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At least 991 records · Page 55

Leak detection in a subcritical boiler

Thermal power plants experience cycling duty leading to the fatigue of the boiler and heat exchanger tubes. As a result, tube failures occur frequently in coal fired fleets leading to forced outages. Furthermore, because the tube leaks have been the major source of unwanted shutdowns and the number of outages is increasing, present work focuses on the detection and isolation of the leak in a subcritical boiler based upon the process data from a commercial coalfired power plant. The mass balance equation around the steam drum was analyzed using timeseries data collected from a 300 MW power plant. The ratio of the feed water mass flow rate to the steam mass flow rate was defined as a key parameter for detecting leaks. The difference in slope between the feedwater and steam mass flow rate during the normal and faulty operations was established as the upper control limit for real time monitoring. To reduce false alarm rates that arise when raw signal is directly compared against the threshold due to common process fluctuations, an optimal filter was derived for smoothing. It was found that the optimal filter reacted much more quickly to process changes than an exponential moving average filter, around 8 h earlier on average. Occurrence of relatively high false alarm rates even in the filtered responses was related to the cycling of the boiler from the base load condition. Variable threshold was established to keep false alarm rates to the minimum while maintaining the leak detection rate. Finally, the leak was located at the economizer and this could readily be isolated by investigating the magnitude of the mass flow rates ratio and the temperature at the economizer outlet.

42 ENGINEERING↗

Influence of the irradiated pulmonary microenvironment on macrophage and T cell dynamics

The lung is sensitive to radiation, which increases the risk of normal tissue toxicity following radiation therapy. Adverse outcomes include pneumonitis and pulmonary fibrosis, which are thought to result from dysregulated intercellular communication within the pulmonary microenvironment. Macrophage accumulation in the lung following radiation exposure is implicated in these pathogenic outcomes. Here we investigate the role of the microenvironment in macrophage and T cell dynamics. Materials and methods C57Bl/6 mice received 6Gyx5 x-ray irradiation to the right lung. Macrophage and T cell dynamics were investigated in ipsilateral right lungs, contralateral left lungs and compared to those from non-irradiated control subjects at 4-26wk post exposure. Lungs were evaluated by flow cytometry, histology and proteomics. Results In uni-lung irradiated subjects, focal regions of macrophage accumulation were noted in both lungs by 8wk, however fibrotic lesions were observed only in ipsilateral lungs by 26wk. Both infiltrating and alveolar macrophages populations transiently expanded in both lungs, however a transitional CD11b+ alveolar macrophage population persisted only in ipsilateral lungs and expressed lower CD206. Concurrently, arginase-1+ macrophages were noted within areas of macrophage accumulation in ipsilateral but not contralateral lungs at 8 and 26wk post exposure, while CD206+ macrophages were absent from these accumulations. While CD8+ T cells were present in both lungs of irradiated subjects, T regulatory cells were only increased in ipsilateral lungs. Unbiased proteomics analysis of immune cells revealed a substantial number of differentially expressed proteins in ipsilateral lungs when compared to either contralateral or non-irradiated lungs, as well as between contralateral lungs from irradiated subjects and non-irradiated controls. Conclusions Pulmonary macrophage and T cell dynamics are impacted by the microenvironmental conditions that develop in the lung following radiation exposure, both locally and systemically. Our findings demonstrate that while macrophages and T cells infiltrate and expand in both lungs, they diverge phenotypically depending on their environment.

62 RADIOLOGY AND NUCLEAR MEDICINE↗

Viral infections likely mediate microbial controls on ecosystem responses to global warming

Abstract Climate change is affecting how energy and matter flow through ecosystems, thereby altering global carbon and nutrient cycles. Microorganisms play a fundamental role in carbon and nutrient cycling and are thus an integral link between ecosystems and climate. Here, we highlight a major black box hindering our ability to anticipate ecosystem climate responses: viral infections within complex microbial food webs. We show how understanding and predicting ecosystem responses to warming could be challenging—if not impossible—without accounting for the direct and indirect effects of viral infections on different microbes (bacteria, archaea, fungi, protists) that together perform diverse ecosystem functions. Importantly, understanding how rising temperatures associated with climate change influence viruses and virus-host dynamics is crucial to this task, yet is severely understudied. In this perspective, we (i) synthesize existing knowledge about virus-microbe-temperature interactions and (ii) identify important gaps to guide future investigations regarding how climate change might alter microbial food web effects on ecosystem functioning. To provide real-world context, we consider how these processes may operate in peatlands—globally significant carbon sinks that are threatened by climate change. We stress that understanding how warming affects biogeochemical cycles in any ecosystem hinges on disentangling complex interactions and temperature responses within microbial food webs.

54 ENVIRONMENTAL SCIENCES↗

Investigation of boron powder flow rates on real-time wall

The limit of boron flow rates for real-time conditioning of the first walls has been systematically investigated in the Experimental Advanced Superconducting Tokamak (EAST) with a full metal wall. Initially, solid boron injection demonstrated effective control over carbon impurities and deuterium recycling on the basis of pre-discharge boronization. A minimum flow rate, identified between 1.0 mg/s and 2.0 mg/s, was necessary for actively improving wall conditions under specific plasma operating scenarios, with this effect progressively enhancing as boron flow rates increased. Additionally, a maximum flow rate, estimated between 3.5 mg/s and 8.0 mg/s, was identified for these plasma conditions. When boron flow rates exceeded this maximum, boron-induced fueling effects influenced the plasma line-averaged density, and at excessively high flow rates, plasma disruption was observed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

An experimental system and procedure of unsteady-state relative permeability test for gas hydrate-bearing sediments

Reliable estimations of the relative permeability of gas and water in hydrate-bearing sediments (HBS) and the dependency of the relative permeability on hydrate saturation are critical to predict the productivity of a hydrate reservoir. Yet, this remains poorly estimated owing to lack of experimental data associated with difficulties in conducting multiphase flow experiments in HBS. Recognizing the experimental challenges, this study intends to develop and validate a new experimental system and procedure of unsteady-state relative permeability test that can generate reliable and reproducible flow measurements in HBS. Furthermore, gas hydrate is considered as a part of solid matrix in the sediment, so one of the challenges is to maintain a constant hydrate saturation, which is achieved in this experimental study using tight pressure-temperature (P-T) control near the hydrate stability boundary. The measured differential pressure across the specimen, methane injection flow rate, and volume of displaced brine are used to calculate the relative permeability by adopting a conventional Buckley-Leverett theory-based interpretation method. Residual brine saturation calculated for the hydrate-bearing specimen is higher than that of hydrate-free specimen, presumably due to decrease in pore size, increase in heterogeneity of solid matrix, and increase in size distribution of solid matrix and pore in the presence of hydrates. Further studies are necessary to represent the results of the unsteady-state flow experiment in HBS with a gas hydrate-dependent relative permeability model.

03 NATURAL GAS↗

Evaluation of bio-inspired flow fields in a mediated Li-S flow battery for grid energy storage

Lithium-sulfur is a redox flow battery with high energy density for applications in safe, reliable, and lasting scaling of energy. However, lithium-based batteries often encounter platting as a problem thanks to poor Li-ions deposition after cycling. Aiming to reduce this impact, a uniform and continuous flow of ions is needed. On this work, novel bio-inspired flow fields in the electrochemical cell were tested to improve ions flowability and lithium platting control, ultimately enhancing battery performance and life. To secure Li-S efficient, low-cost, and secure energy storage capabilities, we chose a configuration with decamethylferrocene and cobaltocene acting as redox mediators, Li metal as anode and sulfur kept in a separate catholyte reservoir. Flow test and battery results insinuated a beneficial influence of bio-inspired designs in flowing electrolyte uniformly with less pressure and pump power in comparison to other conventional designs used in the industry, with an encouraging ability to approach a cheap, safe, and reliable Li-S grid energy storage.

25 ENERGY STORAGE↗

Probabilistic Deliverability Assessment of Distributed Energy Resources via Scenario-Based AC Optimal Power Flow

As electric grids decarbonize and distributed energy resources (DERs) become increasingly prevalent, interconnection assessments must evolve to reflect operational variability and control flexibility. This paper highlights key modeling limitations observed in practice and reviews approaches for modeling uncertainty. It then introduces a Probabilistic Deliverability Assessment (PDA) framework designed to complement and extend existing procedures. The framework integrates scenario-based AC optimal power flow (AC OPF), corrective dispatch, and optional multi-temporal constraints. Together, these form a structured methodology for quantifying DER utilization, deliverability, and reliability under uncertainty in load, generation, and topology. Outputs include interpretable metrics with confidence intervals that inform siting decisions and evaluate compliance with reliability thresholds across sampled operating conditions. A case study on Puerto Rico’s publicly available bulk power system model demonstrates the framework’s application using minimal input data, consistent with current interconnection practice. Across staged fossil generation retirements, the PDA identifies high-value DER sites and regions requiring additional reactive power support. Results are presented through mean dispatch signals, reliability metrics, and geospatial visualizations, demonstrating how the framework provides transparent, data-driven siting recommendations. The framework’s modular design supports incremental adoption within existing workflows, encouraging broader use of AC OPF in interconnection and planning contexts.

14 SOLAR ENERGY↗

Public Reference Data for Megawatt-Scale Hydrogen Electrolysis - Simulated Marine Hydrokinetic Tidal Turbine

The U.S. Department of Energy and National Laboratory of the Rockies (NLR) demonstrate hydrogen electrolysis, hydrogen compression and storage, and variable hydrogen fuel cell power production using megawatt-scale equipment at NLR’s Flatirons Campus as part of the Advanced Research on Integrated Energy Systems (ARIES) initiative. This dataset is part of that effort and is intended for academic, national laboratory, industrial, and other stakeholders to plan, design, and validate models of megawatt-scale hydrogen technologies and diverse energy infrastructure. These data provide a baseline for how existing hydrogen electrolysis technologies perform when coupled with other energy technologies. This dataset contains inputs and outputs from simulations of a floating marine hydrokinetic turbine over approximately half a tidal cycle (~6.6 hours). Inflow conditions were derived from field measurements in Alaska’s Cook Inlet and represent a tidal environment in which the current speed ramps from near 0 m/s to a peak of 3 m/s and back. The original acoustic doppler current profiler dataset is publicly available on the Marine and Hydrokinetic Data Repository. In a full tidal cycle, the flow reverses and the rotor would reorient; this reversal was not modeled. In the Cook Inlet campaign , turbulence intensity was similar in both directions. Two inflow cases are included. In the first case, labeled “raw” in the files, the measured current time series was used directly in the InflowWind module of OpenFAST. Speed and direction were applied as a function of time and elevation, uniformly in the horizontal direction. With full spatial coherence, this approach captures high turbulent variability and results in pronounced power fluctuations, so it is considered a conservative, near-worst-case representation of loading. In the second case, labeled “average” in the files, a 30-minute moving average was applied to extract the slowly varying mean speed. The residual fluctuations about this mean were used to generate spatially varying, full-field turbulence inputs with TurbSim, giving a more physically realistic representation of the inflow across the rotor disk. Two random realizations were used to produce distinct inflow conditions for two OpenFAST simulations representing a two-turbine array. The same turbulence intensity is applied across the full time series, producing larger fluctuations at the start and end, where the mean speed is low. The second case is the more appropriate framework for performance and power assessment but overpredicts turbulence at lower flow speeds and underpredicts it at higher speeds. As the floating platform moves and the rotor changes its x-position, Taylor’s frozen turbulence hypothesis used by InflowWind assumes a constant rather than a time-varying mean velocity, introducing some inaccuracy in the velocity plane sampling. The turbine modeled is the 500-kW Reference Model 1, a horizontal-axis two-bladed hydrokinetic turbine on a four-column floating semisubmersible substructure . Simulations were performed using OpenFAST v4.1 with the Reference Open Source Controller (ROSCO) v2.10. All input files required to reproduce the simulations are included. The electrolyzer is a 1.25-MW proton exchange membrane type MC250 system manufactured by Nel . This unit supports up to 2.5 MW, but NLR has only a single 1.25-MW stack. The datasets report hydrogen balance-of-plant and system data, all captured at 1 Hz, including hydrogen mass production measured with an Emerson Coriolis flow meter. The system controls hydrogen production by varying direct current applied to the stack, from a maximum of 3,000 A to a minimum safe operating current of 300 A, or 10%. Because the current–voltage characteristic changes as the stack ages and efficiency degrades, the actual minimum safe operating power changes over time. The simulated tidal turbine time series data was translated from power (kilowatts) to current (amperes) using a curve fit with calibration data and sent to the electrolyzer power supply at 1-Hz. Each zip file represents a single tidal electrolysis experiment and is named: {technology}_{inflow method}_{number of 500 kW tidal turbines connected} For instance, “tidal-500kW-RM1_average_2.zip” is a 6-hour experiment using the 500-kW tidal reference model, scaled by 2x (1-MW) to better match the electrolyzer maximum of 1.25MW, fed with the 30-minute moving average current case. Each zip folder contains the following files: A .csv file of raw data. An .xlsx file explaining all the fields in the raw data. A .png plot showing the time series of hydrogen production in kilograms per hour, electrolysis power consumption, and input wave power. A .csv file combines all tidal profiles as "combined_tidal_experiments.csv." A separate experiment, “characterization_200.zip,” shows the MC250 electrolyzer steady-state response with 30-minute load steps over 5 hours and is accessible with this entry.

08 HYDROGEN↗

"Traffic Control via Connected and Automated Vehicles: An Open-Road Field Experiment with 100 CAVs"

The CIRCLES project aims to reduce instabilities in traffic flow, which are naturally occurring phenomena due to human driving behavior. These "phantom jams" or "stop-and-go waves,"are a significant source of wasted energy. Toward this goal, the CIRCLES project designed a control system referred to as the MegaController by the CIRCLES team, that could be deployed in real traffic. Our field experiment leveraged a heterogeneous fleet of 100 longitudinally-controlled vehicles as Lagrangian traffic actuators, each of which ran a controller with the architecture described in this paper. The MegaController is a hierarchical control architecture, which consists of two main layers. The upper layer is called Speed Planner, and is a centralized optimal control algorithm. It assigns speed targets to the vehicles, conveyed through the LTE cellular network. The lower layer is a control layer, running on each vehicle. It performs local actuation by overriding the stock adaptive cruise controller, using the stock on-board sensors. The Speed Planner ingests live data feeds provided by third parties, as well as data from our own control vehicles, and uses both to perform the speed assignment. The architecture of the speed planner allows for modular use of standard control techniques, such as optimal control, model predictive control, kernel methods and others, including Deep RL, model predictive control and explicit controllers. Depending on the vehicle architecture, all onboard sensing data can be accessed by the local controllers, or only some. Control inputs vary across different automakers, with inputs ranging from torque or acceleration requests for some cars, and electronic selection of ACC set points in others. The proposed architecture allows for the combination of all possible settings proposed above. Most configurations were tested throughout the ramp up to the MegaVandertest.

Lee, Jonathan↗

Improving power grid transient stability and transfer capability using HVDC emergency power controls

In the future, with high levels of renewable energy sources penetration, the transmission corridors will have to be flexible to operate under faster transients and variable power flows. Fast power ramping and overloading capabilities of HVDC system can be utilized to ensure transient stability of the interconnected power grid. In this paper, HVDC auxiliary controllers have been studied that can provide the power grid with additional synchronizing torques through fast DC power changes in response to arising system conditions. The effectiveness of the auxiliary controllers in improving transient stability is demonstrated by performing dynamic simulations on the detailed model of the Western Interconnection system (WECC).

Sundaresh, Lakshmi↗

Impact of Rheology Models on Horizontal Well Polymer Flooding in a Heavy Oil Reservoir on Alaska North Slope: A Simulation Study

Polymer rheology can have either a positive or a negative effect on polymer flooding performance under varied circumstances. Many researchers have studied the effect of polymer rheology in a vertical well, but no field scale studies have been conducted to investigate whether polymer rheology is beneficial to polymer flooding in heavy oil reservoirs developed by horizontal wells. In this paper, we conducted a numerical simulation study to examine the effect of HPAM polymer rheology on a polymer flooding pilot, which is the first-ever project conducted on a heavy oil reservoir from Alaska North Slope (ANS) developed by horizontal wells. Three rheology types were considered in the study including the apparent viscosity measured during coreflooding of using a HPAM polymer, the bulk viscosity measured with a viscometer, and a Newtonian flow model. The results suggest that using the bulk viscosity in simulation underestimates the conformance control and the water-oil-ratio reduction capability of the HPAM polymer solution. When the apparent viscosity is used, the incremental oil and sweep were largely increased, and the optimal recovery period of polymer flooding was extended greatly, especially for the heterogeneous formations. Therefore, the rheology type of polymer plays a significant role in the incremental oil recovery and injection profile of the horizontal well system given the pilot test conditions. This study has provided practical guidance to field operators for the ongoing polymer flooding pilot on ANS and will also provide valuable information for other polymer projects conducted in similar conditions.

Leng, Jianqiao↗

Enhanced Control, Optimization, and Integration of Distributed Energy Applications (ECO-IDEA)

With support from the U.S. Department of Energy Solar Energy Technologies Office, the National Renewable Energy Laboratory (NREL) partnered with Xcel Energy, Schneider Electric, Varentec, and Electric Power Research Institute (EPRI) to meet the goals of the Enabling Extreme Real-Time Grid Integration of Solar Energy (ENERGISE) program. This project developed and validated an innovative data-enhanced hierarchical control architecture that enables the efficient, reliable, resilient, and secure operation of future distribution systems with a high penetration of distributed energy resources like solar energy. The architecture enables a hybrid control approach where a centralized control layer is complemented by distributed control algorithms for solar inverters and autonomous control of grid edge devices. It is fully interoperable and includes all the cybersecurity aspects necessary for reliable and secure system operation. The hybrid approach can seamlessly integrate multiple voltage-regulation technologies, both at central and grid-edge levels, which enables reliable and efficient system operation in the face of unpredictable conditions. The overarching goal of the Eco-Idea project is to develop, validate, and deploy a unique and innovative Data-Enhanced Hierarchical Control (DEHC) architecture that comprehensively addresses the formidable challenges associated with proliferation of high penetration of distributed PV such as reverse power flows, transients from variability of PV systems, feeder load balancing, and voltage stability. These issues are exposing the weaknesses of existing grid operations and controls - including, but not limited to, lack of grid situational awareness, heuristic and slow-acting control actions, latency of control for emergency situations, and points of failure in communications. The proposed architecture will comprehensively resolve the deficiencies of current operational settings - where monitoring and control solutions proposed across industry and academia may not be interoperable and may not coexist in the same system - and will enable an efficient, reliable, resilient, and secure operation of future distribution systems with penetration of solar energy well beyond current limits. The DEHC architecture was developed and validated rigorously through hardware-in-loop simulations in the laboratory environment and deployed on the field.

24 POWER TRANSMISSION AND DISTRIBUTION↗

Overview of the TJ-II stellarator research programme towards model validation in fusion plasmas

TJ-II stellarator results on modelling and validation of plasma flow asymmetries due to on-surface potential variations, plasma fuelling physics, Alfvén eigenmodes (AEs) control and stability, the interplay between turbulence and neoclassical (NC) mechanisms and liquid metals are reported. Regarding the validation of the neoclassically predicted potential asymmetries, its impact on the radial electric field along the flux surface has been successfully validated against Doppler reflectometry measurements. Research on the physics and modelling of plasma core fuelling with pellets and tracer encapsulated solid pellet injection has shown that, although post-injection particle radial redistributions can be understood qualitatively from NC mechanisms, turbulence and fluctuations are strongly affected during the ablation process. Advanced analysis tools based on transfer entropy have shown that radial electric fields do not only affect the radial turbulence correlation length but are also capable of reducing the propagation of turbulence from the edge into the scrape-off layer. Direct experimental observation of long range correlated structures show that zonal flow structures are ubiquitous in the whole plasma cross-section in the TJ-II stellarator. Alfvénic activity control strategies using ECRH and ECCD as well as the relation between zonal structures and AEs are reported. Finally, the behaviour of liquid metals exposed to hot and cold plasmas in a capillary porous system container was investigated.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Pulsed laminar falling films in vertical tubes: Maintaining a continuous liquid film with reduced film thickness

Falling-liquid-film heat transfer is important to a wide variety of industrial applications, including two-phase thermosyphons, falling-film evaporators in the food industry, heat exchangers in fuel-ethanol processing, and the chemical service industry. Particularly for laminar falling films, the heat transfer increases as the film thickness decreases, hence it is desirable to keep the films as thin as possible. This article presents a periodically-pulsed flow concept to reduce the average mass flow inside a vertical tube. The technique provides thinner films than can be achieved with continuous flow. A drainage model is adopted to predict the film thickness as a function of flow rate and location along the tube. The concept is confirmed experimentally by measuring the film thickness in real time in a circular tube using a laser-based absorption technique. A new heat-transfer-based film continuity measurement is also integrated into the optical film measurement setup. Water at ambient temperature and pressure is used for this work. Film thickness reductions of up to 60%, and liquid-film volume-flow reductions of up to 80% compared to the minimum continuous-flow film have been obtained. The time-varying film thickness profile can also be controlled to a limited extent, which may be of interest for process industries.

42 ENGINEERING↗

Active-noise-induced dynamic clustering of passive colloidal particles

Active fluids generate spontaneous, often chaotic mesoscale flows. Harnessing these flows to drive soft materials embedded within an active fluid into structures with controlled length scales and lifetimes is a key challenge at the interface between the fields of active matter and nonequilibrium self-assembly. Here, we present a simple and efficient computational approach to model soft materials advected by active fluids, by simulating particles moving in a spatiotemporally correlated noise field. To illustrate our approach, we simulate the dynamical self-organization of repulsive colloids within such an active noise field. The colloids form structures whose sizes and dynamics can be tuned by the correlation time and length of the active fluid, and range from small rotating droplets to clusters with internal flows and system-spanning sizes that vastly exceed the active correlation length. Our results explain how the interplay between active fluid time and length scales and emergent driven assembly can be used to rationally design functional assemblies. More broadly, our approach can be used to efficiently simulate diverse active fluids and other systems with spatiotemporally correlated noise.

Brownian dynamics↗

Manufacturing control systems and logic for prognosis of defects in composite materials

Presented are manufacturing control systems for composite-material structures, methods for assembling/operating such systems, and transfer molding techniques for predicting and ameliorating void conditions in fiber-reinforced polymer panels. A method for forming a composite-material construction includes receiving a start signal indicating a fiber-based preform is inside a mold cavity, and transmitting a command signal to inject pressurized resin into the mold to induce resin flow within the mold cavity and impregnate the fiber-based preform. An electronic controller receives, from a distributed array of sensors attached to the mold, signals indicative of pressure and/or temperature at discrete locations on an interior face of the mold cavity. The controller determines a measurement deviation between a calibrated baseline value and the pressure and/or temperature values for each of the discrete locations. If any one of the respective measurement deviations exceeds a calibrated threshold, a void signal is generated to flag a detected void condition.

36 MATERIALS SCIENCE↗

GradientGraph

Under this SBIR Phase II, Reservoir Labs has developed G2 Analytics, a new technology that allows network operators to analyze bottleneck and flow performance with high precision. G2 delivers a new analytical approach and framework to resolve a variety of key problems found in modern communication networks, including: traffic engineering, routing, flow scheduling, network design, capacity planning, resiliency analysis, network slicing, or service level agreement (SLA) management, among others. G2 leverages the bottleneck structure of congestion-controlled communication networks, a recent mathematical discovery by the Reservoir team [RL19b, RL20a, RL20b, RL21a]. Bottleneck structures reveal how perturbations on flows and links propagate through the network, providing an analytical framework to measure (qualitatively and quantitatively) the ripple effects induced as they traverse the network. Leveraging the mathematics of bottleneck structures, Reservoir Labs is developing the G2 technology to provide network operators with a framework to design, optimize and troubleshoot network performance. This delivery includes the G2 software stack.

Yellamraju, Sruthi↗

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

An etching system based on the interaction of electrons extracted from a direct current (DC) hollow-cathode (HC) Ar plasma and injected towards a Si3N4 covered silicon substrate located in the downstream reactive environment created by an additional remote CF 4 /O 2 plasma source was developed and evaluated. By controlling the properties of the injected beam electrons, this approach allows to deliver energy to a surface functionalized by exposure to reactive species, and initiate surface etching. The energy of the primary beam electrons is controlled by the acceleration voltage relative to the HC discharge. Ar atoms flow from the high-pressure HC discharge into the low pressure downstream reactive environment in the process chamber. For an acceleration voltage greater than the ionization potential of Ar and/or process gas species, the energetic primary beam electrons produce a secondary plasma in the process chamber, and can also cause additional dissociation. We have characterized the properties of the secondary plasma and also surface etching of Si 3 N 4 as a function of process parameters, including acceleration voltage (0-80 V), discharge current of the HC discharge (1-2 A), pressure (3.5-20 mTorr), source to substrate distance (1.5 to 5 cm), and feed gas composition (20% and 80% O2 in CF 4 /O 2 ). The electron energy probability function (EEPF) measured with a Langmuir probe about 2.5 cm below the extraction ring suggests several major groups of electrons for this situation, including high energy primary beam electrons with an energy that varies as the acceleration voltage is changed and low energy electrons produced by beam electron-induced ionization of the Ar gas in the process chamber. When a remote CF 4 /O 2 plasma is additionally coupled to the process chamber, Si 3 N 4 surfaces can be functionalized, and by varying the energy of the beam electrons, Si 3 N 4 etching can be induced by electron-neutral synergy effect with plasma-surface interaction. For conditions without beam electron injection, the remote plasma etching rate (ER) of Si 3 N 4 depends strongly on the O 2 concentration in the CF 4 /O 2 processing gas mixture and can be suppressed for O 2 -rich process conditions by the formation of a SiONF passivation layer on the Si 3 N 4 surface. The combination of the HC electron beam source with the remote plasma source (HCEB-RP) makes it possible to induce Si 3 N 4 etching for O 2 -rich remote plasma conditions where remote plasma by itself produces negligible Si 3 N 4 etching. The electron enhanced etching of Si 3 N 4 depends strongly on O 2 /CF 4 mixing ratio reflecting changing arrival rates of O and F species at the surface. Optical emission spectroscopy was used to estimate the ratio of gas phase F and O densities and found to be controlled by the gas mixing ratio and independent of HC EB operating conditions. At this time the detailed sequence of events operative in the etching mechanism is unclear. While the increase of the electron energy is ultimately responsible for initiating surface etching, at present we cannot rule out a role of ions from the simultaneously produced secondary plasma in plasma surface interaction mechanisms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗