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DOE OSTI2022

LCLS-II and HE Cryomodule Microphonics at CMTF at Fermilab

Microphonics causes the cavity to detune. This study discusses the microphonics of 16 cryomodules, 14 for LCLS-II and 2 for LCLS-II HE tested at CMTF. The peak detuning, as well as the RMS detuning for each cryomodule, will be discussed. For each cryomodule, the data was taken with enough soaking time to prevent any thermalization effects which can show up in the detuning. Each data capture taken was 30 minutes or longer and sampled at 1 kHz.

43 PARTICLE ACCELERATORS↗

DOE OSTI2024

GEOS: A performance portable multi-physics simulation framework for subsurface applications

GEOS is a simulation framework focused on solving tightly coupled multi-physics problems with an initial emphasis on subsurface reservoir applications. Currently, GEOS supports capabilities for studying carbon sequestration, geothermal energy, hydrogen storage, and related subsurface applications. The unique aspect of GEOS that differentiates it from existing reservoir simulators is the ability to simulate tightly coupled compositional flow, poromechanics, fault slip, fracture propagation, and thermal effects, etc. Extensive documentation is available on the GEOS documentation pages (GEOS Documentation, 2024). Note that GEOS, as presented here, is a complete rewrite of the previous incarnation of the GEOS referred to in (Settgast et al., 2017).

58 GEOSCIENCES↗

DOE OSTI2022

Isotherm Modeling and Techno-Economic Analysis of Contactor Technologies for New Tetraamine-Appended MOF for NGCC Applications

Recently, a family of tetraamine-functionalized metal-organic frameworks (MOF) has been reported as promising sorbent materials for capturing CO2 from flue gas conditions relevant to natural gas combined cycle (NGCC) applications. The main advantages of these materials are their two-step cooperative CO2 adsorption, which gives rise to unusual two step-shaped CO2 adsorption profiles and their high thermal stability. This work presents the modelling of the two-transition isotherm of the tetraamine-appended MOF, N,N'-bis(3-aminopropyl)-1,4-diaminobutane (3-4-3)-appended Mg2(dobpdc), and the techno-economic analysis (TEA) of carbon capture processes utilizing this sorbent. Due to the unusual isotherm shapes of the experimental CO2 adsorption data for tetraamine-appended Mg2(dobpdc) and the strong nonlinearity of CO2 loading with respect to temperature and pressure, we tested two different models which use logistic functions for representing the different isotherm behaviors in the different pressure ranges. The first model uses the quadratic isotherm model in the low-pressure region, the Langmuir isotherm model in the middle pressure range, and the dual site Langmuir isotherm model in the high-pressure range. To model the transition between regions we used the arctangent functions independent of temperature and the thermal effect was accounted by using the Clausius-Clapeyron relation]. The second model is an extension of the weighted dual-site Langmuir isotherm model presented by Hughes et al.. In this extended model, the dual-site Langmuir isotherm is employed in the three transition regions, using temperature-dependent logistic functions to activate or deactivate the isotherm model in the low, middle, and high-pressure ranges. Both models fit the experimental data quite well with root mean squared errors (RMSE’s) of 0.41 and 0.17 for model 1 and model 2, respectively. Since model 2 resulted in a lower RMSE, it was leveraged for the development of the gas/solid contactor models used by the TEA. Specifically, two different contactor models, an axial-flow fixed bed and moving bed contactor, were developed as part of this work. These models are dynamic, pressure-driven, and consist of mass, energy, and momentum conservation equations. A kinetic model was also developed by performing parameter estimation using experimental fixed bed breakthrough data. These models are then used to simulate CO2 capture processes from the flue gas generated from a ~600 gross MW NGCC power plant. A cost model was developed which considers the capital cost of the reactors and the significant operating costs such as steam and electricity. Using NETL’s Framework for the Optimization and Quantification of Uncertainty of Uncertainty and Surrogates tool (FOQUS), which has the capability of linking models built using numerous modelling platforms with derivative-free optimization solvers, a techno-economic optimization of the carbon capture processes was performed which minimizes the cost of capture.

Caballero, Daison↗

DOE OSTI2020

Integrated Data Analysis to Improve Te and Zeff Measurement on NSTX-U

The multi-energy soft x-ray (ME-SXR) camera is a new concept for a fusion plasma diagnostic based on a pixelated detector with adjustable photon cutoff thresholds. It is a single, compact, solid-state detector which combines spatial and spectral sensitivity and can be configured remotely at run time, making it ideal for a fusion environment. The detector can be configured for application to a wide range of physics problems including impurity transport, electron temperature profiles, and non-thermal effects. The detector has been installed on the Madison Symmetric Torus (MST) as part of a collaboration between Princeton Plasma Physics Laboratory and the University of Wisconsin–Madison to develop the technology and analysis techniques. A full diagnostic forward model of the ME-SXR diagnostic has been developed to enable analysis of the raw photon count data. This model incorporates the atomic physics underlying the plasma emission, diagnostic geometry, and detector response characteristics. Employing this model, a Bayesian analysis approach is used to extract electron temperature from the raw data. This analysis approach uses all available information, clearly quantifies prior information, and handles uncertainties transparently. The ME-SXR camera is being used to study the 3D (helical, stellarator-like) state that forms in the MST device. This helical core structure has improved energy confinement. The transition to the helical state is accompanied by a rise in electron temperature in the central part of the helical structure, but then this enhancement fluctuates. The characteristics of this fluctuation are being compared to a magneto-hydrodynamics model.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2020

Literature Review on the Theory and Measurement of Dry Sliding Friction of Metals

Understanding the friction behavior between two sliding bodies can inform the design of machines, processing of materials, and simulation of dynamic processes. Kinetic friction is a complex phenomenon that depends on a multitude of factors such as sliding velocity, normal force, contact area, surface roughness, material properties, lubrication conditions, and thermal effects. This literature review covers the major known effects of sliding velocity, normal load, and surface roughness on the measured kinetic friction coefficient in the context of microscopic friction phenomena. Classic macroscale friction models are reviewed to illustrate approaches for simulating friction behavior. Prominent experimental friction setups within the literature are discussed with respect to achievable velocity and pressure regimes. The background information gathered here will be used to inform experimental procedures and modeling strategies of the exploratory research (ER) project titled “Measurement of Dynamic Friction via Kolsky Bar” (20200418ER).

36 MATERIALS SCIENCE↗

DOE OSTI2021

Imaging APO-BMI with Micro X-ray Computed Tomography (CT)

APO-BMI is a high-strength, high-temperature, and low-density foam comprised of 1,2-bis(2-aminophenylthio) ethane (APO-Link, formerly Apocure-601) and 4,4’-bismaleimidodiphenylmethane (BMI) that is used structural applications within the aerospace and weapons manufacturing sectors. APO-link is the diamine reagent used to synthesize BMI, a thermosetting resin. This resin can remain in a molten, flowing state for an extended period of time before crosslinking, allowing addition of glass or carbon microballoons to form its final structure. A portion of the current project was to observe the thermal effects on the structural integrity of the foam associated with exposure to an ion beam. Features within the foam were imaged using micro X-ray computed tomography (CT). The resulting imaging provided evidence that microballoon structure remained mostly intact at the points of failure, indicating that the failure of the material was occurring in the binder material.

36 MATERIALS SCIENCE↗

DOE OSTI2021

FY21 NNSA-IAEC Science Area V, Environmental ISR, Waste Management and Subsurface Science (Final Report)

The FY21 NNSA NA-22 Final Report represents the progress achieved over the past year (FY21) by the research team for Topic Area 3, Waste Management & Subsurface Science (WM3), and Topic Area 7, Radiation and Thermal Effects on Bituminous Rocks (WM7). WM3 and WM7 are part of Science Area V (Subsurface Science and Waste Management) in the NNSA-IAEC Science and Technology Working Group. The project was initiated four years ago (2017) with an MOU agreement between the U.S. National Nuclear Security Administration (NNSA) and the Israel Atomic Energy Commission (IAEC) to evaluate the feasibility of geological subsurface disposal of radioactive waste in Israel. The core WM3 and WM7 teams are comprised of scientists and engineers from Los Alamos National Laboratory, the Geologic Survey of Israel (GSI), and the Nuclear Research Center - Negev (NRCN), with a close collaboration to the teams from Sandia National Laboratory (SNL) and Lawrence Livermore Laboratory (LLNL)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

DOE OSTI2023

Tunable Laser-Plasma Amplifier (Final Report)

Exploration at the laser intensity frontier has always offered new avenues for physics and reaching beyond this frontier is a grand challenge. Present-day petawatt-class lasers provide focused intensities on target of 10 22 W/cm 2 , corresponding to electric fields of 200 TV/m, while laser-plasma amplification opens a route for focused intensities well above 10 23 W/cm 2 . Intensities in this range provide the ability to test quantum electrodynamics in the unexplored low-energy, strong-field regime where signatures for new physics may arise. The behavior of matter under such extraordinary conditions is a rich and fascinating subject, not only in its own right in fundamental plasma physics, but for the many potential applications that promise to enrich the natural sciences in the future, including compact electron-beam, ion-beam particle accelerators, and ultra-bright X-ray sources. Although laser systems are now under construction internationally to access intensities of 10 23 W/cm 2 , the current technologies used appear to be fundamentally limited to these intensities. The realization of intensities beyond 10 23 W/cm 2 using parametric amplification in plasmas promises a breakthrough in high-energy density physics. Parametric amplification using Raman scattering in a plasma could provide the enabling technology for the generation of ultra-high-power laser pulses, but a more complete understanding of the nonlinear optics of plasmas is required. There is a significant gap in well-diagnosed laser-plasma instability studies of nonlinear plasma-wave phenomena, which are critical to understand for future laser-plasma devices. To achieve an efficient laser-plasma amplifier, plasma waves must be driven to large amplitude where significant energy can be rapidly transferred from the pump to the seed over the pulse duration of the seed. Simulations suggest that this nonlinear pump depletion regime can be achieved in the “pi-pulse” amplification regime. While simulations show this optimal regime with efficient amplification, it has remained elusive in experiments and there is a growing consensus within the community that thermal effects and pump beam limitations prevent laser-plasma amplifiers from progressing through the linear regime into the nonlinear pump depletion regime. Previous experiments have been significantly limited by the laser power available at the necessary wavelengths for the seed laser; therefore, the amplification is required to start in the linear regime where it is sensitive to many deleterious effects. The enabling technology (currently unique to plasma-wave amplification in the world) at the University of Rochester is the ability to provide a seed pulse with sufficient power (4 mJ/100 fs seed) to immediately drive nonlinear plasma waves into the pi-pulse regime and to tune its wavelength to optimize the efficiency of energy transfer. This in combination with the state-of-the-art OMEGA heater beams providing multiple kilojoules in a nanosecond to sufficiently heat the plasma make this system distinct from previous studies. These heater beams will provide, for the first time in Raman amplification studies, a homogeneous electron temperature high enough to prevent pump beam propagation issues that have plagued previous experiments. These systems will provide a platform for driving electron-plasma waves into the nonlinear regime where pump depletion and pulse shortening are predicted to lead to high amplification efficiencies (>30%). The Team has made significant progress through prior support from DOE Fusion Energy Sciences [DOE Office of Science Award Number DE-SC0016253 (2016-2022)]. This includes twenty-two peer-reviewed manuscripts, one patent, ten contributed talks presented at international conferences, and research that was highlighted as invited talks at fifteen international conferences. The broader impacts of this research are evident in the support of early career scientists, two Ph.D. theses, four current graduate students, a Masters Project, two undergraduate researchers, and an underrepresented minority student hired through the California Alliance for Minority Participation who now works as a Research Engineer in the group. This research met all of the funded research objectives and the highlights from primary Raman amplification thrust of this work are discussed below and form the foundation for the proposed research.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Thermal Modeling of Advanced Test Reactor Fuel in a Generalized Dry Storage System Under Hypothetical Accident Conditions

Work was performed to investigate the thermal behavior of a sealed aluminum-clad spent nuclear fuel (ASNF) dry storage configuration under hypothetical accident conditions during long-term storage. The considered system consists of a concrete dry storage overpack; a welded over canister, backfilled with argon; and nine Department of Energy (DOE) standardized canisters (DOESCs) loaded with ASNF, backfilled with helium gas. One technical concern associated with the long-term storage of ASNF includes radiolytic hydrogen generation. The yield of large quantities of hydrogen could lead to DOESC over pressurization or a flammable internal atmosphere. While flammability concerns can be resolved by preventing the ingress of oxygen, the canister pressure is partially controlled by the atmosphere temperature. This memorandum summarizes the results of modeling and simulation (M&S) work completed with Star CCM+ (a computational fluid dynamics [CFD] software) considering the thermal effects of a fully engulfing flame and another scenario with the vent ports of the concrete dry storage overpack completely blocked. The goal was to determine the bounding maximum temperature of the DOESC internal atmosphere to evaluate a worst-case pressure scenario, as well as the critical vent port blockage durations.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2024

FORGE STRESS annual report

The project's goal is to combine high-fidelity numerical models and true-triaxial block fracturing tests at high temperatures to understand the relationship between in situ stress, thermal effects, wellbore orientations and hydraulic fracture patterns. The numerical models are calibrated against field data, such as well pressures and microseismic data, and employed to estimate the in situ stress at the FORGE site. Laboratory experiments investigate the complex physics driving hydraulic fracture nucleation in EGS, enhancing understanding of the role of parameters like temperature, well orientation, and stress. Additionally, they are employed to validate some of the numerical tools used in the project. The project will have a significant impact by: (1) improving the characterization of the in-situ stress field at FORGE; (2) demonstrating the use of high-fidelity modeling tools for EGS; (3) providing a unique set of high-temperature hydraulic fracturing results to identify key components for in-situ stress estimation, validate current theories, and propose new ones; (4) offering a validated set of numerical tools within an open-source simulation framework, GEOS, that will be available to any future user.

15 GEOTHERMAL ENERGY↗

DOE OSTI2024

Optimization of Solid Oxide Electrolysis Cell Systems Accounting for Long-Term Performance and Health Degradation

This study focuses on optimizing solid oxide electrolysis cell (SOEC) systems for efficient and durable long-term hydrogen (H2) production. While the elevated operating temperatures of SOECs offer advantages in terms of efficiency, they also lead to chemical degradation, which shortens cell lifespan. To address this challenge, dynamic degradation models are coupled with a steady-state, two-dimensional, non-isothermal SOEC model and steady-state auxiliary balance of plant equipment models, within the IDAES modeling and optimization framework. A quasi-steady state approach is presented to reduce model size and computational complexity. Long-term dynamic simulations at constant H2 production rate illustrate the thermal effects of chemical degradation. Dynamic optimization is used to minimize the lifetime cost of H2 production, accounting for SOEC replacement, operating, and energy expenses. Several optimized operating profiles are compared by calculating the Levelized Cost of Hydrogen (LCOH).

Giridhar, Nishant↗

DOE OSTI2023

Noble Gas Transport in the MSRE

This study explores the relationship between the physicochemical parameter known as Henry’s gas constant and gas transport across a two-layer film interface. The investigation utilized the Gibbs free energy, incorporating surface and volume terms to elucidate trends in enthalpy and entropy. Notably, our findings align with experimental data and offer predictive insights into the Henry’s gas constants for helium and krypton, which hold significance for future experiments and theoretical developments. Furthermore, this study enhances the Gibbs free energy theory pertaining to the liquid–gas interface. It underscores the substantial contribution of noble gases in this region to volumetric energy as temperature increases. Additionally, we employed Monte Carlo simulations to analyze the effective thermal neutron multiplication factor, denoted as k eff . Our analysis reveals a linear correlation between graphite density and uniform density as a function of temperature. For the 1D Molten Salt Reactor Experiment (MSRE) system, we employed the Mole code to conduct heat and mass transfer calculations. These computations enable us to ascertain the distribution of fuel temperature based on coefficients and thermal properties. We also studied delayed neutron precursors during fuel cycling, taking into account the drift of cycling fuel through Mole–Griffin coupling. Our model represents k eff and β eff across various volume flow rates and salinity compositions. Finally, this study leveraged xenon-135 for continuous on-line monitoring of fuel salts to investigate the impact of steady-state xenon-135 on the MSRE and to better understand its distribution. These efforts build upon previous research related to removal processes.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

DOE OSTI2024

The hygrothermal performance of continuous and cavity wood fiber insulation

Wood fiber insulation is an emerging material known for its effective thermal performance and moisture management properties, making it a compelling alternative to conventional insulation. Its vapor permeability and ability to regulate indoor humidity contribute to improved building durability and comfort, particularly in varying climate conditions. The goal of this project is to characterize the hygrothermal performance of a new wood fiber insulation product line in U.S. climate zones and to facilitate the design and construction of the product in residential and light commercial building envelopes. This study investigates the thermal and hygrothermal performance of wood fiber insulation, both as continuous and cavity insulation. The research employs an exhaustive simulation task and an environmental chamber test of a wood fiber insulation. Over 400 simulations were conducted to study the hygrothermal characteristics of bio-based wood fiber insulation in various building envelope configurations across four climate zones. Environmental chamber tests were conducted under controlled winter conditions representative of Climate Zone 5A (Chicago, IL) to complement the simulation results. The chamber tests focused on the hygrothermal performance of the wood fiber insulation and the sheathing board to assess the insulation's ability to manage moisture in a cold climate. Simulation and environmental chamber test results were analyzed to evaluate the insulation's consistency and efficacy across diverse climatic zones. Results show that with a proper moisture control strategy, both cavity and continuous wood fiber insulation can work properly in both new and retrofit constructions.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

DOE OSTI2024

The Hygrothermal Performance of Continuous and Cavity Wood Fiber Insulation

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

DOE OSTI2025

Multiphysics Modeling of Microreactors with NEAMS codes, and Validation Based on KRUSTY Reactivity Insertion

The NEAMS Multiphysics Applications team continues to assess code usability and functionality for microreactor design and safety analyses, while demonstrating that NEAMS tools capture both steady-state and transient behavior across distinct microreactor concepts. In FY2025, the team advanced full-core, high-fidelity, multiphysics models that solve more complex problems and strengthen verification/validation for several microreactor systems: heat-pipe microreactor (HPMR), gas-cooled microreactor (GCMR), and the KRUSTY experiment. These models employ the MOOSE MultiApp/Transfers architecture with Griffin for neutronics, BISON for heat conduction/thermomechanics, Sockeye for heat pipes, SAM/THM for coolant channels and loops, and SWIFT for hydride behavior, with meshes generated via the MOOSE Reactor Module. The graphite models available in the Grizzly code were also investigated for future analyses. For the HPMR, a Na-HPMR variant was constructed to align with recently validated heat-pipe experiments and Sockeye’s LCVF capability, enabling mechanistic heat-pipe transients and startup modeling. The Na-HPMR will serve as the primary model for HPMR investigations in upcoming tasks. The load-following and single heat-pipe failure scenarios (Griffin/BISON/Sockeye), which were previously modeled for the K-HPMR, were replicated for the Na-HPMR, showing strong negative temperature feedback and highly localized thermal effects, respectively, while the startup case captured vapor-front progression and heat-removal activation. Solid mechanics was added to the previously built K-HPMR full-core model in BISON, showing minimal impact on steady-state reactivity yet enabling stress-field predictions that prepare the path for full-core TRISO performance analyses. For the GCMR, automated steady-state and four transient scenarios were executed using Griffin/BISON/SAM/SWIFT. Results confirm robust inherent safety: power collapses promptly in loss-of-cooling events, the inlet-temperature drop settles to a new equilibrium, and a single-channel blockage yields only a ~30 K local fuel-temperature rise with <0.4% power decrease. SWIFT-predicted hydrogen redistribution affects reactivity during both steady-state and transient conditions, underscoring its importance. A Brayton-cycle balance of plant (BOP) model in SAM/THM demonstrated stable startup behavior, and xenon-driven reactivity during load following was analyzed. To improve TRISO-compact temperature fidelity, a fast multiscale Heat Source Decomposition (HSD) treatment was implemented. Against heterogeneous benchmarks, HSD reduces underprediction of kernel temperatures and lowers predicted peak powers in reactivity-insertion transients compared to previous homogenized models. KRUSTY warm-critical validation progressed from FY2024 baselines: the 15Ȼ insertion shows excellent agreement in peak power (~2% high) and temperature trends, and the 30Ȼ case was automated via a feedback controller that maintained power near 3 kW for ~150 s with close agreement to data. The successful modeling of the warm critical tests has laid a strong foundation for simulating more complex nuclear system tests in the years ahead. Throughout FY2025, developer feedback was provided (e.g., MOOSE batch mesh generation, distributed pre-split meshes, Griffin sweeper on displaced meshes), several new models were contributed to the Virtual Test Bed, and an OECD-NEA WPRS multiphysics benchmark based on the HPMR was initiated to enable broader cross-comparison and best-practice development with the nuclear community at large.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

DOE OSTI2026

Transition Metal Taggants in UO 2 from First Principles

The incorporation of transition metals into nuclear fuel has gained attention both to improve fuel properties and as a possible nuclear forensics tool. Recent experimental studies by Ulrich et al. and Adorno Lopes et al. have investigated Ni and Fe as candidate transition metal dopants for potential nuclear forensics purposes and found that there is minimal alteration to key UO 2 fuel properties. In the present work, we performed density functional theory (DFT) investigations into possible defect structures for Ni and Fe incorporation. The dynamic stability of these defect structures was validated by calculating the phonon density of states. We found that transition metal incorporation likely occurs via substitution at U sites in the fluorite crystal structure with a nearby O vacancy for charge-balancing, which agrees with experimentally proposed structures. Additionally, this defect structure does not cause long-range alterations to the crystal parameters—an important consideration for use as a nuclear fuel taggant. Future needed work involves computational investigation of additional defect concentrations using larger supercells, additional transition metal charge states, and thermal effects. Such investigations can be carried forward into sintering models for a more complete understanding of the suitability of Ni and Fe as fuel taggants.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2023

Numerical Investigation of Wall-Cooling Effect on Aero-Optical Distortions for Hypersonic Boundary Layer

Compressible wall-modeled large-eddy simulations of Mach 8 turbulent boundary-layer flows over a flat plate were carried out for the conditions of the hypersonic wind tunnel at Sandia National Laboratories. The simulations provide new insight into the effect of wall cooling on the aero-optical path distortions for hypersonic turbulent boundary-layer flows. Four different wall-to-recovery temperature ratios, 0.3, 0.48, 0.71, and 0.89, are considered. Despite the much lower grid resolution, the mean velocity, temperature, and resolved Reynolds stress profiles from the simulation for a temperature ratio of 0.48 are in good agreement with those from a reference direct numerical simulation. The normalized root-mean-square optical path difference obtained from the present simulations is compared with that from reference direct numerical simulations, Sandia experiments, as well as predictions obtained with a semi-analytical model by Notre Dame University. Here the present analysis focuses on the effect of wall cooling on the wall-normal density correlations, on key underlying assumptions of the aforementioned model such as the strong Reynolds analogy, and on the elevation angle effect on the optical path difference. Wall cooling is found to increase the velocity fluctuations and decrease the density fluctuations, resulting in an overall reduction of the normalized optical path distortion. Compared to the simulations, the basic strong Reynolds analogy overpredicts the temperature fluctuations for cooled walls. Also different from the strong Reynolds analogy, the velocity and temperature fluctuations are not perfectly anticorrelated. Finally, as the wall temperature is raised, the density correlation length, away from the wall but inside the boundary layer, increases significantly for beam paths tilted in the downstream direction.

42 ENGINEERING↗

DOE OSTI2022

High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment

The exceptional material properties of Lithium Niobate (LiNbO3) make it an excellent material platform for a wide range of RF, MEMS, phononic and photonic applications; however, nano-micro scale device concepts require high fidelity processing of LN films. Here, we reported a highly optimized processing methodology that achieves a deep etch with nearly vertical and smooth sidewalls. We demonstrated that Ti/Al/Cr stack works perfectly as a hard mask material during long plasma dry etching, where periodically pausing the etching and chemical cleaning between cycles were leveraged to avoid thermal effects and byproduct redeposition. To improve mask quality on X- and Y-cut substrates, a H2-plasma treatment was implemented to relieve surface tension by modifying the top surface atoms. Structures with etch depths as deep as 3.4 µm were obtained in our process across a range of crystallographic orientations with a smooth sidewall and perfect verticality on several crystallographic facets.

36 MATERIALS SCIENCE↗