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At least 919 records · Page 51

All sources NASA NTRS DOE OSTI

DOE OSTI2016

Growth and coalescence control of inclined c-axis polar and semipolar GaN multilayer structures grown on Si(111), Si(112), and Si(115) by metalorganic vapor phase epitaxy

Herein, silicon substrates in alternative orientations from the commonly used Si(111) were used to enable the growth of polar and semipolar GaN-based structures by the metalorganic vapor phase epitaxy method. Specifically, Si(112) and Si(115) substrates were used for the epitaxial growth of nitride multilayer structures, while the same layer schemes were also deposited on Si(111) for comparison purposes. Multiple approaches were studied to examine the influence of the seed layers and the growth process conditions upon the final properties of the GaN/Si(11x) templates. Scanning electron microscope images were acquired to examine the topography of the deposited samples. It was observed that the substrate orientation and the process conditions allow control to produce an isolated GaN block growth or a coalesced layer growth, resulting in inclined c-axis GaN structures under various forms. The angles of the GaN c-axis inclination were determined by x-ray diffraction measurements and compared with the results obtained from the analysis of the atomic force microscope (AFM) images. The AFM image analysis method to determine the structure tilt was found to be a viable method to estimate the c-axis inclination angles of the isolated blocks and the not-fully coalesced layers. The quality of the grown samples was characterized by the photoluminescence method conducted at a wide range of temperatures from 77 to 297 K, and was correlated with the sample degree of coalescence. Using the free-excitation peak positions plotted as a function of temperature, analytical Bose-Einstein model parameters were fitted to obtain further information about the grown structures.

42 ENGINEERING↗

DOE OSTI2017

Modeling high-efficiency extreme ultraviolet etched multilayer phase-shift masks

Achieving high-throughput extreme ultraviolet (EUV) patterning remains a major challenge due to low source power; phase-shift masks can help solve this challenge for dense features near the resolution limit by creating brighter images than traditional absorber masks when illuminated with the same source power. We explore applications of etched multilayer phase-shift masks for EUV lithography, both in the current-generation 0.33 NA and next-generation 0.55 NA systems. We derive analytic formulas for the thin-mask throughput gains, which are 2.42× for lines and spaces and 5.86× for contacts compared with an absorber mask with dipole and quadrupole illumination, respectively. Using rigorous finite-difference time-domain simulations, we quantify variations in these gains by pitch and orientation, finding 87% to 113% of the thin-mask value for lines and spaces and a 91% to 99% for contacts. We introduce an edge placement error metric, which accounts for CD errors, relative feature motion, and telecentricity errors, and use this metric both to optimize mask designs for individual features and to explore which features can be printed on the same mask. Furthermore, we find that although partial coherence shrinks the process window, at an achievable sigma of 0.2 we obtain a depth of focus of 340 nm and an exposure latitude of 39.2%, suggesting that partial coherence will not limit the feasibility of this technology. Finally, we show that many problems such as sensitivity to etch uniformity can be greatly mitigated using a central obscuration in the imaging pupil.

42 ENGINEERING↗

DOE OSTI2013

Quality assurance of proton beams using a multilayer ionization chamber system

Purpose: The measurement of percentage depth-dose (PDD) distributions for the quality assurance of clinical proton beams is most commonly performed with a computerized water tank dosimetry system with ionization chamber, commonly referred to as water tank. Although the accuracy and reproducibility of this method is well established, it can be time-consuming if a large number of measurements are required. In this work the authors evaluate the linearity, reproducibility, sensitivity to field size, accuracy, and time-savings of another system: the Zebra, a multilayer ionization chamber system.Methods: The Zebra, consisting of 180 parallel-plate ionization chambers with 2 mm resolution, was used to measure depth-dose distributions. The measurements were performed for scattered and scanned proton pencil beams of multiple energies delivered by the Hitachi PROBEAT synchrotron-based delivery system. For scattered beams, the Zebra-measured depth-dose distributions were compared with those measured with the water tank. The principal descriptors extracted for comparisons were: range, the depth of the distal 90% dose; spread-out Bragg peak (SOBP) length, the region between the proximal 95% and distal 90% dose; and distal-dose fall off (DDF), the region between the distal 80% and 20% dose. For scanned beams, the Zebra-measured ranges were compared with those acquired using a Bragg peak chamber during commissioning.Results: The Zebra demonstrated better than 1% reproducibility and monitor unit linearity. The response of the Zebra was found to be sensitive to radiation field sizes greater than 12.5 × 12.5 cm; hence, the measurements used to determine accuracy were performed using a field size of 10 × 10 cm. For the scattered proton beams, PDD distributions showed 1.5% agreement within the SOBP, and 3.8% outside. Range values agreed within −0.1 ± 0.4 mm, with a maximum deviation of 1.2 mm. SOBP length values agreed within 0 ± 2 mm, with a maximum deviation of 6 mm. DDF values agreed within 0.3 ± 0.1 mm, with a maximum deviation of 0.6 mm. For the scanned proton pencil beams, Zebra and Bragg peak chamber range values demonstrated agreement of 0.0 ± 0.3 mm with a maximum deviation of 1.3 mm. The setup and measurement time for all Zebra measurements was 3 and 20 times less, respectively, compared to the water tank measurements.Conclusions: Our investigation shows that the Zebra can be useful not only for fast but also for accurate measurements of the depth-dose distributions of both scattered and scanned proton beams. The analysis of a large set of measurements shows that the commonly assessed beam quality parameters obtained with the Zebra are within the acceptable variations specified by the manufacturer for our delivery system.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

DOE OSTI2014

SU-E-T-561: Development of Depth Dose Measurement Technique Using the Multilayer Ionization Chamber for Spot Scanning Method

Purpose: To develop a measurement technique which suppresses the difference between profiles obtained with a multilayer ionization chamber (MLIC) and with a water phantom. Methods: The developed technique multiplies the raw MLIC data by a correction factor that depends on the initial beam range and water equivalent depth. The correction factor is derived based on a Bragg curve calculation formula considering range straggling and fluence loss caused by nuclear reactions. Furthermore, the correction factor is adjusted based on several integrated depth doses measured with a water phantom and the MLIC. The measured depth dose profiles along the central axis of the proton field with a nominal field size of 10 by 10 cm were compared between the MLIC using the new technique and the water phantom. The spread out Bragg peak was 20 cm for fields with a range of 30.6 cm and 6.9 cm. Raw MLIC data were obtained with each energy layer, and integrated after multiplying by the correction factor. The measurements were performed by a spot scanning nozzle at Nagoya Proton Therapy Center, Japan. Results: The profile measured with the MLIC using the new technique is consistent with that of the water phantom. Moreover, 97% of the points passed the 1% dose /1mm distance agreement criterion of the gamma index. Conclusion: We have demonstrated that the new technique suppresses the difference between profiles obtained with the MLIC and with the water phantom. It was concluded that this technique is useful for depth dose measurement in proton spot scanning method.

07 ISOTOPE AND RADIATION SOURCES↗

DOE OSTI2023

Autonomous alignment and healing in multilayer soft electronics using immiscible dynamic polymers

Self-healing soft electronic and robotic devices can, like human skin, recover autonomously from damage. While current devices use a single type of dynamic polymer for all functional layers to ensure strong interlayer adhesion, this approach requires manual layer alignment. In this study, we used two dynamic polymers, which have immiscible backbones but identical dynamic bonds, to maintain interlayer adhesion while enabling autonomous realignment during healing. These dynamic polymers exhibit a weakly interpenetrating and adhesive interface, whose width is tunable. When multilayered polymer films are misaligned after damage, these structures autonomously realign during healing to minimize interfacial free energy. Finally, we fabricated devices with conductive, dielectric, and magnetic particles that functionally heal after damage, enabling thin-film pressure sensors, magnetically assembled soft robots, and underwater circuit assembly.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2026

Superconducting phase diagram of multilayer square-planar nickelates

The discovery of superconductivity in square-planar nickelates has offered a rich materials platform to explore the origins of high-temperature superconductivity. However, experimental investigations have largely been limited to the infinite-layer R NiO 2 ( R , rare earth) nickelates. For this work we constructed a phase diagram of multilayer square-planar Nd n+1 Ni n O 2n+2 compounds and found signatures of superconductivity for dimensionality n = 4 to 8. Upon decreasing n , the superconducting anisotropy evolves owing to 4ƒ electron effects, and electronic structure characteristics approach cuprate-like behavior. Magnetic fluctuations persist from within the superconducting regime and into the overdoped, nonsuperconducting regime. The superconducting regime overlaps with that of chemically doped infinite-layer nickelates, demonstrating underlying commonalities as well as differences across varying structural realizations of square-planar nickelates. Our work establishes this layered template for creating new nickel-based superconductors.

36 MATERIALS SCIENCE↗

DOE OSTI2018

IR Spectroscopic Study of Interatomic Interaction in [(CoFeB){sub 60}C{sub 40}/SiO{sub 2}]{sub 200} and [(CoFeB){sub 34}(SiO{sub 2}){sub 66}/C]{sub 46} Multilayer Nanostructures with Metal-Containing Composite Layers

This paper presents an IR spectroscopic study of chemical bonds between components of amorphous [(CoFeB){sub 60}C{sub 40}/SiO{sub 2}]{sub 200} and [(CoFeB){sub 34}(SiO{sub 2}){sub 66}/C]{sub 46} multilayer nanostructures (MNS’s) made up of metal-containing composite layers and different interlayers, which influence their electromagnetic properties. Our results demonstrate that, even though the MNS’s have identical elemental compositions, their IR spectra differ significantly. The reason for this is that the main contribution to the IR spectrum of the [(CoFeB){sub 60}C{sub 40}/SiO{sub 2}]{sub 200} MNS is made by its SiO{sub 2} interlayers. The formation of other bonds with oxygen and silicon is blocked by the carbon present in the (CoFeB){sub 60}C{sub 40} composite layers, as evidenced by the presence of the strongest mode in the IR spectra of this structure, which corresponds to boron carbide, BC. The considerable intensity redistribution to the low-frequency region in the IR spectrum of the [(CoFeB){sub 34}(SiO{sub 2}){sub 66}/C]{sub 46} MNS, containing carbon interlayers, is due to the incorporation of nominal SiO2 into the metal-containing composite layers and the partial redistribution of oxygen bonds from the SiO{sub 2} to the 3d transition metals, resulting in the formation of metal oxides and a silicon suboxide. The interaction of the carbon present in the interlayers between the composite layers with elements of the composite layers, in particular with boron, is considerably weaker in comparison with the other MNS, [(CoFeB){sub 60}C{sub 40}/SiO{sub 2}]{sub 200}, which has oxide interlayers.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

DOE OSTI2018

Calculation of Transfer Functions of Multilayer Biotissues in the Problems of Correction of Their Fluorescence Spectra

A method for rapid calculation of a flux of stimulated fluorescence of a multilayer optically dense medium with inhomogeneous distribution of the fluorophore has been developed. The light field in the medium at the excitation wavelength of fluorescence is represented by a superposition of incident collimated, incident diffuse, and reflected diffuse fluxes. A two-stream approximation is used to describe the light field in the medium at the wavelength of emission of the fluorescence. Fluxes in adjacent elementary layers of the medium and on its surface are connected by simple matrix operators that are obtained using a combination of engineering approaches of radiation-transfer theory and single-scattering approximation. The calculations of fluorescence fluxes of a four-layer biotissue that are excited and recorded at 400–800 nm are compared with their Monte Carlo simulation with a discrepancy of 1%. The effect of the propagation medium on the fluorescence spectra of 5-ALA-induced protoporphyrin IX that are recorded from human skin was studied, and a technique for their correction that is based on measurements and quantitative analysis of the diffuse reflectance spectrum of skin was proposed.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2018

An Ellipsoidal Model for Small Multilayer Particles

This paper presents an ellipsoidal model that is constructed for small layered nonspherical particles and methods for constructing “effective” multilayer ellipsoids, the light-scattering properties of which would be close to the corresponding properties of original particles. In the case of axisymmetric particles, prolate or oblate spheroids (ellipsoids of revolution) are implied. Numerical calculations of the polarizability and scattering cross sections of small layered nonspherical particles, including nonconfocal (similar) spheroids, Chebyshev particles, and pseudospheroids, are performed by different approximate and rigorous methods. Approximate approaches involve the use of an ellipsoidal model, in which the polarizability of a layered particle is determined in two ways. In the first case, the polarizability is calculated in the approximation of confocal spheroids, while, in the second case, it is sought as a linear combination of the polarizabilities of embedded spheroids proportionally to the volumes of layers. Among rigorous methods, the extended boundary conditions method and the generalized separation of variables method are applied. On the basis of a comparison of the results obtained with rigorous and approximate approaches, their drawbacks and advantages are discussed.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2018

Light Scattering by Small Multilayer Particles: A Generalized Separation of Variables Method

A Rayleigh approximation is constructed for light scattering by small multilayer axisymmetric particles, in which their polarizability is determined by the generalized separation of variables method (SVM). In this method, scalar potentials, the gradients of which yield the electric-field strengths, are represented as expansions in spherical harmonics of the Laplace equation. Unknown coefficients of expansions are determined from the boundary conditions, which are reduced to infinite systems of linear algebraic equations (ISLAEs), since the separation of variables is incomplete. The T matrix of the electrostatic problem, principal element T{sub 11} of which is proportional to the particle polarizability, is determined. The necessary condition for the ISLAEs solvability for the SVM coincides with the condition of the correct application of the extended boundary conditions method (EBCM). However, numerical calculations in which finite-dimensional (i.e., reduced) systems are solved, yield different results in ranges of variation of parameters that are close to the boundary of the range of applicability. An analysis of the numerical calculations of the scattering and absorption cross sections for two-layer confocal spheroids, an exact solution for which can be obtained using spheroidal harmonics, shows that the SVM is preferable to the EBCM. It turned out that the proposed method yields workable results in a wider range of variation of parameters. Even outside the range of applicability, in which it should be regarded as a certain approximate solution, its use in a number of cases is quite acceptable. Additional calculations for three-layer nonconfocal spheroids, as well as for three-layer similar pseudospheroids and Pascal’s snails, which can be obtained from spheroids as a result of the inversion with respect to the coordinate origin and one of the foci, respectively, confirm these inferences. We note that, for certain values of the parameters, the shapes of the latter particles are nonconvex.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2012

Basic analysis of reflectometry data software package for the analysis of multilayered structures according to reflectometry data

The main principles of developing the Basic Analysis of Reflectometry Data (BARD) software package, which is aimed at obtaining a unified (standardized) tool for analyzing the structure of thin multilayer films and nanostructures of different nature based on reflectometry data, are considered. This software package contains both traditionally used procedures for processing reflectometry data and the authors' original developments on the basis of new methods for carrying out and analyzing reflectometry experiments. The structure of the package, its functional possibilities, examples of application, and prospects of development are reviewed.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2013

Multilayer X-ray mirrors for the (4.4-5)-nm carbon-window spectral region

Cr/C-based multilayer X-ray mirrors intended for the reflection of X-ray radiation in the 'carbon-window' spectral region ({lambda} = 4.4-5 nm) are fabricated and studied. The structures are formed by magnetron sputtering at different deposition parameters. Under normal incidence, record reflection coefficients up to 15% are reached. The structural parameters of the mirrors are investigated by reflectometry at wavelengths of 0.154 and 4.47 nm.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2013

Investigation into the correlation factor of substrate and multilayer film surfaces by atomic force microscopy

A method for studying the correlations between substrate and film-coating profiles by atomic force microscopy, which makes it possible to calculate the correlation factor (a function of spatial frequency), has been developed. The spatial-frequency range in which the correlation factor can be reliably calculated is established. The method proposed is used to calculate the dependence of the correlation factor on spatial frequency for multilayer interference mirror elements.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2013

Strain relaxation in multilayer III–N structures on Si(111) substrates

X-ray diffractometry and X-ray scattering reciprocal space maps have been used to study strain relaxation in a complex buffer composed of seven intermediate layers of Al{sub x}Ga{sub 1−x}N composition with different values of x, decreasing with an increase in the distance from the substrate. The layers have been grown by hydride metalorganic vapor phase epitaxy on silicon and sapphire substrates. Differences in the structural quality of the first four layers of a multilayer buffer grown on different substrates have been revealed. A gradual smoothing out of these differences in the next three layers with an increase in the layer serial number has been shown. The last grown intermediate Al{sub x}Ga{sub 1−x}N layer and the GaN layer grown on it have identical thicknesses and degrees of mosaicity, regardless of the substrate type. Device structures grown on a complex buffer demonstrate emission in approximately the same wavelength range.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2016

Preparation and analysis of multilayer composites based on polyelectrolyte complexes

A method for preparing multilayer film composites based on chitosan has been developed by the example of polymer pairs: chitosan–hyaluronic acid, chitosan–alginic acid, and chitosan–carrageenan. The structure of the composite films is characterized by X-ray diffractometry and scanning electron microscopy. It is shown that the deposition of a solution of hyaluronic acid, alginic acid, or carrageenan on a chitosan gel film leads to the formation of a polyelectrolyte complex layer at the interface, which is accompanied by the ordering of chitosan chains in the surface region; the microstructure of this layer depends on the nature of contacting polymer pairs.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2017

X-ray analysis of multilayer In{sub 0.52}Al{sub 0.48}As/In{sub 0.53}Ga{sub 0.47}As/In{sub 0.52}Al{sub 0.48}As HEMT heterostructures with InAs nanoinsert in quantum well

In{sub 0.52}Al{sub 0.48}As/In{sub 0.53}Ga{sub 0.47}As/In{sub 0.52}Al{sub 0.48}As HEMT heterostructures on InP substrates with elastically strained InAs insert in combined quantum well (QW) have been investigated using a combination of X-ray methods: double-crystal X-ray diffraction, X-ray reflectivity, and reciprocal space mapping. This approach has provided detailed complementary information about the layered and real crystal structures of the samples. The data obtained have made it possible to perform structural analysis of the multilayer systems and compare their characteristics with specified technological parameters, due to which the HEMT growth technology can be corrected and improved.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2017

Low-voltage scanning electron microscopy of multilayer polymer systems

The possibilities of low-voltage scanning electron microscopy for visualization of specific features of the microstructure in internal layers of multilayer polymer films are demonstrated by the example of “chitosan–polyelectrolyte complex–alginic acid” composite. The process of electron beam interaction with a sample at low electron energies is considered. The key parameters of low-voltage electron microscopy, which make it possible to increase the resolution of SEM images of polymer systems, are discussed.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2015

Interlayer coupling in Fe/Cr/Gd multilayer structures

The effect of the chromium layer thickness on the magnetic state of an [Fe/Cr/Gd/Cr]{sub n} multilayer structure is studied. A series of Fe/Cr/Gd structures with Cr spacer thicknesses of 4–30 Å is studied by SQUID magnetometry and ferromagnetic resonance in the temperature range 4.2–300 K. The obtained experimental results are described in terms of an effective field model, which takes into account a biquadratic contribution to the interlayer coupling energy and a nonuniform magnetization distribution inside the gadolinium layer (which was detected earlier). Depending on the magnetic field and temperature, the following types of magnetic ordering are identified at various chromium layer thicknesses: ferromagnetic, antiferromagnetic, and canted ordering. A comparison of the experimental and calculated curves allowed us to determine the dependence of the bilinear (J{sub 1}) and biquadratic (J{sub 2}) exchange constants on chromium layer thickness t{sub Cr}. Weak oscillations at a period of about 18 Å are detected in the J{sub 1}(t{sub Cr}) dependence in the range 8–30 Å. The interlayer coupling oscillations in the system under study are assumed to be related to the RKKY exchange interaction mechanism via the conduction electrons of Cr.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗