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Fabrication of a Kilopixel Array of Superconducting Microcalorimeters with Microstripline Wiring

A document describes the fabrication of a two-dimensional microcalorimeter array that uses microstrip wiring and integrated heat sinking to enable use of high-performance pixel designs at kilopixel scales (32 X 32). Each pixel is the high-resolution design employed in small-array test devices, which consist of a Mo/Au TES (transition edge sensor) on a silicon nitride membrane and an electroplated Bi/Au absorber. The pixel pitch within the array is 300 microns, where absorbers 290 microns on a side are cantilevered over a silicon support grid with 100-micron-wide beams. The high-density wiring and heat sinking are both carried by the silicon beams to the edge of the array. All pixels are wired out to the array edge. ECR (electron cyclotron resonance) oxide underlayer is deposited underneath the sensor layer. The sensor (TES) layer consists of a superconducting underlayer and a normal metal top layer. If the sensor is deposited at high temperature, the ECR oxide can be vacuum annealed to improve film smoothness and etch characteristics. This process is designed to recover high-resolution, single-pixel x-ray microcalorimeter performance within arrays of arbitrarily large format. The critical current limiting parts of the circuit are designed to have simple interfaces that can be independently verified. The lead-to-TES interface is entirely determined in a single layer that has multiple points of interface to maximize critical current. The lead rails that overlap the TES sensor element contact both the superconducting underlayer and the TES normal metal

Chervenak, James↗

Acoustic Phased Array Quantification of Quiet Technology Demonstrator 3 Advanced Inlet Liner Noise Component

Acoustic phased array flyover noise measurements were acquired as part of the Boeing 737 MAX-7 NASA Advanced Inlet Liner segment of the Quiet Technology Demonstrator 3 (QTD3) flight test program. This paper reports on the processes used for separating and quantifying the engine inlet, exhaust and airframe noise source components and provides sample phased array-based comparisons of the component noise source levels associated with the inlet liner treatment configurations. Full scale flyover noise testing of NASA advanced inlet liners was conducted as part of the Quiet Technology Demonstrator 3 flight test program in July and August of 2018. Details on the inlet designs and testing are provided in the companion paper of Reference 1. The present paper provides supplemental details relating to the acoustic phased array portion of the analyses provided in Ref. 1. In brief, the test article was a Boeing 737MAX-7 aircraft with a modified right hand (starboard side) engine inlet, which consisted of either a production inlet liner, a NASA designed inlet liner or a simulated hard wall configuration (accomplished by applying speed tape over the inlet acoustic treatment areas). In all three configurations, the engine forward fan case acoustic panel was replaced with a unperforated (hardwall) panel. No other modifications to any other acoustic treatment areas were made. The left hand (port side) engine was a production engine and was flown at idle thrust for all measurements in order to isolate the effects of the inlet liners to the right hand engine. As described in Ref. 1, the NASA inlet treatment consists of laterally cut slots (cut perpendicular to the flow direction) which are designed to reduce excrescence drag while maintaining or exceeding the liner acoustic noise reduction capabilities. The NASA inlet liner consists of a Multi-Degree of Freedom (MDOF) design with two breathable septum layers inserted into each honeycomb cell [1]. The aircraft noise measurements were acquired for both takeoff (flaps 1 setting, gear up) and approach (flaps 30 gear up and gear down) configurations. The inlet and flight test configurations are summarized in Table 1. Table 1: Inlet Treatment and Flight Configurations Inlet Forward Fan Case Aircraft Production Hardwall Flaps 1, gear up; flaps 30 gear up; flaps 30 gear down NASA Hardwall Flaps 1, gear up; flaps 30 gear up; flaps 30 gear down Hardwall Hardwall Flaps 1, gear up; flaps 30 gear up; flaps 30 gear down III.Test Description and Hardware The flight testing was conducted at the Grant County airport in Moses Lake, WA, between 27 July and 6 August 2018. The noise measurement instrumentation included 8 flush dish microphones arranged in a noise certification configuration as well as an 840 microphone phased array. The flush dish microphones were used to quantify the levels and differences in levels between the various inlet treatments. The phased array was used to separate and quantify the narrowband (tonal) and broadband noise component levels from the engine inlet/exhaust and from the airframe. Phased array extraction of the broadband component was critical to this study because it allowed for the separation of the inlet component from the total airplane level noise even when it was significantly below the total level. Figure 1 provides an overview of the phased array microphone layout as well as a detailed image of an individual phased array microphone mounted in a plate holder (the microphone sensor is the dot in the center of the plate). The ground plane ensemble array microphones (referred to as “ensemble array” in this paper) were mounted in plates with “flower petal” edges designed to minimize edge scattering effects. Fig. 1 Flyover test microphone layout. The phased array configuration was the result of a progressive development of concepts originally implemented in Ref. 2 and refined over the following years, consisting namely of multiple multi-arm logarithmic spiral subarrays designed to cover overlapping frequency ranges and optimized for various aircraft emission angles. For the present case, the signals from all 840 microphones were acquired on a single system. The 840 microphones were parsed into 11 primary subarray sets spanning from smallest to largest aperture size and labeled accordingly as “a, b, …, k”, where “a” corresponds to the smallest fielded subarray and “k” corresponds to the largest aperture subarray. The apertures ranged from approximately 10 ft to 427 ft in size (in the flight direction) with the subarrays consisting of between 215 and 312 microphones. Figure 2 shows three such subarrays, k, h and a. As done in Ref. 2, microphones were shared between subarrays in order to reduce total channel count. Fig. 2 Sample subarray sizes (20° from overhead – refer to Figure 3a discussion). In addition to the above, each of the 11 primary subarray sets consisted of four subarrays optimized to provide near equivalent array spatial resolution in both the flight and lateral directions within 30 degrees of overhead (i.e., airplane directly above the center of the array), namely, at angles  of 0, ±10, ±20 and ±30 degrees relative to overhead where angle  is defined as shown in Figure 3a. This allowed for optimized aircraft noise measurements from 60 to 120 degree emission angle.6 An example of this pletharray design is shown in Figure 3b for the k subarray. When the aircraft is at overhead, the microphones indicated by the blue markers are used for beamforming. When the aircraft is at angles ±10 degrees from overhead, both the blue and red colored microphones are used, and so on for the ±20 and ±30 degree aircraft locations. See Ref. 3 for extensive details on pletharray design for aeroacoustic phased array testing. 6 In the discussions that follow, emission angle values are used. These are the angles at the time sound is emitted relative to the engine axis and are calculated based on flight path angle, body aircraft body angle with respect to the relative wind direction, and engine axis angle relative to aircraft body angle.

Brusniak, Leon↗

Second-Generation Electronic Nose

A report discusses the second generation of the JPL Electronic Nose (ENose), an array of 32 semi-specific chemical sensors used as an event monitor to identify and quantify contaminants released into breathing air by leaks or spills. It is designed to monitor the environment for changes in air quality, and is trained to identify and quantify selected chemical species at predetermined concentrations, ranging from sub-ppm to ppth. This system has improved reproducibility for making matched arrays, allowing use of data analysis software with minimal recalibration on sensor set replacement. The Second Generation (SG) ENose is a follow-up to the first JPL Electronic Nose that was tested on an earlier space shuttle mission (STS-95). Improvements have been made to the hardware, sensor materials, and data analysis software.

Homer, Margie↗

Development of Optical Fiber-Based Sensors for Nuclear Microreactor Structural Health Monitoring

This report provides an experimental assessment of two different optical fiber–based acoustic sensors that are being investigated for application in nuclear microreactors to enhance structural health monitoring capabilities. Optical fibers are resilient in high-temperature and high-radiation environments, have a small sensor footprint, are immune to electromagnetic interference, and are capable of spatially distributed sensing. The two sensors investigated here are (1) Fabry–Pérot Cavities (FPCs) between two copper-coated fibers, embedded in nickel capillary tubes and (2) type-I fiber Bragg grating (FBG) arrays contained within metal capillary tubes. These sensors can be interrogated using low-coherence interferometry or swept wavelength interferometry, respectively, to measure the resonant frequencies of the components or systems to which these sensors are bonded. The FPC developed herein has been subjected to temperatures up to nearly 800°C while tack-welded to a tubular test specimen. Even at the highest temperatures, the measured resonant frequencies compared well with those obtained using an accelerometer that was bonded to an unheated portion of the specimen. The FBG array was tested in multiple bonding configurations to a tubular test specimen, all at room temperature, with the understanding that high temperature (i.e., type II) FBGs could be used to obtain similar data at high temperatures; the FBG array data were validated with noncontact laser vibrometry, which is being used at Los Alamos National Laboratory to relate acoustic signatures to component stresses and/or structural defects. The goal of this work is to identify the most promising techniques that are also compatible with operation in a microreactor environment.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Shortwave infrared 512 x 2 line sensor for earth resources applications

As part of the NASA remote-sensing Multispectral Linear Array Program, an edge-buttable 512 x 2 IRCCD line image sensor with 30-micron Pd2Si Schottky-barrier detectors is developed for operation with passive cooling at 120 K in the 1.1-2.5 micron short infrared band. On-chip CCD multiplexers provide one video output for each 512 detector band. The monolithic silicon line imager performance at a 4-ms optical integration time includes a signal-to-noise ratio of 241 for irradiance of 7.2 microwatts/sq cm at 1.65 microns wavelength, a 5000 dynamic range, a modulation transfer function, greater than 60 percent at the Nyquist frequency, and an 18-milliwatt imager chip total power dissipation. Blemish-free images with three percent nonuniformity under illumination and nonlinearity of 1.25 percent are obtained. A five SWIR imager hybrid focal plane was constructed, demonstrating the feasibility of arrays with only a two-detector loss at each joint.

Tower, J. R.↗

Optical rate sensor algorithms

Optical sensors, in particular Charge Coupled Device (CCD) arrays, will be used on Space Station to track stars in order to provide inertial attitude reference. Algorithms are presented to derive attitude rate from the optical sensors. The first algorithm is a recursive differentiator. A variance reduction factor (VRF) of 0.0228 was achieved with a rise time of 10 samples. A VRF of 0.2522 gives a rise time of 4 samples. The second algorithm is based on the direct manipulation of the pixel intensity outputs of the sensor. In 1-dimensional simulations, the derived rate was with 0.07 percent of the actual rate in the presence of additive Gaussian noise with a signal to noise ratio of 60 dB.

Uhde-Lacovara, Jo A.↗

Advanced multispectral remote sensing technology and applications; Proceedings of the Conference, Arlington, VA, May 6, 7, 1982

Sensor system concepts are discussed, taking into account a multispectral linear array instrument design, an improved earth resources sensing instrument, design tradeoffs for a multispectral linear array instrument, imaging spectrometer technologies for advanced earth remote sensing, and the design concept for an optimized earth radiation budget sensor. Topics related to supporting optics and signal processing methodologies are explored, giving attention to two mirror objective design for multispectral remote sensing, the measurement of optical modulation functions in sparsely sampled mosaic focal plane arrays, multispectral linear array focal plane signal processing, signal processing for the NASA multispectral linear array, the concept for a multiple resolution pushbroom sensor, and the evolution of the octal radiometer. Techniques and applications for multispectral data are considered along with aspects of focal plane technology.

Ando, K. J.↗

A cost-effective intelligent robotic system with dual-arm dexterous coordination and real-time vision

Dexterous coordination of manipulators based on the use of redundant degrees of freedom, multiple sensors, and built-in robot intelligence represents a critical breakthrough in development of advanced manufacturing technology. A cost-effective approach for achieving this new generation of robotics has been made possible by the unprecedented growth of the latest microcomputer and network systems. The resulting flexible automation offers the opportunity to improve the product quality, increase the reliability of the manufacturing process, and augment the production procedures for optimizing the utilization of the robotic system. Moreover, the Advanced Robotic System (ARS) is modular in design and can be upgraded by closely following technological advancements as they occur in various fields. This approach to manufacturing automation enhances the financial justification and ensures the long-term profitability and most efficient implementation of robotic technology. The new system also addresses a broad spectrum of manufacturing demand and has the potential to address both complex jobs as well as highly labor-intensive tasks. The ARS prototype employs the decomposed optimization technique in spatial planning. This technique is implemented to the framework of the sensor-actuator network to establish the general-purpose geometric reasoning system. The development computer system is a multiple microcomputer network system, which provides the architecture for executing the modular network computing algorithms. The knowledge-based approach used in both the robot vision subsystem and the manipulation control subsystems results in the real-time image processing vision-based capability. The vision-based task environment analysis capability and the responsive motion capability are under the command of the local intelligence centers. An array of ultrasonic, proximity, and optoelectronic sensors is used for path planning. The ARS currently has 18 degrees of freedom made up by two articulated arms, one movable robot head, and two charged coupled device (CCD) cameras for producing the stereoscopic views, and articulated cylindrical-type lower body, and an optional mobile base. A functional prototype is demonstrated.

Marzwell, Neville I.↗

Modulation and Modeling of Three-Dimensional Nanowire Assemblies Targeting Gas Sensors with High Response and Reliability

Despite improved sensitivity, simple downsizing of gas-sensing components to randomly arranged nanostructures often faces challenges associated with unpredictable electrical conduction pathways. In the present study, controlled fabrication of three-dimensional (3D) metal oxide nanowire networks is demonstrated that can greatly improve both signal stability and sensor response compared to random nanowire arrays. For example, the highest ever reported H 2 S gas response value, and a 5 times lower relative standard deviation of baseline resistance than that of random nanowires assemblies, are achieved with the ordered 3D nanowire network. Systematic engineering of 3D geometries and their modeling, utilizing equivalent circuit components, provide additional insights into the electrical conduction and gas-sensing response of 3D assemblies, revealing the critical importance of wire-to-wire junction points and their arrangement. Here these findings suggest new design rules for both enhanced performance and reliability of chemical sensors, which may also be extended to other devices based on nanoscale building blocks.

36 MATERIALS SCIENCE↗

The Simons Observatory Microwave SQUID Multiplexing Detector Module Design

Advances in cosmic microwave background(CMB)science depend on increasing the number of sensitive detectorsobserving the sky. New instruments deploy large arrays of superconducting transition-edge sensor(TES)bolometers tileddensely into ever larger focal planes. High multiplexing factors reduce the thermal loading on the cryogenic receivers andsimplify their design. We present the design of focal-plane modules with an order of magnitude higher multiplexingfactor than has previously been achieved with TES bolometers. We focus on the novel cold readout component, whichemploys microwave SQUID multiplexing(μmux). Simons Observatory will use 49 modules containing 70,000bolometers to make exquisitely sensitive measurements of the CMB. We validate the focal-plane module design,presenting measurements of the readout component with and without a prototype detector array of 1728 polarization-sensitive bolometers coupled to feedhorns. The readout component achieves a 95% yield and a 910 multiplexing factor.The median white noise of each readout channel is 65pA Hz. This impacts the projected SO mapping speed by<8%,which is less than is assumed in the sensitivity projections. The results validate the full functionality of the module. Wediscuss the measured performance in the context of SO science requirements, which are exceeded.

Heather McCarrick↗

Multiplexed Readout of Thermal Bolometers with Superconducting Transition Edge Thermometers

History shows that in astronomy, more is better. In the near future, direct detector arrays for the far-infrared and submillimeter will contain hundreds to thousands of elements. A multiplexed readout is necessary for practical implementation of such arrays, and has been developed using SQUIDs. The technology permits a 32 x 32 array of bolometers to be read out using approximately 100 wires rather than the >2000 needed with direct wiring. These bolometer arrays are made by micromachining techniques, using superconducting transition edge sensors as the thermistors. We describe the development of this multiplexed superconducting bolometer array architecture as a step toward bringing about the first astronomically useful arrays of this design. This technology will be used in the Submillimeter and Far Infrared Experiment (SAFIRE) instrument on Stratospheric Observatory for Infrared Astronomy (SOFIA), and is a candidate for a wide variety of other spectroscopic and photometric instruments.

Benford, Dominic J.↗

CdZnTe Image Detectors for Hard-X-Ray Telescopes

Arrays of CdZnTe photodetectors and associated electronic circuitry have been built and tested in a continuing effort to develop focal-plane image sensor systems for hard-x-ray telescopes. Each array contains 24 by 44 pixels at a pitch of 498 m. The detector designs are optimized to obtain low power demand with high spectral resolution in the photon- energy range of 5 to 100 keV. More precisely, each detector array is a hybrid of a CdZnTe photodetector array and an application-specific integrated circuit (ASIC) containing an array of amplifiers in the same pixel pattern as that of the detectors. The array is fabricated on a single crystal of CdZnTe having dimensions of 23.6 by 12.9 by 2 mm. The detector-array cathode is a monolithic platinum contact. On the anode plane, the contact metal is patterned into the aforementioned pixel array, surrounded by a guard ring that is 1 mm wide on three sides and is 0.1 mm wide on the fourth side so that two such detector arrays can be placed side-by-side to form a roughly square sensor area with minimal dead area between them. Figure 1 shows two anode patterns. One pattern features larger pixel anode contacts, with a 30-m gap between them. The other pattern features smaller pixel anode contacts plus a contact for a shaping electrode in the form of a grid that separates all the pixels. In operation, the grid is held at a potential intermediate between the cathode and anode potentials to steer electric charges toward the anode in order to reduce the loss of charges in the inter-anode gaps. The CdZnTe photodetector array is mechanically and electrically connected to the ASIC (see Figure 2), either by use of indium bump bonds or by use of conductive epoxy bumps on the CdZnTe array joined to gold bumps on the ASIC. Hence, the output of each pixel detector is fed to its own amplifier chain.

Chen, C. M. Hubert↗

The Simons Observatory Microwave SQUID Multiplexing Detector Module Design

Advances in cosmic microwave background (CMB) science depend on increasing the number of sensitive detectors observing the sky. New instruments deploy large arrays of superconducting transition-edge sensor (TES) bolometers tiled densely into ever larger focal planes. High multiplexing factors reduce the thermal loading on the cryogenic receivers and simplify their design. We present the design of focal-plane modules with an order of magnitude higher multiplexing factor than has previously been achieved with TES bolometers. We focus on the novel cold readout component, which employs microwave SQUID multiplexing (μmux). Simons Observatory will use 49 modules containing 70,000 bolometers to make exquisitely sensitive measurements of the CMB. We validate the focal-plane module design, presenting measurements of the readout component with and without a prototype detector array of 1728 polarization-sensitive bolometers coupled to feedhorns. The readout component achieves a 95% yield and a 910 multiplexing factor. The median white noise of each readout channel is 65 . This impacts the projected SO mapping speed by <8%, which is less than is assumed in the sensitivity projections. The results validate the full functionality of the module. We discuss the measured performance in the context of SO science requirements, which are exceeded.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Development of a Multi-Gas Microsensor Array for the Exploration Portable Life Support System

The Portable Life Support System (PLSS) of the Exploration Extravehicular Mobility Unit (xEMU) requires sensors capable of measuring the major constituents of the gas stream. These major constituents include oxygen, carbon dioxide, and water vapor. The sensors must operate across a wide range of flow and pressure conditions and introduce very low pressure drop in the ventilation loop. The sensors must operate with low power and occupy a small volume. This paper reports the development of a compact, low power, multi-parameter astronaut life support sensor (M-PALSS). M-PALSS consists of an array of low-power chemical microsensors for oxygen, carbon dioxide, water vapor, and pressure. M-PALSS includes custom electronics to control the sensors and is packaged in a custom housing that meets the volume and shape requirements for service in the PLSS.

James Makel↗

Development of a Multi-Gas Microsensor Array for the Exploration Portable Life Support System

The Portable Life Support System (PLSS) of the Exploration Extravehicular Mobility Unit (xEMU) requires sensors capable of measuring the major constituents of the gas stream. These major constituents include oxygen, carbon dioxide, and water vapor. The sensors must operate across a wide range of flow and pressure conditions and introduce very low pressure drop in the ventilation loop. The sensors must operate with low power and occupy a small volume. This paper reports the development of a compact, low power, multi-parameter astronaut life support sensor (M-PALSS). M-PALSS consists of an array of low-power chemical microsensors for oxygen, carbon dioxide, water vapor, and pressure. M-PALSS includes custom electronics to control the sensors and is packaged in a custom housing that meets the volume and shape requirements for service in the PLSS.

James Makel↗

Development of a Multi-Gas Microsensor Array for the Exploration Portable Life Support System

The Portable Life Support System (PLSS) of the Exploration Extravehicular Mobility Unit (xEMU) requires sensors capable of measuring the major constituents of the gas stream. These major constituents include oxygen, carbon dioxide, and water vapor. The sensors must operate across a wide range of flow and pressure conditions and introduce very low pressure drop in the ventilation loop. The sensors must operate with low power and occupy a small volume. This paper reports the development of a compact, low power, multi-parameter astronaut life support sensor (M-PALSS). M-PALSS consists of an array of low-power chemical microsensors for oxygen, carbon dioxide, water vapor, and pressure. M-PALSS includes custom electronics to control the sensors and is packaged in a custom housing that meets the volume and shape requirements for service in the PLSS.

James Makel↗

Lens-free compound eye cameras based on angle-sensitive meta-surfaces

A lens-free ultrathin imaging sensor using a compound-eye vision modality can be formed by forming a metasurface on each pixel of an array of pixels in a solid state imaging sensor. The metasurface can be configured to form a diffraction grating that directs light incident on the metasurface at a predefined angle to excite surface plasmon polaritons into the solid state imaging sensor and light incident at any other angle is reflected or diffracted away from the metasurface. Each pixel of the imaging sensor can be configured using the metasurface to only receive light incident from a different portion of a field of view. A computational imaging system can be used to construct the image from the individual pixels.

Paiella, Roberto↗

Pyroelectric Materials for Uncooled Infrared Detectors: Processing, Properties, and Applications

Uncooled pyroelectric detectors find applications in diverse and wide areas such as industrial production; automotive; aerospace applications for satellite-borne ozone sensors assembled with an infrared spectrometer; health care; space exploration; imaging systems for ships, cars, and aircraft; and military and security surveillance systems. These detectors are the prime candidates for NASA s thermal infrared detector requirements. In this Technical Memorandum, the physical phenomena underlying the operation and advantages of pyroelectric infrared detectors is introduced. A list and applications of important ferroelectrics is given, which is a subclass of pyroelectrics. The basic concepts of processing of important pyroelectrics in various forms are described: single crystal growth, ceramic processing, polymer-composites preparation, and thin- and thick-film fabrications. The present status of materials and their characteristics and detectors figures-of-merit are presented in detail. In the end, the unique techniques demonstrated for improving/enhancing the performance of pyroelectric detectors are illustrated. Emphasis is placed on recent advances and emerging technologies such as thin-film array devices and novel single crystal sensors.

Aggarwal, M. D.↗