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All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

High precision monitoring of outgassing species in model EUV photoresists with a cavity ring-down spectrometer

Extreme ultraviolet (EUV) photoresists play a pivotal role in advancing nanopatterning technologies by balancing image quality and sensitivity. The outgassing behavior of photoresist thin films under EUV and deep ultraviolet (DUV) exposure reveals chemical details relevant to their performance. This study focuses on utilizing an analytical technique not previously used in photolithography, the tabletop cavity ring-down spectrometer, to investigate outgassing dynamics in EUV photoresists, enabling precise chemical identification and deeper insights into resist processing. The spectrometer’s enhanced laser path length (~20 km) and broadband absorption capabilities in the CH overtone region allow for sensitive and temporally resolved detection of outgassed species. Using a model resist comprising a polymer matrix with a photoacid generator and quencher, we analyzed the influence of time delays between exposure and Post-Exposure Bake (PEB) as well as storage under varying environmental conditions. Suppression of isobutylene outgassing and thickness loss was observed with extended delays between exposure and PEB, potentially linked to water absorption and acid deactivation. The technique proved highly effective in distinguishing subtle chemical differences between processing stages. Delay times and their environmental conditions, particularly humidity, reduce outgassing and thickness loss of photoresists during PEB, suggesting decreased acid-driven deprotection. This can potentially impact sensitivity, defectivity, and roughness of resist patterns, necessitating precise monitoring and control.

Lüttgenau, Bernhard↗
DOE OSTI2020

Agile Cradle-to-Grave (Agile C2G) v1

The concept for the AgileC2G Model is based on well-documented input-output methods first introduced by Wassily Leontief. These matrices are more commonly used to represent monetary inputs and outputs by sector. In contrast, the developers have constructed a model that uses a customized matrix consisting of key products and services (in place of sectors) that are directly and/or indirectly relevant to bioenergy systems (and energy systems more broadly). Their matrix tracks inputs and outputs based on physical units and uses prices only to complete the required calculations before converting total requirements back to physical units of interest.

Scown, Corinne↗
DOE OSTI2025

2D reactive transport model of shale chemical weathering and biogeochemical fluxes along a mountainous hillslope, East River Watershed, Colorado: Input files and simulation results

This data package contains input files and simulation results for a two-dimensional (2D) reactive transport model used to quantitatively analyze the coupled hydrological and biogeochemical processes governing shale weathering and associated biogeochemical fluxes under realistic environmental conditions in the high-elevation East River Watershed. These data support the conclusions presented in Stolze et al. (Water Resources Research, under review), "Model-based interpretation of solute exports and carbon partitioning during shale weathering in a mountainous hillslope". The model simulates atmospheric-subsurface gas exchange, subsurface water flow, and shale weathering processes under dynamic, year-scale conditions along a shale-underlain hillslope located in the East River watershed. The simulations were performed using the PFLOTRAN flow and reactive transport code and executed on the Perlmutter supercomputer to leverage its large-scale parallel computing capabilities. The data package contains two zipped folders, "model_input_files" and "simulation_results", and one readme.txt file. "model_input_files" contains the necessary input files to run the calibrated base-base model presented in Stolze et al. (Water Resources Research, under review). "simulation_results" contains a single hdf5 file ("Output_2D_hillslope_model.h5") which includes the results of simulation performed using the base-case model. This file can be opened with HDFView 3.1.4, Python, or MATLAB. "readme.txt" contains relevant information about the base-case model and provides guidelines on how to run the associated input files provided in the folder "model_input_files". Furthermore, readme.txt provides information regarding the model results provided in "Output_2D_hillslope_model.h5" such as matrix dimensionality and output units. Field datasets used to evaluate model performance were collected at three monitoring wells located along a hillslope transect (PLM1, PLM2, and PLM3). Dissolved ion concentration data were collected from November 2016 to October 2021 for Ca, Mg, DIC, Na, K, SO4 (Dong et al., 2025 - dic_npoc_data_2014_2024.zip - DOI:10.15485/1660459; Williams et al., 2025 - anion_data_2014_2024.zip - DOI:10.15485/1668054; Dong et al., 2025 - cation_data_2014_2024.zip - DOI:10.15485/1668055). Note that we used the files named er_PLM1_xx_yy, er_PLM2_xx_yy, and er_PLM3_xx_yy where xx stands for the name of the aqueous species and yy stands for the depth where the measurements were performed. Soil water content ([0 - 1] m) and water table depth were collected from November 2016 to October 2021 (Wan et al., 2024 - Dynamic_water_table__depthsFig2b.csv and Soil_water_content_Fig4e.csv - DOI:10.15485/2322567). Gaseous CO2 concentration were collected from October 2020 to December 2021(Wan et al., 2024 - Soil_CO2_concentrations_Fig4h.csv - DOI:10.15485/2322567) Gaseous CO2 flux from the subsurface to the atmosphere were collected in the vicinity of PLM2 from October 2019 to May 2022 (Wu et al., 2025). Soil microbial biomass concentration was measured from August 2016 to June 2017 (Sorensen et al., 2019 - 2017_East_River_Pumphouse_Microbial_Biomass__1_.csv - DOI:10.15485/1577267) All field data are published as CSV files compatible with Microsoft Excel, MATLAB, and Python, or as text files. The coordinates of the monitoring wells and the CO2(g) flux sensor in the coordinate system WGS84 are: -PLM1: [38.9197710 ; -106.9492750] -PLM2: [38.9201580 ; -106.9487170] -PLM3: [38.9207843 ; -106.9483668] -PLM4: 38.9210060 ; -106.9479528] -CO2(g) flux sensor: [38.9199180 ; -106.9489906] ------------------------------------------------------------------------------------------- This work was supported by the Watershed Function Science Focus Area at Lawrence Berkeley National Laboratory funded by the US Department of Energy, Office of Science, Biological and Environmental Research under Contract No. DE-AC02-05CH11231. This research used resources of the National Energy Research Scientific Computing Center (NERSC), a Department of Energy User Facility using NERSC award BER-ERCAP 23980, BER-ERCAP 28550, and BER-ERCAP 33789.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2022

Department of Energy Project DE-SC0012198: Probing Electron-Molecule Scattering with HHG: Theory and Experiment (Final Report)

The study of the motion of atoms in molecules is important to understanding many areas of physical and life sciences. Such motion occurs on many different times scales, with electronic motion occurring on a sub-femtosecond time scale, and simple vibrational motion in tens to hundreds of femtoseconds. One way to follow such processes in real time is by the use of shortpulsed lasers, and in particular by studying time-resolved photoionization and the related process of high-harmonic generation (HHG). Thus there has been much effort to develop the tools necessary to probe molecular systems using short pulse lasers and understanding the sensitivity of the different possible probes to the time dependent geometric structure as well as the electronic structure of molecules. Our research has particularly focused on the connection between high-field processes and the more traditional weak field photoionization processes. Strong field and weak field processes can be connected through models that involve the same matrix elements. We have demonstrated in our study of HHG from SF 6 that the spectrum is sensitive to the interplay between the angular dependence of the ionization step and recombination step. In our study of rescattering spectroscopy, we have shown that with a combination of experiment and theory, we can use this high-field spectroscopy to determine molecular structure in molecules such as C 2 H 4 . We have also developed new computational tools based on overset grids to enable studies on larger molecular systems which use much more robust numerical approaches so that the resulting code can be a tool that non-specialists can use to study related systems.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2023

Resonance Parameter Evaluation of n + 88 Sr reactions for ENDF/B-VIII.1 Library

An evaluation of n+ 88 Sr reactions up to 950 keV was compiled from a publicly available set of resonance parameters. Starting from the repository of the ENDF/B-VIII.0 library, an evaluated nuclear data file was assembled and submitted for inclusion to the Evaluated Nuclear Data File (ENDF)/B-VIII.1 release. This evaluation features an external function representation defined by pole strengths and R ∞ parameters over the entire resolved resonance range. This work improves the modeling of the R-matrix parameterization from multi-Level Breit-Wigner resonance parameters to Reich-Moore formalism, and it also extends thrice the upper energy range of the current ENDF/B-VIII.0 resolved resonance evaluation.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2023

Assessing the National Off-Cycle Benefits of 2-Layer HVAC Technology Using Dynamometer Testing and a National Simulation Framework

Some CO2-reducing technologies have real-world benefits not captured by regulatory testing methods. This paper documents a two-layer heating, ventilation, and air-conditioning (HVAC) system that facilitates faster engine warmup through strategic increased air recirculation. The performance of this technology was assessed on a 2020 Hyundai Sonata. Empirical performance of the technology was obtained through dynamometer tests at Argonne National Laboratory. Performance of the vehicle across multiple cycles and cell ambient temperatures with the two-layer technology active and inactive indicated fuel consumption reduction in nearly all cases. A thermally sensitive powertrain model, the National Renewable Energy Laboratory's FASTSim Hot, was calibrated and validated against vehicle testing data. The developed model included the engine, cabin, and HVAC system controls. Validation of component thermal models and engine efficiency ensured accurate thermal dynamics, fuel consumption, and two-layer benefit. The real-world benefit of the two-layer technology was calculated by simulating the validated powertrain model across a representative test matrix comparing performance with and without the two-layer system. Simulation across the test matrix revealed a real-world representative benefit of 0.0835%. Analysis of test matrix results at the regional level revealed the most benefit in cold climates and rural regions. Mean results across cycle length sensitivity simulations revealed a larger real-world benefit of 0.0872%. These benefit values can be considered a more accurate assessment of real-world technology performance. Future work is planned to explore the requisite number of drive cycles to ensure the full technology benefit is captured.

2-layer↗
NASA NTRS1975

On the effect of timing errors in run length codes

Many redundancy removal algorithms employ some sort of run length code. Blocks of timing words are coded with synchronization words inserted between blocks. The probability of incorrectly reconstructing a sample because of a channel error in the timing data is a monotonically nondecreasing function of time since the last synchronization word. In this paper we compute the 'probability that the accumulated magnitude of timing errors equal zero' as a function of time since the last synchronization word for a zero-order predictor (ZOP). The result is valid for any data source that can be modeled by a first-order Markov chain and any digital channel that can be modeled by a channel transition matrix. An example is presented.

Wilkins, L. C.↗
NASA NTRS1976

Radiation in the earth's atmosphere - Its radiance, polarization, and ellipticity

A matrix operator method for a model of the real atmosphere is used to calculate the complete radiation field of the atmosphere. The radiance, direction and amount of polarization, and ellipticity are obtained at the top and bottom of the atmosphere for three values of the surface albedo (0, 0.15, 0.90) and five solar zenith angles, taking account of molecular absorption and scattering (including by ozone) together with the variation of the density of these molecules with height.

Hitzfelder, S. J.↗
NASA NTRS1981

Vibrations of three-dimensional pipe systems with acoustic coupling

A general algorithm is developed to calculate the beam-type dynamic response of three dimensional multiplane finite length pipe systems, consisting of elbow and straight ducts with continuous interfaces. Emphasis is on secondary acoustic wave effects giving rise to coupling mechanisms; and the simulation accounts for one-dimensional elastoacoustic coupling from a plane acoustic wave and secondary loads resulting from wave asymmetries. The transfer matrix approach is adopted in modeling the elastodynamics of each duct, with allowance for distribution loads. Secondary loads from plane wave distortion are considered with a solution of the Helmholtz equation in an equivalent rigid waveguide, and effects of path imperfection are introduced as a perturbation from the hypothetical perfectly straight pipe. Computations indicate that the one-dimensional acoustic assumption is valid for frequencies below one-half the first cut-off frequency, and the three-dimensional acoustic effects produce an increase in response levels near and above cut-off.

El-Raheb, M.↗
NASA NTRS1984

A finite element method for nonlinear forced vibrations of beams

Techniques for defining a finite element model (FEM) for analysis of nonlinear vibrations in beam structures subjected to harmonic excitation are presented. The resulting model covers longitudinal deformation and inertial effects. The nonlinear oscillations of a beam element under forced excitation are modeled by a harmonic force matrix based on first order approximations of the Jacobian elliptic forcing function. Harmonic force and nonlinear stiffness matrices are derived and the nonlinear forced responses of beams are calculated under various boundary conditions. The results of FEM computations for simply-supported and clamped beams show that midplane stretching caused by large deflections increases the nonlinearity. Axially-restrained beams experience only hardening nonlinearity, while axially-free beams have reduced nonlinearity in deformation and inertia and an increase in linearity due to large deflection.

Mei, C.↗
NASA NTRS1987

Binary synaptic connections based on memory switching in a-Si:H for artificial neural networks

A scheme for nonvolatile associative electronic memory storage with high information storage density is proposed which is based on neural network models and which uses a matrix of two-terminal passive interconnections (synapses). It is noted that the massive parallelism in the architecture would require the ON state of a synaptic connection to be unusually weak (highly resistive). Memory switching using a-Si:H along with ballast resistors patterned from amorphous Ge-metal alloys is investigated for a binary programmable read only memory matrix. The fabrication of a 1600 synapse test array of uniform connection strengths and a-Si:H switching elements is discussed.

Thakoor, A. P.↗
NASA NTRS1988

Experimental verification of a large flexible manipulator

A large experimental lightweight manipulator would be useful for material handling, for welding, or for ultrasonic inspection of a large structure, such as an airframe. The flexible parallel link mechanism is designed for high rigidity without increasing weight. This constrained system is analyzed by singular value decomposition of the constraint Jacobian matrix. A verification of the modeling using the assumed mode method is presented. Eigenvalues and eigenvectors of the linearized model are compared to the measured system natural frequencies and their associated mode shapes. The modeling results for large motions are compared to the time response data from the experiments. The hydraulic actuator is verified.

Lee, Jac Won↗
NASA NTRS1992

Matrix dominated stress/strain behavior in polymeric composites: Effects of hold time, nonlinearity and rate dependency

In order to understand matrix dominated behavior in laminated polymer matrix composites, an elastic/viscoplastic constitutive model was developed and used to predict stress strain behavior of off-axis and angle-ply symmetric laminates under in-plane, tensile axial loading. The model was validated for short duration tests at elevated temperatures. Short term stress relaxation and short term creep, strain rate sensitivity, and material nonlinearity were accounted for. The testing times were extended for longer durations, and periods of creep and stress relaxation were used to investigate the ability of the model to account for long term behavior. The model generally underestimated the total change in strain and stress for both long term creep and long term relaxation respectively.

Gates, Thomas S.↗
NASA NTRS1992

Orbit-determination performance of Doppler data for interplanetary cruise trajectories. Part 1: Error analysis methodology

An error covariance analysis methodology is used to investigate different weighting schemes for two-way (coherent) Doppler data in the presence of transmission-media and observing-platform calibration errors. The analysis focuses on orbit-determination performance in the interplanetary cruise phase of deep-space missions. Analytical models for the Doppler observable and for transmission-media and observing-platform calibration errors are presented, drawn primarily from previous work. Previously published analytical models were improved upon by the following: (1) considering the effects of errors in the calibration of radio signal propagation through the troposphere and ionosphere as well as station-location errors; (2) modelling the spacecraft state transition matrix using a more accurate piecewise-linear approximation to represent the evolution of the spacecraft trajectory; and (3) incorporating Doppler data weighting functions that are functions of elevation angle, which reduce the sensitivity of the estimated spacecraft trajectory to troposphere and ionosphere calibration errors. The analysis is motivated by the need to develop suitable weighting functions for two-way Doppler data acquired at 8.4 GHz (X-band) and 32 GHz (Ka-band). This weighting is likely to be different from that in the weighting functions currently in use; the current functions were constructed originally for use with 2.3 GHz (S-band) Doppler data, which are affected much more strongly by the ionosphere than are the higher frequency data.

Ulvestad, J. S.↗
NASA NTRS1992

Evaluating space transportation sensitivities with Taguchi methods

The lunar and Mars transportation system sensitivities and their effect on cost is discussed with reference to several design concepts using Taguchi analysis. The general features of the approach are outlined, and the selected Taguchi matrix (L18) is described. The modeling results are displayed in a Design of Experiments format to aid the evaluation of sensitivities.

Brown, Norman S.↗
NASA NTRS1993

Pattern classifier for health monitoring of helicopter gearboxes

The application of a newly developed diagnostic method to a helicopter gearbox is demonstrated. This method is a pattern classifier which uses a multi-valued influence matrix (MVIM) as its diagnostic model. The method benefits from a fast learning algorithm, based on error feedback, that enables it to estimate gearbox health from a small set of measurement-fault data. The MVIM method can also assess the diagnosability of the system and variability of the fault signatures as the basis to improve fault signatures. This method was tested on vibration signals reflecting various faults in an OH-58A main rotor transmission gearbox. The vibration signals were then digitized and processed by a vibration signal analyzer to enhance and extract various features of the vibration data. The parameters obtained from this analyzer were utilized to train and test the performance of the MVIM method in both detection and diagnosis. The results indicate that the MVIM method provided excellent detection results when the full range of faults effects on the measurements were included in training, and it had a correct diagnostic rate of 95 percent when the faults were included in training.

Chin, Hsinyung↗