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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 901 records · Page 50
All sourcesNASA NTRSDOE OSTI
NASA NTRS1967

Thin film process forms effective electrical contacts on semiconductor crystals

Process makes microscopic, low-resistance electrical contacts on hexagonal n-type silicon carbide crystals used for microelectronic devices. A vacuum deposition of aluminum is etched to expose the bare silicon carbide where the electrical contacts are made. Sputtering alternating layers of tantalum and gold forms the alloy film.

Formigoni, N. P.↗
NASA NTRS1968

Ion plating technique improves thin film deposition

Ion plating technique keeps the substrate surface clean until the film is deposited, allows extensive diffusion and chemical reaction, and joins insoluble or incompatible materials. The technique involves the deposition of ions on the substrate surface while it is being bombarded with inert gas ions.

Mattox, D. M.↗
NASA NTRS1967

Thin film diodes

Design, and performance of gold-silver-gold film diode

Eschwei, M.↗
NASA NTRS1969

Dielectric materials for use in thin-film capacitors

Investigation report presents details of dielectric properties of various metals measured at 300 degrees K for thermally evaporated oxides from 300 to 6000 A in thickness. It is relevant to the medium of integrated circuitry.

Carr, H. E.↗
NASA NTRS1969

Surface plasmons in thin films.

Dispersion relations for surface plasma oscillations in normal metals for single and multiple films taking into account retardation effects, noting dielectric function

Economou, E. N.↗
NASA NTRS1970

Thin film devices used as oxygen partial pressure sensors

Electrical conductivity of zinc oxide films to be used in an oxygen partial pressure sensor is measured as a function of temperature, oxygen partial pressure, and other atmospheric constituents. Time response following partial pressure changes is studied as a function of temperature and environmental changes.

Canady, K. S.↗
NASA NTRS1970

Holographic analysis of thin films

Technique for monitoring deposition of films on surfaces, in place on a real-time basis, reads both the thickness and the uniformity of the deposited film. Holograms are produced from both reflected and transmitted light on one plate.

Norden, B. N.↗