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At least 1,045 records · Page 58

Time resolved photo-luminescent decay characterization of mercury cadmium telluride focal plane arrays

The minority carrier lifetime is a measurable material property that is an indication of infrared detector device performance. To study the utility of measuring the carrier lifetime, an experiment has been constructed that can time resolve the photo-luminescent decay of a detector or wafer sample housed inside a liquid nitrogen cooled Dewar. Motorized stages allow the measurement to be scanned over the sample surface, and spatial resolutions as low as 50µm have been demonstrated. A carrier recombination simulation was developed to analyze the experimental data. Results from measurements performed on 4 mercury cadmium telluride focal plane arrays show strong correlation between spatial maps of the lifetime, dark current, and relative response.

36 MATERIALS SCIENCE↗

Creation And Ordering Of Oxygen Vacancies At WO3-d And Perovskite Interfaces

Changes in structure and composition resulting from oxygen deficiency can strongly impact the physical and chemical properties of transition metal oxides. However, it is extremely difficult to accurately characterize the oxygen deficiency levels and pinpoint how these materials properties change in response. In this paper, the effects of substrate strain and oxidizing power on the creation and distribution of oxygen defects in WO3 thin films are investigated in detail. An 18O2 isotope labeled time-of-flight secondary ion mass spectrometry (ToF-SIMS) study reveals that WO3-films grown on STO display a significantly larger oxygen vacancy gradient along the growth direction. This result is corroborated by scanning transmission electron microscopy (STEM) images which reveal a large number of defects present close to the interface to accommodate interfacial strain, leading to ordering of oxygen vacancies and formation of semi-aligned Magnéli phases. The strain is gradually released and tetragonal phase with much better crystallinity is observed at the film/vacuum interface. The changes in structure resulting from oxygen defect creation are shown to have a direct impact on the electronic and optical properties of the films.

Zhang, Kelvin H.↗

Microwave-Hydrothermal Synthesis of Y{sub 3}Fe{sub 5}O{sub 12} Nanoparticles: Sintering Temperature Effect on Structural, Magnetic and Dielectric Properties

Herein, we report a facile microwave-assisted hydrothermal method for the preparation of yttrium iron garnet (YIG, Y{sub 3}Fe{sub 5}O{sub 12})nanocrystals and realized the synergy between its structural and magnetic properties. The as-prepared powder thermal stability was characterized in detail by using thermogravimetric-differential thermal analysis (TG-DTA). The synthesized powder was microwave sintered at six different temperatures ranging from 973 to 1373 K for 60 min and characterized using X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM). Magnetic properties were investigated by vibrating-sample magnetometer (VSM) and ferromagnetic resonance (FMR) studies. The frequency variation of dielectric and magnetic properties was measured in the frequency range of 100 kHz–1.8 GHz. The observed magnetic and dielectric parameters such as saturation magnetization, coercivity, permeability, linewidth, dielectric constant and magnetodielectric losses are strongly affected by sintering temperature. The saturation magnetization and coercivity of YIG were found in the range 14.4–28.0 emu/g and 35–87 Oe, respectively. Furthermore, the FMR linewidth decreases from 844 to 204 Oe. This analysis undoubtedly demonstrates that the synthesis method and sintering temperature have the prominent effect on the electrical and magnetic properties of YIG and would be very useful for the garnet-based microwave device applications.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Dirac point and transconductance of top-gated graphene field-effect transistors operating at elevated temperature

Top-gated graphene field-effect transistors (GFETs) have been fabricated using bilayer epitaxial graphene grown on the Si-face of 4H-SiC substrates by thermal decomposition of silicon carbide in high vacuum. Graphene films were characterized by Raman spectroscopy, Atomic Force Microscopy, Scanning Tunnelling Microscopy, and Hall measurements to estimate graphene thickness, morphology, and charge transport properties. A 27 nm thick Al₂O₃ gate dielectric was grown by atomic layer deposition with an e-beam evaporated Al seed layer. Electrical characterization of the GFETs has been performed at operating temperatures up to 100 °C limited by deterioration of the gate dielectric performance at higher temperatures. Devices displayed stable operation with the gate oxide dielectric strength exceeding 4.5 MV/cm at 100 °C. Significant shifting of the charge neutrality point and an increase of the peak transconductance were observed in the GFETs as the operating temperature was elevated from room temperature to 100 °C.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Experimental and simulation study of target biasing effects on plasma transport in linear plasma device MPS-LD

Linear plasma devices (LPDs) are important experimental platforms for investigating plasma–material interactions (PMI). In PMI experiments, it has been found that applying a target bias not only effectively modifies the incident ion energy, but also induces significant changes in the electron density and electron temperature, whereby the evolution of these plasma parameters is primarily governed by plasma transport processes. However, at present, the physical process and mechanism underlying such bias-induced variations remain unclear. In this work, biasing experiments under argon plasma discharge conditions were first carried out on the MPS-LD device. For the corresponding experiments, an electric potential model was newly developed based on the BOUT++ LPD module, enabling self-consistent simulations of plasma transport under biased conditions. Numerical simulations were then performed to reproduce the experimental results and to validate the accuracy of the proposed model. Finally, by combining experimental measurements with numerical simulations, a bias-voltage scan was performed to investigate how the electron density and electron temperature vary with the bias voltage (U bias ). The results show that applying negative bias decreases the target electron density (n e,T ) while increasing the target electron temperature (T e,T ). In contrast, positive bias increases both n e,T and T e,T ; however, at high positive bias, n e,T first reaches a maximum and subsequently decreases with further increases in U bias . The underlying physical mechanisms are analyzed using particle flux, momentum, and energy conservation. It indicates that the applied bias regulates the parallel electric field, thereby changing ion and electron velocities, and consequently affecting the electron density. At high positive bias, the ion velocity is further influenced by ion viscosity, leading to the reversal in n e,T . Meanwhile, the enhanced parallel electric field drives stronger currents, significantly increasing ion–electron frictional work and converting the input bias power into electron energy, which raises the electron temperature. In conclusion, these results contribute to a deeper understanding of the effects and mechanisms of biasing on plasma transport in the MPS-LD device.

BOUT++ simulation↗

Epitaxial Thin Film Growth on Recycled SrTiO 3 Substrates Toward Sustainable Processing of Complex Oxides

Complex oxide thin films cover a range of physical properties and multifunctionalities that are critical for logic, memory, and optical devices. Typically, the high‐quality epitaxial growth of these complex oxide thin films requires single crystalline oxide substrates such as SrTiO 3 (STO), MgO, LaAlO 3 , a‐Al 2 O 3, and many others. Recent successes in transferring these complex oxides as free‐standing films not only offer great opportunities in integrating complex oxides on other devices, but also present enormous opportunities in recycling the deposited substrates after transfer for cost‐effective and sustainable processing of complex oxide thin films. In this work, the surface modification effects introduced on the recycled STO are investigated, and their impacts on the microstructure and properties of subsequently grown epitaxial oxide thin films are assessed and compared with those grown on the pristine substrates. Detailed analyses using high‐resolution scanning transmission electron microscopy and geometric phase analysis demonstrate distinct strain states on the surfaces of the recycled STO versus the pristine substrates, suggesting a pre‐strain state in the recycled STO substrates due to the previous deposition layer. These findings offer opportunities in growing highly mismatched oxide films on the recycled STO substrates with enhanced physical properties. Specifically, yttrium iron garnet (Y 3 Fe 5 O 12 ) films grown on recycled STO present different ferromagnetic responses compared to that on the pristine substrates, underscoring the effects of surface modification. The study demonstrates the feasibility of reuse and redeposition using recycled substrates. Via careful handling and preparation, high‐quality epitaxial thin films can be grown on recycled substrates with comparable or even better structural and physical properties toward sustainable process of complex oxide devices.

pre-strained STO surfaces↗

Investigation on improved performance of Erbium doped TiO2 nanowire based UV detector

Highlights: • PL study showed the removal of oxygen defects of TiO{sub 2} material after Er doping. • Superior photosensitivity was obtained for Er:TiO{sub 2} NW based detector. • Detectivity and NEP were calculated for both undoped and doped detectors. • Photoswitching was observed for Er:TiO{sub 2} NW detector at 350 nm of wavelength. - Abstract: Undoped TiO{sub 2} and Erbium doped TiO{sub 2} nanowires (Er:TiO{sub 2} NWs) were synthesized on respective thin films using e-beam cum glancing angle deposition technique onto n-type silicon substrates. The length of the NWs was ∼182 nm as calculated from field emission gun scanning electron microscopy images. Transmission electron microscopy showed an average NW length of 173 nm. Polycrystalline nature of both samples was obtained from the selected area electron diffraction analysis as well as from the X-ray diffraction (XRD) analysis. Energy dispersive X-ray spectroscopy and variation in the grain size (calculated from XRD) confirmed the doping of Erbium in case of Er:TiO{sub 2} NWs. Increased absorption, as well as enhanced bandgap, was observed for Er:TiO{sub 2} NWs compared to the undoped TiO{sub 2} NWs. Superior device performance in terms of detectivity, sensitivity and photoswitching was obtained for Er:TiO{sub 2} NWs as compared to the undoped TiO{sub 2} NWs in the UV region.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Interaction transfer of silicon atoms forming Co silicide for Co/√(3)×√(3)R30°-Ag/Si(111) and related magnetic properties

Combined scanning tunneling microscopy, Auger electron spectroscopy, and surface magneto-optic Kerr effect studies were employed to study the microscopic structures and magnetic properties for ultrathin Co/√(3)×√(3)R30°-Ag/Si(111). As the annealing temperature increases, the upward diffusion of Si atoms and formation of Co silicides occurs at temperature above 400 K. Below 600 K, the √(3)×√(3)R30°-Ag/Si(111) surface structure persists. We propose an interaction transferring mechanism of Si atoms across the √(3)×√(3)R30°-Ag layer. The upward transferred Si atoms react with Co atoms to form Co silicide. The step height across the edge of the island, a separation of 0.75 nm from the analysis of the 2 × 2 structure, and the calculations of the normalized Auger signal serve as strong evidences for the formation of CoSi{sub 2} at the interface. The interaction transferring mechanism for Si atoms enhances the possibility of interactions between Co and Si atoms. The smoothness of the surface is advantage for that the easy axis of magnetization for Co/√(3)×√(3)R30°-Ag/Si(111) is in the surface plane. This provides a possible way of growing flat magnetic layers on silicon substrate with controllable silicide formation and shows potential applications in spintronics devices.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Spatial Mapping of Thermal Boundary Conductance at Metal–Molybdenum Diselenide Interfaces

Improving the thermal transport across interfaces is a necessary consideration for micro- and nanoelectronic devices and necessitates accurate measurement of the thermal boundary conductance (TBC) and understanding of transport mechanisms. Two-dimensional transition-metal dichalcogenides (TMDs) have been studied extensively for their electrical properties, including the metal–TMD electrical contact resistance, but the thermal properties of these interfaces are significantly less explored irrespective of their high importance in their electronic devices. We isolate individual islands of MoSe 2 grown by chemical vapor deposition using photolithography and correlate the 2D variation of TBC with optical microscope images of the MoSe 2 islands. We measure the 2D spatial variation of the TBC at metal–MoSe 2 –SiO 2 interfaces using a modified time-domain thermoreflectance (TDTR) technique, which requires much less time than full TDTR scans. The thermoreflectance signal at a single probe delay time is compared with a correlation curve, which enables us to estimate the change in the signal with respect to the TBC at the metal–MoSe 2 –SiO 2 interface as opposed to recording the decay of the thermoreflectance signal over delay times of several nanoseconds. The results show a higher TBC across the Ti–MoSe 2 –SiO 2 interface compared to Al–MoSe 2 –SiO 2 . An image-clustering method is developed to differentiate the TBC for different numbers of MoSe 2 layers, which reveals that the TBC in single-layer regions is higher than that in the bilayer. Finally, we perform traditional TDTR measurements over a range of delay times and verify that TBC is higher at the Ti–MoSe 2 –SiO 2 interface compared to Al–MoSe 2 –SiO 2 , highlighting the importance of the choice of metal for heat dissipation at electrical contacts in TMD devices.

22 interfacial↗

Environmental damping and vibrational coupling of confined fluids within isolated carbon nanotubes

Abstract Because of their large surface areas, nanotubes and nanowires demonstrate exquisite mechanical coupling to their surroundings, promising advanced sensors and nanomechanical devices. However, this environmental sensitivity has resulted in several ambiguous observations of vibrational coupling across various experiments. Herein, we demonstrate a temperature-dependent Radial Breathing Mode (RBM) frequency in free-standing, electron-diffraction-assigned Double-Walled Carbon Nanotubes (DWNTs) that shows an unexpected and thermally reversible frequency downshift of 10 to 15%, for systems isolated in vacuum. An analysis based on a harmonic oscillator model assigns the distinctive frequency cusp, produced over 93 scans of 3 distinct DWNTs, along with the hyperbolic trajectory, to a reversible increase in damping from graphitic ribbons on the exterior surface. Strain-dependent coupling from self-tensioned, suspended DWNTs maintains the ratio of spring-to-damping frequencies, producing a stable saturation of RBM in the low-tension limit. In contrast, when the interior of DWNTs is subjected to a water-filling process, the RBM thermal trajectory is altered to that of a Langmuir isobar and elliptical trajectories, allowing measurement of the enthalpy of confined fluid phase change. These mechanisms and quantitative theory provide new insights into the environmental coupling of nanomechanical systems and the implications for devices and nanofluidic conduits.

36 MATERIALS SCIENCE↗

SU-F-T-210: The Variable Virtual Source-To-Axis Distance Effect On A Compact Proton Pencil Beam Scanning System

Purpose: We investigate the spot characteristic and dose profiles properties from a compact gantry proton therapy system. This compact design features a dedicated pencil beam scanning nozzle with the scanning magnet located upstream of the final 60 degree bending magnet. Due to the unique beam line design, uncertainty has been raised in the virtual source-to-axis distance (SAD). We investigate its potential clinical impact through measurements and simulation. Methods: A scintillator camera based detector was used to measure spot characteristics and position accuracy. An ion chamber array device was used to measure planar dose profile. Dose profile in-air simulation was performed using in-house built MATLAB program based on additional spot parameters directly from measurements. Spot characteristics such as position and in-air sigma values were used to general simulated 2D elliptical Gaussian spots. The virtual SAD distance changes in the longitudinal direction were also simulated. Planar dose profiles were generated by summation of simulated spots at the isocenter, 15 cm above the isocenter, and 15 cm below the isocenter for evaluation of potential clinical dosimetric impact. Results: We found that the virtual SAD varies depending on the spot location on the longitudinal axis. Measurements have shown that the variable SAD changes from 7 to 12 meters from one end to the other end of the treatment field in the longitudinal direction. The simulation shows that the planer dose profiles differences between the fixed SAD and variable SAD are within 3% from the isocenter profile and the lateral penumbras are within 1 mm difference. Conclusion: Our measurements and simulations show that there are minimum effects on the spot characteristics and dose profiles for this up-stream scanning compact system proton system. Further treatment planning study is needed with the variable virtual SAD accounted for in the planning system to show minimum dosimetric impact.

60 APPLIED LIFE SCIENCES↗

Hydrogel Spacer Prospective Multicenter Randomized Controlled Pivotal Trial: Dosimetric and Clinical Effects of Perirectal Spacer Application in Men Undergoing Prostate Image Guided Intensity Modulated Radiation Therapy

Purpose: Perirectal spacing, whereby biomaterials are placed between the prostate and rectum, shows promise in reducing rectal dose during prostate cancer radiation therapy. A prospective multicenter randomized controlled pivotal trial was performed to assess outcomes following absorbable spacer (SpaceOAR system) implantation. Methods and Materials: Overall, 222 patients with clinical stage T1 or T2 prostate cancer underwent computed tomography (CT) and magnetic resonance imaging (MRI) scans for treatment planning, followed with fiducial marker placement, and were randomized to receive spacer injection or no injection (control). Patients received postprocedure CT and MRI planning scans and underwent image guided intensity modulated radiation therapy (79.2 Gy in 1.8-Gy fractions). Spacer safety and impact on rectal irradiation, toxicity, and quality of life were assessed throughout 15 months. Results: Spacer application was rated as “easy” or “very easy” 98.7% of the time, with a 99% hydrogel placement success rate. Perirectal spaces were 12.6 ± 3.9 mm and 1.6 ± 2.0 mm in the spacer and control groups, respectively. There were no device-related adverse events, rectal perforations, serious bleeding, or infections within either group. Pre-to postspacer plans had a significant reduction in mean rectal V70 (12.4% to 3.3%, P<.0001). Overall acute rectal adverse event rates were similar between groups, with fewer spacer patients experiencing rectal pain (P=.02). A significant reduction in late (3-15 months) rectal toxicity severity in the spacer group was observed (P=.04), with a 2.0% and 7.0% late rectal toxicity incidence in the spacer and control groups, respectively. There was no late rectal toxicity greater than grade 1 in the spacer group. At 15 months 11.6% and 21.4% of spacer and control patients, respectively, experienced 10-point declines in bowel quality of life. MRI scans at 12 months verified spacer absorption. Conclusions: Spacer application was well tolerated. Increased perirectal space reduced rectal irradiation, reduced rectal toxicity severity, and decreased rates of patients experiencing declines in bowel quality of life. The spacer appears to be an effective tool, potentially enabling advanced prostate RT protocols.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Room temperature multiferroic properties and magnetoelectric coupling in Sm and Ni substituted Bi{sub 4−x}Sm{sub x}Ti{sub 3−x}Ni{sub x}O{sub 12±δ} (x = 0, 0.02, 0.05, 0.07) ceramics

Lead free multiferroic Bi{sub 4−x}Sm{sub x}Ti{sub 3−x}Ni{sub x}O{sub 12±δ} (x = 0.02, 0.05, and 0.07) samples have been synthesized by conventional solid state route. X-ray diffraction analysis reveals single phase up to x = 0.07, and a secondary phase appears at x > 0.07. Raman spectroscopy confirms the local distortions in the crystal. Field emission scanning electron microscopy shows plate like grains. Substitution has increased the orthorhombic distortion, grain size, and hence the ferroelectric transition temperature (T{sub c}). A significant reduction in the values of dielectric constant (ε′) and loss tangent (tan δ) has been observed with the increase of Sm and Ni ions. The increase in dc resistivity at room temperature has been found with substitution. Enhancement in the values of remnant polarization (2P{sub r}) and magnetization (2M{sub r}) is observed. Magnetoelectric coupling coefficient (α) values of 0.60 mV/cm/Oe are achieved in Bi{sub 4−x}Sm{sub x}Ti{sub 3−x}Ni{sub x}O{sub 12±δ} ceramic samples. Hence, we have successfully converted the ferroelectric Bi{sub 4}Ti{sub 3}O{sub 12} into a multiferroic, which is a new lead free multiferroic material, can be useful for future electromagnetic devices.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Local strain-dependent electronic structure and perpendicular magnetic anisotropy of a MnGaN 2D magnetic monolayer

Local strain-dependent spin-polarized electronic structure of a two-dimensional (2D) magnetic layer is an exciting property for practical applications. For example, it holds the promise for advanced ultrathin spintronic nanodevices with customized electronic and magnetic properties by local strain engineering. Here, we demonstrate that the spin-polarized electronic structure of a 2D manganese gallium nitride (MnGaN-2D) magnetic monolayer is sensitive to intrinsic local lattice strain, as proven by first-principles calculations and indicated by scanning tunneling spectroscopy measurements. Atomic resolution images reveal a highly non-Gaussian lattice spacing/strain distribution, while the spectroscopy reveals variations in the electronic density of states. Simulations of the MnGaN-2D monolayer based on first-principles calculations, including both isotropic and anisotropic strains, confirm a highly strain-dependent manganese partial density of states. Spin-orbit coupling is included which indicates either out-of-plane perpendicular magnetic anisotropy (PMA) or in-plane magnetic anisotropy, dependent on the type of strain whether compressive or tensile, suggesting that MnGaN-2D is magnetoelastic. The MnGaN-2D PMA is further supported by superconducting quantum interference device magnetometry measurements which reveal a high spin polarization of ~ 79 % at room temperature.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Preparation and nonlinear optical properties of indium nanocrystals in sodium borosilicate glass by the sol–gel route

Graphical abstract: The sodium borosilicate glass doped with indium nanocrystals have been successfully prepared by sol–gel methods. And the indium nanocrystals in tetragonal crystal system have formed uniformly in the glass, and the average diameter of indium nanocrystals is about 30 nm. The third-order optical nonlinear refractive index γ, absorption coefficient β, and susceptibility χ{sup (3)} of the glass are determined to be −4.77 × 10{sup −16} m{sup 2}/W, 2.67 × 10{sup −9} m/W, and 2.81 × 10{sup −10} esu, respectively. Highlights: ► Indium nanocrystals embedded in glass matrix have been prepared by sol–gel route. ► The crystal structure and composition are investigated by XRD and XPS. ► Size and distribution of indium nanocrystals is determined by TEM. ► The third-order optical nonlinearity is investigated by using Z-scan technique. -- Abstract: The sodium borosilicate glass doped with indium nanocrystals have been successfully prepared by sol–gel route. The thermal stability behavior of the stiff gel is investigated by thermogravimetric (TG) and differential thermal (DTA) analysis. The crystal structure of the glass is characterized by X-ray powder diffraction (XRD). Particle composition is determined by X-ray photoelectron spectroscopy (XPS). Size and distribution of the nanocrystals are characterized by transmission electron microscopy (TEM) as well as high-resolution transmission electron microscopy (HRTEM). Results show that the indium nanocrystals in tetragonal crystal structure have formed in glass, and the average diameter is about 30 nm. Further, the glass is measured by Z-scan technique to investigate the nonlinear optical (NLO) properties. The third-order NLO coefficient χ{sup (3)} of the glass is determined to be 2.81 × 10{sup −10} esu. The glass with large third-order NLO coefficient is promising materials for applications in optical devices.

36 MATERIALS SCIENCE↗

Angle resolved x-ray photoelectron spectroscopy (ARXPS) analysis of lanthanum oxide for micro-flexography printing

Micro-flexography printing was developed in patterning technique from micron to nano scale range to be used for graphic, electronic and bio-medical device on variable substrates. In this work, lanthanum oxide (La{sub 2}O{sub 3}) has been used as a rare earth metal candidate as depositing agent. This metal deposit was embedded on Carbon (C) and Silica (Si) wafer substrate using Magnetron Sputtering technique. The choose of Lanthanum as a target is due to its wide application in producing electronic devices such as thin film battery and printed circuit board. The La{sub 2}O{sub 3} deposited on the surface of Si wafer substrate was then analyzed using Angle Resolve X-Ray Photoelectron Spectroscopy (ARXPS). The position for each synthetic component in the narrow scan of Lanthanum (La) 3d and O 1s are referred to the electron binding energy (eV). The La 3d narrow scan revealed that the oxide species of this particular metal is mainly contributed by La{sub 2}O{sub 3} and La(OH){sub 3}. The information of oxygen species, O{sup 2-} component from O 1s narrow scan indicated that there are four types of species which are contributed from the bulk (O{sup 2−}), two chemisorb component (La{sub 2}O{sub 3}) and La(OH){sub 3} and physisorp component (OH). Here, it is proposed that from the adhesive and surface chemical properties of La, it is suitable as an alternative medium for micro-flexography printing technique in printing multiple fine solid lines at nano scale. Hence, this paper will describe the capability of this particular metal as rare earth metal for use in of micro-flexography printing practice. The review of other parameters contributing to print fine lines will also be described later.

36 MATERIALS SCIENCE↗

Production of micron-sized polymer particles for additive manufacturing by melt emulsification

Melt emulsification is an advanced top-down approach that permits to produce spherical particles and thus widens the availability of polymer feed materials for additive manufacturing. In the process the polymer is molten in a continuous phase and droplet breakup is realized in a rotor-stator-device. The stabilization of the newly formed surfaces is quite challenging. Therefore, a new method to identify an appropriate emulsifier by measuring the interfacial tension between the polymer and continuous phase using a high pressure / high temperature cell is presented. The obtained powders are characterized by scanning electron microscopy (SEM) and by a Zimmermann tensile strength tester to determine the powder flowability. The processability of the polymer powders for additive manufacturing is investigated and demonstrated by building single layers by laser beam melting.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Electrical and morphological characterization of transfer-printed Au/Ti/TiO{sub x}/p{sup +}-Si nano- and microstructures with plasma-grown titanium oxide layers

Highly-ordered, sub-70 nm-MOS-junctions of Au/Ti/TiO{sub x}/p{sup +}-Si were efficiently and reliably fabricated by nanotransfer-printing (nTP) over large areas and their functionality was investigated with respect to their application as MOS-devices. First, we used a temperature-enhanced nTP process and integrated the plasma-oxidation of a nm-thin titanium film being e-beam evaporated directly on the stamp before the printing step without affecting the p{sup +}-Si substrate. Second, morphological investigations (scanning electron microscopy) of the nanostructures confirm the reliable transfer of Au/Ti/TiO{sub x}-pillars of 50 nm, 75 nm, and 100 nm size of superior quality on p{sup +}-Si by our transfer protocol. Third, the fabricated nanodevices are also characterized electrically by conductive AFM. Fourth, the results are compared to probe station measurements on identically processed, i.e., transfer-printed μm-MOS-structures including a systematic investigation of the oxide formation. The jV-characteristics of these MOS-junctions demonstrate the electrical functionality as plasma-grown tunneling oxides and the effectivity of the transfer-printing process for their large-scale fabrication. Next, our findings are supported by fits to the jV-curves of the plasma-grown titanium oxide by kinetic-Monte-Carlo simulations. These fits allowed us to determine the dominant conduction mechanisms, the material parameters of the oxides and, in particular, a calibration of the thickness depending on applied plasma time and power. Finally, also a relative dielectric permittivity of 12 was found for such plasma-grown TiO{sub x}-layers.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗