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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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All sourcesNASA NTRSDOE OSTI
NASA NTRS2002

Status of Brayton Cycle Power Conversion Development at NASA GRC

The NASA Glenn Research Center (GRC) is pursuing the development of Brayton cycle power conversion for various NASA initiatives. Brayton cycle power systems offer numerous advantages for space power generation including high efficiency, long life, high maturity, and broad scalability. Candidate mission applications include surface rovers and bases, advanced propulsion vehicles, and earth orbiting satellites. A key advantage is the ability for Brayton converters to span the wide range of power demands of future missions from several kilowatts to multi-megawatts using either solar, isotope, or reactor heat sources. Brayton technology has been under development by NASA since the early 1960's resulting in engine prototypes in the 2 to 15 kW-class that have demonstrated conversion efficiency of almost 30% and cumulative operation in excess of 40,000 hours. Present efforts at GRC are focusing on a 2 kW testbed as a proving ground for future component advances and operational strategies, and a 25 kW engine design as a modular building block for 100 kW-class electric propulsion and Mars surface power applications.

Mason, Lee S.↗
DOE OSTI2022

Development of a Gibbs Energy Minimiser for the MOOSE-based Corrosion Modelling App Yellowjacket and Validation of MSTDB

Nuclear materials are highly complex multiscale, multiphysics systems,and an effective prediction of nuclear reactor performance and safety requires simulation capabilities that tightly couple different physical phenomena. The Idaho National Laboratory’s Multiphysics Object Oriented Simulation Environment (MOOSE) provides the computational foundation for performing such simulations. With the move towards advanced reactors, such as the Molten Salt Reactor (MSR), that employ high temperature fluids compared to conventional reactors, corrosion has become a problem of great interest. A new application called Yellowjacket is currently under development to directly couple thermodynamic equilibrium and kinetics with phase field models in order to model corrosion in MSRs. As part of Yellowjacket, a Gibbs energy minimiser is being developed to perform thermochemical equilibrium calculations for a range of different materials, which is currently in its infancy. This report describes the further progress towards the development of Yellowjacket Gibbs energy minimiser. Ontario Tech University is developing a new Gibbs energy minimiser for Yellowjacket which is the primary contribution of this work. The aim to develop a thermochemistry solver for the MOOSE framework following the same development philosophy and using the same tools and libraries. A special focus is on performance, documentation and SQA. Furthermore through a scope extension partway through the fiscal year a thorough assessment of the MSTDB-TC v1.3 was performed at Ontario Tech University in the context of continuous improvement and quality assurance. The objective of the work was to have an arm’s length review of the database to give confidence that the database is performing as it was intended while assessing its current state to give recommendations to future developments. This assessment involved two parts: A) a quantitative assessment, and B) a qualitative assessment. Part A involved developing an automated test-suite that would compute values from the database using Thermochimica with comparisons to experimental measurements for validation purposes, which gives confidence to the database’s stakeholders that its functioning properly. Part B involved reviewing all binary systems in the database and making a qualitative assessment with two performance indicators: comprehensiveness and overall confidence. It is important to note that the models in the database are empirical, which is to say that the quality of any model is highly dependent on the experimental data used to inform its development.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2025

Enhancing Post-Irradiation Examination (PIE) Efficiency with High-Throughput Experiments

Nuclear materials testing is essential for understanding changes in reactor environments, but traditional methods are costly and time-consuming. High-Throughput Experimentation (HTE) enables rapid screening and optimization of material properties by significantly increasing the number of specimens in the experiment. In this work, HTE methods were employed to irradiate novel materials at the Advanced Test Reactor (ATR) at Idaho National Laboratory. A total of 367 sub-sized tensile specimens were irradiated using the standard capsule design. To facilitate HTE, automated systems such as the Automated Mechanical Testing System were implemented for mechanical testing within hot cell environments, thereby reducing the need for manual interaction with hot cell manipulators and significantly lowering both the cost and duration of experiments. Digital image correlation (DIC) was used to measure displacement during mechanical testing, providing precise, non-contact measurement capabilities. The methodologies developed in this research will support the advancement of HTE techniques for future nuclear materials testing experiments at ATR. This approach allows for more efficient and cost-effective evaluation of new materials, ultimately leading to improved reactor performance, enhanced safety, and extended longevity within the nuclear industry.

22 - GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2023

SCALE depletion capabilities for molten salt reactors and other liquid-fueled systems

Nuclear reactor systems that use fuel dissolved in a liquid have the potential for enhanced safety characteristics, improved fuel-cycle outcomes, and more efficient isotope-production configurations. In these reactor systems, the fueled liquid may simultaneously undergo irradiation, physical and chemical removal processes, and fueling. The modeling and simulation of this transmutation and decay with material additions and removals is an ongoing research area. An accurate simulation tool is critical to the reactor and fuel-cycle design, reactor deployment, and source-term characterization for these advanced reactor systems. The work described herein involved implementing, testing, and applying the capability to perform reactor physics simulations within the Oak Ridge National Laboratory-developed SCALE suite for nuclear systems analyses and design, leveraging much of its pedigree in quality-assurance and reactor-analysis capabilities. The functionalities to simulate irradiation with material feeds and removals had been added in ORIGEN, and the TRITON reactor physics sequence was extended to calculate the total removed material and track external nonirradiated mixtures to estimate separate processing or waste streams. Results from these capabilities align with analytical expectations obtained from ORIGEN for simplified test cases and with expectations for a molten salt reactor application. This implementation, available with the SCALE 6.3 release, provides for a more efficient and accurate material accountability methodology, allowing for the characterization, design, and analysis of the complete isotopic material inventory of advanced liquid-fueled systems for a variety of applications.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2020

Fast-Spectrum Critical Assemblies with a Pb-HEU Core Surrounded by a Copper Reflector

The Department of Energy invests tens of millions of dollars each year to develop the next generation of nuclear engineering modeling & simulation (M&S) tools. These M&S tools are used to analyze advanced reactor designs and the safety of current nuclear operations. As computers become more powerful, we are able to enhance resolution in our calculations. This improved resolution is taking us to a point where the limitations of simulation capability are in the quality of data, including our ability to quantify the uncertainty and sensitivity of the data. In order to accurately model systems of interest, the industry must improve key nuclear data measurements and our confidence of how well we understand the data. Thus, M&S tools need evaluated and quality-assured experimental data for validation purposes. The International Criticality Safety Benchmark Evaluation Project (ICSBEP) compiles benchmark experiment data in a handbook that can be used by criticality safety engineers to validate computer codes and cross-section libraries at nuclear facilities. Both critical and subcritical experiments are included in the handbook. Figure 1 organizes all the benchmark evaluations that have been performed by the isotope of interest, in this case Pb, and the neutron energy within the system. Compared to other isotopes of interest for nuclear applications, there are few benchmark evaluations for Pb systems. This has caused the latest nuclear cross-section libraries to over/underestimate changes in the neutron population compared to experimental results. Therefore, this evaluation fills an important knowledge gap in benchmark evaluations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2021

U.S. Industry Opportunities for Advanced Nuclear Technology Development Phase II (Final Report)

This limited scope study aims at preserving the results of experimental programs for the safety of light water cooled and advanced reactors by locating and documenting, to the extent possible, where the experimental test information for these programs has been archived. The Light Water Reactor Data Preservation Activity Team initially identified seven (7) experimental programs, exceeding the required five (5) in the scope of work, which were determined to be “at risk” of potentially losing valuable data. The seven (7) experimental programs/subject areas identified are (descriptions of each experiment/experience are provided in Section 3.0): 1. FERMI-1 Reactor Accident 2. Fission Product Behavior During the In-Pile Severe Fuel Damage Test SFD I-4 3. Containment Iodine Computer Code Exercise Based on Radioiodine Test Facility (RTF) Experiment 4. Wide Range Piping Integrity Demonstration (WIND) Project 5. Iodine Chemical Research in Canada 6. High Temperature Fission Product Chemistry and Transport in Steam 7. Anything related to radioactive Methyl Iodide.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2024

Advanced Closures for Nonlinear Fluid Simulations of Plasmas (Final Report)

Advanced Closures for Nonlinear Fluid Simulations of Plasmas E. Held, Utah State University (Principal Investigator) J.-Y. Ji, Utah State University (Co-Investigator) Utah State University (USU) continued to develop and apply closures for hybrid fluid/kinetic simulations of magnetized fusion plasmas. The closures developed by USU's fusion theory and computation group use the drift ordering and are referred to as "continuum" and "general moment" approaches. They differ in their representation for the distribution functions which probabilistically describe the density of particles in 5 dimensional phase space. The two chosen velocity variables, needed in studies of kinetic physics for magnetized plasmas, are the speed and the component of a particle's velocity along the magnetic field. In magnetized plasmas, the charged particle trajectories are tied closely to the magnetic field lines. Both approaches account for binary interactions between particles using the Coulomb collision operator. Theoretical and computational development along both lines provided avenues for verification between the two approaches. This funding allowed USU to further develop physically accurate and numerically efficient models that advance our understanding of kinetic physics in experiments like the International Thermonuclear Experimental Reactor (ITER). The ITER device will likely prove the physical practicality of thermonuclear fusion by producing 500 megawatts of clean, abundant fusion power. This work helped to realize this goal by advancing our simulation capability using hybrid fluid/kinetic models.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

DISH-STARS™ Commercialization (Abstract)

The goal of this project is to aggressively support the near-term commercialization of a new technology platform – based on the integration of solar concentrators and micro- and meso-channel process technology (MMPT) – that was evaluated and identified as a strong candidate for near-term commercialization at EERE’s inaugural Lab-Corps program during early FY2016. Known as STARS, for Solar Thermochemical Advanced Reactor System, or Dish-STARS™ when paired with parabolic dish concentrators, STARS is a promising energy-related technology developed at the Pacific Northwest National Laboratory (PNNL) that efficiently converts solar energy into chemical energy. Combined with economies through hardware mass production, the efficiency of Dish-STARS™ provides a near-term opportunity for the production of renewable electricity, fuels and chemicals. This proposed CRADA project supports the commercialization of Dish-STARS™ in these important ways: The project will support the cooperative development of Dish-STARS™ by the DOE national laboratory and private partners, including the startup company, STARS Corporation, that is being established by the PNNL Lab-Corps team that evaluated STARS on behalf of EERE. The project will provide important transition funding at the time that the previous DOE SunShot project, which has supported Dish-STARS™ development from Technology Readiness Level 3 (TRL 3) to TRL 6, is scheduled to end.

14 SOLAR ENERGY↗
DOE OSTI2026

Study on Application of Distributed Network of Sensors with List Mode for NMAC Literature Review

Nuclear material accounting and control (NMAC) for nuclear security detects, deters, and resolves questions related to unauthorized removal (i.e. theft) or misuse of nuclear material. NMAC also serves as a key insider threat mitigation measure and aids in recovery of nuclear material that is missing. Effective nuclear security depends on NMAC for timely and accurate information about nuclear material types, quantities, and locations. Bulk nuclear material processing facilities, however, present unique challenges for effective NMAC due to the presence of large quantities of material in-process and the accumulation of residual material holdup within process equipment. These holdup accumulations can obscure accurate physical inventory taking and complicate efforts to resolve NMAC irregularities at the facility level. Bulk material monitoring systems often rely on material balance calculations and indirect measurement techniques, which may mask protracted theft of smaller amounts of nuclear material. These monitoring limitations have generated increased interest in continuous monitoring technologies, including distributed non-destructive assay (NDA) sensor networks capable of providing real-time or near-real-time measurement of material movement and accumulation within bulk processing environments. Recent advancements in distributed networks of NDA radiation detectors and sensing technologies provide an opportunity to address these limitations. Although such distributed sensor networks have been implemented in select facilities for IAEA Safeguards applications, their potential for supporting NMAC functions specifically tailored to nuclear security objectives remains largely unexplored. Furthermore, emerging list-mode data acquisition technologies have reached high technology readiness levels, enabling time-correlated detection of nuclear events across multiple temporal scales. These capabilities provide enhanced opportunities for accurate holdup measurement, continuous process monitoring, and improved detection of material theft or misuse over time. The increasing global expansion of civil nuclear power and development of related bulk material processing facilities, including those supporting high-assay low-enriched uranium (HALEU) and other advanced reactor fuel fabrication, further increases the need for advanced measurement and monitoring strategies for NMAC.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2024

SAS4A/SASSYS-1 Modeling Improvements for the Transition to Natural Circulation

SAS4A/SASSYS-1 (SAS) is a simulation tool used to perform deterministic analyses of anticipated events as well as design basis and beyond design basis accidents for advanced liquid-metal-cooled nuclear reactors. With its origin as SAS1A in the late 1960s, the SAS series of codes has been under continuous use and development for over fifty years and represents a critical investment in safety analysis capabilities for the U.S. Department of Energy. In recent years, SAS has undergone a number of improvements to enable improved safety analyses that meet end users’ modernized needs while complying with the current regulatory environment. Improvements made in versions 5.6 and 5.7 released within the last year include the development of anisotropic Reynolds number dependent loss coefficients throughout the core and heat transport systems, the ability to distinguish the transition friction factor from the fully developed laminar and turbulent friction factors, and timedependent direct coolant and wall heating for pipe-like elements in the heat transport systems. While it was possible to capture loss coefficients, friction factors, and heat transfer from an element to a heat sink within SAS in previous versions of the code, users were required to end the simulation and restart it to adjust the input to account for any significant changes to the values during the transient. With these improvements, users can better capture flow reversal, pump heating, and the transition from forced to natural circulation without being limited to constant orifice coefficients, constant heat sinks, or the need to restart the simulation and modify input. In order to demonstrate the application of these improvements, a loss of flow transient is simulated for the Advanced Burner Test Reactor (ABTR).

SAS4A/SASSYS-1↗
DOE OSTI2022

Validation of NEAMS Tools Using MSRE Data

This report documents the benchmarks developed and performed for the tools and codes developed under the Nuclear Energy Advanced Modeling and Simulation (NEAMS) program utilizing the MSRE experiment data. There are three focus areas explored in this work: fuel evolution, CFD, and system transient analyses. Fuel depletion is important for MSR reactor physics and fuel cycle analysis. Fuel depletion capability is currently being developed in the Griffin reactor physics code. To support this, a benchmark problem is developed using the MSRE data and an existing depletion code with flowing fuel analysis functionality (ADDER) to validate this new capability in Griffin. The ADDER calculation is compared with the TRITON-MSR results as well as the MSRE experimental data. This benchmark can be directly used to verify and validate the Griffin fuel depletion capability in future years. For CFD simulation, the MSRE CAD model is obtained from the Copenhagen Atomics and a mesh is generated for the MSRE inlet plenum. The Nek5000 code will be employed to find the flow distribution in the MSRE inlet plenum based on the mesh generated. For system analysis, a simple benchmark problem for three types of MSR system transients is developed. The SAM and SPECTRA codes are used to solve the simple problem, and the results from the two codes agree well. The SAM code is also employed to obtain the frequency response of the MSRE system at the 5 and 8 MWt power levels. The results agree well with the experiment measurements. These verification and validation efforts gives SAM users more confidence in MSR system transient simulations using SAM. Lastly, the SAM-Griffin Multiphysics coupling work is initiated. A simple one-way coupling of evaluating the precursor drift effect on the MSRE k-eff is demonstrated. This preliminary coupling work serves as the basis for future more complex Multiphysics simulation and modelling.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2024

HTGR Validation: NEUP Survey and Database - Data Reporting Standard for HTGR Thermal-Fluid Experiments

Since 2009, the U.S. Department of Energy (DOE) Office of Nuclear Energy's Nuclear Energy University Program (NEUP) has been at the forefront of nuclear research, specifically concentrating on advancing high-temperature gas-cooled reactor (HTGR) technologies. By Fiscal Year 2024, NEUP has authorized 36 projects dedicated to HTGR research, each contributing significantly to the enhancement of our understanding of this technology. The outcomes of these diverse projects have been disseminated through final NEUP reports, peer-reviewed journal articles, and presentations at academic conferences, forming a comprehensive tapestry of knowledge. Despite the substantial value of these findings, their dissemination has been fragmented, posing challenges for accessibility to researchers and policymakers and leading to underutilization of DOE investments. Recognizing this critical gap and its potential consequences for the future of nuclear research, the Advanced Reactor Technologies (ART) Gas-Cooled Reactor (GCR) program conducted an extensive survey of completed and ongoing HTGR NEUP projects. This survey enabled the compilation of crucial data, resulting in the development of a specialized public-access database tailored for computational fluid dynamics and system code validation, specifically designed for HTGR applications. However, the data collection process revealed a significant challenge in central data organization due to individual researchers from different institutes employing varying logics and preferences for recording and documenting experimental data. Consequently, an urgent need has been identified to establish a standardized reporting format for HTGR experimental projects. Addressing this issue is essential for enhancing collaboration, maximizing the impact of DOE investments, and ensuring the seamless advancement of HTGR technologies in nuclear research.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2023

HTGR Validation: NEUP Survey and Database Database Development for HTGR Thermal-Fluid Experiments

This set of slides is aimed to improve access to the High-Temperature Gas-cooled Reactor (HTGR) validation data and optimize the return on the significant investment made by DOE. Supported by the Advanced Reactor Technologies (ART) Gas-Cooled Reactor (GCR) program. Slides include information from FY2009 to FY2023, there are in total 35 DOE NEUP projects focusing on the thermal-fluid experiments related with High-Temperature Gas-cooled Reactor (HTGR), producing a large amount of high-quality validation data. NEUP Survey and Database Development for HTGR Thermal-Fluid Experiments is distributed at universities and has not been disseminated to the HTGR community. More collaborating with university PIs and refining the HTGR phenomena summary chart continuously is expected in the future.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2023

Attack Surface Analysis of the Digital Twins interface with Advanced Sensor and Instrumentation Interfaces: Cyber Threat Assessment and Attack Demonstration for Digital Twins in Advanced Reactor Architectures

A digital twin is a virtual representation of a physical system or object using real-time data that can predict and analyze how the system or object performs. This relatively new technology can be applied to the field of nuclear power generation, to aid in the design and development of new nuclear power plants and reduce operation costs using predictive maintenance and other data analytical methods. While there are already companies utilizing simulation software to train operators and technicians in the nuclear industry, some are now transitioning to utilizing their existing technology, software, and methods to develop digital twin solutions for the next generation of nuclear power plants, offering their services to utilities and government organizations around the world.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗
DOE OSTI2020

NEAMS Problem Draft (FY2020 Assessment)

This report documents the physical configuration required to model the assessment problem posed by the Reactor Physics focus area within the Department of Energy (DOE) Nuclear Energy Advanced Modeling and Simulation (NEAMS) program. This model is based on the Empire model developed by staff at Los Alamos National Laboratory under the MEITNER (Modeling-Enhanced Innovations Trailblazing Nuclear Energy Reinvigoration) program. The reference report does not provide dimensions for development of computational models; those data are provided elsewhere in published. Thus, this report has been prepared to provide a single reference that can be used to create consistent models by assessment participants.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗
DOE OSTI2024

A Workflow to Optimize Fast Neutron Irradiation in A Thermal Neutron Spectrum Test Reactor Leveraging Open-Source Tools

The Advanced Test Reactor (ATR) located at Idaho National Laboratory (INL) is one of the key nuclear engineering research and testing facilities within the US Department of Energy (DOE). The ATR is one of few high-power research reactors in the world with different application including accelerated testing of nuclear fuel, materials irradiation in a very high neutron flux environment, and medical radioisotope production [1]. Also, the ATR offers opportunities for testing fast spectrum fission and fusion reactor materials. The key challenges in this area are in further detailing and optimizing a fast spectrum environment within a thermal test reactor. This challenge involves researching, developing, and testing novel concepts for the multiplying of neutron populations into ever higher energy spectra in high flux test reactors like ATR. The main objective of this work is to investigate candidate materials for establishing a fast neutron experiment irradiation in thermal neutron spectrum test reactors which can be accomplished by filtering thermal and epithermal neutrons and boosting fast neutrons at designated irradiation positions. However, adding these filters will render the neutron spectrum and the criticality of the system. The selection of the thickness and material layers should be accomplished by developing an optimization design algorithm that is applicable for ATR to enhance the fast neutron spectrum irradiation utilizing high-fidelity Monte Carlo methods along with advanced machine learning capabilities. This paper presents workflow for design optimization to enhance fast neutron irradiation in the ATR. The workflow leverages open-source tools to develop an algorithm that is viable to ATR and can be leveraged in other reactors. The following sections discuss the development of the experiment design optimization workflow and its application to ATR irradiation positions.

42 - ENGINEERING↗
NASA NTRS2011

Design and Test of Advanced Thermal Simulators for an Alkali Metal-Cooled Reactor Simulator

The Early Flight Fission Test Facility (EFF-TF) at NASA Marshall Space Flight Center (MSFC) has as one of its primary missions the development and testing of fission reactor simulators for space applications. A key component in these simulated reactors is the thermal simulator, designed to closely mimic the form and function of a nuclear fuel pin using electric heating. Continuing effort has been made to design simple, robust, inexpensive thermal simulators that closely match the steady-state and transient performance of a nuclear fuel pin. A series of these simulators have been designed, developed, fabricated and tested individually and in a number of simulated reactor systems at the EFF-TF. The purpose of the thermal simulators developed under the Fission Surface Power (FSP) task is to ensure that non-nuclear testing can be performed at sufficiently high fidelity to allow a cost-effective qualification and acceptance strategy to be used. Prototype thermal simulator design is founded on the baseline Fission Surface Power reactor design. Recent efforts have been focused on the design, fabrication and test of a prototype thermal simulator appropriate for use in the Technology Demonstration Unit (TDU). While designing the thermal simulators described in this paper, effort were made to improve the axial power profile matching of the thermal simulators. Simultaneously, a search was conducted for graphite materials with higher resistivities than had been employed in the past. The combination of these two efforts resulted in the creation of thermal simulators with power capacities of 2300-3300 W per unit. Six of these elements were installed in a simulated core and tested in the alkali metal-cooled Fission Surface Power Primary Test Circuit (FSP-PTC) at a variety of liquid metal flow rates and temperatures. This paper documents the design of the thermal simulators, test program, and test results.

Garber, Anne E.↗
NASA NTRS1998

High-Density Plasma Reactors: Simulations for Design

The development of improved and more efficient plasma reactors is a costly process for the semiconductor industry. Until five years ago, the Industry made most of its advancements through a trial and error approach. More recently, the role of computational modeling in the design process has increased. Both conventional computational fluid dynamics (CFD) techniques like Navier-Stokes solvers as well as particle simulation methods are used to model plasma reactor flowfields. However, since high-density plasma reactors generally operate at low gas pressures on the order of 1 to 10 mTorr, a particle simulation may be necessary because of the failure of CFD techniques to model rarefaction effects. The direct simulation Monte Carlo method is the most widely accepted and employed particle simulation tool and has previously been used to investigate plasma reactor flowfields. A plasma DSMC code is currently under development at NASA Ames Research Center with its foundation as the object-oriented parallel Cornell DSMC code, MONACO. The present investigation is a follow up of a neutral flow investigation of the effects of process parameters as well as reactor design on etch rate and etch rate uniformity. The previous work concentrated on silicon etch of a chlorine flow in a configuration typical of electron cyclotron resonance (ECR) or helical resonator type reactors. The effects of the plasma on the dissociation chemistry were modeled by making assumptions about the electron temperature and number density. The electrons or ions themselves were not simulated.The present work extends these results by simulating the charged species.The electromagnetic fields are calculated such that power deposition is modeled self-consistently. Electron impact reactions are modeled along with mechanisms for charge exchange. An bipolar diffusion assumption is made whereby electrons remain tied to the ions. However, the velocities of tile electrons are allowed to be modified during collisions and are not confined to a Maxwellian distribution. The interaction between the neutral flow and plasma is examined, and results for etch rate uniformity from the previous research and the present plasma simulations are compared.

Hash, David B.↗