF tests. The LCF behavior of AA 5754 is modeled by finite element method (FEM) using Chaboche kinematic hardening cyclic plasticity model. Hardening behavior or fatigue life of as-received and solution-treated alloy is successfully simulated using this model. The results obtained by FEM simulations are compared with those obtained by LCF experiments. Microstructural studies are also performed for as-received and solution-treated alloy. The fracture surfaces obtained from LCF tests are analyzed by scanning electron microscopy.

36 MATERIALS SCIENCE↗
DOE OSTI2014

Behavior of a hollow core photonic crystal fiber under high radial pressure for downhole application

Pressure fiber sensors play an important role in downhole high pressure measurements to withstand long term operation. The purpose of this paper is to present an application of hollow core photonic crystal fiber (HC-PCF) as a high pressure sensor head for downhole application based on dispersion variation. We used a high pressure stainless steel unit to exert pressure on the sensor. The experimental results show that different wavelengths based on sagnac loop interferometer have additive sensitivities from 5 × 10{sup −5} nm/psi at 1480 nm to 1.3 × 10{sup −3} nm/psi at 1680 nm. We developed a simulation to understand the reason for difference in sensitivity of wavelengths and also the relationship between deformation of HC-PCF and dispersion variation under pressure. For this purpose, by using the finite element method, we investigated the effect of structural variation of HC-PCF on spectral transformation of two linear polarizations under 1000 psi pressure. The simulation and experimental results show exponential decay behavior of dispersion variation from −3.4 × 10{sup −6} 1/psi to −1.3 × 10{sup −6} 1/psi and from −5 × 10{sup −6} 1/psi to −1.8 × 10{sup −6} 1/psi, respectively, which were in a good accordance with each other.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2016

Effect of viscous dissipation and radiation in an annular cone

The viscous dissipation is an effect due to which heat is generated inside the medium. The presence of radiation further complicates the heat transfer behavior inside porous medium. The present paper discusses the combined effect of viscous dissipation and radiation inside a porous medium confined in an annular cone with inner radius r{sub i}. The viscous dissipation and radiation terms are included in the energy equation thereby solving the coupled momentum and energy equations with the help of finite element method. The results are presented in terms of isothermal and streamline indicating the thermal and fluid flow behavior of porous medium. It is found that the combination of viscous dissipation and radiation parameter and the cone angle has significant effect on the heat transfer and fluid flow behavior inside the porous medium. The fluid velocity is found to increase with the increase in Raleigh number.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2014

Enabling Predictive Simulation and UQ of Complex Multiphysics PDE Systems by the Development of Goal-Oriented Variational Sensitivity Analysis and A Posteriori Error Estimation Methods

It was demonstrated that a posteriori analyses in general and in particular one that uses adjoint methods can accurately and efficiently compute numerical error estimates and sensitivity for critical Quantities of Interest (QoIs) that depend on a large number of parameters. Activities include: analysis and implementation of several time integration techniques for solving system of ODEs as typically obtained from spatial discretization of PDE systems; multirate integration methods for ordinary differential equations; formulation and analysis of an iterative multi-discretization Galerkin finite element method for multi-scale reaction-diffusion equations; investigation of an inexpensive postprocessing technique to estimate the error of finite element solution of the second-order quasi-linear elliptic problems measured in some global metrics; investigation of an application of the residual-based a posteriori error estimates to symmetric interior penalty discontinuous Galerkin method for solving a class of second order quasi-linear elliptic problems; a posteriori analysis of explicit time integrations for system of linear ordinary differential equations; derivation of accurate a posteriori goal oriented error estimates for a user-defined quantity of interest for two classes of first and second order IMEX schemes for advection-diffusion-reaction problems; Postprocessing finite element solution; and A Bayesian Framework for Uncertain Quantification of Porous Media Flows.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2018

Air-Coupled Nondestructive Evaluation Dissected

This work develops a two-dimensional theoretical model to simulate the behavior of a fully non-contact air-coupled nondestructive evaluation system for a thin isotropic plate. The model is divided into transmission, guided wave propagation and reception phase. The validation of the complete model was carried out by modeling the same system by means of finite element method using a Multiphysics software. In addition, the dependency of the generated Lamb waves on different transmitter’s parameters and incidence angle is thoroughly investigated. The results of the acoustic pressure excited by the transducer, the out-of-plane velocity amplitudes for the generated first antisymmetric Lamb wave mode, and the radiated pressure from the plate caused by the leaky Lamb wavefield were all compared between the two models and a reasonable degree of similarity was found.

42 ENGINEERING↗
DOE OSTI2013

Efficient simulation of press hardening process through integrated structural and CFD analyses

Press hardened steel parts are being increasingly used in automotive structures for their higher strength to meet safety standards while reducing vehicle weight to improve fuel consumption. However, manufacturing of sheet metal parts by press hardening process to achieve desired properties is extremely challenging as it involves complex interaction of plastic deformation, metallurgical change, thermal distribution, and fluid flow. Numerical simulation is critical for successful design of the process and to understand the interaction among the numerous process parameters to control the press hardening process in order to consistently achieve desired part properties. Until now there has been no integrated commercial software solution that can efficiently model the complete process from forming of the blank, heat transfer between the blank and tool, microstructure evolution in the blank, heat loss from tool to the fluid that flows through water channels in the tools. In this study, a numerical solution based on Altair HyperWorks® product suite involving RADIOSS®, a non-linear finite element based structural analysis solver and AcuSolve®, an incompressible fluid flow solver based on Galerkin Least Square Finite Element Method have been utilized to develop an efficient solution for complete press hardening process design and analysis. RADIOSS is used to handle the plastic deformation, heat transfer between the blank and tool, and microstructure evolution in the blank during cooling. While AcuSolve is used to efficiently model heat loss from tool to the fluid that flows through water channels in the tools. The approach is demonstrated through some case studies.

36 MATERIALS SCIENCE↗
DOE OSTI2016

Heat and mass transfer in porous cavity: Assisting flow

In this paper, investigation of heat and mass transfer in a porous cavity is carried out. The governing partial differential equations are non-dimensionalised and solved using finite element method. The left vertical surface of the cavity is maintained at constant temperature and concentration which are higher than the ambient temperature and concentration applied at right vertical surface. The top and bottom walls of the cavity are adiabatic. Heat transfer is assumed to take place by natural convection and radiation. The investigation is carried out for assisting flow when buoyancy and gravity force act in same direction.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2018

Adhesive and Cohesive Strength in FeB/Fe{sub 2}B Systems

In this work, FeB/Fe{sub 2}B systems were evaluated by the scratch test. The powder-pack boriding process was performed on the surface of AISI M2 steel. The mechanical parameters, such as yield stress and Young’s modulus of the boride layer, were obtained by the instrumented indentation technique. Residual stresses produced on the boride layer were estimated by using the x-ray diffraction (XRD) technique. The scratch test was performed in order to evaluate the cohesive/adhesive strength of the FeB/Fe{sub 2}B coating. In addition, a numerical evaluation of the scratch test on boride layers was performed by the finite element method. Maximum principal stresses were related to the failure mechanisms observed by the experimental scratch test. Shear stresses at the interfaces of the FeB/Fe{sub 2}B/substrate system were also evaluated. Finally, the results obtained provide essential information about the effect of the layer thickness, the residual stresses, and the resilience modulus on the cohesive/adhesive strength in FeB/Fe{sub 2}B systems.

36 MATERIALS SCIENCE↗
DOE OSTI2014

Design of a magnetic shielding system for the time of flight enhanced diagnostics neutron spectrometer at Experimental Advanced Superconducting Tokamak

The novel neutron spectrometer TOFED (Time of Flight Enhanced Diagnostics), comprising 90 individual photomultiplier tubes coupled with 85 plastic scintillation detectors through light guides, has been constructed and installed at Experimental Advanced Superconducting Tokamak. A dedicated magnetic shielding system has been constructed for TOFED, and is designed to guarantee the normal operation of photomultiplier tubes in the stray magnetic field leaking from the tokamak device. Experimental measurements and numerical simulations carried out employing the finite element method are combined to optimize the design of the magnetic shielding system. The system allows detectors to work properly in an external magnetic field of 200 G.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2016

One-step fabrication of submicrostructures by low one-photon absorption direct laser writing technique with local thermal effect

In this work, local thermal effect induced by a continuous-wave laser has been investigated and exploited to optimize the low one-photon absorption (LOPA) direct laser writing (DLW) technique for fabrication of polymer-based microstructures. It was demonstrated that the temperature of excited SU8 photoresist at the focusing area increases to above 100 °C due to high excitation intensity and becomes stable at that temperature thanks to the use of a continuous-wave laser at 532 nm-wavelength. This optically induced thermal effect immediately completes the crosslinking process at the photopolymerized region, allowing obtain desired structures without using the conventional post-exposure bake (PEB) step, which is usually realized after the exposure. Theoretical calculation of the temperature distribution induced by local optical excitation using finite element method confirmed the experimental results. LOPA-based DLW technique combined with optically induced thermal effect (local PEB) shows great advantages over the traditional PEB, such as simple, short fabrication time, high resolution. In particular, it allowed the overcoming of the accumulation effect inherently existed in optical lithography by one-photon absorption process, resulting in small and uniform structures with very short lattice constant.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2019

Sierra/SolidMechanics 4.54. Capabilities in Development

This user’s guide documents capabilities in Sierra/SolidMechanics which remain “in-development” and thus are not tested and hardened to the standards of capabilities listed in Sierra/SM 4.54 User’s Guide. Capabilities documented herein are available in Sierra/SM for experimental use only until their official release. These capabilities include, but are not limited to, novel discretization approaches such as peridynamics and the reproducing kernel particle method (RKPM), numerical fracture and failure modeling aids such as the extended finite element method (XFEM) and /-integral, explicit time step control techniques, dynamic mesh rebalancing, as well as a variety of new material models and finite element formulations.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2020

Sierra/SolidMechanics 4.58. Capabilities In Development

This user’s guide documents capabilities in Sierra/SolidMechanics which remain “in-development” and thus are not tested and hardened to the standards of capabilities listed in Sierra/SM 4.58 User’s Guide. Capabilities documented herein are available in Sierra/SM for experimental use only until their official release. These capabilities include, but are not limited to, novel discretization approaches such as peridynamics and the reproducing kernel particle method (RKPM), numerical fracture and failure modeling aids such as the extended finite element method (XFEM) and /-integral, explicit time step control techniques, dynamic mesh rebalancing, as well as a variety of new material models and finite element formulations

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2014

Nanoantennas for nanowire photovoltaics

We consider the use of plasmonic nanoantenna elements, hemispherical and cylindrical, for application in semiconductor nanowire (NW) vertical arrays. Using Mie theory and a finite element method, scattering and absorption efficiencies are obtained for the desired enhancement of interaction with light in the NWs. We find an optimal mixture of nanoantennae for efficient scattering of solar spectrum in the NW array. Spectral radiation patterns of scattered light are computed, and, for representing the total response of the nanoantenna-equipped NWs to the solar AM1.5G spectrum, the weighted average of scattering patterns for unpolarized normal incidence is obtained showing an advantageous overall directivity toward the NWs.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2015

A simple structure of all circular-air-holes photonic crystal fiber for achieving high birefringence and low confinement loss

We propose a simple structure of photonic crystal fibers (PCFs) with high birefringence and low confinement loss based on one rectangular centric ring of smaller circular air holes (CAHs) in the fiber core, and three rings of larger CAHs in the fiber cladding. This simple geometry (using all CAHs with two different air hole sizes) is capable of achieving a flexible control of the birefringence, B = 5.501 × 10{sup −3}, and ultra-low confinement loss, 7.30 × 10{sup −5 }dB/km, at an excitation wavelength of λ = 1550 nm. The birefringence value is ∼5.0 times greater than that obtained for conventional CAH PCF. This simple structure has the added advantage from the view point of easy fabrication, robustness, and cost. A full-vector finite element method combined with anisotropic perfectly matched layers was used to analyze the various fiber structures. We have analyzed four cases of CAH PCFs, focusing on the core asymmetry design as opposed to the conventional approach of CAHs or elliptical air holes on the cladding and core. The robustness against manufacturing inaccuracies of the proposed structure has also been further investigated in this work.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
NASA NTRS1987

Shape design sensitivity analysis and optimal design of structural systems

The material derivative concept of continuum mechanics and an adjoint variable method of design sensitivity analysis are used to relate variations in structural shape to measures of structural performance. A domain method of shape design sensitivity analysis is used to best utilize the basic character of the finite element method that gives accurate information not on the boundary but in the domain. Implementation of shape design sensitivty analysis using finite element computer codes is discussed. Recent numerical results are used to demonstrate the accuracy obtainable using the method. Result of design sensitivity analysis is used to carry out design optimization of a built-up structure.

Choi, Kyung K.↗
NASA NTRS1982

Finite element analysis of aerodynamic heating in three dimensional viscous high speed compressible flow: An assessment

The current capability of the finite element method for solving problems of viscous flow is reviewed. Much work has been directed to the simulation of incompressible flows and the relevant features are described. The methods available for, and the problems associated with, the finite element solution of high speed viscous compressible flows are analyzed. A plan for developing finite element research in this area with experimental support is presented.

Morgan, K.↗