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At least 1,045 records · Page 58

Integrated Strategies for Overcoming Resolution Limits in Electron Beam Lithography of Chemically Amplified Resists

Electron beam lithography (EBL) of chemically amplified resists (CARs) faces fundamental challenges, including stochastic electron scattering and acid diffusion, that limit resolution and reproducibility. Using SU-8 as a model CAR, this study systematically investigated complementary strategies to address these challenges, combining multipass exposure, proximity effect correction (PEC) with midrange correction factors, base quencher incorporation, and post-exposure bake (PEB) suppression. Monte Carlo simulations and calibrated PEC modeling revealed that extending the point spread function to include a midrange scattering component significantly improved critical dimension (CD) control across varying pattern densities, correcting deviations that conventional two-term PEC failed to capture. Multipass exposure, particularly 4-pass writing with a 25% offset, redistributed the dose to average stochastic beam and scattering fluctuations, reducing line-width roughness by more than 50% and yielding more uniform nanoscale features. Photoacid confinement was investigated by adding urea as a base quencher, which successfully reduced acid diffusion but introduced substantial sensitivity penalties without improving ultimate resolution or Z-factor performance, underscoring the trade-offs of chemical versus physical confinement. Suppressing PEB most directly minimized acid diffusion, resulting in improved Z-factors and reproducible 30 nm half-pitch dense line/space patterns. Overall, these results demonstrated that PEC with midrange correction, multipass strategies, quencher additives, and PEB-free processing addresses different aspects of the EBL process window and that their integration provides a comprehensive framework for managing stochastic scattering, diffusion, and chemical amplification effects. This framework advances dense nanoscale patterning in CARs and establishes guiding principles for optimizing resist design and process strategies in high-resolution EBL and potentially other advanced lithographies, such as extreme ultraviolet (EUV) lithography.

36 MATERIALS SCIENCE↗

Application of cross-beam energy transfer to control drive symmetry in ICF implosions in low gas fill Hohlraums at the National Ignition Facility

Cross beam energy transfer (CBET), invoked by setting a wavelength difference, Δλ, between inner and outer beam cones, can be used to increase the drive on the waist in indirectly driven inertial confinement fusion experiments at the National Ignition Facility (NIF). Historically, hot spot symmetry control in capsule implosions in high (≥0.9 mg/cm 3 4 He) gas fill Hohlraums was enabled by substantial CBET. However, these implosion designs suffered from inflight symmetry swings, high SRS backscatter on the inner cones, and significant hot electron generation posing a threat to DT fuel preheat. Subsequent experiments in larger, low (≤0.6 mg/cm 3 4 He) gas fill Hohlraums demonstrated round implosions by varying the inner cone fraction throughout the laser drive at Δλ = 0 Å while keeping backscatter and hot electron generation very low. To enable driving larger capsules at a given Hohlraum size, additional tools for implosion symmetry control are required. With this goal in mind, here we present a detailed experimental study of using CBET in low gas fill Hohlraums near NIF's current peak power capability. We find a ~2.5× higher sensitivity of the P 2 Legendre mode with respect to Δλ changes compared to that of high gas fill designs. We attribute this observation to the fact that backscatter remains very low and that CBET remains in a linear regime, as suggested by simulations. As a result, a much smaller Δλ of order 1 Å is sufficient for sustaining implosion symmetry while keeping laser-to- Hohlraum coupling high and hot electron generation very low. While this study used plastic ablator capsules, our findings can be generalized to other ablator materials and, hence, show great promise for using wavelength detuning as a strong lever for implosion symmetry control in future low gas fill designs that require smaller case to capsule ratios in order to increase the energy coupled to the capsule.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Deterministic scattering of relativistic electron beams by off-resonant circularly polarized electromagnetic waves

A mechanism is presented whereby relativistic electron beams localized in phase space are deterministically scattered by coherent circularly polarized electromagnetic waves without stochastic processes. It is shown via an exact single-particle analysis that the condition for maximal scattering is an off-resonant condition, contrary to previous kinetic analyses that predict maximal diffusion or interaction at exact resonance or its harmonics. The mechanism, verified by single-particle simulations, enables a fast, nonlinear redistribution of the beam particles. A possible application of this mechanism to runaway electron suppression is presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Whistler waves generated by nongyrotropic and gyrotropic electron beams during asymmetric guide field reconnection

Using a two-dimensional particle-in-cell simulation of asymmetric reconnection with a guide field whose strength is 0.3 times the reconnecting magnetic field, we study electron distribution functions and wave intensities in the diffusion region, focusing on the electron diffusion region (EDR). Wave activities with frequencies below the electron cyclotron frequency are observed, and these are whistler waves propagating almost anti-parallel to the magnetic field. The waves are concentrated near the magnetospheric separatrix away from the X line, but the wave activity also spreads through the EDR near the X line. The reconnection outflows are asymmetric in the outflow direction in the magnetospheric side, and the wave intensity is stronger in the side of the faster electron outflow. We study the whistler waves using the fast Fourier transform, analyses of electron velocity distribution functions, and the dispersion solver calculation. Along the magnetospheric separatrix in the stronger outflow side, highly anisotropic electron beams exist with super-Alfvénic drift speeds. The dispersion analysis shows that there are two modes: a temperature anisotropy mode and a beam mode. Outside the EDR, the whistler wave intensity is highest near the separatrix, but the wave intensity decreases if we move away from the separatrix toward the magnetic neutral line because of the increase in the electron population near zero parallel velocity. In the EDR, in the velocity plane perpendicular to the magnetic field, ring/crescent electron distribution functions are observed. Near the X-line, the wave power is enhanced where nongyrotropic electrons contribute to increase the perpendicular temperature anisotropy.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Development of a pulsed, variable-energy positron beam for atomic scale defect studies

Positron annihilation spectroscopy provides a sensitive means of non-destructive characterization of materials, capable of probing single atom vacancies in solids with 10 –7 sensitivity. Here, in this work, we detail the development of a magnetically guided, variable energy, pulsed positron beam designed to conduct depth-dependent defect studies in metals, semiconductors, and dielectrics, which will be the first of its kind in the United States. The design of the target stage provides capabilities for measurements during in situ annealing up to 800 °C and incorporates a new approach to minimize the background due to energetic backscattered positrons. The developed beam at Bowling Green State University provides a powerful tool for characterization of thin films, devices, and ion irradiated materials.

47 OTHER INSTRUMENTATION↗

Low-damage electron beam lithography for nanostructures on Bi 2 Te 3 -class topological insulator thin films

Nanostructured topological insulators (TIs) have the potential to impact a wide array of condensed matter physics topics, ranging from Majorana physics to spintronics. However, the most common TI materials, the Bi 2 Se 3 family, are easily damaged during nanofabrication of devices. In this paper, we show that electron beam lithography performed with a 30 or 50 kV accelerating voltage—common for nanopatterning in academic facilities—damages both nonmagnetic TIs and their magnetically doped counterparts at unacceptable levels. We additionally demonstrate that electron beam lithography with a 10 kV accelerating voltage produces minimal damage detectable through low-temperature electronic transport. In conclusion, although reduced accelerating voltages present challenges in creating fine features, we show that with careful choice of processing parameters, particularly the resist, 100 nm features are reliably achievable.

42 ENGINEERING↗

Ion concentration ratio measurements of ion beams generated by a commercial microwave electron cyclotron resonance plasma source

A commercially available electron cyclotron resonance (ECR) plasma source (GenII Plasma Source, tectra GmbH) is widely used for surface processing. This plasma source is compatible with ultrahigh vacuum systems, and its working pressure is relatively low, around 10 –6 –10 –4 Torr even without differential pumping. Here, we report ion flux concentration ratios for each ion species in an ion beam from this source, as measured by a mass/energy analyzer that is a combination of a quadrupole mass spectrometer, an electrostatic energy analyzer, and focusing ion optics. In this study, the examined beams were those arising from plasmas produced from feed gases of H 2 , D 2 , N 2 , O 2 , Ar, and dry air over a range of input power and working pressures. H 2 (D 2 ) plasmas are widely used for nuclear fusion applications and, hence, the ion concentration ratios of H + , H 2 + , and H 3 + reported here will be useful information for research that applies this plasma source to well-controlled plasma-material interaction studies. Ion energy distributions, stability of operation, and impurity concentrations were also assessed for each of the plasma species investigated.

47 OTHER INSTRUMENTATION↗

A GHz-frequency multistrip acoustic beam splitter for quantum applications

Here we demonstrate a microwave-frequency, two-track acoustic beam splitter, based on a multistrip coupler design matched to four unidirectional transducers, two on each of the two acoustic tracks that make up the device. We explain the device design and its experimental implementation, showing good agreement between our model and the measured device scattering spectra. The beam splitter regime, dividing an input signal at port 1 into closely equal outputs at ports 2 and 3, is reached over a 94.7 MHz bandwidth centered at 4.79 GHz, with an output power division ratio |S 21 /S 31 | 2 = 1.1 ± 0.2. The measured bandwidth of the device is limited by the bandwidth of the transducers, rather than that of the multistrip coupler.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Decay of a laser beam under stimulated temperature scattering in toluene as a result of two-photon pump absorption and nonsteady-state laser pulse interaction with matter

The decay of the pump-beam spatial structure under conditions of stimulated temperature scattering of a pulsed laser beam in toluene as a result of two-photon absorption of pump radiation and time-dependent interaction of a laser pulse with a medium is considered. (paper)

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Multi-physics modeling of grain growth during solidification in electron beam additive manufacturing of Inconel 718

While experimental work has shown promising results regarding control of additive manufacturing metal grain structure, the effects of processing parameters on the grain structure is difficult to understand and predict from experiment alone. To this end, a modeling framework is developed which sequentially couples a macro-scale, semi-analytic thermal model, and a meso-scale, cellular automata-based microstructure model. This framework is applied to electron beam additive manufacturing of Inconel 718 using a complex spot scan pattern. The model shows that, with the same scan pattern, variations in the spot time and electron-beam current produce thermal histories with significant spatial and temporal differences, which then produce complex solidification conditions from the interplay between molten pools in the same layer and subsequent layers, resulting in vastly different grain structures. Additionally, it is noted that the framework can significantly reduce the computational expenses for coupled thermal-metallurgical problems, and has the potential to be used for component level problems.

36 MATERIALS SCIENCE↗

Cryo-FIB for TEM Investigation of Soft Matter and Beam Sensitive Energy Materials

Primarily driven by structural biology, the rapid advances in cryogenic electron microscopy techniques are now being adopted and applied by materials scientists. Samples that inherently have electron transparency can be rapidly frozen (vitrified) in amorphous ice and imaged directly on a cryogenic transmission electron microscopy (cryo-TEM), however this is not the case for many important materials systems, which can consist of layered structures, embedded architectures, or be contained within a device. Cryogenic focused ion beam (cryo-FIB) lift-out procedures have recently been developed to extract intact regions and interfaces of interest, that can then be thinned to electron transparency and transferred to the cryo-TEM for characterization. Several detailed studies have been reported demonstrating the cryo-FIB lift-out procedure, however due to its relative infancy in materials science improvements are still required to ensure the technique becomes more accessible and routinely successful. Here, we review recent results on the preparation of cryo-TEM lamellae using cryo-FIB and show that the technique is broadly applicable to a range of soft matter and beam sensitive energy materials. We then present a tutorial that can guide the materials scientist through the cryo-FIB lift-out process, highlighting recent methodological advances that address the most common failure points of the technique, such as needle attachment, lift-out and transfer, and final thinning.

36 MATERIALS SCIENCE↗

Ion beam analysis of fusion plasma-facing materials and components: facilities and research challenges

Following the IAEA Technical Meeting on 'Advanced Methodologies for the Analysis of Materials in Energy Applications Using Ion Beam Accelerators', our work reviews the current status of ion beam analysis (IBA) techniques and some aspects of ion-induced radiation damage in materials for the field of materials relevant to fusion. Available facilities, apparatus development, future research options and challenges are presented and discussed. The analysis of beryllium and radioactivity-containing samples from future experiments in JET or ITER represents not only an analytical but also a technical challenge. A comprehensive list of the facilities, their current status, and analytical capabilities comes alongside detailed descriptions of the labs. A discussion of future issues of sample handling and the current status of facilities at JET complete the technical section. To prepare the international IBA community for these challenges, the IAEA technical meeting finalizes the necessity for determining new nuclear reaction cross-sections and improving the inter-laboratory comparability by defining international standards and testing these via a round-robin test.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Broadening of microwave heating beams in the DIII-D tokamak by edge turbulence

Abstract We have demonstrated for the first time that turbulent plasma density fluctuations in the edge of the DIII-D tokamak are responsible for substantial broadening of an injected microwave beam by successful quantitative comparison between experimental observations and first principles 2D full-wave simulations. The broadening of the beam has important implications for control of tokamak discharges through localized electron cyclotron deposition needed for eliminating magnetohydrodynamic instabilities. This new predictive capability is mandatory to design & operate present & future tokamaks in such a way that microwave heating schemes achieve their intended objectives.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Beam physics research with the IOTA electron lens

The electron lens in the Fermilab Integrable Optics Test Accelerator (IOTA) will enable new research in nonlinear integrable optics, space-charge compensation, electron cooling, and the stability of intense beams. This research addresses scientific questions on high-brightness beams and operational challenges of high-power accelerators for nuclear and particle physics. We review the roles that electron lenses play in this field and the physical principles behind their applications. The design criteria and specifications for the IOTA storage ring and electron lens are then discussed. We conclude with a description of the components of the apparatus.

43 PARTICLE ACCELERATORS↗

Beam delivery and beamstrahlung considerations for ultra-high energy linear colliders

As part of the Snowmass'21 community planning excercise, the Advanced Accelerator Concepts (AAC) community proposed future linear colliders with center-of-mass energies up to 15 TeV and luminosities up to 50 × 1034 cm -2 s -1 in a compact footprint. In addition to being compact, these machines must also be energy efficient. We identify two challenges that must be addressed in the design of these machines. First, the Beam Delivery System (BDS) must not add significant length to the accelerator complex. Second, beam parameters must be chosen to mitigate beamstrahlung effects and maximize the luminosity-per-power of the machine. In this paper, we review advances in plasma lens technology that will help to reduce the length of the BDS system, and we detail new Particle-in-Cell simulation studies that will provide insight into beamstrahlung mitigation techniques. We apply our analysis to both $e$ + $e$ - and $γγ$ colliders. The challenges and solutions described in this paper are considered independently. In conclusion, a unified, self-consistent concept for a BDS system for a 15 TeV linear collider will be the subject of future work.

47 OTHER INSTRUMENTATION↗

Characterizing novel Indium Phosphide pad detectors with focused X-ray beams and laboratory tests

Future tracking systems in High Energy Physics experiments will require large instrumented areas with low radiation length. Crystalline silicon sensors have been used in tracking systems for decades, but are difficult to manufacture and costly to produce for large areas. We are exploring alternative sensor materials that are amenable to fast fabrication techniques used for thin film devices. Indium Phosphide pad sensors were fabricated at Argonne National Lab using commercially available InP:Fe 2-inch mono-crystal substrates. Current-voltage and capacitance-voltage characterizations were performed to study the basic operating characteristics of a group of sensors. Micro-focused X-ray beams at Canadian Light Source and Diamond Light Source were used to study the response to ionizing radiation, and characterize the uniformity of the response for several devices. Electrical test results showed a high degree of performance uniformity between the 48 tested devices. X-ray test beam results showed good performance uniformity within tested devices after accounting for spatially-local defects and edge fields. As a result, this motivates further studies into thin film devices for future tracking detectors.

47 OTHER INSTRUMENTATION↗

Exploration of Neutron-Rich Isotopes around N = 50 via the In-Flight Fission of a 345 MeV/Nucleon 238 U Beam

A search for new neutron-rich isotopes beyond $Z=28$ and $N=50$ was performed using a 345 MeV/nucleon $^{238}$U beam at RI Beam Factory in RIKEN Nishina Center. The BigRIPS separator and state-of-the-art radiation detectors were used to efficiently separate and identify the produced nuclei. For the first time, we have observed and determined the production cross sections for eight neutron-rich isotopes $^{72}$Cr, $^{74,75}$Mn, $^{77}$Fe, $^{79,80}$Co, $^{85}$Cu, and $^{90}$Ga. This study broadens our understanding of nuclear existence and paves the way for investigating the properties of neutron-rich medium-mass nuclei.

Shimizu, Yohei [RIKEN, Saitama (Japan); et al.]↗