Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.
Scanning electron mirror microscope advantages over electron mirror and scanning electron microscopes for examining integrated circuits
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Scanning electron mirror microscope advantages over electron mirror and scanning electron microscopes for examining integrated circuits
Section of light pipe consists of separated segments having opposed toroidal mirrors that intercept meridional rays to present virtual wall in space between mirrors, thus insuring uninterrupted light transmission down the pipe. Design affords internal access to pipe section. Segments are electrically or thermally insulated from one another.
The effects of aging, vacuum exposure, and thermal cycling on the dimensional stability of mirror-substrate materials, fused silica, Cer-Vit, Kanigen-coated beryllium, polycrystalline silicon, and U.L.E. fused silica were investigated. A multiple-beam interferometer was used to determine nonrecoverable surface-shape changes of the 12.7-cm-diameter mirrors with substrates of these materials. Thermal cycling and aging in vacuum produced the largest changes, but only a few were as large as 1/30 wavelength, where the wavelength was 632.8 nm.
The maintenance of accurate primary mirror figure in the face of environmental disturbances is the key to the achievement of diffraction-limited performance in a large space telescope. In order to develop the concepts of optical mirror figure control, an experimental program was initiated. A major component in this experiment will be an XDS Sigma 5.7 digital computer which will realize the control algorithm. A software package is described which realizes linear optimal, simplified linear, and iterative optimal control algorithms. The software, in addition, provides for interactive communication between the operator and the computer, and interaction between the computer and the experimental hardware elements. A brief description of a small hybrid computer system is also presented.
The mirror on the Surveyor 3 television camera was subjected to tests which modified its surface. Lunar dust was removed by rubbing, by acetate and metallic film stripping techniques, rinsing, scraping, and by inadvertently touching the surface. A second shadow line was revealed. Second and third generation peels were taken across the upper shadow line, and a study was made in order to define the source(s) or events(s) responsible for creating the two shadow lines occurring on the lower part of the mirror.
The active optics concept using a thin deformable mirror has been successfully demonstrated using a 30 in. diameter, 1/2 in. thick mirror and a 61 point matrix of forces for alignment. Many of the problems associated with the design, fabrication, and launch of large aperture diffraction-limited astronomical telescopes have been resolved and experimental data created that can provide accurate predictions of performance in orbit.
Experiments were conducted to simulate radiant heating of the propellant stream of a nuclear light bulb engine to obtain high bulk exit temperatures in the flowing simulated propellant stream by absorption of large fractions of the incident thermal radiation. A high-power, vortex-stabilized dc arc within an uncooled fused silica tube was used as the radiant energy source. It was surrounded by a mirror system to increase the radiation incident on the simulated propellant. The 12.7-cm-long by 2.3-cm-wide, diverging-duct test section had a transparent front wall and a reflecting rear wall. The central stream of seeded gas, a tungsten-particle/argon aerosol, had unseeded argon buffer layers on both sides to prevent coating of the duct walls. Arc operating times were approximately 0.5 sec with power levels up to 780 kW. Bulk exit temperatures were measured using a calorimeter downstream of the duct. The maximum simulated propellant bulk exit temperature obtained was 4515 K, compared with 3860 K in previous tests, 3300 to 3700 K expected in in-reactor tests in the Nuclear Furnace, and 6660 K in the reference nuclear light bulb engine. The maximum temperature in these tests was limited primarily by the amount of radiation incident on the test section (determined by the arc operating characteristics and the effectiveness of the mirror cavity).
The use of a very long straight entrance slit in an Ebert grating spectrometer with two plane mirrors at the shorter exit slit to increase the energy density is described. This system has been employed in a far ultraviolet rocket spectrometer to provide higher sensitivity than has been achieved previously. The imaging properties and required slit and mirror adjustments are presented. Experimental results are included.
Aluminized Mylar film is bonded to polyurethane foam mold; Mylar is then removed, leaving highly reflective coating of aluminum on foam. Mold may be used repeatedly to make mirrors for several optical instruments. Large mirrors of almost any shape may be made singularly or in quantity.
The analysis, design, manufacture, test, and delivery of one secondary mirror articulation mechanism for the large space telescope (LST) are reported. The mechanism provides angular freedom about two axes that are perpendicular to the optical axis of the secondary mirror. Motion in each axis is controlled from two sources; one source provides alignment, the other source provides stabilization. Two articulation mechanism configurations were evaluated. In one configuration the stabilization system was assembled with piezoelectric actuators. In the second configuration the stabilization system utilized flexure torque motor actuators. The alignment system was the same for both configurations. System testing confirmed performance that met or exceeded all operational requirements. The two types of stabilization actuators had different performance characteristics. Both types demonstrated position resolution and frequency response better than specified limits.
Results are presented of testing performed to measure the effects of material outgas products on the reflectances of ultraviolet-region mirrors. These tests were to provide data on changes of ultraviolet reflectances of first-surface mirrors which had been exposed to the outgas products of selected materials under specific time and thermal-vacuum conditions. The requirement for such data was based on the extreme sensitivity of the sophisticated optical instruments in the Skylab mission's Apollo Telescope Mount (ATM) to condensed outgas products from materials, and on the desire to insure that no serious hazard of contaminating these instruments existed.
A candidate mirror, hexagonally lightweighted, is analyzed under various loadings using as complete a procedure as possible. Successive simplifications are introduced and compared to an original analysis. A model which is a reasonable compromise between accuracy and cost is found and is used for making trade-off studies of the various structural parameters of the lightweighted mirror.
The phase correction for a Michelson interferometer with misaligned mirrors in converging light is shown to give rise to a quadratic phase shift. In general, the calculation of a spectrum from the measured interferogram needs phase correction. Phase corrections have been well worked out for the cases of a linear phase shift and a phase that is slowly varying. The standard procedures for correcting calculated spectra need to be modified, however, to remove any phase errors resulting from misaligned mirrors.
Performance tests, accomplished by inserting entire X ray telescope and polished mirror into vacuum line 67 m long and taking photographs of an X ray resolution source, indicate that polishing increases mirror efficiency from 0.06 percent for X rays at 0.8 nm and increases resolution from 15 to 3.75 arc-seconds.
A radiation effects experimental program was performed, in which second surface mirror type thermal control coatings were exposed to ultraviolet radiation, electrons, and protons simultaneously. Stability was assessed by making periodic spectral reflectance measurements in situ (and in air after testing for comparison). Solar absorption coefficients were derived by computer. Many of the exposed materials showed large amounts of degradation in reflectance absorptance, principally due to the electron exposure. A series of tests was conducted, leading to the identification of a modified second surface mirror that shows considerable improvement and promise for stability during thermal control applications in a charged particle space radiation environment.
The equivalence of the classical Newtonian, Cassegrainian, and Gregorian mirror systems with respect to the first two Seidel aberrations is rederived by means of a simple congruence. The effects of arbitrary small modifications of the two mirror systems are then studied and general formulas are derived for the effects of such modifications on the spherical aberration and coma. Spherical aberration is corrected to the third order if the amount of glass removed from one surface is replaced at the corresponding zone of the other surface. Modifications in which one surface is made spherical while the other is adjusted to eliminate spherical aberration result in large increases of coma for systems having the usual amplifying ratios.
A prototype high resolution, adjustable, lockable mirror mount is described, suitable for use as a resonator end mirror mount in fieldable lasers. The prototype was vibrated to 15g levels, 10-2000 Hz, and was shown to be stable to within 1 arc second and settable to an accuracy of 10 arc seconds. Improvements to be made to the prototype are outlined which will significantly improve the accuracy without sacrificing the other attributes of the prototype.
The 30 by 5 cm aperture telescope described uses six moveable mirrors to compensate for phase distortions induced by the atmosphere. A feedback system is used to adjust the mirrors in real time to maximize the intensity of light passing through a narrow slit in the image plane. Using the telescope, diffraction-limited images of objects were obtained, using both laser and white light, through 250 meters of turbulent atmosphere.