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DOE OSTI2024

Future of plasma etching for microelectronics: Challenges and opportunities

Plasma etching is an essential semiconductor manufacturing technology required to enable the current microelectronics industry. Along with lithographic patterning, thin-film formation methods, and others, plasma etching has dynamically evolved to meet the exponentially growing demands of the microelectronics industry that enables modern society. At this time, plasma etching faces a period of unprecedented changes owing to numerous factors, including aggressive transition to three-dimensional (3D) device architectures, process precision approaching atomic-scale critical dimensions, introduction of new materials, fundamental silicon device limits, and parallel evolution of post-CMOS approaches. The vast growth of the microelectronics industry has emphasized its role in addressing major societal challenges, including questions on the sustainability of the associated energy use, semiconductor manufacturing related emissions of greenhouse gases, and others. The goal of this article is to help both define the challenges for plasma etching and point out effective plasma etching technology options that may play essential roles in defining microelectronics manufacturing in the future. The challenges are accompanied by significant new opportunities, including integrating experiments with various computational approaches such as machine learning/artificial intelligence and progress in computational approaches, including the realization of digital twins of physical etch chambers through hybrid/coupled models. These prospects can enable innovative solutions to problems that were not available during the past 50 years of plasma etch development in the microelectronics industry. To elaborate on these perspectives, the present article brings together the views of various experts on the different topics that will shape plasma etching for microelectronics manufacturing of the future.

Engineering↗

NASA NTRS2017

Brushing Your Spacecrafts Teeth: A Review of Biological Reduction Processes for Planetary Protection Missions

Much like keeping your teeth clean, where you brush away biofilms that your dentist calls plaque, there are various methods to clean spaceflight hardware of biological contamination, known as biological reduction processes. Different approaches clean your hardwares teeth in different ways and with different levels of effectiveness. We know that brushing at home with a simple toothbrush is convenient and has a different level of impact vs. getting your teeth cleaned at the dentist. In the same way, there are some approaches to biological reduction that may require simple tools or more complex implementation approaches (think about sonicating or just soaking your dentures, vs. brushing them). There are also some that are more effective for different degrees of cleanliness and still some that have materials compatibility concerns. In this article, we review known and NASA-certified approaches for biological reduction, pointing out materials compatibility concerns and areas where additional research is needed.

Pugel, D.E. (Betsy)↗

NASA NTRS2021

Analysis of Arc Welding Process in Space

This work is motivated by NASA plans to conduct welding experiments on the ISS. It is expected that deployment of welding and additive manufacturing technologies in the space environment has the potential to revolutionise how orbiting platforms are designed, manufactured, and assembled. However, the structure, composition and quality of a weld is extremely dependent on the environment and can be difficult to control in space. Shielding gases would also be tough to manage as gases behave differently in zero gravity and airless environments. Additional points of concern are related to the spatter and sparks dynamics in space. Therefore, there is a need for a more basic understanding of welding processes by computational modelling. To provide such an insight we developed state of art models of the ARC torch, droplet detachment and transfer, and the melt pool build up using magnetohydrodynamics approximation and level set method for two-phase liquid metal/-gas flow modelling. Two finite element models were built using 2D axisymmetric geometry in COMSOL Multiphysics®: (i) stationary model of the ARC torch and (ii) dynamical model of droplet detachment and transfer. Both models demonstrate reasonable agreement with earlier experimental observations and high sensitivity to the temperature dependence of the thermophysical parameters on the system materials. The models were used to provide physical insight into ARC welding in various environments and geometries. It was shown, in particular, that there is a significant probability of gas bubbles trapping in the meltpool and a possibility of unbounded wondering of sparks in the welding chamber in zero gravity. In addition, we estimated metal evaporation rate that may be hazardous in the confined environment of the ISS. These issues raise concern of quality of the weld and safety for ISS applications.

ARC welding↗

DOE OSTI2022

Rotational flexural strength of cylindrical brittle specimens

Conventional static flexural strength testing of brittle cylindrical rods only subjects a small fraction of the entire specimen's area or volume to the maximum tensile stress. Thus, a nonconservative measured strength likely results since most flaws on the surface or in the bulk are not subjected to a sufficiently high tensile stress that can cause fracture. Here, to mitigate this, a rotational flexural tester and corresponding test method were developed whereby rotation and monotonically increasing three-point flexure were superimposed to investigate fracture response of solid glass cylinders. This combination of rotation and flexure subjects more area and volume of a cylindrical test specimen to tensile stress than a standard static (nonrotating) flexural test. As anticipated, failure stresses were lower for the rotational flexural test. Expressions for effective area and volume are provided for rotating solid rods and tubes subjected to three-point, four-point, uniform, and uniformly distributed load bending configurations.

36 MATERIALS SCIENCE↗

DOE OSTI2020

Field controlled direct-write electrospinning

The invention provides a method for producing fibers, the method having the steps of producing electrospun fiber; and directing the fiber to a plurality of targets, whereby only one of the targets is grounded at any one time. Also provided is a system for producing anisotropic fibers having a reservoir of electrospun fiber constituent' wherein an egress point of the reservoir is electrically charged; a plurality of electrodes opposed to the egress point, wherein only one of the electrodes is grounded at any one time while the remaining electrodes are at an initial floating voltage state; and a target substrate disposed between the egress point and the plurality of electrodes.

36 MATERIALS SCIENCE↗

DOE OSTI2022

Ab Initio Phase Diagram of Chromium to 2.5 TPa

Chromium possesses remarkable physical properties such as hardness and corrosion resistance. Chromium is also a very important geophysical material as it is assumed that lighter Cr isotopes were dissolved in the Earth’s molten core during the planet’s formation, which makes Cr one of the main constituents of the Earth’s core. Unfortunately, Cr has remained one of the least studied 3d transition metals. In a very recent combined experimental and theoretical study (Anzellini et al., Scientific Reports, 2022), the equation of state and melting curve of chromium were studied to 150 GPa, and it was determined that the ambient body-centered cubic (bcc) phase of crystalline Cr remains stable in the whole pressure range considered. However, the importance of the knowledge of the physical properties of Cr, specifically its phase diagram, necessitates further study of Cr to higher pressure. In this work, using a suite of ab initio quantum molecular dynamics (QMD) simulations based on the Z methodology which combines both direct Z method for the simulation of melting curves and inverse Z method for the calculation of solid–solid phase transition boundaries, we obtain the theoretical phase diagram of Cr to 2.5 TPa. We calculate the melting curves of the two solid phases that are present on its phase diagram, namely, the lower-pressure bcc and the higher-pressure hexagonal close-packed (hcp) ones, and obtain the equation for the bcc-hcp solid–solid phase transition boundary. We also obtain the thermal equations of state of both bcc-Cr and hcp-Cr, which are in excellent agreement with both experimental data and QMD simulations. We argue that 2180 K as the value of the ambient melting point of Cr which is offered by several public web resources (“Wikipedia,” “WebElements,” “It’s Elemental,” etc.) is most likely incorrect and should be replaced with 2135 K, found in most experimental studies as well as in the present theoretical work.

equation of state↗

DOE OSTI2022

New proposed ITER divertor design using carbon insert on tungsten to mitigate ELMs and secondary radiation effects on nearby components

Abstract Building a successful device for the magnetic fusion energy production is a great challenge. ITER is an international project of the tokamak based magnetic fusion design being developed for the demonstration of the feasibility of thermonuclear technologies for future realization of successful commercial fusion energy. A key obstacle to a successful magnetic fusion energy production is however, the performance during abnormal events including plasma disruptions and edge-localized modes (ELMs). A credible reactor design must tolerate at least a few of these transient events without serious consequences such as melting of the structure. This paper investigates and compares the performance of the current ITER tokamak design during two types of transient events, i.e., ELMs occurring at normal operation and disruptions during abnormal operation. We simulated the divertor components response using our integrated 3D HEIGHTS package. The simulations include self-consistent modeling of the interaction of the released core plasma particles with the initial solid divertor material, energy deposition processes, vaporization of divertor material, secondary plasma formation and MHD evolution, incident core particles collisions and scattering from this dense secondary plasma, photon radiation of secondary plasma, and the resulting heat loads on nearby components. Our simulations showed that using a small carbon insert around the strike point can significantly reduce the overall expected damage on the tungsten dome structure, reflector plates, and prevent tungsten vaporization and its potential core plasma contamination.

47 OTHER INSTRUMENTATION↗

DOE OSTI2022

Experimental and theoretical studies of native deep-level defects in transition metal dichalcogenides

Abstract Transition metal dichalcogenides (TMDs), especially in two-dimensional (2D) form, exhibit many properties desirable for device applications. However, device performance can be hindered by the presence of defects. Here, we combine state of the art experimental and computational approaches to determine formation energies and charge transition levels of defects in bulk and 2D MX 2 (M = Mo or W; X = S, Se, or Te). We perform deep level transient spectroscopy (DLTS) measurements of bulk TMDs. Simultaneously, we calculate formation energies and defect levels of all native point defects, which enable identification of levels observed in DLTS and extend our calculations to vacancies in 2D TMDs, for which DLTS is challenging. We find that reduction of dimensionality of TMDs to 2D has a significant impact on defect properties. This finding may explain differences in optical properties of 2D TMDs synthesized with different methods and lays foundation for future developments of more efficient TMD-based devices.

36 MATERIALS SCIENCE↗

NASA NTRS2006

Repairing Fractured Bones by Use of Bioabsorbable Composites

A proposed method of surgical repair of fractured bones would incorporate recent and future advances in the art of composite materials. The composite materials used in this method would be biocompatible and at least partly bioabsorbable: that is, during the healing process following surgery, they would be wholly or at least partly absorbed into the bones and other tissues in which they were implanted. Relative to the traditional method, the proposed method would involve less surgery, pose less of a risk of infection, provide for better transfer of loads across fracture sites, and thereby promote better healing while reducing the need for immobilization by casts and other external devices. One requirement that both the traditional and proposed methods must satisfy is to fix the multiple segments of a broken bone in the correct relative positions. Mechanical fixing techniques used in the traditional method include the use of plates spanning the fracture site and secured to the bone by screws, serving of wire along the bone across the fracture site, insertion of metallic intramedullary rods through the hollow portion of the fractured bone, and/or inserting transverse rods through the bone, muscle, and skin to stabilize the fractured members. After the bone heals, a second surgical operation is needed to remove the mechanical fixture(s). In the proposed method, there would be no need for a second surgical operation. The proposed method is based partly on the observation that in the fabrication of a structural member, it is generally more efficient and reliable to use multiple small fasteners to transfer load across a joint than to use a single or smaller number of larger fasteners, provided that the stress fields of neighboring small fasteners do not overlap or interact. Also, multiple smaller fasteners are more reliable than are larger and fewer fasteners. However, there is a trade-off between structural efficiency and the cost of insertion time and materials. The proposed method is further based partly on the conjecture that through-the-thickness reinforcements could be excellent for fixing bone segments for surgical repair. The through-the-thickness reinforcements would superficially resemble nails in both form and function. Denoted small-diameter rods (SDRs) to distinguish them from other narrow rods, these reinforcements would be shot or otherwise inserted through adjacent segments of fractured bone to fix them in their correct relative positions (see figure). Shot insertion would be effected by use an applicator that would amount to a miniaturized and highly refined version of the pneumatic guns often used in carpentry to drive nails and brads. The applicator, envisioned to be about the size of a ball-point-pen, would be driven by pressurized carbon dioxide. To further promote stabilization of the segments, layers of bone glue could be applied to the fracture surfaces prior to insertion of the SDRs. The bone glue could be therapeutically loaded with chemicals to promote growth of bone and fight infection

Farley, Gary L.↗

NASA NTRS2017

Brushing Your Spacecrafts Teeth: A Review of Biological Reduction Processes for Planetary Protection Missions

Much like keeping your teeth clean, where you brush away biofilms that your dentist calls "plaque," there are various methods to clean spaceflight hardware of biological contamination, known as biological reduction processes. Different approaches clean your hardware's "teeth" in different ways and with different levels of effectiveness. We know that brushing at home with a simple toothbrush is convenient and has a different level of impact vs. getting your teeth cleaned at the dentist. In the same way, there are some approaches to biological reduction that may require simple tools or more complex implementation approaches (think about sonicating or just soaking your dentures, vs. brushing them). There are also some that are more effective for different degrees of cleanliness and still some that have materials compatibility concerns. In this article, we review known and NASA-certified approaches for biological reduction, pointing out materials compatibility concerns and areas where additional research is needed.

Pugel, D. E. (Betsy)↗

NASA NTRS2020

Solution of the Nonlinear High-Fidelity Generalized Method of Cells Micromechanics Relations via Order-Reduction Techniques

The High-Fidelity Generalized Method of Cells (HFGMC) is one technique, distinct from traditional finite element approaches, for accurately simulating nonlinear composite material behavior. In this work, the HFGMC global system of equations for doubly-periodic repeating unit cells with nonlinear constituents has been reduced in size through the novel application of a Petrov-Galerkin Proper Orthogonal Decomposition order-reduction scheme in order to improve its computational efficiency. Order-reduced models of an E-glass/Nylon 12 composite led to a 4.8 to 6.3x speedup in the equation assembly/solution runtime while maintaining model accuracy. This corresponded to a 21 to 38 percent reduction in total runtime. The significant difference in assembly/solution and total runtimes was attributed to the evaluation of integration point inelastic field quantities; this step was identical between the unreduced and order-reduced models. Nonetheless, order-reduced techniques offer the potential to significantly improve the computational efficiency of multiscale calculations.

Ricks, Trenton M.↗

NASA NTRS2019

Experimental and Numerical Analysis of Skin-Stiffener Separation Using a Seven-Point Bend Configuration

Skin-stiffener separation in stiffened composite panels consists of a complex interaction between multiple scales of progressive damage and failure mechanisms. This work used a superposed cohesive element method of modeling resistance curve effects that represents the structural interface of a unidirectional tape skin and a fabric stiffener. Finite element models using cohesive elements with input properties obtained from tape-to-fabric interface characterization tests were compared to experimental results of a stable skin-stiffener separation characterization test using a seven-point bend fixture. This fixture deformed the stiffened panel specimens into a buckled configuration which induced mixed-mode interlaminar stress states at the skin-stiffener interface. The advantage of this fixture was the potential for more stable damage initiation and delamination growth compared to a stringer-stiffened panel under axial compression. Use of the superposed cohesive elements showed promise, but the characterization of interface material properties as input to the cohesive elements remains a crucial component to be investigated to ensure accurate prediction of skin-stiffener separation.

Kosztowny, Cyrus J. R.↗

DOE OSTI2024

Integrated top-down process and voxel-based microstructure modeling for Ti-6Al-4V in laser wire direct energy deposition process

Laser-wire metal additive manufacturing (AM) is one of the ideal direct energy deposition (DED) processes for creating large-scale parts with a medium level of complexity. However, the DED process involves complex thermal signatures and wide length scales making the fabrication of realistic AM components and part qualification often reliant on experimental trial-and-error optimization. While experimental measurements over the full volume of a part are valuable and necessary, measuring the entire area of a part is significantly laborious and practically infeasible, particularly for large parts in terms of cost and rapid qualification. Therefore, in this work, we developed an effective thermal and microstructure modeling framework based on the Johnson–Mehl-Avrami-Kolmogorov (JMAK) and Koistinen & Marburger (KM) models through a top-down approach that considers plate distortion-affected thermal profiles. A voxel-by-voxel simulation method is used to predict individual phase fractions of Ti-6Al-4 V. The predicted results were validated through detailed metallurgical measurements. A combined voxel-by-voxel approach with a sparse data reconstruction technique produced a near-perfect reconstruction of the original data. This approach anticipates a significant reduction in data points and computation time and resources. Lastly, we conclude with potential extensions of this work to other modeling efforts.

36 MATERIALS SCIENCE↗

DOE OSTI2021

Evaluating the benefits of kinetic Monte Carlo and microkinetic modeling for catalyst design studies in the presence of lateral interactions

Popular computational catalyst design strategies rely on the identification of reactivity descriptors, which can be used along with Brønsted–Evans–Polanyi (BEP) and scaling relations as input to a microkinetic model (MKM) to make predictions for activity or selectivity trends. The main benefit of this approach is related to the inherent dimensionality reduction of the large material space to just a few catalyst descriptors. Conversely, it is well documented that a small set of descriptors is insufficient to capture the intricacies and complexities of a real catalytic system. The inclusion of coverage effects through lateral adsorbate-adsorbate interactions can narrow the gap between simplified descriptor predictions and real systems, but mean-field MKMs cannot properly account for local coverage effects. This shortcoming of the mean-field approximation can be rectified by switching to a lattice-based kinetic Monte Carlo (kMC) method using cluster expansion representation of adsorbate–adsorbate lateral interactions. Using the prototypical CO oxidation reaction as an example, we critically evaluate the benefits of kMC over MKM in terms of trend predictions and computational cost when using only a small set of input parameters. After confirming that in the absence of lateral interactions the kMC and MKM approaches yield identical trends and mechanistic information, we observed substantial differences between the two kinetic models when lateral interactions were introduced. Here, the mean-field implementation applies coverage corrections directly to the descriptors, causing an artificial overprediction of the activity of strongly binding metals. In contrast, the cluster expansion in kMC implementation can differentiate among the highly active metals but it is very sensitive to the set of included interaction parameters. Considering that computational screening relies on a minimal set of descriptors, for which MKM makes reasonable trend predictions at a ca. three orders of magnitude lower computational cost than kMC, the MKM approach does provide a better entry point for computational catalyst design.

36 MATERIALS SCIENCE↗

NASA NTRS1996

Near-Net Forging Technology Demonstration Program

Significant advantages in specific mechanical properties, when compared to conventional aluminum (Al) alloys, make aluminum-lithium (Al-Li) alloys attractive candidate materials for use in cryogenic propellant tanks and dry bay structures. However, the cost of Al-Li alloys is typically five times that of 2219 aluminum. If conventional fabrication processes are employed to fabricate launch vehicle structure, the material costs will restrict their utilization. In order to fully exploit the potential cost and performance benefits of Al-Li alloys, it is necessary that near-net manufacturing methods be developed to off-set or reduce raw material costs. Near-net forging is an advanced manufacturing method that uses elevated temperature metal movement (forging) to fabricate a single piece, near-net shape, structure. This process is termed 'near-net' because only a minimal amount of post-forge machining is required. The near-net forging process was developed to reduce the material scrap rate (buy-to-fly ratio) and fabrication costs associated with conventional manufacturing methods. The goal for the near-net forging process, when mature, is to achieve an overall cost reduction of approximately 50 percent compared with conventional manufacturing options for producing structures fabricated from Al-Li alloys. This NASA Marshall Space Flight Center (MSFC) sponsored program has been a part of a unique government / industry partnership, coordinated to develop and demonstrate near-net forging technology. The objective of this program was to demonstrate scale-up of the near-net forging process. This objective was successfully achieved by fabricating four integrally stiffened, 170- inch diameter by 20-inch tall, Al-Li alloy 2195, Y-ring adapters. Initially, two 2195 Al-Li ingots were converted and back extruded to produce four cylindrical blockers. Conventional ring rolling of the blockers was performed to produce ring preforms, which were then contour ring rolled to produce 'contour preforms'. All of the contour preforms on this first-of-a-kind effort were imperfect, and the ingot used to fabricate two of the preforms was of an earlier vintage. As lessons were learned throughout the program, the tooling and procedures evolved, and hence the preform quality. Two of the best contour preforms were near- net forged to produce a process pathfinder Y-ring adapter and a 'mechanical properties pathfinder' Y-ring adapter. At this point, Lockheed Martin Astronautics elected to procure additional 2195 aluminum-lithium ingot of the latest vintage, produce two additional preforms, and substitute them for older vintage material non-perfectly filled preforms already produced on this contract. The existing preforms could have been used to fulfill the requirements of the contract.

Hall, I. Keith↗

DOE OSTI2025

Automated Scoring of Morphological Changes in Images of Pentaerythritol Tetranitrate

Recent advances in characterization techniques that generate large datasets of material microstructure images require robust, automated image-processing. We applied an unsupervised anomaly detection method called feature anomaly detection system (FADS) to automatically detect and quantify microstructure changes in images of the explosive pentaerythritol tetranitrate (PETN) aged at various temperatures. We demonstrated the FADS approach on two-dimensional images extracted from computed tomography scans, but the same technique can be readily applied to other imaging modalities. FADS calculates anomaly scores on the basis of differences in filter activations of nominal and test data in pretrained convolutional neural networks. The FADS scores successfully differentiated between pristine PETN and PETN aged at a temperature where material coarsening occurred. Morphological metric analysis of segmented images verified observed trends in FADS scores as a function of aging temperature and aging time, specifically by calculating volume fractions, specific boundary lengths, two-point correlation functions, and local thicknesses. Here, the FADS technique has two important advantages compared to traditional morphological analysis: First, it uses grayscale images as input, rather than images that are segmented to separate the appropriate phases; and second, FADS scores capture any type of changes among image sets, rather than requiring prior knowledge or selection of a relevant set of metrics.

Accelerated aging↗

NASA NTRS1989

Electronic structures of HgTe and CdTe surfaces and HgTe/CdTe interfaces

A Green's-function method has been used to study the surface and interface electronic structures of the II-VI compounds HgTe and CdTe. Localized surface and resonance states near the cation-terminated (100) surface of CdTe and the anion-terminated surface of HgTe have been found for the ideal surfaces. The energies and strengths of these surface states are altered by surface perturbations. The bulk states near the surface are drastically modified by the creation of the surface, but the band gaps remain unchanged. Numerical evaluation of the local densities of states at the Gamma and J points shows that, at the (100) interface of HgTe/CdTe, the previously observed surface states are no longer present. However, in the interface region, bulk states of one material penetrate some distance into the other material.

Schick, J. T.↗

NASA NTRS2010

Simulated Service and Stress Corrosion Cracking Testing for Friction Stir Welded Spun Formed Domes

Simulated service testing (SST) development was required to help qualify a new 2195 aluminum lithium (Al-Li) alloy spin forming dome fabrication process for the National Aeronautics and Space Administration (NASA) Exploration Development Technology Program. The application for the technology is to produce high strength low weight tank components for NASA s next generation launch vehicles. Since plate material is not currently manufactured large enough to fabricate these domes, two plates are joined by means of friction stir welding. The plates are then pre-contour machined to near final thicknesses allowing for a thicker weld land and anticipating the level of stretch induced by the spin forming process. The welded plates are then placed in a spin forming tool and hot stretched using a trace method producing incremental contours. Finally the dome receives a room temperature contour stretch to final dimensions, heat treatment, quenching, and artificial aging to emulate a T-8 condition of temper. Stress corrosion cracking (SCC) tests were also performed by alternate immersion in a sodium chloride (NaCl) solution using the typical double beam assembly and with 4-point loaded specimens and use of bent-beam stress-corrosion test specimens under alternate immersion conditions. In addition, experiments were conducted to determine the threshold stress intensity factor for SCC (K(sub ISCC)) which to our knowledge has not been determined previously for Al-Li 2195 alloy. The successful simulated service and stress corrosion testing helped to provide confidence to continue to Ares 1 scale dome fabrication

Stewart, Thomas J.↗