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At least 1,009 records · Page 56

Atomic Layer Deposition of Pt on the Surface Deactivated by Fluorocarbon Implantation: Investigation of the Growth Mechanism

Selective atomic layer deposition (ALD) using surface-controlled reactivity is attracting a great deal of attention as a simple bottom-up patterning process that can provide both continued dimensional scaling and accurate pattern placement for next-generation nanoelectronics. Previously, we reported topographically selective deposition through Pt ALD using a MeCpPtMe 3 precursor and an O 2 counter reactant on fluorocarbon (CF x )-modified surfaces; however, gradual loss of selectivity in the CF x -modified regions was observed during the Pt ALD process. This work develops a fundamental understanding of the microscopic growth mechanisms of Pt ALD on the CF x -modified surface using a combination of experimental analyses and theoretical methods. The Pt growth characteristics on the CF x surface are investigated within a temperature window from 225 to 350 °C, and the results show a sharp sensitivity to growth temperature, with significant Pt growth occurring at temperatures above 300 °C. Through density functional theory (DFT) calculations, the reaction energies for adsorption of oxygen and the MeCpPtMe 3 precursor as well as formation of reaction products of CF x degradation are determined. Based on experimental results in conjunction with the DFT calculations, we show that while lower temperature Pt ALD (<300 °C) on CF x -modified surfaces can be significantly retarded because of a lack of MeCpPtMe 3 chemisorption, the surface reaction pathways for Pt ALD on CF x -modified surfaces at temperatures above 300 °C can proceed through oxygen adsorption and CF 4 desorption followed by Pt nucleation in CF x -degraded regions.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Revealing nano-scale lattice distortions in implanted material with 3D Bragg ptychography

Small ion-irradiation-induced defects can dramatically alter material properties and speed up degradation. Unfortunately, most of the defects irradiation creates are below the visibility limit of state-of-the-art microscopy. As such, our understanding of their impact is largely based on simulations with major unknowns. Here we present an x-ray crystalline microscopy approach, able to image with high sensitivity, nano-scale 3D resolution and extended field of view, the lattice strains and tilts in crystalline materials. Using this enhanced Bragg ptychography tool, we study the damage helium-ion-irradiation produces in tungsten, revealing a series of crystalline details in the 3D sample. Our results lead to the conclusions that few-atom-large ‘invisible’ defects are likely isotropic in orientation and homogeneously distributed. A partially defect-denuded region is observed close to a grain boundary. These findings open up exciting perspectives for the modelling of irradiation damage and the detailed analysis of crystalline properties in complex materials.

42 ENGINEERING↗

AI-enabled, implantable, multichannel wireless telemetry for photodynamic therapy

Photodynamic therapy (PDT) offers several advantages for treating cancers, but its efficacy is highly dependent on light delivery to activate a photosensitizer. Advances in wireless technologies enable remote delivery of light to tumors, but suffer from key limitations, including low levels of tissue penetration and photosensitizer activation. Here, we introduce DeepLabCut (DLC)-informed low-power wireless telemetry with an integrated thermal/light simulation platform that overcomes the above constraints. The simulator produces an optimized combination of wavelengths and light sources, and DLC-assisted wireless telemetry uses the parameters from the simulator to enable adequate illumination of tumors through high-throughput (<20 mice) and multi-wavelength operation. Together, they establish a range of guidelines for effective PDT regimen design. In vivo Hypericin and Foscan mediated PDT, using cancer xenograft models, demonstrates substantial suppression of tumor growth, warranting further investigation in research and/or clinical settings.

60 APPLIED LIFE SCIENCES↗

Scalable method for micro-CT analysis enables large scale quantitative characterization of brain lesions and implants

Anatomic evaluation is an important aspect of many studies in neuroscience; however, it often lacks information about the three-dimensional structure of the brain. Micro-CT imaging provides an excellent, nondestructive, method for the evaluation of brain structure, but current applications to neurophysiological or lesion studies require removal of the skull as well as hazardous chemicals, dehydration, or embedding, limiting their scalability and utility. Here we present a protocol using eosin in combination with bone decalcification to enhance contrast in the tissue and then employ monochromatic and propagation phase-contrast micro-CT imaging to enable the imaging of brain structure with the preservation of the surrounding skull. Instead of relying on descriptive, time-consuming, or subjective methods, we develop simple quantitative analyses to map the locations of recording electrodes and to characterize the presence and extent of hippocampal brain lesions.

3-D reconstruction↗

Three-dimensional piezoelectric polymer microsystems for vibrational energy harvesting, robotic interfaces and biomedical implants

Piezoelectric microsystems are of use in areas such as mechanical sensing, energy conversion and robotics. The systems typically have a planar structure, but transforming them into complex three-dimensional (3D) frameworks could enhance and extend their various modes of operation. Here, we report a controlled, nonlinear buckling process to convert lithographically defined two-dimensional patterns of electrodes and thin films of piezoelectric polymers into sophisticated 3D piezoelectric microsystems. To illustrate the engineering versatility of the approach, we create more than twenty different 3D geometries. With these structures, we then demonstrate applications in energy harvesting with tailored mechanical properties and root-mean-square voltages ranging from 2 mV to 790 mV, in multifunctional sensors for robotic prosthetic interfaces with improved responsivity (for example, anisotropic responses and sensitivity of 60 mV N -1 for normal force), and in bio-integrated devices with in vivo operational capabilities. We note the 3D geometries, especially those with ultralow stiffnesses or asymmetric layouts, yield unique mechanical attributes and levels of functionality that would be difficult or impossible to achieve with conventional two-dimensional designs.

42 ENGINEERING↗

3D lattice distortions and defect structures in ion-implanted nano-crystals

The ability of Focused Ion Beam (FIB) techniques to cut solid matter at the nano-scale revolutionized the study of material structure across the life-, earth- and material sciences. But a detailed understanding of the damage caused by the ion beam and its effect on material properties remains elusive. We examine this damage in 3D using coherent X-ray diffraction to measure the full lattice strain tensor in FIB-milled gold nano-crystals. We also found that even very low ion doses, previously thought to be negligible, cause substantial lattice distortions. At higher doses, extended self-organized defect structures appear. Combined with detailed numerical calculations, these observations allow fundamental insight into the nature of the damage created and the structural instabilities that lead to a surprisingly inhomogeneous morphology.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Single-atom implanted two-dimensional MOFs as efficient electrocatalysts for the oxygen evolution reaction

The exploration of novel electrochemical energy conversion and storage devices has been extensively studied in recent decades for their specific advantages. Therefore, the design of highly efficient, stable, and noble-metal-free electrocatalysts for oxygen-related reactions (OER) is critical but challenging and is still worth improving. Herein, a facile and controllable synthesis strategy for bimetallic electrocatalysts for the OER from a two-dimensional iron-based metal–organic framework (HUST-8, HUST = Huazhong University of Science and Technology) precursor has been reported. The unoccupied porphyrin center has been disposed into the layer structure of HUST-8, which is very facile for the introduction of a second type of metal center via post-modification treatment. Guided by the synthesis strategy, Fe/Ni, Fe/Co, Fe/Zn, Fe/Mn and Fe/Fe species have been fabricated, and their electrocatalytic performance for the OER has been further characterized, among which the Fe/Ni type exhibits the best efficiency and conversion. For Fe/Ni species of HUST-8 (labeled as Ni@HUST-8), in 1 M KOH, the initial potential for OER activity performance is 170 mV (vs. RHE). At 10 mA cm -2 , the corresponding overpotential is 240 mV and the Tafel slope is simulated as 60.8 mV dec -1 . All of these experimental results of Ni@HUST-8 illustrate its better performance than commercial IrO 2 . Compared to the MOF parent and other bimetallic species, the higher electrocatalytic performance of Ni@HUST-8 should be ascribed to the special synergistic effect of Fe and Ni centers, which tends to greatly improve the reaction kinetics and charge transfer efficiency, while increasing the activity of the OER and achieving the best catalytic performances. The systematic investigation clearly manifests the important role of the synergistic effect of bimetallic centers in the OER and provides other insight into fabricating tailored electrocatalysts derived from MOF-based templates.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Silver doped nanobioactive glass particles for bone implant applications

Silica based silver doped nanobioactive glass compositions (58SiO{sub 2}-33CaO-9P{sub 2}O{sub 5} and 58SiO{sub 2}-23CaO-9P{sub 2}O{sub 5}-10Ag{sub 2}O(mol%)) were synthesized by a simple sol-gel route. The prepared samples were comprehensively characterised by X-ray diffraction, Fourier transform infrared spectroscopy, transmission electron microscopy and scanning electron microscopic studies. The results reveal that the prepared samples have amorphous phase with spherical morphology and having a particle size less than 100 nm. The specific surface areas were 90 and 61 m{sup 2}g{sup -1} respectively. The in vitro bioactivity of glass samples were confirmed by the formation of hydroxyapatite layer on glass surfaces. The Ag{sub 2}O-doped nanobioactive glasse samples shows reveal significant antibacterial activity compare with base glasses.

36 MATERIALS SCIENCE↗

Helium plasma implantation on metals: Nanostructure formation and visible-light photocatalytic response

It has been found recently that low-energy helium (He) plasma irradiation to tungsten (W) leads to the growth of W nanostructures on the surface. The process to grow the nanostructure is identified as a self-growth process of He bubbles and has a potential to open up a new plasma processing method. Here, we show that the metallic nanostructure formation process by the exposure to He plasma can occur in various metals such as, titanium, nickel, iron, and so on. When the irradiation conditions alter, the metallic cone arrays including nanobubbles inside are formed on the surface. Different from W cases, other processes than growth of fiberform structure, i.e., physical sputtering and the growth of large He bubbles, can be dominant on other metals during irradiation; various surface morphology changes can occur. The nanostructured W, part of which was oxidized, has revealed a significant photocatalytic activity under visible light (wavelength >700 nm) in decolorization of methylene blue without any co-catalyst.

36 MATERIALS SCIENCE↗

Near surface silicide formation after off-normal Fe-implantation of Si(001) surfaces

We report on formation of non-crystalline Fe-silicides of various stoichiometries below the amorphized surface of crystalline Si(001) after irradiation with 5 keV Fe{sup +} ions under off-normal incidence. We examined samples prepared with ion fluences of 0.1 × 10{sup 17} and 5 × 10{sup 17} ions cm{sup −2} exhibiting a flat and patterned surface morphology, respectively. Whereas the iron silicides are found across the whole surface of the flat sample, they are concentrated at the top of ridges at the rippled surface. A depth resolved analysis of the chemical states of Si and Fe atoms in the near surface region was performed by combining X-ray photoelectron spectroscopy and X-ray absorption spectroscopy (XAS) using synchrotron radiation. The chemical shift and the line shape of the Si 2p core levels and valence bands were measured and associated with the formation of silicide bonds of different stoichiometric composition changing from an Fe-rich silicides (Fe{sub 3}Si) close to the surface into a Si-rich silicide (FeSi{sub 2}) towards the inner interface to the Si(001) substrate. This finding is supported by XAS analysis at the Fe K-edge which shows changes of the chemical environment and the near order atomic coordination of the Fe atoms in the region close to surface. Because a similar Fe depth profile has been found for samples co-sputtered with Fe during Kr{sup +} ion irradiation, our results suggest the importance of chemically bonded Fe in the surface region for the process of ripple formation.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Porosity as a function of stoichiometry and implantation temperature in Ge/Si{sub 1−x}Ge{sub x} alloys

The development of porosity in single-crystal germanium and silicon-germanium alloys (c-Si{sub 1−x} Ge{sub x}) of (100) orientation was studied under bombardment with 140 keV Ge{sup −} ions over a wide range of temperatures (−180 to 400 °C) and ion fluences up to 1 × 10{sup 18} ions/cm{sup 2}. The surface swelling and morphology were investigated using multi-characterization techniques including optical profilometry, transmission electron microscopy, and scanning electron microscopy. The initiation of porosity and the evolution of the near-surface microstructure strongly depend on the ion fluence, the irradiation temperature, and the stoichiometry of the substrate. Significant results and new findings include: (i) the fact that, over the entire temperature and stoichiometry range, porosity is only developed once the substrate is rendered amorphous; (ii) with increasing Si content in the alloy, the onset of porosity is pushed to higher fluences; (iii) porosity is observed for Si contents in the alloy up to 23% but not higher under the irradiation conditions used; and (iv) in all cases the initiation of porosity was observed to occur at the surface of the amorphous alloy above a threshold fluence. This last result strongly suggests that the mechanism for initiation of porosity is via preferential vacancy segregation and clustering at the surface of the amorphous alloy. Particularly at elevated temperatures, preferential sputtering of the Si-Ge atomic species in the alloy also plays an important role in developing the surface topography and porosity in alloys. Such effects are discussed along with the implications of our results for mechanisms of porosity in Ge and its alloys.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗