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At least 973 records · Page 54

Hybrid chemical characterization of latent images in EUV resist with 12 nm half-pitch features

With the advancement of high numerical aperture extreme ultraviolet (EUV) lithography, the new platform will enable chipmakers to achieve critical dimensions of 8 nm. However, resist materials face significant challenges in delivering increased sensitivity while managing rising stochastic variations. We aim to develop comprehensive techniques to characterize the chemical profile of latent images, stored in EUV resists after exposure and postexposure baking, which is essential for understanding the origin of stochastic effects. Infrared photo-induced force microscopy (IR PiFM) is a bimodal atomic force microscopy technique combined with an infrared light source, allowing for simultaneous sub-5 nm topographic and chemical characterization within a localized environment. Critical-dimension resonant soft X-ray scatterometry (CD-RSoXS) provides statistical data that reveal structural and chemical information for comparative analysis. For the first time, IR PiFM has been used to chemically map the latent images of EUV resists (after exposure and postexposure baking) at a record high resolution of 12 nm half-pitch, enabling nondestructive analysis of patterns prior to development. Furthermore, CD-RSoXS offers direct experimental observation and comparison of exposed, postexposure baked, and developed patterns, which align with the IR PiFM results. We demonstrate that the IR PiFM technique offers valuable insights into both high spatial resolution and local chemical information simultaneously. In addition, CD-RSoXS provides statistical results that support our main findings. This hybrid metrology approach leverages a multifaceted dataset by combining the most reliable information from each source, which is essential for a comprehensive understanding of the stochastic effects in EUV lithography processes.

O’Reilly, Padraic↗

Quantifying the Known Unknown: Including Marine Sources of Greenhouse Gases in Climate Modeling

Researchers have recently estimated that Arctic submarine permafrost currently traps 60 billion tons of methane and contains 560 billion tons of organic carbon in seafloor sediments and soil, a giant pool of carbon with potentially large feedbacks on the climate system. Unlike terrestrial permafrost, the submarine permafrost system has remained a “known unknown” because of the difficulty in acquiring samples and measurements. Consequently, this potentially large carbon stock never yet considered in global climate models or policy discussions, represents a real wildcard in our understanding of Earth’s climate. This report summarizes our group’s effort at developing a numerical modeling framework designed to produce a first-of-its-kind estimate of Arctic methane gas releases from the marine sediments to the water column, and potentially to the atmosphere, where positive climate feedback may occur. Newly developed modeling capability supported by the Laboratory Directed Research and Development (LDRD) program at Sandia National Laboratories now gives us the ability to probabilistically map gas distribution and quantity in the seabed by using a hybrid approach of geospatial machine learning, and predictive numerical thermodynamic ensemble modeling. The novelty in this approach is its ability to produce maps of useful data in regions that are only sparsely sampled, a common challenge in the Arctic, and a major obstacle to progress in the past. By applying this model to the circum-Arctic continental shelves and integrating the flux of free gas from in situ methanogenesis and dissociating gas hydrates from the sediment column under climate forcing, we can provide the most reliable estimate of a spatially and temporally varying source term for greenhouse gas flux that can be used by global oceanographic circulation and Earth system models (such as DOE’s E3SM). The result will allow us to finally tackle the wildcard of the submarine permafrost carbon system, and better inform us about the severity of future national security threats that sustained climate change poses.

54 ENVIRONMENTAL SCIENCES↗

ORNL Portable Diagnostic Package for Evaluating Mirror Performance

Oak Ridge National Laboratory (ORNL) and Realta Fusion successfully executed a one-year collaborative effort to deploy the Portable Diagnostic Package (PDP) on the Wisconsin HTS Axisymmetric Mirror (WHAM) and to assess future diagnostic needs. The PDP consists of an optical emission spectroscopy (OES) subsystem and a Thomson scattering (TS) subsystem. Within the first two months, the PDP OES subsystem was installed, integrated with WHAM timing, and handed over to trained Realta personnel. It immediately delivered multi-channel impurity surveys and the first spatially resolved plasma-rotation profiles inferred from C III Doppler shifts. The TS subsystem was commissioned within the first six months; transportation of the class IV laser system, approval of the safety plan, and the integration with WHAM timing with 100 ns resolution. The TS subsystem provided the first localized electron temperature measurements in WHAM commissioning shots. Leveraging these results, the team has discussed a diagnostic concept map for Realta’s next-step facility, Anvil, identifying line-of-sight constraints, required temporal resolution, and hardware upgrades.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Determinants of synapse diversity revealed by super-resolution quantal transmission and active zone imaging

Neural circuit function depends on the pattern of synaptic connections between neurons and the strength of those connections. Synaptic strength is determined by both postsynaptic sensitivity to neurotransmitter and the presynaptic probability of action potential evoked transmitter release (P r ). Whereas morphology and neurotransmitter receptor number indicate postsynaptic sensitivity, presynaptic indicators and the mechanism that sets P r remain to be defined. To address this, we developed QuaSOR, a super-resolution method for determining P r from quantal synaptic transmission imaging at hundreds of glutamatergic synapses at a time. We mapped the P r onto super-resolution 3D molecular reconstructions of the presynaptic active zones (AZs) of the same synapses at the Drosophila larval neuromuscular junction (NMJ). We find that P r varies greatly between synapses made by a single axon, quantify the contribution of key AZ proteins to P r diversity and find that one of these, Complexin, suppresses spontaneous and evoked transmission differentially, thereby generating a spatial and quantitative mismatch between release modes. Transmission is thus regulated by the balance and nanoscale distribution of release-enhancing and suppressing presynaptic proteins to generate high signal-to-noise evoked transmission.

59 BASIC BIOLOGICAL SCIENCES↗

Demonstration of sub-micron UCN position resolution using room-temperature CMOS sensor

High spatial resolution of ultracold neutron (UCN) measurement is of growing interest to UCN experiments such as UCN spectrometers, UCN polarimeters, quantum physics of UCNs, and quantum gravity. Here we utilize physics informed deep learning to enhance the experimental position resolution and to demonstrate sub-micron spatial resolutions for UCN position measurements obtained using a room-temperature CMOS sensor, extending our previous work that demonstrated a position uncertainty of 1.5 microns. We explore the use of the open-source software Allpix Squared to generate experiment-like synthetic hit images with ground-truth position labels. We use physics-informed deep learning by training a fully connected neural network (FCNN) to learn a mapping from input hit images to output hit position. The automated analysis for sub-micron position resolution in UCN detection combined with the fast data rates of current and next generation UCN sources will enable improved precision for future UCN research and applications.

10B nanometer thin film↗

The metallicity’s fundamental dependence on both local and global galactic quantities

ABSTRACT We study the scaling relations between gas-phase metallicity, stellar mass surface density (Σ*), star formation rate surface density (ΣSFR), and molecular gas surface density ($\Sigma _{{\rm H}_2}$) in local star-forming galaxies on scales of a kpc. We employ optical integral field spectroscopy from the Mapping Nearby Galaxies at Apache Point Observatory (MaNGA) survey, and ALMA data for a subset of MaNGA galaxies. We use partial correlation coefficients and Random Forest regression to determine the relative importance of local and global galactic properties in setting the gas-phase metallicity. We find that the local metallicity depends primarily on Σ* (the resolved mass–metallicity relation, rMZR), and has a secondary anticorrelation with ΣSFR (i.e. a spatially resolved version of the ‘Fundamental Metallicity Relation’, rFMR). We find that $\Sigma _{{\rm H}_2}$ is less important than ΣSFR in determining the local metallicity. This result indicates that gas accretion, resulting in local metallicity dilution and local boosting of star formation, is unlikely to be the primary origin of the rFMR. The local metallicity depends also on the global properties of galaxies. We find a strong dependence on the total stellar mass (M*) and a weaker (inverse) dependence on the total SFR. The global metallicity scaling relations, therefore, do not simply stem out of their resolved counterparts; global properties and processes, such as the global gravitational potential well, galaxy-scale winds and global redistribution/mixing of metals, likely contribute to the local metallicity, in addition to local production and retention.

79 ASTRONOMY AND ASTROPHYSICS↗

NoRA: A Tensor Network Ansatz for Volume-Law Entangled Equilibrium States of Highly Connected Hamiltonians

Motivated by the ground state structure of quantum models with all-to-all interactions such as mean-field quantum spin glass models and the Sachdev-Ye-Kitaev (SYK) model, we propose a tensor network architecture which can accomodate volume law entanglement and a large ground state degeneracy. We call this architecture the non-local renormalization ansatz (NoRA) because it can be viewed as a generalization of MERA, DMERA, and branching MERA networks with the constraints of spatial locality removed. We argue that the architecture is potentially expressive enough to capture the entanglement and complexity of the ground space of the SYK model, thus making it a suitable variational ansatz, but we leave a detailed study of SYK to future work. We further explore the architecture in the special case in which the tensors are random Clifford gates. Here the architecture can be viewed as the encoding map of a random stabilizer code. We introduce a family of codes inspired by the SYK model which can be chosen to have constant rate and linear distance at the cost of some high weight stabilizers. We also comment on potential similarities between this code family and the approximate code formed from the SYK ground space.

Physics↗

Spatial heterogeneity analyses of pore structure and mineral composition of Barnett Shale using X-ray scattering techniques

The spatial heterogeneity of pore structure and mineral composition at mu m to mm scales in mm to cm-sized shale samples complicates the laboratory measurements of porosity & pore size distribution and consequently reservoir quality evaluation. Traditional fluid invasion characterization methods typically take hours to days to get data and can only test relatively small samples (usually 2.54 cm diameter core plugs and mm-sized rock chips). Furthermore, the Xray scattering techniques at the Advanced Photon Source of the Argonne National Laboratory have the capability to non-destructively determine the pore structure and mineral composition of mm x mm area in a short time of seconds and to hold several to hundreds of mm 2 sized sample to conduct large area heterogeneity analysis in the short duration of hours. With the use of ultra-small angle X-ray scattering (USAXS), small-angle X-ray scattering (SAXS), and wide-angle X-ray scattering (WAXS), the porosity, surface area and pore size distribution of two Barnett Shale samples have been mapped out and the mineral compositions are determined qualitatively. Overall, the porosity and pore surface area of the Barnett Shale Sample A over a 36 cm2 area ranges from 1.70 % to 8.13 % and 8.87 m 2 /g to 40.2 m 2 /g respectively. The porosity and surface area of Sample B over a 24 cm 2 area varies from 3.15 % to 11.7 % and 18.3 m 2 /g to 60.2 m 2 /g. In Sample A, the mineral composition shows a shift from carbonate-rich to siliciclastic-rich over a distance of several millimeters. For Sample B, the mineral compositions are mainly siliciclastic and do not show an obvious lithological change. The direct observations of high spatial heterogeneity of pore structure and mineral composition in shale illustrate the utility of integrated X-ray scattering techniques to provide valuable insights into shale studies and reservoir evaluation.

58 GEOSCIENCES↗

Answering old questions with new techniques: Understanding performance-limiting factors in transition metal dichalcogenide photoelectrochemical solar cells

In the late 1970s and early 1980s, several research groups reported high-efficiency and stable photoelectrochemical solar cells based on transition metal dichalcogenides (TMDS; e.g., MoS 2 , WSe 2 , and MoSe 2 ) immersed in iodide/tri-iodide electrolytes. A consensus emerged that smooth crystals were necessary for high efficiency based on significant evidence that rough crystals with exposed edge sites produced lower photocurrents and fill factors. However, anecdotal observations in the literature hinted at significant performance variation among apparently smooth crystals with the possibility of highly active “hot” edge sites. Furthermore, this mini-review article is a case study on how spatially resolved photoelectrochemical techniques developed in the 2020s are answering old questions regarding the origin of performance variation in high efficiency n-type TMD|I – ,I 3 – |Pt photoelectrochemical solar cells.

14 SOLAR ENERGY↗

Redshift evolution of the H2/H i mass ratio in galaxies

ABSTRACT In this paper, we present an attempt to estimate the redshift evolution of the molecular to neutral gas mass ratio within galaxies (at fixed stellar mass). For a sample of five nearby grand design spirals located on the main-sequence (MS) of star-forming galaxies, we exploit maps at 500 pc resolution of stellar mass and star formation rate (M⋆ and SFR). For the same cells, we also have estimates of the neutral (MH i) and molecular ($M_{\rm H_2}$) gas masses. To compute the redshift evolution, we exploit two relations: (i) one between the molecular-to-neutral mass ratio and the total gas mass (Mgas), whose scatter shows a strong dependence with the distance from the spatially resolved MS, and (ii) the one between $\log (M_{\rm {H_2}}/M_{\star })$ and log (MH i/M⋆). For both methods, we and that $M_{\rm H_2}$/MH i within the optical radius slightly decreases with redshift, contrary to common expectations of galaxies becoming progressively more dominated by molecular hydrogen at high redshifts. We discuss possible implications of this trend on our understanding of the internal working of high-redshift galaxies.

Morselli, Laura (ORCID:0000000307532571)↗

Data-driven surrogates for high dimensional models using Gaussian process regression on the Grassmann manifold

This paper introduces a surrogate modeling scheme based on Grassmannian manifold learning to be used for cost-efficient predictions of high-dimensional stochastic systems. The method exploits subspace-structured features of each solution by projecting it onto a Grassmann manifold. This point-wise linear dimensionality reduction harnesses the structural information to assess the similarity between solutions at different points in the input parameter space. The method utilizes a solution clustering approach in order to identify regions of the parameter space over which solutions are sufficiently similarly such that they can be interpolated on the Grassmannian. In this clustering, the reduced-order solutions are partitioned into disjoint clusters on the Grassmann manifold using the eigen-structure of properly defined Grassmannian kernels and, the Karcher mean of each cluster is estimated. Then, the points in each cluster are projected onto the tangent space with origin at the corresponding Karcher mean using the exponential mapping. For each cluster, a Gaussian process regression model is trained that maps the input parameters of the system to the reduced solution points of the corresponding cluster projected onto the tangent space. Using this Gaussian process model, the full-field solution can be efficiently predicted at any new point in the parameter space. In certain cases, the solution clusters will span disjoint regions of the parameter space. In such cases, for each of the solution clusters we utilize a second, density-based spatial clustering to group their corresponding input parameter points in the Euclidean space. The proposed method is applied to two numerical examples. Here, the first is a nonlinear stochastic ordinary differential equation with uncertain initial conditions where the surrogate is used to predict the time history solution. The second involves modeling of plastic deformation in a model amorphous solid using the Shear Transformation Zone theory of plasticity, where the proposed surrogate is used to predict the full strain field of a material specimen under large shear strains.

42 ENGINEERING↗

Johnson-noise-limited cancellation-free microwave impedance microscopy with monolithic silicon cantilever probes

Abstract Microwave impedance microscopy (MIM) is an emerging scanning probe technique for nanoscale complex permittivity mapping and has made significant impacts in diverse fields. To date, the most significant hurdles that limit its widespread use are the requirements of specialized microwave probes and high-precision cancellation circuits. Here, we show that forgoing both elements not only is feasible but also enhances performance. Using monolithic silicon cantilever probes and a cancellation-free architecture, we demonstrate Johnson-noise-limited, drift-free MIM operation with 15 nm spatial resolution, minimal topography crosstalk, and an unprecedented sensitivity of 0.26 zF/ √ Hz. We accomplish this by taking advantage of the high mechanical resonant frequency and spatial resolution of silicon probes, the inherent common-mode phase noise rejection of self-referenced homodyne detection, and the exceptional stability of the streamlined architecture. Our approach makes MIM drastically more accessible and paves the way for advanced operation modes as well as integration with complementary techniques.

47 OTHER INSTRUMENTATION↗

Diverse Super-Resolution (diversity_SR) [SWR-21-60]

Deep learning tools for enhancing the spatial resolution of wind data. The software is developed in Python using the TensorFlow deep learning package. Models for diversity super-resolution is provided. Included in the package are pretrained models with example code/data to perform the super-resolution as well as tools of training models for different enhancement- or data-types. The super-resolution is an inherently ill-conditioned problem, with multiple high-resolution fields plausibly mapping to the same coarse field. Considitional GANs provide a framework for generating a distribution of high-resolution realizations from a given low-resolution input. Stochastic estimation is used to inform the network of the expected degree and location of sub-grid diversity. The package includes a pretrained network to generate distributions of 10x-enhanced fields of wind data.

Glaws, Andrew↗

Soft X-ray Tomography Reveals HSV-1-Induced Remodeling of Human B Cells

Upon infection, viruses hijack the cell machinery and remodel host cell structures to utilize them for viral proliferation. Since viruses are about a thousand times smaller than their host cells, imaging virus-host interactions at high spatial resolution is like looking for a needle in a haystack. Scouting gross cellular changes with fluorescent microscopy is only possible for well-established viruses, where fluorescent tagging is developed. Soft X-ray tomography (SXT) offers 3D imaging of entire cells without the need for chemical fixation or labeling. Here, we use full-rotation SXT to visualize entire human B cells infected by the herpes simplex virus 1 (HSV-1). We have mapped the temporospatial remodeling of cells during the infection and observed changes in cellular structures, such as the presence of cytoplasmic stress granules and multivesicular structures, formation of nuclear virus-induced dense bodies, and aggregates of capsids. Our results demonstrate the power of SXT imaging for scouting virus-induced changes in infected cells and understanding the orchestration of virus-host remodeling quantitatively.

59 BASIC BIOLOGICAL SCIENCES↗

Uncertainty-aware Continuous Implicit Neural Representations for Remote Sensing Object Counting

Many existing object counting methods rely on density map estimation (DME) of the discrete grid representation by decoding extracted image semantic features from designed convolutional neural networks (CNNs). Relying on discrete density maps not only leads to information loss dependent on the original image resolution, but also has a scalability issue when analyzing high-resolution images with cubically increasing memory complexity. Furthermore, none of the existing methods can offer reliable uncertainty quantification (UQ) for the derived count estimates. To overcome these limitations, we design UNcertainty-aware, hypernetwork-based Implicit neural representations for Counting (UNIC) to assign probabilities and the corresponding counting confidence over continuous spatial coordinates. We derive a sampling-based Bayesian counting loss function and develop the corresponding model training algorithm. UNIC outperforms existing methods on the Remote Sensing Object Counting (RSOC) dataset with reliable UQ and improved interpretability of the derived count estimates. Our code is available at https://github.com/SiyuanXu-tamu/UNIC.

97 MATHEMATICS AND COMPUTING↗

Data initiatives for ocean-driven melt of Antarctic ice shelves

Ocean-driven melt of Antarctic ice shelves is an important control on mass loss from the ice sheet, but is complex to study due to significant variability in melt rates both spatially and temporally. Here we assess the strengths and weakness of satellite and field-based observations as tools for testing models of ice-shelf melt. We discuss how the complementary use of field, satellite and model data can be a powerful but underutilised tool for studying melt processes. Finally, we identify some community initiatives working to collate and publish coordinated melt rate datasets, which can be used in future for validating satellite-derived maps of melt and evaluating processes in numerical simulations.

54 ENVIRONMENTAL SCIENCES↗

Position-dependent Voronoi probability distribution functions for matter and halos

Here, we measure the Voronoi density probability distribution function (PDF) for both dark matter and halos in N-body simulations. For the dark matter, Voronoi densities represent the matter density field smoothed on a uniform mass scale, which approximates the Lagrangian density field. For halos, the Voronoi densities contain information about the local environment of each halo. We measure the halo virial masses, the total amount of dark matter within each halo Voronoi cell, and the halo Voronoi cell volumes, and we show how halo abundances depend on these three quantities. We then study the position-dependent Voronoi density PDF, measured within finite subregions of the Universe, using separate universe simulations. We demonstrate that the spatial variation of the position-dependent PDF is due to large-scale density fluctuations, indicating that the position-dependent PDF is a biased tracer of large-scale structure. We measure this bias for the dark matter, and interpret it as the bias of regions of the Lagrangian density field that are selected based on density. For the halos, this bias can be interpreted as a form of assembly bias. We present the mapping from late-time to early-time Voronoi density for each simulation dark matter particle, which is highly stochastic. We compare the median of this stochastic map with spherical collapse calculations and discuss challenges involved in modeling the evolution of the density field on these scales.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗